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    Evaporation donor substrate, method for manufacturing the same, and method for manufacturing light-emitting device
    1.
    发明授权
    Evaporation donor substrate, method for manufacturing the same, and method for manufacturing light-emitting device 有权
    蒸镀供体基板及其制造方法以及发光装置的制造方法

    公开(公告)号：US09159923B2

    公开(公告)日：2015-10-13

    申请号：US12338449

    申请日：2008-12-18

    申请人： Kohei Yokoyama ,  Yosuke Sato ,  Tomoya Aoyama ,  Rena Takahashi

    发明人： Kohei Yokoyama ,  Yosuke Sato ,  Tomoya Aoyama ,  Rena Takahashi

    IPC分类号： B05D5/12 ,  H01L51/00 ,  C23C14/04

    CPC分类号： H01L51/0013 ,  C23C14/048 ,  Y10T428/24331

    摘要： An evaporation donor substrate that makes it possible to evaporate only a desired evaporation material in the case of performing deposition by an evaporation method. Thus, the use efficiency of an evaporation material can be increased resulting in reduction in production cost, and further a film with high uniformity can be deposited. The evaporation donor substrate can be obtained by forming a reflective layer having an opening over a substrate, forming a thermal insulation layer having a light-transmitting property separately over the substrate and the reflective layer, forming a light absorption layer over the thermal insulation layer, and forming a material layer over the light absorption layer.

    摘要翻译： 蒸发供体衬底，其可以通过蒸发法进行沉积的情况下仅蒸发所需的蒸发材料。 因此，可以提高蒸发材料的使用效率，从而降低生产成本，并且还可以沉积高均匀性的膜。 可以通过在基板上形成具有开口的反射层，在基板和反射层上分别形成具有透光性的隔热层，在绝热层上形成光吸收层， 并在光吸收层上形成材料层。

    Method of manufacturing light-emitting device, and evaporation donor substrate
    3.
    发明授权
    Method of manufacturing light-emitting device, and evaporation donor substrate 有权
    制造发光装置的方法和蒸发供体基板

    公开(公告)号：US08153201B2

    公开(公告)日：2012-04-10

    申请号：US12254966

    申请日：2008-10-21

    申请人： Tomoya Aoyama ,  Yosuke Sato ,  Kohei Yokoyama ,  Rena Takahashi

    发明人： Tomoya Aoyama ,  Yosuke Sato ,  Kohei Yokoyama ,  Rena Takahashi

    IPC分类号： H01L51/50 ,  H01L51/56

    CPC分类号： H01L51/0013 ,  B41M5/382 ,  B41M5/38242 ,  C23C14/048 ,  H01L51/0037 ,  H01L51/0052 ,  H01L51/0059 ,  H01L51/007 ,  H01L51/0078 ,  H01L51/5012 ,  H01L51/5048 ,  H01L51/5088 ,  Y10T428/24331 ,  Y10T428/31504

    摘要： The present invention provides a method of manufacturing a light-emitting device and an evaporation donor substrate, by which the precision of patterning of an EL layer of each color can be improved in manufacture of a full color flat panel display using emission colors of red, green, and blue. A first substrate which includes a reflective layer including an opening portion, a heat insulating layer including an opening portion in a position overlapped with the opening portion of the reflective layer over the reflective layer, a light absorption layer covering the opening portion of the reflective layer and the opening portion of the heat insulating layer over the heat insulating layer, and a material layer over the light absorption layer is used. While one surface of the first substrate is disposed close to a deposition target surface of a second substrate, the first substrate is irradiated with light from the other surface of the first substrate. The irradiation light is absorbed in the light absorption layer in the position overlapped with the opening portion of the reflective layer to heat an evaporation material. The heated evaporation material is evaporated onto the second substrate.

    摘要翻译： 本发明提供一种制造发光器件和蒸发施主衬底的方法，通过该方法可以在使用红色发光颜色的全色平板显示器的制造中提高每种颜色的EL层的图案化精度， 绿色和蓝色。 1.一种第一基板，包括具有开口部的反射层，在所述反射层上与所述反射层的开口部重叠的位置的开口部的绝热层，覆盖所述反射层的开口部的光吸收层 隔热层上的绝热层的开口部分和光吸收层上的材料层。 虽然第一基板的一个表面设置成靠近第二基板的沉积目标表面，但是第一基板被来自第一基板的另一个表面的光照射。 照射光在与反射层的开口部分重叠的位置处吸收在光吸收层中以加热蒸发材料。 加热的蒸发材料蒸发到第二基底上。

    Evaporation donor substrate and method for manufacturing light-emitting device
    5.
    发明授权
    Evaporation donor substrate and method for manufacturing light-emitting device 有权
    蒸镀供体基板及其制造方法

    公开(公告)号：US08425974B2

    公开(公告)日：2013-04-23

    申请号：US12272034

    申请日：2008-11-17

    申请人： Rena Takahashi ,  Yosuke Sato ,  Kohei Yokoyama ,  Tomoya Aoyama

    发明人： Rena Takahashi ,  Yosuke Sato ,  Kohei Yokoyama ,  Tomoya Aoyama

    IPC分类号： B05D5/12 ,  B41M5/40

    CPC分类号： B32B3/10 ,  B32B3/12 ,  B32B3/30 ,  B32B7/12 ,  B32B15/043 ,  B32B15/08 ,  B32B27/281 ,  B32B27/304 ,  B32B27/308 ,  B32B27/34 ,  B32B27/36 ,  B32B2262/101 ,  B32B2307/206 ,  B32B2307/416 ,  B32B2457/20 ,  C23C14/048 ,  H01L51/0013 ,  Y10T428/24339

    摘要： A first supporting substrate on a front surface of which a reflective layer having an opening is formed and a second supporting substrate on a front surface of which a light absorption layer patterned into island or stripe shapes and a material layer over the light absorption layer are formed are prepared, the first and second supporting substrates are disposed so that the opening of the reflective layer and the light absorption layer overlap with each other and the reflective layer is in contact with a back surface of the second supporting substrate, the second supporting substrate and a deposition target substrate are disposed so that the front surface of the second supporting substrate faces the deposition target substrate, and the material layer is attached to the deposition target substrate by irradiating the back surface of the first supporting substrate with light and by sublimating the material layer.

    摘要翻译： 在其表面上形成具有开口的反射层的第一支撑基板和在其表面上形成图案化为岛状或条形的光吸收层和在光吸收层上的材料层的第二支撑基板 第一和第二支撑基板被布置成使得反射层和光吸收层的开口彼此重叠，并且反射层与第二支撑基板，第二支撑基板和第二支撑基板的背面接触 设置沉积靶基板使第二支撑基板的前表面面向沉积靶基板，并且通过用光照射第一支撑基板的背面并通过升华材料将材料层附着到沉积靶基板 层。

    Method of Manufacturing Light-Emitting Device, and Evaporation Donor Substrate
    7.
    发明申请
    Method of Manufacturing Light-Emitting Device, and Evaporation Donor Substrate 有权
    制造发光装置和蒸发供体基板的方法

    公开(公告)号：US20090104835A1

    公开(公告)日：2009-04-23

    申请号：US12254966

    申请日：2008-10-21

    申请人： Tomoya Aoyama ,  Yosuke Sato ,  Kohei Yokoyama ,  Rena Takahashi

    发明人： Tomoya Aoyama ,  Yosuke Sato ,  Kohei Yokoyama ,  Rena Takahashi

    IPC分类号： H01J9/00 ,  B32B9/00

    CPC分类号： H01L51/0013 ,  B41M5/382 ,  B41M5/38242 ,  C23C14/048 ,  H01L51/0037 ,  H01L51/0052 ,  H01L51/0059 ,  H01L51/007 ,  H01L51/0078 ,  H01L51/5012 ,  H01L51/5048 ,  H01L51/5088 ,  Y10T428/24331 ,  Y10T428/31504

    摘要： The present invention provides a method of manufacturing a light-emitting device and an evaporation donor substrate, by which the precision of patterning of an EL layer of each color can be improved in manufacture of a full color flat panel display using emission colors of red, green, and blue. A first substrate which includes a reflective layer including an opening portion, a heat insulating layer including an opening portion in a position overlapped with the opening portion of the reflective layer over the reflective layer, a light absorption layer covering the opening portion of the reflective layer and the opening portion of the heat insulating layer over the heat insulating layer, and a material layer over the light absorption layer is used. While one surface of the first substrate is disposed close to a deposition target surface of a second substrate, the first substrate is irradiated with light from the other surface of the first substrate. The irradiation light is absorbed in the light absorption layer in the position overlapped with the opening portion of the reflective layer to heat an evaporation material. The heated evaporation material is evaporated onto the second substrate.

    摘要翻译： 本发明提供一种制造发光器件和蒸发施主衬底的方法，通过该方法可以在使用红色发光颜色的全色平板显示器的制造中提高每种颜色的EL层的图案化精度， 绿色和蓝色。 1.一种第一基板，包括具有开口部的反射层，在所述反射层上与所述反射层的开口部重叠的位置的开口部的绝热层，覆盖所述反射层的开口部的光吸收层 隔热层上的绝热层的开口部分和光吸收层上的材料层。 虽然第一基板的一个表面设置成靠近第二基板的沉积目标表面，但是第一基板被来自第一基板的另一个表面的光照射。 照射光在与反射层的开口部分重叠的位置处吸收在光吸收层中以加热蒸发材料。 加热的蒸发材料蒸发到第二基底上。

    Evaporation Donor Substrate, Method for Manufacturing the Same, and Method for Manufacturing Light-Emitting Device
    8.
    发明申请
    Evaporation Donor Substrate, Method for Manufacturing the Same, and Method for Manufacturing Light-Emitting Device 有权
    蒸发供体基板，其制造方法以及制造发光装置的方法

    公开(公告)号：US20090169809A1

    公开(公告)日：2009-07-02

    申请号：US12338449

    申请日：2008-12-18

    申请人： Kohei Yokoyama ,  Yosuke Sato ,  Tomoya Aoyama ,  Rena Takahashi

    发明人： Kohei Yokoyama ,  Yosuke Sato ,  Tomoya Aoyama ,  Rena Takahashi

    IPC分类号： B32B3/10 ,  B05D5/06

    CPC分类号： H01L51/0013 ,  C23C14/048 ,  Y10T428/24331

    摘要： An evaporation donor substrate that makes it possible to evaporate only a desired evaporation material in the case of performing deposition by an evaporation method. Thus, the use efficiency of an evaporation material can be increased resulting in reduction in production cost, and further a film with high uniformity can be deposited. The evaporation donor substrate can be obtained by forming a reflective layer having an opening over a substrate, forming a thermal insulation layer having a light-transmitting property separately over the substrate and the reflective layer, forming a light absorption layer over the thermal insulation layer, and forming a material layer over the light absorption layer.

    摘要翻译： 蒸发供体衬底，其可以通过蒸发法进行沉积的情况下仅蒸发所需的蒸发材料。 因此，可以提高蒸发材料的使用效率，从而降低生产成本，并且还可以沉积高均匀性的膜。 可以通过在基板上形成具有开口的反射层，在基板和反射层上分别形成具有透光性的隔热层，在绝热层上形成光吸收层， 并在光吸收层上形成材料层。

    Evaporation Donor Substrate and Method for Manufacturing Light-Emitting Device
    9.
    发明申请
    Evaporation Donor Substrate and Method for Manufacturing Light-Emitting Device 有权
    蒸发供体基板和制造发光装置的方法

    公开(公告)号：US20090142510A1

    公开(公告)日：2009-06-04

    申请号：US12272034

    申请日：2008-11-17

    申请人： Rena Takahashi ,  Yosuke Sato ,  Kohei Yokohama ,  Tomoya Aoyama

    发明人： Rena Takahashi ,  Yosuke Sato ,  Kohei Yokohama ,  Tomoya Aoyama

    IPC分类号： B05D5/06 ,  B32B3/10

    CPC分类号： B32B3/10 ,  B32B3/12 ,  B32B3/30 ,  B32B7/12 ,  B32B15/043 ,  B32B15/08 ,  B32B27/281 ,  B32B27/304 ,  B32B27/308 ,  B32B27/34 ,  B32B27/36 ,  B32B2262/101 ,  B32B2307/206 ,  B32B2307/416 ,  B32B2457/20 ,  C23C14/048 ,  H01L51/0013 ,  Y10T428/24339

    摘要： A first supporting substrate on a front surface of which a reflective layer having an opening is formed and a second supporting substrate on a front surface of which a light absorption layer patterned into island or stripe shapes and a material layer over the light absorption layer are formed are prepared, the first and second supporting substrates are disposed so that the opening of the reflective layer and the light absorption layer overlap with each other and the reflective layer is in contact with a back surface of the second supporting substrate, the second supporting substrate and a deposition target substrate are disposed so that the front surface of the second supporting substrate faces the deposition target substrate, and the material layer is attached to the deposition target substrate by irradiating the back surface of the first supporting substrate with light and by sublimating the material layer.

    摘要翻译： 在其表面上形成具有开口的反射层的第一支撑基板和在其表面上形成图案化为岛状或条形的光吸收层和在光吸收层上的材料层的第二支撑基板 第一和第二支撑基板被布置成使得反射层和光吸收层的开口彼此重叠，并且反射层与第二支撑基板，第二支撑基板和第二支撑基板的背面接触 设置沉积靶基板使第二支撑基板的前表面面向沉积靶基板，并且通过用光照射第一支撑基板的背面并通过升华材料将材料层附着到沉积靶基板 层。

    Manufacturing method of light-emitting device
    10.
    发明授权
    Manufacturing method of light-emitting device 有权
    发光装置的制造方法

    公开(公告)号：US08367152B2

    公开(公告)日：2013-02-05

    申请号：US12054954

    申请日：2008-03-25

    申请人： Kohei Yokoyama ,  Hisao Ikeda ,  Yosuke Sato ,  Tomoya Aoyama ,  Takahiro Ibe ,  Yoshiharu Hirakata

    发明人： Kohei Yokoyama ,  Hisao Ikeda ,  Yosuke Sato ,  Tomoya Aoyama ,  Takahiro Ibe ,  Yoshiharu Hirakata

    IPC分类号： B05D5/12

    CPC分类号： H01L51/0011 ,  H01L51/0003 ,  H01L51/0013 ,  H01L51/56

    摘要： For a full-color flat panel display, demands for high definition, high aperture ratio and high reliability have been increasing. Therefore, increasing in the number of pixels and narrowing a pixel pitch have been major issues. According to the present invention, a layer including an organic compound is selectively formed with a light-exposure apparatus used in a photolithography technique without a resist mask. A material layer including a photopolymerization initiator, a material polymerized with the photopolymerization initiator, and an organic compound are formed on a plate, and then are exposed to light and selectively cured. A film-formation substrate is disposed so as to face the plate. The film-formation substrate or the material layer is heated so that the organic compound included in a region exposed to light or a region not exposed to light is evaporated to be selectively deposited on the surface of the film-formation substrate.

    摘要翻译： 对于全彩平板显示器，高清晰度，高开口率和高可靠性的要求越来越高。 因此，增加像素数量和缩小像素间距是主要问题。 根据本发明，使用不具有抗蚀剂掩模的光刻技术中使用的曝光装置选择性地形成包含有机化合物的层。 在板上形成包含光聚合引发剂，与光聚合引发剂聚合的材料和有机化合物的材料层，然后曝光并选择性固化。 成膜基板被设置成面对板。 加热成膜基板或材料层，使得暴露于光的区域中包含的有机化合物或不暴露于光的区域被蒸发以选择性地沉积在成膜基板的表面上。