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    Nanowire fabrication
    1.
    发明授权
    Nanowire fabrication 有权
    纳米线制造

    公开(公告)号：US08568876B2

    公开(公告)日：2013-10-29

    申请号：US13224238

    申请日：2011-09-01

    申请人： Kwangyeol Lee

    发明人： Kwangyeol Lee

    IPC分类号： B82B1/00

    CPC分类号： C30B29/60 ,  C01B33/02 ,  C30B11/12 ,  C30B29/04 ,  C30B29/06 ,  Y10S977/856 ,  Y10S977/857 ,  Y10S977/888 ,  Y10S977/89 ,  Y10S977/891 ,  Y10S977/892 ,  Y10T428/23993 ,  Y10T428/249921 ,  Y10T428/25 ,  Y10T428/29 ,  Y10T428/2913 ,  Y10T428/2927 ,  Y10T428/2933 ,  Y10T428/294

    摘要： Techniques for making nanowires with a desired diameter are provided. The nanowires can be grown from catalytic nanoparticles, wherein the nanowires can have substantially same diameter as the catalytic nanoparticles. Since the size or the diameter of the catalytic nanoparticles can be controlled in production of the nanoparticles, the diameter of the nanowires can be subsequently controlled as well. The catalytic nanoparticles are melted and provided with a gaseous precursor of the nanowires. When supersaturation of the catalytic nanoparticles with the gaseous precursor is reached, the gaseous precursor starts to solidify and form nanowires. The nanowires are separate from each other and not bind with each other to form a plurality of nanowires having the substantially uniform diameter.

    摘要翻译： 提供了制造具有所需直径的纳米线的技术。 纳米线可以从催化纳米颗粒生长，其中纳米线可以具有与催化纳米颗粒基本相同的直径。 由于可以在纳米颗粒的制备中控制催化纳米颗粒的尺寸或直径，所以可以随后控制纳米线的直径。 将催化纳米颗粒熔化并提供纳米线的气态前体。 当达到具有气态前体的催化纳米颗粒过饱和时，气态前体开始凝固并形成纳米线。 纳米线彼此分离并且不彼此结合以形成具有基本均匀直径的多个纳米线。

    Direct-write nanolithography method of transporting ink with an elastomeric polymer coated nanoscopic tip to form a structure having internal hollows on a substrate
    8.
    发明授权
    Direct-write nanolithography method of transporting ink with an elastomeric polymer coated nanoscopic tip to form a structure having internal hollows on a substrate 失效
    使用弹性体聚合物涂覆的纳米级尖端输送墨水的直写式纳米光刻方法形成在基底上具有内部空洞的结构

    公开(公告)号：US07491422B2

    公开(公告)日：2009-02-17

    申请号：US11056391

    申请日：2005-02-14

    申请人： Hua Zhang ,  Robert Elghanian ,  Linette Demers ,  Nabil Amro ,  Sandeep Disawal ,  Sylvain Cruchon-Dupeyrat

    发明人： Hua Zhang ,  Robert Elghanian ,  Linette Demers ,  Nabil Amro ,  Sandeep Disawal ,  Sylvain Cruchon-Dupeyrat

    IPC分类号： B05D5/00 ,  B05D1/28 ,  B82B1/00 ,  G01N33/00 ,  G03F1/00

    CPC分类号： B81C1/0046 ,  G03F7/0002 ,  G03F7/2049 ,  Y10S977/857 ,  Y10S977/863 ,  Y10S977/879

    摘要： A novel method of transporting ink to a substrate with dip-pen nanolithographic (DPN) stamp tips coated with polymer (e.g., polydimethylsiloxane (PDMS), etc.). This kind of tip adsorbs chemicals (“inks”) easily and is used to generate DPN nanopatterns that are imaged with the same tip after a DPN process. This method builds a bridge between micro-contact printing (μCP) and DPN, making it possible for one to easily generate smaller structures of any molecules that have been patterned by the μCP technique. The easy tip-coating and writing process enriches the state-of-the-art DPN technique. The sub-100 nm DPN resolution obtained by using this kind of novel tip is comparable to that with a conventional Si3N4 probe tip. Importantly, the unique stamp tip was able to transfer solvent (e.g., liquid “ink”) onto a substrate, resulting in fabrication of hollow nanostructures with only one DPN holding/writing step. Inks comprising metals and sol-gel materials are noted, as well as applications in photomask repair, enhancement, and fabrication.

    摘要翻译： 使用涂覆有聚合物（例如聚二甲基硅氧烷（PDMS）等）的浸笔纳米光刻（DPN）印模尖端将墨输送到基底的新方法。 这种尖端容易吸附化学物质（“油墨”），并用于产生在DPN工艺之后用相同尖端成像的DPN纳米图案。 该方法构建了微接触印刷（muCP）和DPN之间的桥梁，使得可以轻松地生成通过muCP技术图案化的任何分子的较小结构。 简单的涂层和书写过程丰富了最先进的DPN技术。 通过使用这种新型尖端获得的亚100nm DPN分辨率与常规Si 3 N 4探针尖端的分辨率相当。 重要的是，独特的压头能够将溶剂（例如液体“墨”）转移到基底上，从而制造具有仅一个DPN保持/书写步骤的中空纳米结构。 注意到包含金属和溶胶 - 凝胶材料的油墨，以及光掩模修复，增强和制造中的应用。