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公开(公告)号：US20050221710A1
公开(公告)日：2005-10-06
申请号：US11086418
申请日：2005-03-23
CPC分类号： H01J9/025 , B82Y10/00 , H01J1/304 , H01J31/127 , H01J2201/30469
摘要： To provide a method of manufacturing a field emission display having an improved electron emission effect by means of laser irradiation and accordingly mitigating a luminance fluctuation among pixels, and other such techniques. Provided is a method of manufacturing a field emission display which includes a cathode substrate and a fluorescent screen glass opposed to the cathode substrate and emits light when an electron emitted from a carbon nanotube printed layer (7) containing a carbon nanotube of the cathode electrode enters a fluorescent material of the fluorescent screen glass, the method including a laser beam irradiation step of irradiating a surface of the carbon nanotube printed layer (7) with a laser beam having its energy density to be spatially modulated to expose and raise the carbon nanotube of the carbon nanotube printed layer so as to form a laser irradiation part (B) and a non-laser irradiation part (C).
摘要翻译： 提供一种通过激光照射制造具有改善的电子发射效果的场致发射显示器的方法，并且相应地减轻像素之间的亮度波动以及其他这样的技术。 提供一种制造场发射显示器的方法，其包括阴极基板和与阴极基板相对的荧光屏玻璃，并且当从包含阴极电极的碳纳米管的碳纳米管印刷层（7）发射的电子进入时发射光 荧光屏玻璃的荧光材料，该方法包括：激光束照射步骤，用具有其空间调制能量密度的激光束照射碳纳米管印刷层（7）的表面，以使碳纳米管的碳纳米管 碳纳米管印刷层，以形成激光照射部分（B）和非激光照射部分（C）。
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公开(公告)号：US07537505B2
公开(公告)日：2009-05-26
申请号：US11086418
申请日：2005-03-23
CPC分类号： H01J9/025 , B82Y10/00 , H01J1/304 , H01J31/127 , H01J2201/30469
摘要： To provide a method of manufacturing a field emission display having an improved electron emission effect by means of laser irradiation and accordingly mitigating a luminance fluctuation among pixels, and other such techniques. Provided is a method of manufacturing a field emission display which includes a cathode substrate and a fluorescent screen glass opposed to the cathode substrate and emits light when an electron emitted from a carbon nanotube printed layer (7) containing a carbon nanotube of the cathode electrode enters a fluorescent material of the fluorescent screen glass, the method including a laser beam irradiation step of irradiating a surface of the carbon nanotube printed layer (7) with a laser beam having its energy density to be spatially modulated to expose and raise the carbon nanotube of the carbon nanotube printed layer so as to form a laser irradiation part (B) and a non-laser irradiation part (C).
摘要翻译： 提供一种通过激光照射制造具有改善的电子发射效果的场致发射显示器的方法，并且相应地减轻像素之间的亮度波动以及其他这样的技术。 提供一种制造场发射显示器的方法，其包括阴极基板和与阴极基板相对的荧光屏玻璃，并且当从包含阴极电极的碳纳米管的碳纳米管印刷层（7）发射的电子进入时发射光 荧光屏玻璃的荧光材料，该方法包括：激光束照射步骤，用具有其空间调制能量密度的激光束照射碳纳米管印刷层（7）的表面，以使碳纳米管的碳纳米管 碳纳米管印刷层，以形成激光照射部分（B）和非激光照射部分（C）。
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3.发明授权Wire electric discharge machining method, semiconductor wafer manufacturing method, and solar battery cell manufacturing method 有权线放电加工方法，半导体晶片制造方法和太阳能电池单元制造方法公开(公告)号：US08138442B2
公开(公告)日：2012-03-20
申请号：US12093836
申请日：2005-11-16
申请人： Tatsushi Sato , Yoshihito Imai , Teiji Takahashi , Takeshi Sakata , Tomoko Sendai , Yoichiro Nishimoto , Shigeru Matsuno , Takeyuki Maegawa , Takaaki Iwata
发明人： Tatsushi Sato , Yoshihito Imai , Teiji Takahashi , Takeshi Sakata , Tomoko Sendai , Yoichiro Nishimoto , Shigeru Matsuno , Takeyuki Maegawa , Takaaki Iwata
IPC分类号： B23H7/02 , H01L21/301 , H01L21/306 , B23H9/00
摘要： Provided are a wire electric discharge machining method for poorly conductive materials, such as solar cell silicon, and a semiconductor wafer manufacturing method and a solar battery cell manufacturing method based on the wire electric discharge machining method. Electrical discharge machining of a high volume resistivity, hard and brittle materials, having a volume resistivity that is equal to or higher than 0.5 Ω·cm and equal to or lower than 5 Ω·cm is performed by applying a pulse voltage having a pulse width that is equal to or higher than 1 μsec and equal to or lower than 4 μsec and having a peak current at the time of machining a wire electrode that is equal to or higher than 10A and equal to or lower than 50A to a wire electrode and generating a discharge pulse between the wire electrode and a subject to be machined.
摘要翻译： 本发明提供一种导电材料的导电放电加工方法，例如太阳能电池硅，半导体晶片的制造方法以及基于该放电加工方法的太阳能电池单元的制造方法。 具有体积电阻率等于或大于0.5且OHgr·cm且等于或小于5Ω的体积电阻率，硬脆材料的放电加工是通过施加具有 脉冲宽度等于或高于1微秒并且等于或低于4微秒，并且在将线电极加工时的峰值电流等于或高于10A并等于或低于50A的线 并且在线电极和待加工对象之间产生放电脉冲。
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4.发明申请WIRE ELECTRIC DISCHARGE MACHINING METHOD, SEMICONDUCTOR WAFER MANUFACTURING METHOD, AND SOLAR BATTERY CELL MANUFACTURING METHOD 有权电线放电加工方法，半导体制造方法和太阳能电池组件制造方法公开(公告)号：US20090212026A1
公开(公告)日：2009-08-27
申请号：US12093836
申请日：2005-11-16
申请人： Tatsushi Sato , Yoshihito Imai , Teiji Takahashi , Takeshi Sakata , Tomoko Sendai , Yoichiro Nishimoto , Shigeru Matsuno , Takeyuki Maegawa , Takaaki Iwata
发明人： Tatsushi Sato , Yoshihito Imai , Teiji Takahashi , Takeshi Sakata , Tomoko Sendai , Yoichiro Nishimoto , Shigeru Matsuno , Takeyuki Maegawa , Takaaki Iwata
IPC分类号： B23H1/00
摘要： Provided are a wire electric discharge machining method for poorly conductive materials, such as solar cell silicon, and a semiconductor wafer manufacturing method and a solar battery cell manufacturing method based on the wire electric discharge machining method. Electrical discharge machining of a high volume resistivity, hard and brittle materials, having a volume resistivity that is equal to or higher than 0.5 Ω·cm and equal to or lower than 5 Ω·cm is performed by applying a pulse voltage having a pulse width that is equal to or higher than 1 μsec and equal to or lower than 4 μsec and having a peak current at the time of machining a wire electrode that is equal to or higher than 10A and equal to or lower than 50A to a wire electrode and generating a discharge pulse between the wire electrode and a subject to be machined.
摘要翻译： 本发明提供一种导电材料的导电放电加工方法，例如太阳能电池硅，半导体晶片的制造方法以及基于该放电加工方法的太阳能电池单元的制造方法。 通过施加具有脉冲宽度的脉冲电压来执行体积电阻率等于或高于0.5Ω·cm且等于或小于5Ω·cm的高体积电阻率，硬脆性材料的放电加工 等于或高于1个音箱并且等于或低于4个音箱，并且在对线电极进行等于或高于10A且等于或小于50A的线电极加工时具有峰值电流，以及 在线电极和待加工对象之间产生放电脉冲。
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5.发明授权Gap detection device for laser beam machine, laser beam machining system and gap detection method for laser beam machine 失效激光束机间隙检测装置，激光束加工系统和激光束机间隙检测方法公开(公告)号：US07557589B2
公开(公告)日：2009-07-07
申请号：US11554707
申请日：2006-10-31
CPC分类号： B23K26/04
摘要： A signal processing portion obtains the reciprocal of a composite impedance of gap static capacitance and a plasma impedance, obtains composite static capacitance which is the sum of the gap static capacitance and a static capacitance component included in the plasma impedance from an imaginary part of the reciprocal, and obtains a resistance component included in the plasma impedance from a real part of the reciprocal. A gap detection device obtains the static capacitance component by using a model representing the characteristics of the reciprocal of the plasma impedance and the resistance component and obtains the gap static capacitance by subtracting the static capacitance component from the composite static capacitance. The gap detection device obtains a gap from the obtained gap static capacitance. Thus provided is a technique to detect a gap between a nozzle of a laser beam machine for outputting a laser beam and an object to be machined with high accuracy.
摘要翻译： 信号处理部分获得间隙静态电容和等离子体阻抗的复合阻抗的倒数，获得复合静态电容，该复合静态电容是等离子体阻抗中包含的静态电容和静态电容之和的总和， 并且从该倒数的实部获得包括在等离子体阻抗中的电阻分量。 间隙检测装置通过使用表示等离子体阻抗和电阻分量的倒数的特性的模型来获得静态电容分量，并且通过从复合静态电容中减去静态电容分量来获得间隙静态电容。 间隙检测装置从获得的间隙静电电容获得间隙。 因此，提供了一种用于检测用于输出激光束的激光束机器的喷嘴与待加工物体之间的间隙的技术，其高精度。
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公开(公告)号：US08664559B2
公开(公告)日：2014-03-04
申请号：US11816830
申请日：2005-02-28
IPC分类号： B23H7/26
CPC分类号： B23H9/14 , B23H7/265 , B23H2400/10
摘要： An electrical discharge machine feeds an electrode wire received within a guide tube to a process region of a machined article. The electrical discharge machine includes a cylindrical hollow driving shaft arranged in a vertical direction, which has a space for receiving the guide tube with the electrode wire along a vertical central axis. A head assembly includes a first holding member for holding the guide tube, and a second holding member for holding the electrode wire extending from a bottom opening of the guide tube. The head assembly is detachably coupled with a bottom portion of the driving shaft. Therefore, the electrode wire can be replaced by replacing the head assembly.
摘要翻译： 放电机器将接收在引导管内的电极丝馈送到加工制品的加工区域。 放电机包括沿垂直方向布置的圆柱形中空驱动轴，其具有用于沿垂直中心轴线接收具有电极线的引导管的空间。 头组件包括用于保持引导管的第一保持构件和用于保持从引导管的底部开口延伸的电极线的第二保持构件。 头部组件与驱动轴的底部可拆卸地联接。 因此，可以通过更换头部组件来代替电极线。
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公开(公告)号：US06505091B1
公开(公告)日：2003-01-07
申请号：US09462687
申请日：2000-03-21
IPC分类号： G06F1900
CPC分类号： B23H7/18 , B23H7/16 , B23H7/20 , B23H2400/10
摘要： A detected value indicating a machining state is filtered and a machining gap between an electrode and a workpiece is adjusted by using a control variable obtained through the filtering. Therefore, machining speed can be improved by maintaining a stable machining state through suppression of a disturbance in a gap distance control system due to eccentricity of an electrode, due to fluctuations in electric characteristics at feeding brush sections, and due to mechanical resonance of the electrode driving system.
摘要翻译： 通过使用通过滤波获得的控制变量来过滤表示加工状态的检测值，并且调整电极和工件之间的加工间隙。 因此，通过由于电极的偏心引起的间隙距离控制系统的干扰，由于馈电刷部分的电特性的波动以及由于电极的机械共振而保持了稳定的加工状态，因此可以提高加工速度 驾驶系统
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8.发明授权
公开(公告)号：US5756956A
公开(公告)日：1998-05-26
申请号：US531076
申请日：1995-09-20
申请人： Seiji Sato , Hisashi Yamada , Takuji Magara , Yoshihito Imai , Tatsushi Sato
发明人： Seiji Sato , Hisashi Yamada , Takuji Magara , Yoshihito Imai , Tatsushi Sato
CPC分类号： B23H7/04
摘要： A wire-cut electric discharge machining apparatus and a control method for the wire-cut EDM apparatus. The amount of current pulses supplied to a machining gap can be measured precisely without a detection delay to thereby detect the occurrence of faulty machining such as wire electrode breakage and centralized arcs.
摘要翻译： 一种线切割放电加工装置以及用于线切割EDM装置的控制方法。 提供给加工间隙的电流脉冲量可以精确测量而没有检测延迟，从而检测线电极断裂和集中电弧等故障加工的发生。
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公开(公告)号：US20070102402A1
公开(公告)日：2007-05-10
申请号：US10579831
申请日：2004-01-23
CPC分类号： B23H7/36 , B23H1/10 , B23H7/265 , B23H9/14 , B23H2400/10
摘要： An electric discharge machining apparatus includes: a guide electrode (7) that is shaped like a hollow bar and receives a small-diameter wire electrode (8) for electric discharge machining in such a way that the small-diameter electrode can freely slide and; guide electrode holding means (9, 19, 20) that holds this guide electrode (7) at a specified position; pressurized fluid supply means (10, 11) that supplies pressurized fluid into the guide electrode (7) to feed out the small-diameter wire electrode (8) from inside the guide electrode (7) to an electric discharge machining side; and small-diameter wire electrode holding means (21) that automatically holds the small-diameter wire electrode (8) fed out of the guide electrode (7).
摘要翻译： 放电加工装置包括：导电电极（7），其形状为中空棒，并且容纳用于放电加工的小直径线电极（8），使得小直径电极可以自由滑动; 将该引导电极（7）保持在规定位置的引导电极保持机构（9,19,20） 加压流体供给装置（10,11），其将加压流体供应到所述引导电极（7）中以将所述小直径线电极（8）从所述引导电极（7）内部输出到放电加工侧; 以及自动保持从引导电极（7）送出的小直径线电极（8）的小直径线电极保持机构（21）。
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公开(公告)号：US06621033B2
公开(公告)日：2003-09-16
申请号：US09773559
申请日：2001-02-02
IPC分类号： B23H104
CPC分类号： B23H1/06 , B23H1/04 , Y10T29/4921 , Y10T428/1216
摘要： A layered anisotropically conductive element, a resistant element, and a feed element constitute an electrode for discharge machining. The layered anisotropically conductive element includes high conductivity layers and low conductivity layers alternately laminated on each other, the high conductivity layers and the low conductivity layers being made of thin metallic plates coated with an insulating film. The layered anisotropically conductive element has an anisotropic conductivity, in which the conductivity in a direction parallel to the low conductivity layers is much higher than that in a direction perpendicular to the low conductivity layers. The resistant element is connected to one of end surfaces of the layered anisotropically conductive element perpendicular to the layers. The feed element is connected to the resistant element.
摘要翻译： 层状各向异性导电元件，电阻元件和馈电元件构成用于放电加工的电极。 层状各向异性导电元件包括彼此交替层叠的高导电性层和低电导率层，高导电性层和低电导率层由涂覆有绝缘膜的薄金属板制成。 层状各向异性导电元件具有各向异性导电性，其中平行于低电导率层的方向上的导电率远高于垂直于低电导率层的方向上的导电率。 电阻元件连接到垂直于层的层状各向异性导电元件的端面之一。 馈电元件连接到电阻元件。
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