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公开(公告)号：US06854956B2
公开(公告)日：2005-02-15
申请号：US10387058
申请日：2003-03-12
CPC分类号： F04D19/042 , F04D27/0292 , F04D29/601
摘要： A turbo-molecular pump has a main body and a pump case for covering the main body. A first flange is integrally formed with the pump case for connection to a second flange integrally with a vacuum chamber. The flange of the pump case and the flange of the vacuum chamber are integrally connected together with fastening bolts. A clamping structure separately clamps the first and second flanges together by surrounding a portion of each of the first and second flanges.
摘要翻译： 涡轮分子泵具有主体和用于覆盖主体的泵壳体。 第一凸缘与泵壳一体地形成，用于与真空室一体地连接到第二凸缘。 泵壳的法兰和真空室的法兰通过紧固螺栓一体连接在一起。 夹持结构通过围绕第一和第二凸缘中的每一个的一部分而将第一和第二凸缘分别夹紧在一起。
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公开(公告)号：US06824349B2
公开(公告)日：2004-11-30
申请号：US10294829
申请日：2002-11-14
IPC分类号： F04D1904
CPC分类号： F04D19/04 , F04D29/601
摘要： A vacuum pump is removably connected to the underside of a chamber for exhausting gas molecules from the chamber. The vacuum pump has a pump case having a flange extending circumferentially around a top portion thereof, a suction port and an exhaust port. Stator blades are fixedly mounted within the pump case, and a rotor is rotatably mounted in the pump case and has rotor blades alternately disposed with respect to the stator blades. A driving motor rotationally drives the rotor so that the rotating rotor blades coact with the stator blades to evacuate gas molecules from the chamber and pump the gas molecules from the suction port to the exhaust port. Bolt insertion holes are formed in the flange and each hole has a smaller diameter portion opening at a lower surface of the flange and a larger diameter portion opening at an upper surface of the flange which faces the underside of the chamber. Bolts extend through respective ones of the bolt insertion holes for removably connecting the flange of the pump case to the underside of the chamber, and buffer members are disposed in respective ones of the bolt insertion holes and surround at least a portion of the corresponding bolt in the region between the upper and lower surfaces of the flange.
摘要翻译： 真空泵可拆卸地连接到室的下侧，用于从室排出气体分子。 真空泵具有泵壳体，其具有围绕其顶部周向延伸的凸缘，吸入口和排气口。 定子叶片固定地安装在泵壳内，并且转子可旋转地安装在泵壳体中并具有相对于定子叶片交替设置的转子叶片。 驱动电动机旋转地驱动转子，使得旋转的转子叶片与定子叶片共同作用以从气室排出气体分子并将气体分子从吸入口泵送到排气口。 螺栓插入孔形成在凸缘中，并且每个孔在凸缘的下表面处具有较小的直径部分开口，并且在凸缘的上表面处面向腔室下侧的较大直径部分开口。 螺栓延伸通过相应的螺栓插入孔，用于将泵壳的凸缘可拆卸地连接到室的下侧，并且缓冲构件设置在相应的螺栓插入孔中并且围绕相应的螺栓的至少一部分 凸缘的上表面和下表面之间的区域。
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公开(公告)号：US06752588B2
公开(公告)日：2004-06-22
申请号：US10294828
申请日：2002-11-14
IPC分类号： F04D1904
CPC分类号： F04D29/644 , F04D19/04 , F04D27/0292 , F04D29/601
摘要： The present invention provides a vacuum pump in which a damaging torque produced when a rotating rotor crashes into the inner wall of a pump case, is prevented to transfer to a vacuum chamber so as to protect the vacuum chamber. Bolt-holes of flange portions, through which the vacuum pump and the vacuum chamber and also the pump case and a base member disposed below the pump case are fastened, respectively, are formed so as to have larger diameters than the shank diameters of corresponding bolts by 20% or more. With this arrangement, when the entire vacuum turns moved by the damaging torque, the pump case slips relative to the vacuum chamber and the base member by the gaps between the pump case-base member fastening bolt-holes and the pump case-base member fastening bolts. As a result, the damaging torque is absorbed and is prevented to transfer to the vacuum chamber.
摘要翻译： 本发明提供了一种真空泵，其中当旋转的转子撞到泵壳的内壁时产生的损坏扭矩被阻止转移到真空室以保护真空室。 分别固定真空泵和真空室以及泵壳和设置在泵壳下方的底座部件的法兰部分的螺栓孔形成为具有比相应螺栓的柄直径更大的直径 减少20％以上。 通过这种布置，当整个真空通过损坏转矩转动时，泵壳体通过泵壳体 - 基件构件紧固螺栓孔和泵壳体 - 基座构件紧固件之间的间隙相对于真空室和基座构件滑动 螺栓 结果，损坏的扭矩被吸收并被阻止转移到真空室。
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公开(公告)号：US07753661B2
公开(公告)日：2010-07-13
申请号：US10566774
申请日：2004-08-03
CPC分类号： F04D19/042 , F04D25/06 , F04D29/5806 , F04D29/584
摘要： A vacuum pump evacuates gas from a chamber by coaction of a rotationally driven rotor and a stator. An electrical equipment section that rotates the rotor is housed within a stator column integral with the stator. A cooling water pipe is buried in a wall of the stator column near the electrical equipment section. One end of the cooling water pipe branches into a plurality of water inlet ports and the other end branches into a plurality of water outlet ports. One pair of water inlet and outlet ports opens to the outside of the vacuum pump at a side surface of the stator column and another pair of water inlet and outlet ports opens to the outside at the underside of the stator column.
摘要翻译： 真空泵通过旋转驱动的转子和定子的共同作用从腔室排出气体。 旋转转子的电气设备部分容纳在与定子一体的定子柱内。 冷却水管埋在电气设备部分附近的定子柱的壁上。 冷却水管的一端分支成多个进水口，另一端分支成多个出水口。 一对水入口和出口在定子柱的侧面向真空泵的外部开口，另一对进水和出口通向定子柱下侧的外部。
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公开(公告)号：US06890145B2
公开(公告)日：2005-05-10
申请号：US10294826
申请日：2002-11-14
申请人： Masayoshi Takamine , Yasushi Maejima , Shinji Kawanishi , Yoshiyuki Sakaguchi , Satoshi Okudera , Kenji Kabata , Yutaka Inayoshi
发明人： Masayoshi Takamine , Yasushi Maejima , Shinji Kawanishi , Yoshiyuki Sakaguchi , Satoshi Okudera , Kenji Kabata , Yutaka Inayoshi
CPC分类号： F04D29/023 , F04D19/04 , F04D29/662 , F05D2230/53 , F05D2260/95 , F05D2300/171 , F05D2300/21 , F05D2300/40 , Y10S416/50
摘要： A vacuum pump has a pump case having a gas suction port at an upper surface thereof, a rotor shaft mounted in the pump case for undergoing rotation, and a rotor connected to the rotor shaft for rotation therewith. The rotor has inner and outer circumferential surfaces coated with a corrosion-resistant film treated by nonelectrolytic plating. Rotor blades are disposed in the pump case and are integrally connected to the outer circumferential surface of the rotor. Stator blades are integrally connected to the pump case so that the rotor blades and the stator blades are alternately positioned and arranged. A balancing body is disposed on the inner circumferential surface of the rotor for balancing the rotor during rotation thereof.
摘要翻译： 真空泵具有在其上表面具有气体吸入口的泵壳体，安装在用于旋转的泵壳体中的转子轴，以及连接到转子轴上以与其一起旋转的转子。 转子具有涂覆有通过非电解电镀处理的耐腐蚀膜的内外表面。 转子叶片设置在泵壳体中并与转子的外周面一体地连接。 定子叶片一体地连接到泵壳体，使得转子叶片和定子叶片交替地定位和布置。 平衡体设置在转子的内周面上，用于在转子旋转期间平衡转子。
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公开(公告)号：US20060140776A1
公开(公告)日：2006-06-29
申请号：US10566774
申请日：2004-08-03
IPC分类号： F04B49/10
CPC分类号： F04D19/042 , F04D25/06 , F04D29/5806 , F04D29/584
摘要： The present invention is to provide a vacuum pump in which an electrical equipment section for rotating a rotor is efficiently cooled so as to maintain in proper temperature, and further several types pumps capable of using common vacuum pump components even for a vacuum pump having a different size and shape though having same structure, and to make the vacuum pump components common. A vacuum pump according to the present invention, which generates vacuum by sucking and discharging a gas with rotation of a rotor, wherein a cooling water pipe is buried in the wall of a stator column which includes an electrical equipment section for rotating the rotor and is formed integrally with a base, said cooling water pipe having a branched water inlet port and a branched outlet port and being provided just near the electrical equipment section arranged near the center of the vacuum pump. Another vacuum pump according to the present invention, which generates vacuum by sucking and discharging a gas with rotation of a rotor with rotor blades, wherein the pump case is supported by a flange of a thread pump stator and the cooling water pipe is buried in the wall of the stator column.
摘要翻译： 本发明提供一种真空泵，其中用于旋转转子的电气设备部分被有效地冷却以保持适当的温度，并且还有几种泵能够使用普通真空泵部件，甚至对于具有不同的真空泵的真空泵 尺寸和形状虽然具有相同的结构，并使真空泵组件相同。 根据本发明的真空泵，其通过转子的旋转吸取和排出气体而产生真空，其中冷却水管被埋在定子柱的壁中，该定子柱包括用于旋转转子的电气设备部分，并且是 与基座一体形成，所述冷却水管具有分支水入口和分支出口，并且设置在靠近真空泵中心附近的电气设备部分附近。 根据本发明的另一个真空泵，其通过用转子叶片的转子旋转抽吸和排出气体而产生真空，其中泵壳由螺纹泵定子的凸缘支撑，冷却水管被埋在 定子柱的壁。
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公开(公告)号：US20120141254A1
公开(公告)日：2012-06-07
申请号：US13381239
申请日：2010-05-31
IPC分类号： F01D1/36
CPC分类号： F04D19/042 , F04D25/0693 , F04D27/0292 , F04D29/522 , F04D29/601
摘要： To provide a vacuum pump in which possibilities of decreased exhaust performance and gas leakage at the time of breakage of a rotor are lessened, in the case where a rotating part closes the inside opening portion of an exhaust outlet portion to decrease the height dimension of the vacuum pump, and further a connector lead wire is installed, easily.An inside opening edge portion of a gas discharge passage for combining the downstream space of the rotor with the exhaust outlet portion is caused to take a shape such that the opening edge portion has no blind portion when a gas exhaust passage forming member is viewed from at least either of an upper side or an oblique upper side, or from at least either of an lower side or an oblique lower side. Furthermore, the inner corner portion of this opening edge portion is formed into a rounded shape to reduce stress concentration. Also, a base is provided with a groove for combining a lead wire installing hole with a hole in the central part, and further the corners of these parts are formed into a rounded shape.
摘要翻译： 为了提供一种真空泵，其中在转子断裂时排气性能下降和气体泄漏降低的可能性减小，在旋转部分封闭排气出口部分的内部开口部分以降低其转速的高度尺寸的情况下 真空泵，另外还可以安装连接器导线。 当将来自转子的下游空间与排气出口部分组合的气体排出通道的内部开口边缘部分形成使得当从那里观察排气通道形成构件时开口边缘部分不具有盲区 至少上侧或倾斜的上侧中的至少一个，或从下侧或倾斜的下侧中的至少一个。 此外，该开口边缘部分的内角部形成为圆形，以减小应力集中。 此外，基部设置有用于将引线安装孔与中心部分中的孔组合的凹槽，并且这些部分的角部还形成为圆形。
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公开(公告)号：US20120143390A1
公开(公告)日：2012-06-07
申请号：US13381254
申请日：2010-06-14
申请人： Tooru Miwata , Keiichi Ishii , Katsuhide Machida , Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
发明人： Tooru Miwata , Keiichi Ishii , Katsuhide Machida , Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
IPC分类号： G05D23/00
CPC分类号： F04D19/042 , F04D27/001 , F04D29/584 , F05D2270/303
摘要： To provide a vacuum pump capable of performing temperature control using one or more heating devices or cooling devices fewer than the number of temperature sensors arranged in the pump.One temperature sensor is arranged for each target in the pump, while only one set consisting of a heater 147 and a magnetic valve 163 is arranged. One set consisting of a heater and a magnetic valve is controlled based on output signals from a plurality of temperature sensors, based on the priorities set for the temperature sensors. As stated above, by setting priorities for the temperature sensors, the temperature of a target provided with a temperature sensor given a higher priority is settled within a control range by performing quick ON/OFF control, and then the temperature of a target provided with a temperature sensor given a lower priority is settled within the control range.
摘要翻译： 提供一种能够使用少于配置在泵中的温度传感器的数量的一个或多个加热装置或冷却装置进行温度控制的真空泵。 在泵中为每个目标设置一个温度传感器，而仅设置由加热器147和电磁阀163组成的一个。 基于为温度传感器设定的优先级，基于来自多个温度传感器的输出信号来控制由加热器和电磁阀组成的一组。 如上所述，通过设定温度传感器的优先级，通过进行快速ON / OFF控制，将设置有较高优先级的温度传感器的目标温度设定在控制范围内，然后设置具有 给定较低优先级的温度传感器在控制范围内确定。
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公开(公告)号：US10001126B2
公开(公告)日：2018-06-19
申请号：US13381254
申请日：2010-06-14
申请人： Tooru Miwata , Keiichi Ishii , Katsuhide Machida , Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
发明人： Tooru Miwata , Keiichi Ishii , Katsuhide Machida , Yoshinobu Ohtachi , Yasushi Maejima , Tsutomu Takaada
CPC分类号： F04D19/042 , F04D27/001 , F04D29/584 , F05D2270/303
摘要： To provide a vacuum pump capable of performing temperature control using one or more heating devices or cooling devices fewer than the number of temperature sensors arranged in the pump. One temperature sensor is arranged for each target in the pump, while only one set consisting of a heater and a magnetic valve is arranged. One set consisting of a heater and a magnetic valve is controlled based on output signals from a plurality of temperature sensors, based on the priorities set for the temperature sensors. As stated above, by setting priorities for the temperature sensors, the temperature of a target provided with a temperature sensor given a higher priority is settled within a control range by performing quick ON/OFF control, and then the temperature of a target provided with a temperature sensor given a lower priority is settled within the control range.
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公开(公告)号：US06709226B2
公开(公告)日：2004-03-23
申请号：US10187573
申请日：2002-07-02
IPC分类号： F04D1904
CPC分类号： F04D19/04 , F04D27/0292 , F04D29/662
摘要： To provide a vacuum pump used for semiconductor manufacturing, which has improved reliability and safety and in which damages to a pump casing, peripheral apparatuses, or the like are prevented from occurring by preventing the occurrence of rotor breakage due to corrosion. A balancer is provided in the outer circumferential surface of the rotor so as to face the inside of the gas passageway. A balancer main body is supported against the outer circumferential surface of a rotor through a fragile portion that is weak with respect to corrosive gasses, the fragile portion of the balancer is damaged by corrosion before any corrosive gas influence appears in rotor blades or the rotor, and the balancer falls off, thus forcibly causing an unbalanced state to appear in the rotor. The balancer thus possesses a function for balancing the rotor and a corrosion detecting function. The unbalanced state of the rotor is then detected by a sensor, and damages to the vacuum pump itself and to the peripheral apparatuses can be prevented by stopping the pump.
摘要翻译： 提供一种用于半导体制造的真空泵，其具有提高的可靠性和安全性，并且通过防止由腐蚀引起的转子断裂的发生而防止对泵壳体，外围设备等的损坏。 平衡器设置在转子的外周面上，以便面对气体通道的内部。 平衡器主体通过相对于腐蚀性气体较弱的脆弱部分支撑在转子的外周面上，在转子叶片或转子中出现任何腐蚀性气体影响之前，平衡器的脆弱部分被腐蚀损坏， 并且平衡器脱落，从而强制地导致转子中出现不平衡状态。 因此，平衡器具有平衡转子和腐蚀检测功能的功能。 然后由传感器检测转子的不平衡状态，并且可以通过停止泵来防止对真空泵本身和外围设备的损坏。
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