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14 条记录 (耗时 0.018 秒)

    Real-time, active picometer-scale alignment, stabilization, and registration in one or more dimensions
    1.
    发明授权
    Real-time, active picometer-scale alignment, stabilization, and registration in one or more dimensions 有权
    在一个或多个维度上实时，活跃的波段尺度对齐，稳定和注册

    公开(公告)号：US07928409B2

    公开(公告)日：2011-04-19

    申请号：US11545498

    申请日：2006-10-11

    申请人： Thomas T. Perkins ,  Gavin M. King ,  Ashley R. Carter

    发明人： Thomas T. Perkins ,  Gavin M. King ,  Ashley R. Carter

    IPC分类号： G03F9/00

    CPC分类号： G01Q40/02 ,  G01Q10/065

    摘要： A method and apparatus for aligning, stabilizing and registering two or more structures in one or more dimensional space with picometer-scale precision. Low noise laser light is scattered by at least one or more structure or fiducial marks. One mark may be coupled to each structure to be positioned. The light which has been scattered off the fiducial marks is collected in a photo-sensitive device which enables real-time high-bandwidth position sensing of each structure. One or more of the structures should be mounted on a stage, and the stage can move in either one or more dimensions. The photo-sensitive device generates signals in response to the scattered light received, and the signals are used to modulate the position of the stage in a feedback loop.

    摘要翻译： 一种用于在一个或多个维度空间中对准，稳定和对准两个或多个结构的方法和装置，其尺寸精度为皮秒。 低噪声激光被至少一个或多个结构或基准标记分散。 一个标记可以联接到要定位的每个结构。 已经从基准标记分散的光被收集在能够实现每个结构的实时高带宽位置感测的光敏装置中。 一个或多个结构应安装在舞台上，舞台可以在一个或多个维度上移动。 光敏装置响应于所接收的散射光产生信号，并且该信号用于在反馈回路中调制载物台的位置。

    Real-time, active picometer-scale alignment, stabilization, and registration in one or more dimensions
    2.
    发明申请
    Real-time, active picometer-scale alignment, stabilization, and registration in one or more dimensions 有权
    在一个或多个维度上实时，活跃的波段尺度对齐，稳定和注册

    公开(公告)号：US20100257641A1

    公开(公告)日：2010-10-07

    申请号：US11545498

    申请日：2006-10-11

    申请人： Thomas T. Perkins ,  Gavin M. King ,  Ashley R. Carter

    发明人： Thomas T. Perkins ,  Gavin M. King ,  Ashley R. Carter

    IPC分类号： G01Q10/00 ,  G12B13/00

    CPC分类号： G01Q40/02 ,  G01Q10/065

    摘要： A method and apparatus for aligning, stabilizing and registering two or more structures in one or more dimensional space with picometer-scale precision. Low noise laser light is scattered by at least one or more structure or fiducial marks. One mark may be coupled to each structure to be positioned. The light which has been scattered off the fiducial marks is collected in a photo-sensitive device which enables real-time high-bandwidth position sensing of each structure. One or more of the structures should be mounted on a stage, and the stage can move in either one or more dimensions. The photo-sensitive device generates signals in response to the scattered light received, and the signals are used to modulate the position of the stage in a feedback loop.

    摘要翻译： 一种用于在一个或多个维度空间中对准，稳定和对准两个或多个结构的方法和装置，其尺寸精度为皮秒。 低噪声激光被至少一个或多个结构或基准标记分散。 一个标记可以联接到要定位的每个结构。 已经从基准标记分散的光被收集在能够实现每个结构的实时高带宽位置感测的光敏装置中。 一个或多个结构应安装在舞台上，舞台可以在一个或多个维度上移动。 光敏装置响应于所接收的散射光产生信号，并且该信号用于在反馈回路中调制载物台的位置。

    Laser guided tip approach with 3D registration to a surface
    4.
    发明授权
    Laser guided tip approach with 3D registration to a surface 有权
    激光引导方法，3D对准表面

    公开(公告)号：US08387158B2

    公开(公告)日：2013-02-26

    申请号：US12806086

    申请日：2010-08-05

    申请人： Thomas T Perkins ,  Gavin M King ,  Ashley R Carter

    发明人： Thomas T Perkins ,  Gavin M King ,  Ashley R Carter

    IPC分类号： G01Q20/02

    CPC分类号： G01Q20/02 ,  G01Q10/06

    摘要： The present invention relates to a method of rapidly and repeatably bringing sharp objects into close proximity to a particular region of interest of a sample with high precision and accuracy in two or three dimensions using a laser guided tip approach with three dimensional registration to the surface.

    摘要翻译： 本发明涉及一种使用具有三维配准到表面的激光引导尖端方法，以高精度和精确度将尖锐物体快速且可重复地以高精度和精确度将锋利物体紧密地附接到样品的特定感兴趣区域的方法。

    Nanotube Processing Employing Solid-Condensed-Gas-Layers
    6.
    发明申请
    Nanotube Processing Employing Solid-Condensed-Gas-Layers 有权
    使用固体 - 气相层的纳米管加工

    公开(公告)号：US20090179005A1

    公开(公告)日：2009-07-16

    申请号：US12409580

    申请日：2009-03-24

    申请人： Jene A. Golovchenko ,  Gavin M. King ,  Gregor M. Schurmann ,  Daniel Branton

    发明人： Jene A. Golovchenko ,  Gavin M. King ,  Gregor M. Schurmann ,  Daniel Branton

    IPC分类号： C23F1/00

    CPC分类号： C23C14/06 ,  B82Y10/00 ,  C23C14/5873 ,  H01J37/3005 ,  H01J2237/31732 ,  H01J2237/3174 ,  H01L21/02238 ,  H01L21/0332 ,  H01L21/0337 ,  H01L21/30604 ,  H01L21/3065 ,  H01L21/31662 ,  H01L21/3185 ,  Y10S977/856 ,  Y10S977/857 ,  Y10S977/888 ,  Y10S977/89 ,  Y10S977/891

    摘要： In a method for processing a nanotube, a vapor is condensed to a solid condensate layer on a surface of the nanotube and then at least one selected region of the condensate layer is locally removed by directing a beam of energy at the selected region. The nanotube can be processed with at least a portion of the solid condensate layer maintained on the nanotube surface and thereafter the solid condensate layer removed. Nanotube processing can include, e.g., depositing a material layer on an exposed nanotube surface region where the condensate layer was removed. After forming a solid condensate layer, an electron beam can be directed at a selected region along a nanotube length corresponding to a location for cutting the nanotube, to locally remove the condensate layer at the region, and an ion beam can be directed at the selected region to cut the nanotube at the selected region.

    摘要翻译： 在用于处理纳米管的方法中，蒸汽被冷凝到纳米管表面上的固体冷凝物层，然后通过在所选择的区域引导能量束来局部去除冷凝物层的至少一个选定区域。 纳米管可以用保持在纳米管表面上的固体冷凝物层的至少一部分进行处理，然后除去固体冷凝物层。 纳米管加工可以包括例如在去除冷凝物层的暴露的纳米管表面区域上沉积材料层。 在形成固体冷凝物层之后，电子束可以沿着与用于切割纳米管的位置相对应的纳米管长度的选定区域被引导，以在该区域局部移除冷凝物层，并且离子束可以被引导到所选择的 区域以在所选区域切割纳米管。