Linear thermal evaporator for vacuum vapor depositing apparatus
    1.
    发明授权
    Linear thermal evaporator for vacuum vapor depositing apparatus 失效
    用于真空气相沉积设备的线性热蒸发器

    公开(公告)号:US5216742A

    公开(公告)日:1993-06-01

    申请号:US928970

    申请日:1992-08-11

    IPC分类号: C23C14/24

    CPC分类号: C23C14/243

    摘要: A crucible (9) of a nonmetallic material with an elongated cavity (42) to contain the material to be evaporated has on top a vapor emission slot (45) which is defined at its longitudinal edges (43, 44) by two elongated plates (40, 41) of a likewise nonmetallic material. In the cavity (42) two heating rods (46, 47) are disposed in a mirror-symmetrical relationship to a plane of symmetry (S) through the vapor emission slot (45), one under each of the plates (40, 41) defining the vapor emission slot (45). Additional heating means are provided outside of the crucible and inside of a thermal barrier system.

    摘要翻译: 具有用于容纳待蒸发的材料的细长空腔(42)的坩埚(9)在其顶部形成有蒸气发射狭槽(45),其在其纵向边缘(43,44)处由两个细长板( 40,41)同样的非金属材料。 在空腔(42)中,两个加热棒(46,47)通过蒸汽发射槽(45)与对称平面(S)以镜对称的关系设置,每个板(40,41)下方一个, 限定蒸汽发射槽(45)。 附加的加热装置设置在坩埚的外部和热障系统的内部。

    Multilayer nitride-containing coatings
    2.
    发明授权
    Multilayer nitride-containing coatings 有权
    多层氮化物涂层

    公开(公告)号:US07901799B2

    公开(公告)日:2011-03-08

    申请号:US11900683

    申请日:2007-09-13

    IPC分类号: B32B9/00

    摘要: This invention relates to erosion resistant coatings comprising at least 2 sublayer systems in which each sublayer system is separated from another by an interlayer, wherein (i) each sublayer system is the same or different and comprises at least 4 layers, (ii) said layers comprise alternating layers of a nitride-containing compound of stoichiometric composition and a nitride-containing compound of nonstoichiometric composition, (iii) each sublayer system has a thickness of greater than about 0.4 microns, and (iv) each interlayer is the same or different and comprises a metal-containing compound. This invention also relates to a method for producing the coatings and to articles, e.g., gas turbine compressor rotor blade and stator vanes, coated with the coatings.

    摘要翻译: 本发明涉及抗侵蚀涂层,其包括至少两个子层系统,其中每个子层系统通过中间层与另一层分离,其中(i)每个子层系统相同或不同并且包含至少4层,(ii)所述层 包括化学计量组成的含氮化物化合物和非化学计量组合物的含氮化物化合物的交替层,(iii)每个子层系统具有大于约0.4微米的厚度,和(iv)每个中间层相同或不同, 包含含金属的化合物。 本发明还涉及一种制备涂层的方法以及涂覆有涂层的制品,例如燃气轮机压缩机转子叶片和定子叶片。

    System for coating substrates with magnetron cathodes
    3.
    发明授权
    System for coating substrates with magnetron cathodes 失效
    用MAGNETRON CATHODES涂覆衬底的系统

    公开(公告)号:US5196105A

    公开(公告)日:1993-03-23

    申请号:US665624

    申请日:1991-03-06

    IPC分类号: C23C14/34 C23C14/35 H01J37/34

    摘要: The present invention provides a system for coating substrates which are arranged within a vacuum chamber on a substrate holder which is situated at least partially in a coating range on whose both sides magnetron cathodes with magnet systems of permanent magnets with outside poles and inside poles are disposed, wherein the polarity of the magnet systems of the magnetron cathodes is such that poles of opposed polarity are opposite one another on both sides of the coating range; and on opposite sides of the coating range at least one magnet coil is disposed, and the oppositely situated magnet coils being connectable to a power source in such a manner that the fields of the magnet coils together make up a closed magnetic field, and that the polarity of the outside poles of the permanent magnet systems and of the magnet coils is the same.

    摘要翻译: 本发明提供了一种涂覆基板的系统,其被布置在基板保持器上的真空室内,该基板保持器至少部分地位于其两侧具有外部磁极和内部磁极的永磁体磁体系的磁控阴极的涂覆范围内 其中磁控管阴极的磁体系统的极性使得相对极性的极在涂层范围的两侧彼此相反; 并且在涂覆范围的相对侧上设置有至少一个磁体线圈,并且相对设置的磁体线圈可以以这样的方式连接到电源,使得磁体线圈的磁场一起构成闭合的磁场,并且 永久磁铁系统和磁铁线圈的外极极性相同。

    Evaporator crucible for vacuum depositing systems
    4.
    发明授权
    Evaporator crucible for vacuum depositing systems 失效
    用于真空沉积系统的蒸发器坩埚

    公开(公告)号:US4613306A

    公开(公告)日:1986-09-23

    申请号:US729675

    申请日:1985-05-02

    摘要: Evaporator crucible for vacuum depositing systems, having a crucible bottom with at least one bottom opening for the introduction of material in rod form for evaporation. At a distance from the bottom opening there is provided at least one metal crucible rim which preferably is provided with a coolant passage. To solve the problem of reducing the heat losses, the crucible rim is provided internally on at least a part of its depth with a lagging comprising ceramic material. This lagging preferably comprises individual ceramic building blocks which are preferably compressed from magnesium oxide.

    摘要翻译: 用于真空沉积系统的蒸发器坩埚,具有至少一个底部开口的坩埚底部,用于引入用于蒸发的棒形式的材料。 在距离底部开口一定距离处,设置有至少一个金属坩埚边缘,其优选地设置有冷却剂通道。 为了解决减少热损失的问题,坩埚边缘在其深度的至少一部分内部设置有包含陶瓷材料的滞后。 这种滞后优选包括优选地从氧化镁压制的单独的陶瓷结块。

    MULTILAYER NITRIDE-CONTAINING COATINGS
    7.
    发明申请
    MULTILAYER NITRIDE-CONTAINING COATINGS 有权
    多层氮化物涂层

    公开(公告)号:US20110117276A1

    公开(公告)日:2011-05-19

    申请号:US13013090

    申请日:2011-01-25

    摘要: This invention relates to erosion resistant coatings comprising at least 2 sublayer systems in which each sublayer system is separated from another by an interlayer, wherein (i) each sublayer system is the same or different and comprises at least 4 layers, (ii) said layers comprise alternating layers of a nitride-containing compound of stoichiometric composition and a nitride-containing compound of nonstoichiometric composition, (iii) each sublayer system has a thickness of greater than about 0.4 microns, and (iv) each interlayer is the same or different and comprises a metal-containing compound. This invention also relates to a method for producing the coatings and to articles, e.g., gas turbine compressor rotor blade and stator vanes, coated with the coatings.

    摘要翻译: 本发明涉及抗侵蚀涂层,其包括至少两个子层系统,其中每个子层系统通过中间层与另一层分离,其中(i)每个子层系统相同或不同并且包含至少4层,(ii)所述层 包括化学计量组成的含氮化物化合物和非化学计量组合物的含氮化物化合物的交替层,(iii)每个子层系统具有大于约0.4微米的厚度,和(iv)每个中间层相同或不同, 包含含金属的化合物。 本发明还涉及一种制备涂层的方法以及涂覆有涂层的制品,例如燃气轮机压缩机转子叶片和定子叶片。