公开(公告)号：US08387158B2

公开(公告)日：2013-02-26

申请号：US12806086

申请日：2010-08-05

申请人： Thomas T Perkins ,  Gavin M King ,  Ashley R Carter

发明人： Thomas T Perkins ,  Gavin M King ,  Ashley R Carter

IPC分类号： G01Q20/02

CPC分类号： G01Q20/02 ,  G01Q10/06

摘要： The present invention relates to a method of rapidly and repeatably bringing sharp objects into close proximity to a particular region of interest of a sample with high precision and accuracy in two or three dimensions using a laser guided tip approach with three dimensional registration to the surface.

摘要翻译： 本发明涉及一种使用具有三维配准到表面的激光引导尖端方法，以高精度和精确度将尖锐物体快速且可重复地以高精度和精确度将锋利物体紧密地附接到样品的特定感兴趣区域的方法。

公开(公告)号：US08273257B2

公开(公告)日：2012-09-25

申请号：US12409580

申请日：2009-03-24

申请人： Jene A Golovchenko ,  Gavin M King ,  Gregor M Schurmann ,  Daniel Branton

发明人： Jene A Golovchenko ,  Gavin M King ,  Gregor M Schurmann ,  Daniel Branton

IPC分类号： C23C14/34 ,  B82B3/00

CPC分类号： C23C14/06 ,  B82Y10/00 ,  C23C14/5873 ,  H01J37/3005 ,  H01J2237/31732 ,  H01J2237/3174 ,  H01L21/02238 ,  H01L21/0332 ,  H01L21/0337 ,  H01L21/30604 ,  H01L21/3065 ,  H01L21/31662 ,  H01L21/3185 ,  Y10S977/856 ,  Y10S977/857 ,  Y10S977/888 ,  Y10S977/89 ,  Y10S977/891

摘要： In a method for processing a nanotube, a vapor is condensed to a solid condensate layer on a surface of the nanotube and then at least one selected region of the condensate layer is locally removed by directing a beam of energy at the selected region. The nanotube can be processed with at least a portion of the solid condensate layer maintained on the nanotube surface and thereafter the solid condensate layer removed. Nanotube processing can include, e.g., depositing a material layer on an exposed nanotube surface region where the condensate layer was removed. After forming a solid condensate layer, an electron beam can be directed at a selected region along a nanotube length corresponding to a location for cutting the nanotube, to locally remove the condensate layer at the region, and an ion beam can be directed at the selected region to cut the nanotube at the selected region.

摘要翻译： 在用于处理纳米管的方法中，蒸汽被冷凝到纳米管表面上的固体冷凝物层，然后通过在所选择的区域引导能量束来局部去除冷凝物层的至少一个选定区域。 纳米管可以用保持在纳米管表面上的固体冷凝物层的至少一部分进行处理，然后除去固体冷凝物层。 纳米管加工可以包括例如在去除冷凝物层的暴露的纳米管表面区域上沉积材料层。 在形成固体冷凝物层之后，电子束可以沿着与用于切割纳米管的位置相对应的纳米管长度的选定区域被引导，以在该区域局部移除冷凝物层，并且离子束可以被引导到所选择的 区域以在所选择的区域切割纳米管。

公开(公告)号：US08221595B2

公开(公告)日：2012-07-17

申请号：US12381502

申请日：2009-03-12

申请人： Daniel Branton ,  Jene A Golovchenko ,  Gavin M King ,  Warren J MoberlyChan ,  Gregor M Schurmann

发明人： Daniel Branton ,  Jene A Golovchenko ,  Gavin M King ,  Warren J MoberlyChan ,  Gregor M Schurmann

IPC分类号： C23C14/34

CPC分类号： C23C14/5873 ,  B82Y10/00 ,  C23C14/541 ,  H01L21/0331 ,  Y10S977/856 ,  Y10S977/857 ,  Y10S977/888 ,  Y10S977/89 ,  Y10S977/891

摘要： The invention provides a method for forming a patterned material layer on a structure, by condensing a vapor to a solid condensate layer on a surface of the structure and then localized removal of selected regions of the condensate layer by directing an ion beam at the selected regions, exposing the structure at the selected regions. A material layer is then deposited on top of the solid condensate layer and the exposed structure at the selected regions. Then the solid condensate layer and regions of the material layer that were deposited on the solid condensate layer are removed, leaving a patterned material layer on the structure.

摘要翻译： 本发明提供了一种用于在结构上形成图案化材料层的方法，其通过将蒸气冷凝在结构表面上的固体冷凝物层，然后通过将离子束引导到选定区域而局部去除冷凝物层的选定区域 ，在所选择的区域暴露结构。 然后将材料层沉积在固体冷凝物层的顶部和所选区域处的暴露结构。 然后去除沉积在固体冷凝物层上的固体冷凝物层和材料层的区域，在结构上留下图案化的材料层。