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1.发明申请公开(公告)号：US20120275059A1
公开(公告)日：2012-11-01
申请号：US13351167
申请日：2012-01-16
申请人： Tomoyuki Maeda , Yousuke Isowaki , Akira Watanabe
发明人： Tomoyuki Maeda , Yousuke Isowaki , Akira Watanabe
CPC分类号： G11B5/7325 , G11B5/746 , G11B5/855
摘要： According to one embodiment, a magnetic recording medium includes a substrate, an auxiliary layer formed on the substrate, and at least one perpendicular magnetic recording layer formed on the auxiliary layer. The perpendicular magnetic recording layer includes a magnetic dot pattern. The perpendicular magnetic recording layer is made of an alloy material containing one element selected from iron and cobalt, and one element selected from platinum and palladium. This alloy material has the L10 structure, and is (001)-oriented. The auxiliary layer includes a dot-like first region covered with the magnetic dot pattern, and a second region not covered with the magnetic dot pattern. The first region is made of one metal selected from (100)-oriented nickel and (100)-oriented iron. The second region contains an oxide of the metal used in the first region.
摘要翻译： 根据一个实施例，磁记录介质包括基板，形成在基板上的辅助层以及形成在辅助层上的至少一个垂直磁记录层。 垂直磁记录层包括磁点图形。 垂直磁记录层由含有选自铁和钴的一种元素的合金材料和选自铂和钯的一种元素制成。 该合金材料具有L10结构，为（001）取向。 辅助层包括用磁点图案覆盖的点状第一区域和未被磁点图案覆盖的第二区域。 第一区域由选自（100）取向的镍和（100）取向的铁中的一种金属制成。 第二区域包含在第一区域中使用的金属的氧化物。
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2.发明申请MAGNETIC RECORDING MEDIUM, METHOD OF MANUFACTURING THE SAME, AND MAGNETIC RECORDING/REPRODUCTION APPARATUS 审中-公开磁记录介质，其制造方法和磁记录/再现装置公开(公告)号：US20120275058A1
公开(公告)日：2012-11-01
申请号：US13351127
申请日：2012-01-16
申请人： Tomoyuki Maeda , Yousuke Isowaki , Akira Watanabe
发明人： Tomoyuki Maeda , Yousuke Isowaki , Akira Watanabe
CPC分类号： G11B5/855 , G11B5/7325 , G11B5/746
摘要： According to one embodiment, a magnetic recording medium includes a substrate, an auxiliary layer formed on the substrate, and at least one perpendicular magnetic recording layer formed on the auxiliary layer. The perpendicular magnetic recording layer includes a magnetic dot pattern. The perpendicular magnetic recording layer is made of an alloy material containing one element selected from iron and cobalt, and one element selected from platinum and palladium. This alloy material has the L10 structure, and is (001)-oriented. The auxiliary layer includes a dot-like first region covered with the magnetic dot pattern, and a second region not covered with the magnetic dot pattern. The first region is made of a (100)-oriented nickel oxide. The second region contains nickel used in the first region as a main component.
摘要翻译： 根据一个实施例，磁记录介质包括基板，形成在基板上的辅助层以及形成在辅助层上的至少一个垂直磁记录层。 垂直磁记录层包括磁点图形。 垂直磁记录层由含有选自铁和钴的一种元素的合金材料和选自铂和钯的一种元素制成。 该合金材料具有L10结构，为（001）取向。 辅助层包括用磁点图案覆盖的点状第一区域和未被磁点图案覆盖的第二区域。 第一区域由（100）取向的氧化镍制成。 第二区域包含在第一区域中使用的镍作为主要成分。
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3.发明授权公开(公告)号：US08634153B2
公开(公告)日：2014-01-21
申请号：US13351167
申请日：2012-01-16
申请人： Tomoyuki Maeda , Yousuke Isowaki , Akira Watanabe
发明人： Tomoyuki Maeda , Yousuke Isowaki , Akira Watanabe
CPC分类号： G11B5/7325 , G11B5/746 , G11B5/855
摘要： According to one embodiment, a magnetic recording medium includes a substrate, an auxiliary layer formed on the substrate, and at least one perpendicular magnetic recording layer formed on the auxiliary layer. The perpendicular magnetic recording layer includes a magnetic dot pattern. The perpendicular magnetic recording layer is made of an alloy material containing one element selected from iron and cobalt, and one element selected from platinum and palladium. This alloy material has the L10 structure, and is (001)-oriented. The auxiliary layer includes a dot-like first region covered with the magnetic dot pattern, and a second region not covered with the magnetic dot pattern. The first region is made of one metal selected from (100)-oriented nickel and (100)-oriented iron. The second region contains an oxide of the metal used in the first region.
摘要翻译： 根据一个实施例，磁记录介质包括基板，形成在基板上的辅助层以及形成在辅助层上的至少一个垂直磁记录层。 垂直磁记录层包括磁点图形。 垂直磁记录层由含有选自铁和钴的一种元素的合金材料和选自铂和钯的一种元素制成。 该合金材料具有L10结构，为（001）取向。 辅助层包括用磁点图案覆盖的点状第一区域和未被磁点图案覆盖的第二区域。 第一区域由选自（100）取向的镍和（100）取向的铁中的一种金属制成。 第二区域包含在第一区域中使用的金属的氧化物。
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4.发明申请Patterned perpendicular magnetic recording medium and magnetic recording and reproducing apparatus 审中-公开图案垂直磁记录介质和磁记录和再现装置公开(公告)号：US20090201607A1
公开(公告)日：2009-08-13
申请号：US12320602
申请日：2009-01-29
摘要： It is made possible to provide a patterned perpendicular magnetic recording medium that has smaller write magnetic field and the variation of magnetic characteristics in the bit regions, generates fewer reversed magnetic domains in the position control information regions of the head, and has excellent thermal stability. A patterned perpendicular magnetic recording medium includes: a nonmagnetic substrate; a soft magnetic base layer formed on the nonmagnetic substrate; a nonmagnetic intermediate layer formed on the soft magnetic base layer; and a perpendicular magnetic recording layer formed on the nonmagnetic intermediate layer, and including a stacked structure of a CoPt-based crystalline film having a Pt content in the range of 5 atomic percent to 35 atomic percent and a rare-earth and transition metal alloy amorphous film formed on the CoPt-based crystalline film. The CoPt-based crystalline film and the rare-earth and transition metal alloy amorphous film are exchange-coupled.
摘要翻译： 可以提供具有较小写入磁场和位区域中的磁特性变化的图案化垂直磁记录介质，在头部的位置控制信息区域中产生较少的反向磁畴，并且具有优异的热稳定性。 图案化的垂直磁记录介质包括：非磁性基板; 形成在非磁性基板上的软磁性基层; 形成在软磁性基底层上的非磁性中间层; 以及形成在非磁性中间层上的垂直磁记录层，并且包括Pt含量在5原子％至35原子％范围内的CoPt基结晶膜的堆叠结构和稀土和过渡金属合金无定形 在基于CoPt的结晶膜上形成的膜。 基于CoPt的结晶膜和稀土和过渡金属合金非晶膜是交换耦合的。
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公开(公告)号：US20110235212A1
公开(公告)日：2011-09-29
申请号：US13007395
申请日：2011-01-14
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/855 , Y10T428/12465
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming on a magnetic recording layer a first hard mask, a second hard mask, a third hard mask and a resist, imprinting the resist with a stamper, removing a residue left in the recesses of the patterned resist, etching the third hard mask by use of the patterned resist as a mask, etching the second hard mask by use of the third hard mask as a mask, etching the first hard mask by use of the second hard mask as a mask, forming a pattern of the magnetic recording layer with ion beam irradiation, and removing the first hard mask by use of a remover liquid with higher reactivity to the metal material of the first hard mask than to a constituent element of the magnetic recording layer.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模，第三硬掩模和抗蚀剂，用压模压印抗蚀剂，除去留在 图案化抗蚀剂的凹部，通过使用图案化的抗蚀剂作为掩模蚀刻第三硬掩模，通过使用第三硬掩模作为掩模蚀刻第二硬掩模，通过使用第二硬掩模蚀刻第一硬掩模 作为掩模，通过离子束照射形成磁记录层的图案，并且通过使用对第一硬掩模的金属材料具有较高反应性的去除剂液体除去第一硬掩模，而不是磁记录的构成元件 层。
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公开(公告)号：US08333899B2
公开(公告)日：2012-12-18
申请号：US13007395
申请日：2011-01-14
IPC分类号： B44C1/22
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/855 , Y10T428/12465
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming on a magnetic recording layer a first hard mask, a second hard mask, a third hard mask and a resist, imprinting the resist with a stamper, removing a residue left in the recesses of the patterned resist, etching the third hard mask by use of the patterned resist as a mask, etching the second hard mask by use of the third hard mask as a mask, etching the first hard mask by use of the second hard mask as a mask, forming a pattern of the magnetic recording layer with ion beam irradiation, and removing the first hard mask by use of a remover liquid with higher reactivity to the metal material of the first hard mask than to a constituent element of the magnetic recording layer.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模，第三硬掩模和抗蚀剂，用压模压印抗蚀剂，除去留在 图案化抗蚀剂的凹部，通过使用图案化的抗蚀剂作为掩模蚀刻第三硬掩模，通过使用第三硬掩模作为掩模蚀刻第二硬掩模，通过使用第二硬掩模蚀刻第一硬掩模 作为掩模，通过离子束照射形成磁记录层的图案，并且通过使用对第一硬掩模的金属材料具有较高反应性的去除剂液体除去第一硬掩模，而不是磁记录的构成元件 层。
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公开(公告)号：US20120067843A1
公开(公告)日：2012-03-22
申请号：US13064301
申请日：2011-03-16
申请人： Akira Watanabe , Kaori Kimura , Yousuke Isowaki , Yoshiyuki Kamata , Naoko Kihara , Akira Kikitsu
发明人： Akira Watanabe , Kaori Kimura , Yousuke Isowaki , Yoshiyuki Kamata , Naoko Kihara , Akira Kikitsu
IPC分类号： C23F1/02
CPC分类号： H01L21/3086 , B82Y10/00 , G03F7/0002 , G03F7/165 , G03F7/168 , G11B5/743 , G11B5/82 , G11B5/855 , H01L21/0332 , H01L21/0337 , H01L21/3081
摘要： A method of forming a fine pattern according to an embodiment includes: forming a hard mask on a substrate; forming a mask reinforcing member on the hard mask; forming a di-block copolymer layer on the mask reinforcing member, the di-block copolymer layer comprising a sea-island structure; forming a pattern comprising a concave-convex structure in the di-block copolymer layer, with island portions of the sea-island structure being convex portions; and transferring the pattern onto the hard mask by performing etching on the mask reinforcing member and the hard mask, with a mask being the pattern formed in the di-block copolymer layer. The mask reinforcing member is comprised of a material having an etching speed that is higher than an etching speed for the hard mask and is lower than an etching speed for sea portions of the sea-island structure of the di-block copolymer layer.
摘要翻译： 根据实施例的形成精细图案的方法包括：在基底上形成硬掩模; 在所述硬掩模上形成掩模加强部件; 在掩模加强部件上形成二嵌段共聚物层，二嵌段共聚物层包含海岛结构体; 在所述二嵌段共聚物层中形成包括凹凸结构的图案，所述海岛结构的岛部是凸部; 并通过在掩模增强部件和硬掩模上进行蚀刻将图案转印到硬掩模上，其中掩模是在二嵌段共聚物层中形成的图案。 掩模加强部件由蚀刻速度高于硬掩模的蚀刻速度的材料构成，并且低于二嵌段共聚物层的海岛结构的海水部分的蚀刻速度。
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公开(公告)号：US07993536B2
公开(公告)日：2011-08-09
申请号：US12636610
申请日：2009-12-11
IPC分类号： B44C1/22
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist film on a magnetic recording layer, imprinting a stamper on the resist film to transfer patterns of recesses and protrusions, removing residues remained in recess of the patterned resist film, etching the second hard mask using the patterned resist film as a mask to transfer patterns of recesses and protrusions, etching the first hard mask using the patterned second hard mask as a mask to transfer patterns of recesses and protrusions, and deactivating magnetism of the magnetic recording layer exposed in the recesses together with removing the second hard mask by ion-beam etching.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模和抗蚀剂膜，在抗蚀剂膜上压印印模以转印凹凸图案，去除 残留物保留在图案化抗蚀剂膜的凹部中，使用图案化的抗蚀剂膜作为掩模蚀刻第二硬掩模以转移凹凸和突起的图案，使用图案化的第二硬掩模作为掩模蚀刻第一硬掩模以转移凹槽的图案 和突起，并且通过离子束蚀刻去除第二硬掩模，使暴露于凹部中的磁记录层的磁性失活。
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公开(公告)号：US08206602B2
公开(公告)日：2012-06-26
申请号：US12838349
申请日：2010-07-16
IPC分类号： B44C1/22
摘要： According to one embodiment, there is provided a method of manufacturing a magnetic recording medium, including forming a first hard mask including carbon as a main component, a second hard mask including a main component other than carbon and a resist on a magnetic recording layer, contacting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues in the recesses of the patterned resist, etching the second hard mask, etching the first hard mask, patterning the magnetic recording layer, and removing the first hard mask, the method further including, between etching the first hard mask and removing the first hard mask, removing the second hard mask remaining on the protrusions of the first hard mask, and removing a contaminating layer on a surface of the first hard mask by a mixed gas of oxygen-based gas and a fluorine compound.
摘要翻译： 根据一个实施例，提供了一种制造磁记录介质的方法，包括形成包括碳作为主要成分的第一硬掩模，包括除碳以外的主要成分的第二硬掩模和在磁记录层上的抗蚀剂， 将压模接触抗蚀剂以将突起和凹陷的图案转移到抗蚀剂，去除图案化抗蚀剂的凹部中的残留物，蚀刻第二硬掩模，蚀刻第一硬掩模，图案化磁记录层，以及去除第一硬 掩模，所述方法还包括在蚀刻所述第一硬掩模和去除所述第一硬掩模之间，去除残留在所述第一硬掩模的突起上的所述第二硬掩模，以及通过所述第一硬掩模的表面去除所述第一硬掩模的表面上的污染层 氧基气体和氟化合物的混合气体。
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10.发明申请公开(公告)号：US20110000880A1
公开(公告)日：2011-01-06
申请号：US12882113
申请日：2010-09-14
IPC分类号： B29C59/02
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses, and partially etching the magnetic recording layer in areas not covered with patterns of the resist used as masks by ion beam etching using a mixed gas of He and N2 as well as modifying a remainder of the magnetic recording layer to leave behind a nonmagnetic layer having a reduced thickness.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在磁记录层上形成抗蚀剂，将压模压印到抗蚀剂上以转印突起和凹陷的图案，以及在不覆盖图案的区域中部分蚀刻磁记录层 通过使用He和N2的混合气体的离子束蚀刻用作掩模的抗蚀剂以及修改磁记录层的剩余部分留下厚度减小的非磁性层。
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