公开(公告)号：US5264038A

公开(公告)日：1993-11-23

申请号：US567224

申请日：1990-08-14

申请人： Tatsushi Hara ,  Nobuhiro Misawa ,  Toshiya Suzuki ,  Takayuki Ohba ,  Fumitake Mieno ,  Akio Yamaguchi

发明人： Tatsushi Hara ,  Nobuhiro Misawa ,  Toshiya Suzuki ,  Takayuki Ohba ,  Fumitake Mieno ,  Akio Yamaguchi

IPC分类号： C23C16/44 ,  C23C16/04 ,  C23C16/448 ,  C23C16/455 ,  H01L21/205 ,  H01L21/28 ,  H01L21/285 ,  C23C16/46

CPC分类号： C23C16/45517 ,  C23C16/04 ,  C23C16/455 ,  C23C16/45591

摘要： A chemical vapor deposition (CVD) system for depositing a material selectively on a part of a substrate comprises a reaction chamber in which a CVD process is performed, a substrate holder and substrate heater provided within the reaction chamber, a gas inlet fixture provided on the reaction chamber for introducing one or more CVD source gases into the reaction chamber, and a reactant distribution fixture provided on the gas inlet fixture within the reaction chamber for controlling distribution of the reactant species in the reaction chamber, wherein the reactant distribution fixture defines a subspace surrounding the substrate within the space of the reaction chamber such that the subspace has a dimension, measured in a direction generally perpendicular to the surface of the substrate such that the dimension is at least less than one half of the mean free path of the reactant species realized inside the space of the reaction chamber during the CVD process and such that an opening is formed for communicating the subspace inside the reaction distribution means with the rest of the space of the reaction chamber for freely passing product species formed as a result of the chemical reaction at the surface of the substrate.

公开(公告)号：US5393565A

公开(公告)日：1995-02-28

申请号：US72086

申请日：1993-06-07

申请人： Toshiya Suzuki ,  Takayuki Ohba ,  Shimpei Jinnouchi ,  Seishi Murakami

发明人： Toshiya Suzuki ,  Takayuki Ohba ,  Shimpei Jinnouchi ,  Seishi Murakami

IPC分类号： C23C16/34 ,  H01L21/768 ,  C23C16/00

CPC分类号： H01L21/76855 ,  C23C16/34 ,  H01L21/76843

摘要： A refractory metal nitride is deposited at a temperature of 600.degree. C. according to a chemical vapor phase deposition method by using a source gas containing a refractory metallic element and a reduction gas containing one of an alkyl amino compound, alkyl azide compound, hydrazine and a hydrazine alkyl compound for reducing the source gas. This refractory metal nitride is used as a barrier metal material for interconnection in a semiconductor device. When forming a refractory metal nitride as a barrier metal on a silicon layer or forming a contact metal between the barrier metal and the silicon layer, a natural oxide film on the surface of the silicon layer set in a pressure-reduced atmosphere is removed by reducing with hydrazine or a hydrazine alkyl compound.

摘要翻译： 根据化学气相沉积法，通过使用含有难熔金属元素的源气体和含有烷基氨基化合物，烷基叠氮化合物，肼和其中之一的还原气体，在600℃的温度下沉积难熔金属氮化物 用于还原源气体的肼烷基化合物。 这种难熔金属氮化物用作半导体器件中的互连的阻挡金属材料。 当在硅层上形成作为阻挡金属的难熔金属氮化物或在阻挡金属和硅层之间形成接触金属时，在减压气氛中设置的硅层表面上的自然氧化膜通过减少 与肼或肼烷基化合物反应。

公开(公告)号：USRE36925E

公开(公告)日：2000-10-31

申请号：US88377

申请日：1998-06-02

申请人： Takayuki Ohba ,  Toshiya Suzuki ,  Seishi Murakami

发明人： Takayuki Ohba ,  Toshiya Suzuki ,  Seishi Murakami

IPC分类号： H01L21/205 ,  C23C16/44 ,  H01L21/00 ,  H01L21/285 ,  H01L21/304 ,  H01L21/31 ,  B08B3/10

CPC分类号： H01L21/67167 ,  H01L21/67051 ,  H01L21/67109 ,  H01L21/67126 ,  H01L21/6719 ,  Y10S134/902

摘要： When an object of treatment is subjected to, for example, a gas treatment in an airtight chamber, reaction products adhere to the inner wall surface of the chamber, an object holder therein, and the corner portions of the chamber. When a cleaning medium is injected into the chamber, according to the present invention, the reaction products are dissolved in the cleaning medium by hydrolysis. Thereafter, the cleaning medium is discharged from the chamber. Then, the chamber is heated and evacuated, so that water vapor is discharged to provide a predetermined degree of vacuum, whereupon the treatment can be started anew. Therefore, a wiping operation can be omitted. Moreover, the reaction products remaining at the corner portions of the chamber can be removed without forming a source of polluted particles, so that the necessity of overhauling can be obviated. Thus, fully automatic cleaning, so to speak, can be effected, and the chamber need not be open to the atmosphere, so that the throughput can be improved.

摘要翻译： 当处理对象例如在气密室中进行气体处理时，反应产物粘附到室的内壁表面，物体保持器和腔室的角部。 当将清洁介质注入室中时，根据本发明，反应产物通过水解溶解在清洁介质中。 此后，清洗介质从室排出。 然后，对该室进行加热抽真空，从而排出水蒸气以提供预定的真空度，从而重新开始处理。 因此，可以省略擦拭操作。 此外，残留在室的角部的反应产物可以被除去而不形成污染颗粒源，从而可以消除大修的必要性。 因此，可以实现全自动清洗，并且室不需要对大气开放，从而可以提高生产量。

公开(公告)号：US5522412A

公开(公告)日：1996-06-04

申请号：US289117

申请日：1994-08-11

申请人： Takayuki Ohba ,  Toshiya Suzuki ,  Seishi Murakami

发明人： Takayuki Ohba ,  Toshiya Suzuki ,  Seishi Murakami

IPC分类号： H01L21/205 ,  C23C16/44 ,  H01L21/00 ,  H01L21/285 ,  H01L21/304 ,  H01L21/31 ,  B08B3/02

CPC分类号： H01L21/67167 ,  H01L21/67051 ,  H01L21/67109 ,  H01L21/67126 ,  H01L21/6719 ,  Y10S134/902

摘要： When an object of treatment is subjected to, for example, a gas treatment in an airtight chamber, reaction products adhere to the inner wall surface of the chamber, an object holder therein, and the corner portions of the chamber. When a cleaning medium is injected into the chamber, according to the present invention, the reaction products are dissolved in the cleaning medium by hydrolysis. Thereafter, the cleaning medium is discharged from the chamber. Then, the chamber is heated and evacuated, so that water vapor is discharged to provide a predetermined degree of vacuum, whereupon the treatment can be started anew. Therefore, a wiping operation can be omitted. Moreover, the reaction products remaining at the corner portions of the chamber can be removed without forming a source of polluted particles, so that the necessity of overhauling can be obviated. Thus, fully automatic cleaning, so to speak, can be effected, and the chamber need not be open to the atmosphere, so that the throughput can be improved.

摘要翻译： 当处理对象例如在气密室中进行气体处理时，反应产物粘附到室的内壁表面，物体保持器和腔室的角部。 当将清洁介质注入室中时，根据本发明，反应产物通过水解溶解在清洁介质中。 此后，清洗介质从室排出。 然后，对该室进行加热抽真空，从而排出水蒸气以提供预定的真空度，从而重新开始处理。 因此，可以省略擦拭操作。 此外，残留在室的角部的反应产物可以被除去而不形成污染颗粒源，从而可以消除大修的必要性。 因此，可以实现全自动清洗，并且室不需要对大气开放，从而可以提高生产量。

公开(公告)号：US08860340B2

公开(公告)日：2014-10-14

申请号：US13370402

申请日：2012-02-10

申请人： Shinsuke Sano ,  Toshiya Suzuki

发明人： Shinsuke Sano ,  Toshiya Suzuki

IPC分类号： H02P1/00 ,  F04D27/00

CPC分类号： F04D27/004

摘要： The present invention is provided to remove dust that adhered to a cooling fan. A plurality of comparators are disposed for each of a plurality of coils, respectively, and generates a back electromotive force sensing signal denoting a comparison result by comparing a back electromotive force appearing at one end of each corresponding coil with a neutral-point voltage of the coils. A driving signal synthesis circuit generates a driving control signal used to enable the fan motor to proceed the following actions: (i) enabling the fan motor to rotate toward the opposite direction as a normal operation within a specific reverse rotation period after a driving of the fan motor is started, (ii) applying a brake to the fan motor within a braking period, and (iii) enabling the fan motor to rotate toward a direction of normal operation in a normal driving period. A driving circuit drives the fan motor.

摘要翻译： 提供本发明以去除附着在冷却风扇上的灰尘。 分别为多个线圈中的每一个设置多个比较器，并且通过将出现在每个相应线圈的一端的反电动势与其中的中性点电压进行比较来产生表示比较结果的反电动势感测信号 线圈 驱动信号合成电路产生用于使风扇马达能够进行以下动作的驱动控制信号：（i）使得风扇马达能够在驱动后的特定反转周期内的正常操作期间朝向相反方向旋转 风扇电动机起动，（ii）在制动期间对风扇电动机施加制动，（iii）使风扇电动机能够在正常运转期间向正常运转方向转动。 驱动电路驱动风扇电机。

公开(公告)号：US20140147693A1

公开(公告)日：2014-05-29

申请号：US13823901

申请日：2011-09-16

申请人： Masanori Yasuyama ,  Yoshiaki Nakazawa ,  Masahito Tasaka ,  Toshiya Suzuki ,  Masahiro Nakata ,  Hiroki Fujimoto ,  Hitomi Nishibata

发明人： Masanori Yasuyama ,  Yoshiaki Nakazawa ,  Masahito Tasaka ,  Toshiya Suzuki ,  Masahiro Nakata ,  Hiroki Fujimoto ,  Hitomi Nishibata

IPC分类号： B32B3/28 ,  B32B15/01 ,  B21D21/00

CPC分类号： B32B3/28 ,  B21D5/08 ,  B21D21/00 ,  B21D22/00 ,  B21D22/208 ,  B21D35/007 ,  B21D49/00 ,  B21D53/88 ,  B23K31/022 ,  B23K2101/006 ,  B32B3/00 ,  B32B3/02 ,  B32B3/04 ,  B32B3/08 ,  B32B3/085 ,  B32B15/01 ,  B60R19/03 ,  B62D21/157 ,  B62D25/04 ,  Y10T29/49826 ,  Y10T428/12347 ,  Y10T428/12354 ,  Y10T428/12375 ,  Y10T428/12382 ,  Y10T428/1241 ,  Y10T428/12958

摘要： A formed member is provided which can be manufactured at a low cost, which has excellent dimensional accuracy, which has excellent axial crushing properties and three-point bending properties, which has excellent bending stiffness and torsional stiffness, and which is suitable for use in a component of an automobile. The formed member (20) has a reinforcing member (35) which is joined by a weld (40) provided on a ridge portion (28). It is manufactured by joining a flat sheet blank and a flat sheet reinforcing member (35) by a weld (40) and performing bending so that the weld (40) becomes a ridge portion (28).

摘要翻译： 提供了可以低成本制造的成形构件，其具有优异的尺寸精度，其具有优异的轴向破碎性能和三点弯曲性能，其具有优异的弯曲刚度和扭转刚度，并且适用于 汽车零部件 成形构件（20）具有加强构件（35），该加强构件通过设置在脊部（28）上的焊接部（40）而接合。 通过焊接（40）接合平板坯料和平板加强部件（35）并进行弯曲使焊缝（40）成为脊部（28）而制造。

公开(公告)号：USD695911S1

公开(公告)日：2013-12-17

申请号：US29428154

申请日：2012-07-26

申请人： Takashi Ishida ,  Toshiya Suzuki ,  Masaji Iida ,  Masahiro Kondo

设计人： Takashi Ishida ,  Toshiya Suzuki ,  Masaji Iida ,  Masahiro Kondo

公开(公告)号：USD687569S1

公开(公告)日：2013-08-06

申请号：US29428149

申请日：2012-07-26

申请人： Takashi Ishida ,  Toshiya Suzuki ,  Masaji Iida ,  Masahiro Kondo

设计人： Takashi Ishida ,  Toshiya Suzuki ,  Masaji Iida ,  Masahiro Kondo

公开(公告)号：US20090058336A1

公开(公告)日：2009-03-05

申请号：US12194904

申请日：2008-08-20

申请人： Satoshi Narumi ,  Hiroshi Murakami ,  Toshiya Suzuki

发明人： Satoshi Narumi ,  Hiroshi Murakami ,  Toshiya Suzuki

IPC分类号： H02P6/18

CPC分类号： H02P6/182

摘要： An object of the present invention is to provide a motor driving device capable of outputting an accurate rotation signal while preventing a false detection of B-EMF in a position detecting comparator. The motor driving device includes an output circuit, filter circuit, comparison circuit, current zero ampere detecting circuit, position detecting circuit, sensorless drive arithmetic operation circuit, noise reduction current waveform generating circuit, signal synthesizing circuit, and output transistor control circuit, the comparison circuit including a comparator, polarity switching portion connected to a +terminal and −terminal of the comparator and signal switching portion, the comparator being structured to be able to set and release an offset having a predetermined voltage value set preliminarily.

摘要翻译： 本发明的目的是提供一种能够在防止位置检测比较器中的B-EMF的错误检测的同时输出精确的旋转信号的电动机驱动装置。 电机驱动装置包括输出电路，滤波电路，比较电路，电流零安培检测电路，位置检测电路，无传感器驱动算术运算电路，降噪电流波形发生电路，信号合成电路和输出晶体管控制电路，比较 电路，包括比较器，连接到比较器和信号切换部分的+端和端的极性切换部分，比较器被构造成能够初步设置和释放具有预定电压值的偏移。

公开(公告)号：US07176677B2

公开(公告)日：2007-02-13

申请号：US11476052

申请日：2006-06-28

申请人： Satoshi Narumi ,  Masaharu Hoashi ,  Toshiya Suzuki ,  Daisuke Suetsugu ,  Hikaru Nakamura

发明人： Satoshi Narumi ,  Masaharu Hoashi ,  Toshiya Suzuki ,  Daisuke Suetsugu ,  Hikaru Nakamura

IPC分类号： G01B7/30 ,  G05D3/00

CPC分类号： G01D5/208

摘要： A stationary position detection circuit and a motor drive circuit capable of more properly detecting the rotor position are disclosed. The stationary position detection circuit supplies an alternating current to each phase load of the motor. The time during which the current flows in a first direction and the time during which the current flows in a second direction opposite to the first direction are converted into electrical signals and amplified. In accordance with the value of the electrical signals, the position of the motor rotor in stationary mode is determined. The use of the alternating current, unlike the kickback voltage, makes it possible to improve the detection accuracy by amplifying the electrical signals with an increased number of alternations. An increased number of alternations can amplify the electrical signals without increasing the value of the alternating current, and therefore, unlike in the case of the kickback voltage, the alternating current of a large value is not required. As a result, the alternating current can be reduced to a small value and the vibration can be suppressed.

摘要翻译： 公开了能够更适当地检测转子位置的静止位置检测电路和电动机驱动电路。 静止位置检测电路向电机的各相负载提供交流电。 电流沿第一方向流动的时间和电流沿与第一方向相反的第二方向流动的时间被转换成电信号并被放大。 根据电信号的值，确定电机转子在静止模式下的位置。 与反冲电压不同，使用交流电可以通过以增加的交替次数放大电信号来提高检测精度。 增加的交替数量可以放大电信号而不增加交流电流的值，因此与反冲电压不同，不需要大值的交流电。 结果，可以将交流电流减小到较小的值，并且可以抑制振动。