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公开(公告)号:US07086839B2
公开(公告)日:2006-08-08
申请号:US10669495
申请日:2003-09-23
申请人: Thomas W. Kenny , James Gill Shook , Shulin Zeng , Daniel J. Lenehan , Juan Santiago , James Lovette
发明人: Thomas W. Kenny , James Gill Shook , Shulin Zeng , Daniel J. Lenehan , Juan Santiago , James Lovette
IPC分类号: F04F11/00
CPC分类号: F04B19/006 , F04B17/00 , F28D15/00 , F28F2250/08
摘要: An electroosmotic pump and method of manufacturing thereof. The pump having a porous structure adapted to pump fluid therethrough, the porous structure comprising a first side and a second side, the porous structure having a plurality of fluid channels therethrough, the first side having a first continuous layer of electrically conductive porous material deposited thereon and the second side having a second continuous layer of electrically conductive porous material deposited thereon, the first second layers coupled to a power source, wherein the power source supplies a voltage differential between the first layer and the second layer to drive fluid through the porous structure at a desired flow rate. The continuous layer of electrically conductive porous material is preferably a thin film electrode, although a multi-layered electrode, screen mesh electrode and beaded electrode are alternatively contemplated. The thickness of the continuous layer is in range between and including 200 Angstroms and 10,000 Angstroms.
摘要翻译: 电渗泵及其制造方法。 所述泵具有适于泵送流体的多孔结构,所述多孔结构包括第一侧和第二侧,所述多孔结构具有穿过其中的多个流体通道,所述第一侧具有沉积在其上的第一连续导电多孔材料层 并且所述第二侧具有沉积在其上的第二连续导电多孔材料层,所述第一第二层耦合到电源,其中所述电源在所述第一层和所述第二层之间提供电压差以驱动流体穿过所述多孔结构 以期望的流速。 导电性多孔材料的连续层优选为薄膜电极,但也可以考虑多层电极,筛网电极和串珠电极。 连续层的厚度在200埃和10,000埃之间的范围内。
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公开(公告)号:US07449122B2
公开(公告)日:2008-11-11
申请号:US10968376
申请日:2004-10-18
申请人: David Corbin , Kenneth Goodson , Thomas Kenny , Juan Santiago , Shulin Zeng
发明人: David Corbin , Kenneth Goodson , Thomas Kenny , Juan Santiago , Shulin Zeng
IPC分类号: F04B1/00
CPC分类号: F04B17/00 , F04B19/006
摘要: An electrokinetic pump for pumping a liquid includes a pumping body having a plurality of narrow, short and straight pore apertures for channeling the liquid through the body. A pair of electrodes for applying a voltage differential are formed on opposing surfaces of the pumping body at opposite ends of the pore apertures. The pumping body is formed on a support structure to maintain a mechanical integrity of the pumping body. The pump can be fabricated using conventional semiconductor processing steps. The pores are preferably formed using plasma etching. The structure is oxidized to insulate the structure and also narrow the pores. A support structure is formed by etching a substrate and removing an interface oxide layer. Electrodes are formed to apply a voltage potential across the pumping body. Another method of fabricating an electrokinetic pump includes providing etch stop alignment marks so that the etch step self-terminates.
摘要翻译: 用于泵送液体的电动泵包括具有多个窄的,短的和直的孔隙的泵送体,用于将液体引导通过身体。 用于施加电压差的一对电极形成在孔隙的相对端处的泵体的相对表面上。 泵体形成在支撑结构上以保持泵体的机械完整性。 泵可以使用常规的半导体处理步骤制造。 优选使用等离子体蚀刻形成孔。 该结构被氧化以使结构绝缘并且还使孔变窄。 通过蚀刻衬底并除去界面氧化物层形成支撑结构。 形成电极以在泵体上施加电压电位。 制造电动泵的另一种方法包括提供蚀刻停止对准标记,使得蚀刻步骤自我终止。
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公开(公告)号:US20050042110A1
公开(公告)日:2005-02-24
申请号:US10366121
申请日:2003-02-12
申请人: David Corbin , Kenneth Goodson , Thomas Kenny , Juan Santiago , Shulin Zeng
发明人: David Corbin , Kenneth Goodson , Thomas Kenny , Juan Santiago , Shulin Zeng
CPC分类号: F04B17/00 , F04B19/006
摘要: An electrokinetic pump for pumping a liquid includes a pumping body having a plurality of narrow, short and straight pore apertures for channeling the liquid through the body. A pair of electrodes for applying a voltage differential are formed on opposing surfaces of the pumping body at opposite ends of the pore apertures. The pumping body is formed on a support structure to maintain a mechanical integrity of the pumping body. The pump can be fabricated using conventional semiconductor processing steps. The pores are preferably formed using plasma etching. The structure is oxidized to insulate the structure and also narrow the pores. A support structure is formed by etching a substrate and removing an interface oxide layer. Electrodes are formed to apply a voltage potential across the pumping body. Another method of fabricating an electrokinetic pump includes providing etch stop alignment marks so that the etch step self-terminates.
摘要翻译: 用于泵送液体的电动泵包括具有多个窄的,短的和直的孔隙的泵送体,用于将液体引导通过身体。 用于施加电压差的一对电极形成在孔隙的相对端处的泵体的相对表面上。 泵体形成在支撑结构上以保持泵体的机械完整性。 泵可以使用常规的半导体处理步骤制造。 优选使用等离子体蚀刻形成孔。 该结构被氧化以使结构绝缘并且还使孔变窄。 通过蚀刻衬底并除去界面氧化物层形成支撑结构。 形成电极以在泵体上施加电压电位。 制造电动泵的另一种方法包括提供蚀刻停止对准标记,使得蚀刻步骤自我终止。
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公开(公告)号:US20050084385A1
公开(公告)日:2005-04-21
申请号:US10968376
申请日:2004-10-18
申请人: David Corbin , Kenneth Goodson , Thomas Kenny , Juan Santiago , Shulin Zeng
发明人: David Corbin , Kenneth Goodson , Thomas Kenny , Juan Santiago , Shulin Zeng
CPC分类号: F04B17/00 , F04B19/006
摘要: An electrokinetic pump for pumping a liquid includes a pumping body having a plurality of narrow, short and straight pore apertures for channeling the liquid through the body. A pair of electrodes for applying a voltage differential are formed on opposing surfaces of the pumping body at opposite ends of the pore apertures. The pumping body is formed on a support structure to maintain a mechanical integrity of the pumping body. The pump can be fabricated using conventional semiconductor processing steps. The pores are preferably formed using plasma etching. The structure is oxidized to insulate the structure and also narrow the pores. A support structure is formed by etching a substrate and removing an interface oxide layer. Electrodes are formed to apply a voltage potential across the pumping body. Another method of fabricating an electrokinetic pump includes providing etch stop alignment marks so that the etch step self-terminates.
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公开(公告)号:US06881039B2
公开(公告)日:2005-04-19
申请号:US10366121
申请日:2003-02-12
申请人: David Corbin , Kenneth Goodson , Thomas Kenny , Juan Santiago , Shulin Zeng
发明人: David Corbin , Kenneth Goodson , Thomas Kenny , Juan Santiago , Shulin Zeng
CPC分类号: F04B17/00 , F04B19/006
摘要: An electrokinetic pump for pumping a liquid includes a pumping body having a plurality of narrow, short and straight pore apertures for channeling the liquid through the body. A pair of electrodes for applying a voltage differential are formed on opposing surfaces of the pumping body at opposite ends of the pore apertures. The pumping body is formed on a support structure to maintain a mechanical integrity of the pumping body. The pump can be fabricated using conventional semiconductor processing steps. The pores are preferably formed using plasma etching. The structure is oxidized to insulate the structure and also narrow the pores. A support structure is formed by etching a substrate and removing an interface oxide layer. Electrodes are formed to apply a voltage potential across the pumping body. Another method of fabricating an electrokinetic pump includes providing etch stop alignment marks so that the etch step self-terminates.
摘要翻译: 用于泵送液体的电动泵包括具有多个窄的,短的和直的孔隙的泵送体,用于将液体引导通过身体。 用于施加电压差的一对电极形成在孔隙的相对端处的泵体的相对表面上。 泵体形成在支撑结构上以保持泵体的机械完整性。 泵可以使用常规的半导体处理步骤制造。 优选使用等离子体蚀刻形成孔。 该结构被氧化以使结构绝缘并且还使孔变窄。 通过蚀刻衬底并除去界面氧化物层形成支撑结构。 形成电极以在泵体上施加电压电位。 制造电动泵的另一种方法包括提供蚀刻停止对准标记,使得蚀刻步骤自我终止。
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公开(公告)号:US20050205241A1
公开(公告)日:2005-09-22
申请号:US11136793
申请日:2005-05-25
申请人: Kenneth Goodson , Chuan-Hua Chen , David Huber , Linan Jiang , Thomas Kenny , Jae-Mo Koo , Daniel Laser , James Mikkelsen , Juan Santiago , Evelyn Wang , Shulin Zeng , Lian Zhang
发明人: Kenneth Goodson , Chuan-Hua Chen , David Huber , Linan Jiang , Thomas Kenny , Jae-Mo Koo , Daniel Laser , James Mikkelsen , Juan Santiago , Evelyn Wang , Shulin Zeng , Lian Zhang
IPC分类号: B81B1/00 , F04B19/00 , F04F99/00 , F25D1/02 , F25D9/00 , F28D15/00 , H01L23/473 , H05K7/20 , F25B21/02 , F28F7/00
CPC分类号: H01L23/473 , F04B19/006 , F28D15/00 , F28F2260/02 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/45169 , H01L2224/48227 , H01L2224/73265 , H01L2225/06562 , H01L2924/01078 , H01L2924/01322 , H01L2924/09701 , H01L2924/10158 , H01L2924/10253 , H01L2924/1461 , H01L2924/3011 , H01L2924/00
摘要: Apparatus and methods according to the present invention utilize micropumps that are capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as well as the associated reduction in reliability. These micropumps are fabricated with materials and structures that improve performance, efficiency, and reduce weight and manufacturing cost relative to presently available micropumps. These micropumps also can allow for recapture of evolved gases and deposited materials, which may provide for long-term closed-loop operation. Apparatus and methods according to the present invention also allow active regulation of the temperature of the device through electrical control of the flow through the pump and can utilize multiple cooling loops to allow independent regulation of the spatial and temporal characteristics of the device temperature profiles. Novel enclosed microchannel structures are also described.
摘要翻译: 根据本发明的装置和方法利用能够在不移动机械部件的情况下产生高压和流动以及相关的不可接受的电和噪声噪声的产生以及相关的可靠性降低的微型泵。 这些微型泵用与目前可用的微型泵相比提高性能,效率以及降低重量和制造成本的材料和结构制造。 这些微型泵还可以重新捕获可能提供长期闭环操作的演化气体和沉积材料。 根据本发明的装置和方法还允许通过电流控制通过泵的流动来主动调节装置的温度,并且可以利用多个冷却回路来允许独立调节装置温度曲线的空间和时间特性。 还描述了新的封闭微通道结构。
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公开(公告)号:US20050098299A1
公开(公告)日:2005-05-12
申请号:US10933068
申请日:2004-09-02
申请人: Kenneth Goodson , Chuan-Hua Chen , David Huber , Linan Jiang , Thomas Kenny , Jae-Mo Koo , Daniel Laser , James Mikkelsen , Juan Santiago , Evelyn Wang , Shulin Zeng , Lian Zhang
发明人: Kenneth Goodson , Chuan-Hua Chen , David Huber , Linan Jiang , Thomas Kenny , Jae-Mo Koo , Daniel Laser , James Mikkelsen , Juan Santiago , Evelyn Wang , Shulin Zeng , Lian Zhang
IPC分类号: B81B1/00 , F04B19/00 , F04F99/00 , F25D1/02 , F25D9/00 , F28D15/00 , H01L23/473 , H05K7/20 , F28F7/00
CPC分类号: H01L23/473 , F04B19/006 , F28D15/00 , F28F2260/02 , H01L2224/16225 , H01L2224/32145 , H01L2224/32225 , H01L2224/45169 , H01L2224/48227 , H01L2224/73265 , H01L2225/06562 , H01L2924/01078 , H01L2924/01322 , H01L2924/09701 , H01L2924/10158 , H01L2924/10253 , H01L2924/1461 , H01L2924/3011 , H01L2924/00
摘要: Apparatus and methods according to the present invention preferably utilize electroosmotic pumps that are capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as well as the associated reduction in reliability. These electroosmotic pumps are preferably fabricated with materials and structures that improve performance, efficiency, and reduce weight and manufacturing cost relative to presently available micropumps. These electroosmotic pumps also preferably allow for recapture of evolved gases and deposited materials, which may provide for long,-term closed-loop operation. Apparatus and methods according to the present invention also allow active regulation of the temperature of the device through electrical control of the flow through the pump and can utilize multiple cooling loops to allow independent regulation of the special and temporal characteristics of the device temperature profiles. Novel microchannel structures are also described.
摘要翻译: 根据本发明的装置和方法优选地利用电渗泵,其能够在不移动机械部件的情况下产生高压和流动,并且相关联地产生不可接受的电和噪声噪声以及相关联的可靠性降低。 这些电渗泵优选地由相对于目前可用的微量泵提高性能,效率以及降低重量和制造成本的材料和结构来制造。 这些电渗泵还优选地允许重新产生放出的气体和沉积的材料,这可以提供长时间的闭环操作。 根据本发明的装置和方法还允许通过电流控制通过泵的流动来主动调节装置的温度,并且可以利用多个冷却回路来允许独立调节装置温度曲线的特殊和时间特性。 还描述了新颖的微通道结构。
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公开(公告)号:US20120228141A1
公开(公告)日:2012-09-13
申请号:US13413161
申请日:2012-03-06
CPC分类号: B01D43/00 , B01D57/02 , G01N27/44769
摘要: The present invention provides a mechanism for separating or isolating charged particles under the influence of an electric field without metal electrodes being in direct contact with the sample solution. The metal electrodes normally in contact with the sample are replaced with high conductivity fluid electrodes situated parallel and adjacent to the sample. When the fluid electrodes transmit the electric field across the sample, particles within the sample migrate according to their electrophoretic mobility.
摘要翻译: 本发明提供了一种用于在没有金属电极与样品溶液直接接触的电场的影响下分离或分离带电粒子的机理。 通常与样品接触的金属电极被替换为与样品平行且相邻的高导电性流体电极。 当流体电极跨越样品传播电场时,样品内的颗粒根据其电泳迁移率而迁移。
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公开(公告)号:US07799453B2
公开(公告)日:2010-09-21
申请号:US10912527
申请日:2004-08-04
申请人: Juan Santiago , Jonathan Posner , Friedrich B. Prinz , Tibor Fabian , John Eaton , Suk-Won Cha , Cullen Buie , Daejoogn Kim , Hideaki Tsuru , Jun Sasahara , Tadahiro Kubota , Yuji Saito
发明人: Juan Santiago , Jonathan Posner , Friedrich B. Prinz , Tibor Fabian , John Eaton , Suk-Won Cha , Cullen Buie , Daejoogn Kim , Hideaki Tsuru , Jun Sasahara , Tadahiro Kubota , Yuji Saito
CPC分类号: H01M8/04164 , F04B17/00 , H01M8/04126 , H01M8/04186 , H01M8/04291 , H01M8/04447 , H01M8/04559 , H01M8/04589 , H01M8/04798 , H01M8/04917 , H01M8/1011 , Y02E60/523
摘要: Water flooding at the cathode of a fuel cell is a common problem in fuel cells. By integrating an electroosmotic (EO) pump to remove product water from the cathode area, fuel cell power can be increased. Integration of EO pumps transforms the designs of air channel and air breathing cathodes, reducing air pumping power loads and increasing oxidant transport. Hydration of gas streams, management of liquid reactants, and oxidant delivery can also be accomplished with integrated electroosmotic pumps. Electroosmotic pumps have no moving parts, can be integrated as a layer of the fuel cell, and scale with centimeter to micron scale fuel cells.
摘要翻译: 在燃料电池的阴极处的水驱是在燃料电池中的常见问题。 通过集成电渗(EO)泵以从阴极区域去除产物水,可以增加燃料电池的功率。 EO泵的整合改变了空气通道和空气呼吸阴极的设计,减少了空气泵送功率负荷和增加了氧化剂运输。 气流的水化,液体反应物的管理和氧化剂输送也可以用集成的电渗泵完成。 电渗泵没有移动部件,可以作为燃料电池的一层集成,并用厘米到微米级的燃料电池进行刻度。
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公开(公告)号:US20080032169A1
公开(公告)日:2008-02-07
申请号:US11807228
申请日:2007-05-24
申请人: Tibor Fabian , Shawn Litster , Juan Santiago , Cullen Bule , Jun Sasahara , Tadahiro Kubota
发明人: Tibor Fabian , Shawn Litster , Juan Santiago , Cullen Bule , Jun Sasahara , Tadahiro Kubota
CPC分类号: H01M8/023 , H01M8/0245 , H01M8/0258 , H01M8/0267 , H01M8/04074 , H01M8/04126 , H01M8/04171 , H01M8/04291 , H01M8/241 , Y10T29/49108
摘要: A method and device for fuel cell heat and water management is provided. A thermally and electrically conductive hydrophilic heat and mass transport element is provided to the fuel cell spanning from inside to outside the cell. The transport element is deposited between current collector and gas diffusion layers, where heat is transported along the transport element from an interior portion of the element inside the cell to an exterior portion of the element outside the cell. Liquid water is transported along the element into or out of the cell, and heat is removed from the exterior portion by any combination of radiation, free convection and forced convection, and where the liquid water is removed from the exterior portion by any combination of convection driven evaporation and advection. The water is added to the cell from the exterior to the interior by any combination of advection and capillary wicking.
摘要翻译: 提供了一种用于燃料电池热水管理的方法和装置。 向导电池内部和外部的燃料电池提供导热和导电的亲水热传质元件。 传输元件沉积在集流体和气体扩散层之间,其中热量沿着传输元件从电池内的元件的内部传送到电池单元外部的外部部分。 液体水沿着元件进入或离开电池,并且通过辐射,自由对流和强制对流的任何组合从外部部分去除热量,并且其中液体水通过对流的任何组合从外部部分去除 驱动蒸发和平流。 通过对流和毛细管芯吸的任何组合将水从外部添加到细胞中。
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