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1.发明授权Backplane, printed wiring board, and/or multi-chip module-level optical interconnect layer having embedded air-gap technologies and methods of fabrication 失效具有嵌入式气隙技术和制造方法的背板，印刷电路板和/或多芯片模块级光学互连层公开(公告)号：US06788867B2
公开(公告)日：2004-09-07
申请号：US10734075
申请日：2003-12-11
申请人： Tony Mule′ , James D. Meindl , Paul Kohl , Stephen M. Schultz , Thomas K. Gaylord , Elias N. Glytsis , Ricardo Villalaz , Muhannad Bakir , Hollie Reed
发明人： Tony Mule′ , James D. Meindl , Paul Kohl , Stephen M. Schultz , Thomas K. Gaylord , Elias N. Glytsis , Ricardo Villalaz , Muhannad Bakir , Hollie Reed
IPC分类号： G02B600
CPC分类号： G02B6/136 , G02B6/12004 , G02B6/132 , G02B6/138
摘要： Optical interconnect layers and methods of fabrication thereof are described. In addition, the optical interconnect layers integrated into devices such as backplane (BP), printed wiring board (PWB), and multi-chip module (MCM) level devices are described. A representative optical interconnect layer includes a first cladding layer, a second cladding layer, one or more waveguides having a waveguide core and an air-gap cladding layer engaging a portion of waveguide core, wherein the first cladding layer and the second cladding layer engage the waveguide.
摘要翻译： 描述光学互连层及其制造方法。 此外，描述了集成到诸如背板（BP），印刷布线板（PWB）和多芯片模块（MCM）级装置的装置中的光学互连层。 代表性的光学互连层包括第一包层，第二包层，具有波导芯的一个或多个波导和与波导芯的一部分接合的气隙包层，其中第一包层和第二包层与 波导。
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2.发明授权Guided-wave optical interconnections embedded within a microelectronic wafer-level batch package 失效引导波光学互连嵌入在微电子晶圆级批量封装内公开(公告)号：US06785458B2
公开(公告)日：2004-08-31
申请号：US10074420
申请日：2002-02-11
申请人： Tony Mule′ , Chirag Patel , James D. Meindl , Thomas K. Gaylord , Elias N. Glytsis , Kevin P. Martin , Stephen M. Schultz , Muhannad Bakir , Hollie Reed , Paul Kohl
发明人： Tony Mule′ , Chirag Patel , James D. Meindl , Thomas K. Gaylord , Elias N. Glytsis , Kevin P. Martin , Stephen M. Schultz , Muhannad Bakir , Hollie Reed , Paul Kohl
IPC分类号： G02B610
CPC分类号： G02B6/43 , G02B6/10 , G02B6/12002 , G02B6/1221 , G02B6/132 , G02B6/136 , G02B6/34 , G02B2006/12107
摘要： Wafer-level electronic packages having waveguides and methods of fabricating chip-level electronic packages having waveguides are disclosed. A representative chip-level electronic package includes at least one waveguide having a waveguide core. In addition, another representative chip-level electronic package includes a waveguide having an air-gap cladding layer around a portion of the waveguide core. A representative method for fabricating a chip-level electronic package includes: providing a substrate having a passivation layer disposed on the substrate; disposing a waveguide core on a portion of the passivation layer; disposing a first sacrificial layer onto at least one portion of the passivation layer and the waveguide core; disposing an overcoat layer onto the passivation layer and the first sacrificial layer; and removing the first sacrificial layer to define an air-gap cladding layer within the overcoat polymer layer and around a portion of the waveguide core.
摘要翻译： 公开了具有波导的晶片级电子封装以及制造具有波导的芯片级电子封装的方法。 代表性的芯片级电子封装包括至少一个具有波导芯的波导。 此外，另一代表性的芯片级电子封装包括在波导芯的一部分周围具有气隙包覆层的波导。 用于制造芯片级电子封装的代表性方法包括：提供具有设置在基板上的钝化层的基板; 在所述钝化层的一部分上设置波导芯; 在所述钝化层和所述波导芯的至少一部分上设置第一牺牲层; 在所述钝化层和所述第一牺牲层上设置外涂层; 以及去除所述第一牺牲层以在所述外涂层聚合物层内和所述波导芯的一部分周围限定气隙包覆层。
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3.发明授权Guided-wave optical interconnections embedded within a microelectronic wafer-level batch package 失效引导波光学互连嵌入在微电子晶圆级批量封装内公开(公告)号：US06954576B2
公开(公告)日：2005-10-11
申请号：US10895685
申请日：2004-07-21
申请人： Tony Mule′ , Chirag Patel , James D. Meindl , Thomas K. Gaylord , Elias N. Glytsis , Kevin P. Martin , Stephen M. Schultz , Muhannad Bakir , Hollie Reed , Paul Kohl
发明人： Tony Mule′ , Chirag Patel , James D. Meindl , Thomas K. Gaylord , Elias N. Glytsis , Kevin P. Martin , Stephen M. Schultz , Muhannad Bakir , Hollie Reed , Paul Kohl
CPC分类号： G02B6/43 , G02B6/10 , G02B6/12002 , G02B6/1221 , G02B6/132 , G02B6/136 , G02B6/34 , G02B2006/12107
摘要： Wafer-level electronic packages having waveguides and methods of fabricating chip-level electronic packages having waveguides are disclosed. A representative chip-level electronic package includes at least one waveguide having a waveguide core. In addition, another representative chip-level electronic package includes a waveguide having an air-gap cladding layer around a portion of the waveguide core. A representative method for fabricating a chip-level electronic package includes: providing a substrate having a passivation layer disposed on the substrate; disposing a waveguide core on a portion of the passivation layer; disposing a first sacrificial layer onto at least one portion of the passivation layer and the waveguide core; disposing an overcoat layer onto the passivation layer and the first sacrificial layer; and removing the first sacrificial layer to define an air-gap cladding layer within the overcoat polymer layer and around a portion of the waveguide core.
摘要翻译： 公开了具有波导的晶片级电子封装以及制造具有波导的芯片级电子封装的方法。 代表性的芯片级电子封装包括至少一个具有波导芯的波导。 此外，另一代表性的芯片级电子封装包括在波导芯的一部分周围具有气隙包覆层的波导。 用于制造芯片级电子封装的代表性方法包括：提供具有设置在基板上的钝化层的基板; 在所述钝化层的一部分上设置波导芯; 在所述钝化层和所述波导芯的至少一部分上设置第一牺牲层; 在所述钝化层和所述第一牺牲层上设置外涂层; 以及去除所述第一牺牲层以在所述外涂层聚合物层内和所述波导芯的一部分周围限定气隙包覆层。
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4.发明授权Optical waveguides with embedded air-gap cladding layer and methods of fabrication thereof 有权具有嵌入式气隙包覆层的光波导及其制造方法公开(公告)号：US06807352B2
公开(公告)日：2004-10-19
申请号：US10074067
申请日：2002-02-11
申请人： Tony Mule′ , James D. Meindl , Thomas K. Gaylord , Elias N. Glytsis , Paul Kohl
发明人： Tony Mule′ , James D. Meindl , Thomas K. Gaylord , Elias N. Glytsis , Paul Kohl
IPC分类号： G02B610
CPC分类号： G02B6/136 , G02B6/10 , G02B6/1221 , G02B6/132 , G02B6/34 , G02B6/43 , G02B2006/12107
摘要： Waveguides having air-gap cladding layers and methods of fabricating waveguides having air-gap cladding layers are disclosed. A representative waveguide includes a waveguide core having an air-gap cladding layer engaging a portion of the waveguide core. In addition, a representative method of fabricating a waveguide having an air-gap cladding layer includes: providing a substrate having a lower cladding layer disposed on the substrate; disposing a waveguide core on a portion of the lower cladding layer; disposing a sacrificial layer onto at least one portion of the lower cladding layer and the waveguide core; disposing an overcoat layer onto the lower cladding layer and the sacrificial layer; and removing the sacrificial layer to define an air-gap cladding layer within the overcoat polymer layer and engaging a portion of the waveguide core.
摘要翻译： 公开了具有气隙包覆层的波导和制造具有气隙包覆层的波导的方法。 代表性的波导包括具有接合波导芯的一部分的气隙包覆层的波导芯。 另外，制造具有气隙包层的波导的代表性方法包括：提供具有设置在基板上的下包层的基板; 在所述下包层的一部分上设置波导芯; 在所述下包层和所述波导芯的至少一部分上设置牺牲层; 在下包层和牺牲层上设置外涂层; 以及去除所述牺牲层以在所述外涂层聚合物层内限定气隙包层并与所述波导芯的一部分接合。
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5.发明授权Optical waveguides formed from nano air-gap inter-layer dielectric materials and methods of fabrication thereof 失效由纳米气隙层间电介质材料形成的光波导及其制造方法公开(公告)号：US06947651B2
公开(公告)日：2005-09-20
申请号：US10142601
申请日：2002-05-10
申请人： Tony Mule′ , Paul Kohl , James D. Meindl , Agnes Padovani , Thomas K. Gaylord , Elias N. Glytsis , Sue Ann B. Allen
发明人： Tony Mule′ , Paul Kohl , James D. Meindl , Agnes Padovani , Thomas K. Gaylord , Elias N. Glytsis , Sue Ann B. Allen
CPC分类号： G02B6/13 , G02B6/124 , G02B6/138 , G02B2006/12104
摘要： Waveguides and methods of fabrication thereof are presented. A representative waveguide includes a waveguide core and a cladding layer, where the cladding layer surrounds the waveguide core. The waveguide core and cladding can be made of a host material having a plurality of nano-pores, wherein the nano-pores include a sacrificial material, and the sacrificial material can be selectively decomposed in both the core and cladding layers to form a plurality of nano air-gaps.
摘要翻译： 提出了波导及其制造方法。 代表性的波导包括波导芯和包覆层，其中包层围绕波导芯。 波导芯和包层可以由具有多个纳米孔的主体材料制成，其中纳米孔包括牺牲材料，牺牲材料可以在芯层和包覆层中选择性地分解形成多个 纳米气隙。
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6.发明授权Phase mask consisting of an array of multiple diffractive elements for simultaneous accurate fabrication of large arrays of optical couplers and method for making same 有权由多个衍射元件阵列组成的相位掩模，用于同时准确地制造大型光耦合器阵列及其制造方法公开(公告)号：US06606432B2
公开(公告)日：2003-08-12
申请号：US09848935
申请日：2001-05-03
IPC分类号： G02B634
CPC分类号： G02B5/1857
摘要： The present invention entails a phase mask for producing a plurality of volume gratings for use as optical couplers and method for creating the phase mask. The phase mask is produced by creating a plurality of volume gratings having predetermined characteristics which allow the phase mask, when excited by a coherent light wave, to produce a plurality of volume gratings in a recording material.
摘要翻译： 本发明涉及用于制造用作光耦合器的多个体积光栅的相位掩模和用于产生相位掩模的方法。 通过产生具有预定特性的多个体积光栅来产生相位掩模，所述特征允许相位掩模在被相干光波激发时在记录材料中产生多个体积光栅。
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公开(公告)号：US06285813B1
公开(公告)日：2001-09-04
申请号：US09165822
申请日：1998-10-02
IPC分类号： G02B634
CPC分类号： G02B6/124 , G02B6/12004 , G02B6/30 , G02B6/34
摘要： The present invention entails a volume grating for use as an optical coupler and method for creating the same which comprises a predetermined surface grating pattern having a decreasing surface grating period along a waveguide light propagation direction in the volume grating with a plurality of slanted grating fringes having a variable slant angle along the waveguide light propagation direction to focus coupled light in a first dimension with a predetermined light intensity profile along a grating-cover interface plane of the volume grating. In addition, the predetermined surface grating pattern further includes an increasing radius of curvature along the waveguide light propagation direction to focus the light in a second dimension. The present invention further comprises a system and method for designing the volume grating, as well as a system and method for designing an apparatus for fabricating the volume grating.
摘要翻译： 本发明涉及用作光耦合器的体光栅及其制造方法，其包括具有沿着波导光传播方向的具有减小的表面光栅周期的预定表面光栅图案，其中多个倾斜光栅条纹具有多个倾斜的光栅条纹， 沿着波导光传播方向的可变倾斜角，以沿着沿着光栅的光栅覆盖界面平面的第一维度具有预定的光强度分布。 此外，预定表面光栅图案还包括沿着波导光传播方向增加的曲率半径，以将光聚焦在第二维度上。 本发明还包括用于设计体积光栅的系统和方法，以及用于设计用于制造体积光栅的装置的系统和方法。
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公开(公告)号：US07085451B2
公开(公告)日：2006-08-01
申请号：US11220337
申请日：2005-09-06
申请人： Thomas K. Gaylord , Gregory D. Van Wiggeren , Donald D. Davis , Elias N. Glytsis , Emmanuel Anemogiannis
发明人： Thomas K. Gaylord , Gregory D. Van Wiggeren , Donald D. Davis , Elias N. Glytsis , Emmanuel Anemogiannis
CPC分类号： G02B6/02085 , G02B6/02142 , G02B6/022
摘要： The present invention relates to a type of optical fiber grating having an azimuthal refractive-index perturbation. The optical fiber includes a fiber grating that has a plurality of grating elements formed therein. At least one of the grating elements has a spatially varying index of refraction that varies azimuthally about the centerline of the optical fiber. The fiber grating acts as a band-stop optical spectral filter. In addition, since fiber-cladding modes are weakly-guided modes, their power can be easily dissipated by scattering, bending, stretching, and/or rotating the optical fiber. Multiple configurations of these gratings within an optical fiber are given. Methodologies are given for the fabrication of these gratings. Devices are presented which can dynamically attenuate, tune, switch, or modulate the wavelength spectral characteristics of an optical signal.
摘要翻译： 本发明涉及一种具有方位角折射率扰动的光纤光栅。 光纤包括在其中形成有多个光栅元件的光纤光栅。 光栅元件中的至少一个具有空间变化的折射率，其围绕光纤的中心线方位改变。 光纤光栅用作带阻光谱滤波器。 此外，由于光纤包层模式是弱引导模式，它们的功率可以通过散射，弯曲，拉伸和/或旋转光纤而容易地消散。 给出光纤内的这些光栅的多种配置。 给出了制造这些光栅的方法。 可以提供可以动态地衰减，调谐，切换或调制光信号的波长光谱特性的装置。
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9.发明授权
公开(公告)号：US4987458A
公开(公告)日：1991-01-22
申请号：US374476
申请日：1989-06-30
CPC分类号： B82Y10/00 , H01L29/122 , H01L29/152 , H01L29/155 , H01L29/86 , Y10S977/759 , Y10S977/761 , Y10S977/936
摘要： Continuously tunable, biased, semiconductor superlattice electron interference filter/emitter which can serve, for example, as a hot electron emitter in a ballistic transistor, provides energy selectivity for substantially ballistic electron wave propagation at electron energies above the superlattice potential barriers. The layers of the biased superlattice have alternatively high and low electron refractive indices wherein each layer is a quarter or half of an electron wavelength in thickness and wherein the quantum well barrier widths are adjusted in the direction of emission to provide the desired energy selectivity.
摘要翻译： 连续可调，偏置的半导体超晶格电子干涉滤光器/发射器，其可以用作例如在弹道晶体管中的热电子发射器，为超晶格势垒上方的电子能量提供基本弹道电子波传播的能量选择性。 偏置超晶格的层具有可选择的高和低电子折射率，其中每层是厚度的电子波长的四分之一或一半，并且其中量子阱势垒宽度在发射方向上被调整以提供期望的能量选择性。
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10.发明授权Optical fiber gratings with azimuthal refractive index perturbation, method of fabrication, and devices for tuning, attenuating, switching, and modulating optical signals 失效具有方位角折射率扰动的光纤光栅，制造方法以及用于调谐，衰减，开关和调制光信号的器件公开(公告)号：US06832023B1
公开(公告)日：2004-12-14
申请号：US09860790
申请日：2001-05-18
申请人： Thomas K. Gaylord , Gregory D. Van Wiggeren , Donald D. Davis , Elias N. Glytsis , Emmanuel Anemogiannis
发明人： Thomas K. Gaylord , Gregory D. Van Wiggeren , Donald D. Davis , Elias N. Glytsis , Emmanuel Anemogiannis
IPC分类号： G02B634
CPC分类号： G02B6/02085 , G02B6/02142 , G02B6/022
摘要： The present invention relates to a type of optical fiber grating having an azimuthal refractive-index perturbation. The optical fiber includes a fiber grating that has a plurality of grating elements formed therein. At least one of the grating elements has a spatially varying index of refraction that varies azimuthally about the centerline of the optical fiber. The fiber grating acts as a band-stop optical spectral filter. In addition, since fiber-cladding modes are weakly-guided modes, their power can be easily dissipated by scattering, bending, stretching, and/or rotating the optical fiber. Multiple configurations of these gratings within an optical fiber are given. Methodologies are given for the fabrication of these gratings. Devices are presented which can dynamically attenuate, tune, switch, or modulate the wavelength spectral characteristics of an optical signal.
摘要翻译： 本发明涉及一种具有方位角折射率扰动的光纤光栅。 光纤包括在其中形成有多个光栅元件的光纤光栅。 光栅元件中的至少一个具有空间变化的折射率，其围绕光纤的中心线方位改变。 光纤光栅用作带阻光谱滤波器。 此外，由于光纤包层模式是弱引导模式，它们的功率可以通过散射，弯曲，拉伸和/或旋转光纤而容易地消散。 给出光纤内的这些光栅的多种配置。 给出了制造这些光栅的方法。 可以提供可以动态地衰减，调谐，切换或调制光信号的波长光谱特性的装置。
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