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公开(公告)号：US5750273A
公开(公告)日：1998-05-12
申请号：US623529
申请日：1996-03-29
申请人： Tetsuo Inoue , Hiroshi Tomita , Tetsuhiko Mizoguchi , Hiromi Fuke
发明人： Tetsuo Inoue , Hiroshi Tomita , Tetsuhiko Mizoguchi , Hiromi Fuke
IPC分类号： H01F10/14 , G11B5/31 , H01F10/12 , H01F10/13 , H01F10/16 , H01F10/187 , H01F17/00 , H01F17/04 , H01F41/18 , H01F41/20 , G11B5/66
CPC分类号： H01F10/131 , H01F10/187 , H01F17/04 , G11B5/3113 , Y10S428/90 , Y10T428/12931 , Y10T428/12979
摘要： A thin film magnetic element is disclosed which uses a soft magnetic thin film having a composition represented by the general formula: T.sub.100-x-y M.sub.x (AO.sub.v).sub.y (wherein T stands for at least one element selected from the group consisting of Fe and Co, M for at least one element selected from the group consisting of Zr, Hf, Nb, and Y, and A for at least one element selected from the group consisting of Si, Ge, Sn, B, P, and C, and x, y, and v respectively satisfy the expressions, 5.ltoreq.x.ltoreq.20 at. %, 8.ltoreq.y.ltoreq.25 at. %, and 0.ltoreq.v.ltoreq.2), consisting of a homogeneous amorphous phase, and having resistivity of not less than 1000 .mu..OMEGA..multidot.cm. Further, a thin film magnetic element is disclosed which uses a soft magnetic thin film of a microstructure having a composition substantially represented by the general formula, T.sub.100-x-z M.sub.x (AO.sub.v).sub.z (1.ltoreq.z.+-.10 at. %) and consisting of a microcrystalline phase and a first amorphous phase and a second amorphous phase disposed around the phases mentioned above.
摘要翻译： 公开了一种薄膜磁性元件，其使用具有由以下通式表示的组成的软磁性薄膜：T100-x-yMx（AOv）y（其中T表示选自Fe和Co中的至少一种元素 ，选自由Zr，Hf，Nb和Y组成的组中的至少一种元素的M，以及选自Si，Ge，Sn，B，P和C中的至少一种元素的A和x ，y和v分别满足以下表达式：5≤x≤20原子％，8≤y≤25原子％，0≤v≤2），由 均匀非晶相，电阻率不小于1000μmOMEGA xcm。 此外，公开了一种薄膜磁性元件，其使用具有基本上由通式T100-x-zMx（AOv）z（1≤z+/- 10at。％）组成的组成的微结构的软磁薄膜， ），并且由微晶相和第一非晶相以及设置在上述相周围的第二非晶相组成。
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公开(公告)号：US5522946A
公开(公告)日：1996-06-04
申请号：US266757
申请日：1994-06-28
申请人： Hiroshi Tomita , Tetsuo Inoue , Hiromi Fuke , Toshiro Sato , Tetsuhiko Mizoguchi
发明人： Hiroshi Tomita , Tetsuo Inoue , Hiromi Fuke , Toshiro Sato , Tetsuhiko Mizoguchi
CPC分类号： H01F10/131 , H01F10/132 , H01F30/10
摘要： An amorphous magnetic thin film possesses as at least part of a thin film forming area a microstructure composed of a first amorphous phase containing at least either of iron and cobalt and bearing magnetism and a second amorphous phase disposed round the first amorphous phase and containing boron and at least one element selected from among the elements of the 4B Group in the Periodic Table of Elements and exhibits uniaxial magnetic anisotropy in the plane of film. The amorphous magnetic thin film possesses soft magnetism concurrently satisfying high saturation magnetization and high resistivity and, at the same time, easily acquires high frequency permeability by applying magnetic field in the hard axis of magnetization. Use of these amorphous magnetic thin films for plane magnetic elements permits the plane magnetic elements to be miniaturized and to be endowed with exalted performance. The amorphous magnetic thin film possesses a composition substantially represented by the formula:(Fe.sub.1-x Co.sub.x).sub.1-y (B.sub.1-z X.sub.z).sub.y(wherein X stands for at least one element selected from among the 4B Group elements and x, y, and z stand for numerals satisfying the expressions, 0
摘要翻译： 无定形磁性薄膜至少具有薄膜形成区域的至少一部分，该微结构由包含铁和钴中的至少一种和承载磁性的第一非晶相组成，而第二非晶相设置在第一非晶相周围并含有硼和 选自元素周期表4B族的元素中的至少一种元素，并且在膜的平面中显示单轴磁各向异性。 非晶磁性薄膜具有同时满足高饱和磁化强度和高电阻率的软磁性，同时通过在硬磁化轴上施加磁场容易地获得高频磁导率。 这些非晶磁性薄膜用于平面磁性元件允许平面磁性元件小型化并赋予高级性能。 非晶磁性薄膜具有基本上由式（Fe1-xCox）1-y（B1-zXz）y表示的组成（其中X表示选自4B族元素中的至少一种元素，x，y和 z表示满足表达式0
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公开(公告)号：US5387551A
公开(公告)日：1995-02-07
申请号：US26027
申请日：1993-03-04
IPC分类号： H01F41/02 , H01F41/04 , H01L21/265
CPC分类号： H01F41/046 , H01F41/02 , H01F2017/0086 , Y10S148/012
摘要： A method of manufacturing a planar inductance element, including the steps of forming a thermal oxide film, a magnetic film, a first insulating interlayer, a planar coil, and a second insulating interlayer on a first semiconductor substrate, forming an insulating film and a magnetic film on a second semiconductor substrate, and adhering the first and the second semiconductor substrates such that the coil side of the first semiconductor substrate faces the magnetic film side of the second semiconductor substrate. According to this method, a stress generated by stacking thin films can be reduced compared with that of a conventional inductance element. Therefore, a high-frequency loss can be reduced, and a quality coefficient Q can be increased.
摘要翻译： 一种制造平面电感元件的方法，包括在第一半导体衬底上形成热氧化膜，磁膜，第一绝缘中间层，平面线圈和第二绝缘中间层的步骤，形成绝缘膜和磁 在第二半导体衬底上形成薄膜，并且使第一和第二半导体衬底粘合，使得第一半导体衬底的线圈侧面向第二半导体衬底的磁性膜侧。 根据该方法，与传统的电感元件相比，可以减少堆叠薄膜产生的应力。 因此，可以降低高频损失，并且可以提高质量系数Q。
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4.发明授权公开(公告)号：US06831543B2
公开(公告)日：2004-12-14
申请号：US09790625
申请日：2001-02-23
IPC分类号： H01F500
CPC分类号： H01F27/292 , H01F17/0006 , H01F17/04 , Y10T428/12431 , Y10T428/32
摘要： A surface mounting type planar magnetic device comprised of upper ferrite magnetic film, lower ferrite magnetic film and a planar coil interposed therebetween. For applying surface mount technology, an opening is formed in the upper ferrite magnetic film above a coil terminal portion and then, an external electrode conductive with the coil terminal portion through the opening is formed on the upper ferrite magnetic film. Further, this surface mounting type planar magnetic device is of a thin structure and can be mounted on the surface of a printed board. Its power loss is small, its inductance is large, its frequency characteristic is excellent, the disparity of the characteristic is small and its reliability is excellent.
摘要翻译： 一种表面安装型平面磁性装置，包括上部铁氧体磁性膜，下部铁氧体磁性膜和插入其间的平面线圈。 为了施加表面贴装技术，在线圈端子部分上方的上部铁氧体磁性膜形成开口，然后在上部铁氧体磁性膜上形成有通过开口的线圈端子部分导电的外部电极。 此外，这种表面安装型平面磁性装置具有薄的结构，并且可以安装在印刷电路板的表面上。 其功率损耗小，电感大，频率特性优良，特性差异小，可靠性好。
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公开(公告)号：US06414564B1
公开(公告)日：2002-07-02
申请号：US09630542
申请日：2000-08-01
申请人： Tetsuhiko Mizoguchi , Tetsuo Inoue , Toshirou Sato
发明人： Tetsuhiko Mizoguchi , Tetsuo Inoue , Toshirou Sato
IPC分类号： H03H738
CPC分类号： H01P1/215 , G01R33/028
摘要： The present invention is directed to a magnetic thin-film device whose operating frequency band ranges from several millihertz (MHz) to several gigahertz (GHz) and which is used as an inductor for a switching power supply, a noise filter, a reception circuit for receiving a quasi-microwave and a magnetic sensor. In this device, uniaxial magnetic anisotropy is guided to a magnetic layer, and the magnetic layer is sandwiched between dielectric layers to form a propagation path of electromagnetic wave. A microstrip line is provided on the top surface of the propagation path, while an insulative underlying substrate is formed on the bottom surface thereof with a lower grounded conductor interposed therebetween. Thus, the wavelength of the propagation path can be shortened to miniaturize the device. The device is rapidly improved in characteristics and miniaturized further, resulting in reduction in manufacturing costs.
摘要翻译： 本发明涉及一种磁性薄膜器件，其工作频带范围为几毫赫（MHz）至几千兆赫（GHz），用作开关电源的电感器，噪声滤波器，接收电路 接收准微波和磁传感器。 在该装置中，将单轴磁各向异性引导到磁性层，将磁性层夹在电介质层之间，形成电磁波的传播路径。 在传播路径的顶面上设置有微带线，而在其底面上形成绝缘性的下层基板，其间插有下接地导体。 因此，可以缩短传播路径的波长，使装置小型化。 该装置的特性迅速提高并进一步小型化，从而降低制造成本。
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公开(公告)号：US6121852A
公开(公告)日：2000-09-19
申请号：US115236
申请日：1998-07-14
申请人： Tetsuhiko Mizoguchi , Tetsuo Inoue , Toshirou Sato
发明人： Tetsuhiko Mizoguchi , Tetsuo Inoue , Toshirou Sato
IPC分类号： H01L21/822 , G01R33/028 , H01L27/04 , H01P1/215 , H03H7/38 , H01F27/06
CPC分类号： H01P1/215 , G01R33/028
摘要： The present invention is directed to a magnetic thin-film device whose operating frequency band ranges from several millihertz (MHz) to several gigahertz (GHz) and which is used as an inductor for a switching power supply, a noise filter, a reception circuit for receiving a quasi-microwave and a magnetic sensor. In this device, uniaxial magnetic anisotropy is guided to a magnetic layer, and the magnetic layer is sandwiched between dielectric layers to form a propagation path of electromagnetic wave. A microstrip line is provided on the top surface of the propagation path, while an insulative underlying substrate is formed on the bottom surface thereof with a lower grounded conductor interposed therebetween. Thus, the wavelength of the propagation path can be shortened to miniaturize the device. The device is rapidly improved in characteristics and miniaturized further, resulting in reduction in manufacturing costs.
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公开(公告)号：US06356079B1
公开(公告)日：2002-03-12
申请号：US09459909
申请日：1999-12-14
申请人： Tetsuhiko Mizoguchi , Tetsuo Inoue , Toshiro Sato
发明人： Tetsuhiko Mizoguchi , Tetsuo Inoue , Toshiro Sato
IPC分类号： G01R3302
CPC分类号： G01R33/02
摘要： The present invention provides a magnetic-field sensor using a magnetic substance. In the magnetic-field sensor, a transmission-line element constituted of a conductor layer, dielectric layer and a magnetic layer is inserted in a feedback circuit of a phase-shift type oscillation circuit using an open-loop operational amplifier as an amplifier. An output of the operational amplifier is fed back to an input thereof through the transmission-line element. Thus, a variation in oscillation frequency depending upon the intensity of an external magnetic field is detected as an output of the sensor.
摘要翻译： 本发明提供一种使用磁性物质的磁场传感器。 在磁场传感器中，使用开环运算放大器作为放大器将由导体层，电介质层和磁性层构成的传输线元件插入到相移型振荡电路的反馈电路中。 运算放大器的输出通过传输线元件反馈到其输入端。 因此，根据外部磁场的强度的振荡频率的变化被检测为传感器的输出。
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8.发明授权公开(公告)号：US06903645B2
公开(公告)日：2005-06-07
申请号：US10791706
申请日：2004-03-04
CPC分类号： H01F27/292 , H01F17/0006 , H01F17/04 , Y10T428/12431 , Y10T428/32
摘要： This invention provides a surface mounting type planar magnetic device comprised of upper ferrite magnetic film, lower ferrite magnetic film and a planar coil interposed therebetween. For applying surface mount technology, an opening is formed in the upper ferrite magnetic film above a coil terminal portion and then, an external electrode conductive with the coil terminal portion through the opening is formed on the upper ferrite magnetic film. Further, this surface mounting type planar magnetic device is of a thin structure and can be mounted on the surface of a printed board. Its power loss is small, its inductance is large, its frequency characteristic is excellent, the disparity of the characteristic is small and its reliability is excellent.
摘要翻译： 本发明提供一种表面安装型平面磁性装置，其包括上部铁氧体磁性膜，下部铁氧体磁性膜和插入其间的平面线圈。 为了施加表面贴装技术，在线圈端子部分上方的上部铁氧体磁性膜形成开口，然后在上部铁氧体磁性膜上形成有通过开口的线圈端子部分导电的外部电极。 此外，这种表面安装型平面磁性装置具有薄的结构，并且可以安装在印刷电路板的表面上。 其功率损耗小，电感大，频率特性优良，特性差异小，可靠性好。
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公开(公告)号：US06404317B1
公开(公告)日：2002-06-11
申请号：US08701996
申请日：1996-08-23
申请人： Tetsuhiko Mizoguchi , Toshiro Sato , Masashi Sahashi , Michio Hasegawa , Hiroshi Tomita , Atsuhito Sawabe
发明人： Tetsuhiko Mizoguchi , Toshiro Sato , Masashi Sahashi , Michio Hasegawa , Hiroshi Tomita , Atsuhito Sawabe
IPC分类号： H01F500
CPC分类号： H01F17/0006 , H01F2017/0066 , H01F2017/0086 , Y10T29/4902
摘要： Disclosed herein is a planar magnetic element comprising a substrate, a first magnetic layer arranged over the substrate, a first insulation layer arranged over the first magnetic layer, a planer coil formed of a conductor, having a plurality of turns, arranged over the first insulation layer and having a gap aspect ratio of at least 1, the gap aspect ratio being the ratio of the thickness of the conductor to the gap between any adjacent two of the turns, a second insulation layer arranged over the planar coil, and a second magnetic layer arranged over the second insulation layer. When used as an inductor, the planar magnetic element has a great quality coefficient Q. When used as a transformer, it has a large gain and a high voltage ratio. Since the element is small and thin, it is suitable for use in an integrated circuit, and can greatly contribute to miniaturization of electronic devices.
摘要翻译： 本文公开了一种平面磁性元件，包括基板，布置在基板上的第一磁性层，布置在第一磁性层上的第一绝缘层，由导体形成的具有多个匝的平面线圈，布置在第一绝缘层 并且具有至少为1的间隙宽高比，间隙宽高比是导体的厚度与任何相邻的两个匝之间的间隙的比率，布置在平面线圈上的第二绝缘层和第二磁性 层布置在第二绝缘层上。 当用作电感器时，平面磁性元件具有很高的质量系数Q.当用作变压器时，其具有大的增益和高电压比。 由于元件小而薄，因此适用于集成电路，并且可以极大地有助于电子设备的小型化。
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公开(公告)号：US5780177A
公开(公告)日：1998-07-14
申请号：US721722
申请日：1996-09-26
CPC分类号： G11B5/3109 , H01F10/135 , H01F10/137 , H01F17/04 , Y10S428/90 , Y10T428/115 , Y10T428/12931 , Y10T428/12979
摘要： A magnetic thin film is disclosed which has a composition represented substantially by the following chemical formula and, the same time, has the whole or part of the thin film formed of an amorphous region: {(Fe.sub.1-x Co.sub.x).sub.1-y (B.sub.1-z X.sub.z).sub.y }.sub.1-a RE.sub.awherein X represents at least one element selected from among the Group 4B elements in the CAS version of the Periodic Table, RE represents rare earth elements including Sm, and x, y, z, and a represent numerical values satisfying the following expressions, 0
摘要翻译： 公开了一种磁性薄膜，其具有基本上由以下化学式表示的组成，并且同时具有由非晶区形成的全部或部分薄膜：{（Fe1-xCox）1-y（B1- zXz）y} 1-a REA，其中X表示选自元素周期表的CAS版本的4B族元素中的至少一种元素，RE表示稀土元素，包括Sm，x，y，z，a表示满足 0
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