公开(公告)号：US07812893B2

公开(公告)日：2010-10-12

申请号：US11719028

申请日：2005-09-20

申请人： Toshifumi Yagi ,  Toshihide Tsubata ,  Tsuyoshi Tokuda ,  Kenji Enda ,  Yoshinori Shimada ,  Shinya Maruoka

发明人： Toshifumi Yagi ,  Toshihide Tsubata ,  Tsuyoshi Tokuda ,  Kenji Enda ,  Yoshinori Shimada ,  Shinya Maruoka

IPC分类号： G02F1/1343 ,  G02F1/1333 ,  G02F1/1337

CPC分类号： G02F1/133707 ,  G02F1/136213 ,  G02F1/136227 ,  G02F1/136286

摘要： An active matrix substrate suppresses reduction in production yield and increase in production steps and simultaneously permits both sufficient securing of a storage capacity and improvement of an aperture ratio of a pixel. The active matrix substrate is an active matrix substrate and includes a thin film transistor disposed at an intersection of a scanning signal line with a data signal line on a substrate, the thin film transistor including a gate electrode connected to the scanning signal line, a source electrode connected to the data signal line, and a drain electrode connected to a drain lead-out wiring; a storage capacitor upper electrode connected to the drain lead-out wiring and a pixel electrode; and a storage capacitor wiring overlapping with the storage capacitor upper electrode through an insulating film, wherein the storage capacitor wiring has an extending portion overlapping with the drain lead-out wiring through the insulating film.

摘要翻译： 有源矩阵基板抑制了生产成本的降低和生产步骤的增加，并且同时允许充分确保存储容量和提高像素的开口率。 有源矩阵基板是有源矩阵基板，并且包括设置在扫描信号线与基板上的数据信号线交叉的薄膜晶体管，薄膜晶体管包括连接到扫描信号线的栅电极，源极 连接到数据信号线的电极和连接到漏极引出布线的漏电极; 连接到漏极引出布线的存储电容器上电极和像素电极; 以及通过绝缘膜与所述保持电容器上部电极重叠的保持电容配线，其中所述保持电容配线具有通过所述绝缘膜与所述漏极引出配线重叠的延伸部。

公开(公告)号：US20090073335A1

公开(公告)日：2009-03-19

申请号：US11719028

申请日：2005-09-20

申请人： Toshifumi Yagi ,  Toshihide Tsubata ,  Tsuyoshi Tokuda ,  Kenji Enda ,  Yoshinori Shimada ,  Shinya Maruoka

发明人： Toshifumi Yagi ,  Toshihide Tsubata ,  Tsuyoshi Tokuda ,  Kenji Enda ,  Yoshinori Shimada ,  Shinya Maruoka

IPC分类号： G02F1/136 ,  H01L29/04

CPC分类号： G02F1/133707 ,  G02F1/136213 ,  G02F1/136227 ,  G02F1/136286

摘要： An active matrix substrate suppresses reduction in production yield and increase in production steps and simultaneously permits both sufficient securing of a storage capacity and improvement of an aperture ratio of a pixel. The active matrix substrate is an active matrix substrate and includes a thin film transistor disposed at an intersection of a scanning signal line with a data signal line on a substrate, the thin film transistor including a gate electrode connected to the scanning signal line, a source electrode connected to the data signal line, and a drain electrode connected to a drain lead-out wiring; a storage capacitor upper electrode connected to the drain lead-out wiring and a pixel electrode; and a storage capacitor wiring overlapping with the storage capacitor upper electrode through an insulating film, wherein the storage capacitor wiring has an extending portion overlapping with the drain lead-out wiring through the insulating film.

摘要翻译： 有源矩阵基板抑制了生产成本的降低和生产步骤的增加，并且同时允许充分确保存储容量和提高像素的开口率。 有源矩阵基板是有源矩阵基板，并且包括设置在扫描信号线与基板上的数据信号线交叉的薄膜晶体管，薄膜晶体管包括连接到扫描信号线的栅电极，源极 连接到数据信号线的电极和连接到漏极引出布线的漏电极; 连接到漏极引出布线的存储电容器上电极和像素电极; 以及通过绝缘膜与所述保持电容器上部电极重叠的保持电容配线，其中所述保持电容配线具有通过所述绝缘膜与所述漏极引出配线重叠的延伸部。

公开(公告)号：US07924382B2

公开(公告)日：2011-04-12

申请号：US11915166

申请日：2006-05-12

申请人： Toshifumi Yagi ,  Toshihide Tsubata ,  Yoshinori Shimada

发明人： Toshifumi Yagi ,  Toshihide Tsubata ,  Yoshinori Shimada

IPC分类号： G02F1/1337 ,  G02F1/1343

CPC分类号： G02F1/136259 ,  G02F1/133707 ,  G02F1/13394 ,  G02F1/134309

摘要： A color filter substrate for a liquid crystal display device includes a color layer, a photo spacer and a counter electrode disposed on the substrate, and an alignment control protrusion is disposed on the counter electrode for controlling alignment of liquid crystal. A manufacturing method for the color filter substrate includes the step of forming an opening by laser irradiation in a region of the counter electrode corresponding to an absent portion occurring in the alignment control protrusion. The manufacturing method is also applicable to an active matrix substrate for a liquid crystal display device. The manufacturing method can effectively correct a defect if one occurs in the alignment control protrusion.

摘要翻译： 液晶显示装置的滤色器用基板包括配置在基板上的着色层，光电隔离层和对置电极，对置控制突起配置在对置电极上，用于控制液晶的取向。 滤色器基板的制造方法包括在对置电极对应于在取向控制突起中发生的不存在部分的区域中通过激光照射形成开口的步骤。 该制造方法也适用于液晶显示装置的有源矩阵基板。 如果在对准控制突起中发生缺陷，则可以有效地校正缺陷。

公开(公告)号：US20090073361A1

公开(公告)日：2009-03-19

申请号：US11915166

申请日：2006-05-12

申请人： Toshifumi Yagi ,  Toshihide Tsubata ,  Yoshinori Shimada

发明人： Toshifumi Yagi ,  Toshihide Tsubata ,  Yoshinori Shimada

IPC分类号： G02F1/1337 ,  G02F1/1333

CPC分类号： G02F1/136259 ,  G02F1/133707 ,  G02F1/13394 ,  G02F1/134309

摘要： A color filter substrate for a liquid crystal display device includes a color layer, a photo spacer and a counter electrode disposed on the substrate, and an alignment control protrusion is disposed on the counter electrode for controlling alignment of liquid crystal. A manufacturing method for the color filter substrate includes the step of forming an opening by laser irradiation in a region of the counter electrode corresponding to an absent portion occurring in the alignment control protrusion. The manufacturing method is also applicable to an active matrix substrate for a liquid crystal display device. The manufacturing method can effectively correct a defect if one occurs in the alignment control protrusion.

摘要翻译： 液晶显示装置的滤色器用基板包括配置在基板上的着色层，光电隔离层和对置电极，对置控制突起配置在对置电极上，用于控制液晶的取向。 滤色器基板的制造方法包括在对置电极对应于在取向控制突起中发生的不存在部分的区域中通过激光照射形成开口的步骤。 该制造方法也适用于液晶显示装置的有源矩阵基板。 如果在对准控制突起中发生缺陷，则可以有效地校正缺陷。

公开(公告)号：US07923274B2

公开(公告)日：2011-04-12

申请号：US11991360

申请日：2006-05-29

申请人： Toshifumi Yagi ,  Toshihide Tsubata ,  Yoshinori Shimada

发明人： Toshifumi Yagi ,  Toshihide Tsubata ,  Yoshinori Shimada

IPC分类号： H01L21/00

CPC分类号： G02F1/13458 ,  G02F1/133707 ,  G02F1/1368 ,  G02F2001/13712 ,  H01L27/124 ,  H01L27/1288 ,  H01L29/41733 ,  H01L29/42384 ,  H01L29/4908

摘要： After forming a gate electrode (4a) in a first step, a gate insulating film (5), a semiconductor film (8) and a conducting film (12) including a transparent conducting film (9) are stacked, and on the thus obtained multilayered body (18), a resist pattern (13a) including a first opening (14a) for exposing the conducting film (12) therein and a second opening (14b) having a bottom portion (B) above the gate electrode (4a) is formed. Portions of the conducting film (12) and the semiconductor film (8) exposed in the first opening (14a) are etched, the bottom portion (B) of the second opening (14b) is removed for exposing the conducting film (12) therein, and the exposed conducting film (12) is etched, so as to form a TFT (20) in a second step. A pixel electrode (5a), a protection masking layer (17a) and a projection (17b) are formed in a third step.

摘要翻译： 在第一步骤中形成栅电极（4a）之后，堆叠包括透明导电膜（9）的栅绝缘膜（5），半导体膜（8）和导电膜（12） 多层体（18），包括用于将导电膜（12）暴露的第一开口（14a）和在栅电极（4a）上方具有底部（B）的第二开口（14b）的抗蚀剂图案（13a） 形成。 蚀刻在第一开口（14a）中暴露的导电膜（12）和半导体膜（8）的一部分，去除第二开口（14b）的底部（B），以将导电膜（12）暴露在其中 ，并且暴露的导电膜（12）被蚀刻，以便在第二步骤中形成TFT（20）。 在第三步骤中形成像素电极（5a），保护屏蔽层（17a）和突起（17b）。

公开(公告)号：US07304698B2

公开(公告)日：2007-12-04

申请号：US10740861

申请日：2003-12-22

申请人： Morihide Ohsaki ,  Toshihide Tsubata ,  Tsuyoshi Tokuda ,  Yoshinori Shimada

发明人： Morihide Ohsaki ,  Toshihide Tsubata ,  Tsuyoshi Tokuda ,  Yoshinori Shimada

IPC分类号： G02F1/1335

CPC分类号： G02F1/133514 ,  G02B5/201 ,  G02F1/133512 ,  G02F2001/133388 ,  H01J2211/44

摘要： A color filter substrate includes a transparent substrate with first and second opposed edges, a color filter layer including color filters of first, second and third types extending in a first direction with the third type interposed between the first and second types, and an opaque layer including opaque portions extending in the first direction and another opaque portion connected to the other opaque portions along the second edge. The color filter substrate is fabricated by (a) forming the opaque layer on the transparent substrate, and then (b) forming the color filter layer thereon. The step (a) includes forming an opening in a non-effective display area of the color filter substrate between one end of each color filter of the third type and the second edge. The step (b) includes attaching and rolling a dry film in the first direction on the transparent substrate after the color filters of the first and second types have been provided thereon.

摘要翻译： 滤色器基板包括具有第一和第二相对边缘的透明基板，滤色器层包括第一，第二和第三类型的滤色器，第一和第三类型在第一方向上延伸，第三类型插入在第一和第二类型之间，不透明层 包括在第一方向上延伸的不透明部分和沿第二边缘连接到其它不透明部分的另一不透明部分。 通过（a）在透明基板上形成不透明层，然后（b）在其上形成滤色器层来制造滤色器基板。 步骤（a）包括在第三类型的每个滤色器的一端和第二边缘之间的滤色器基板的非有效显示区域中形成开口。 步骤（b）包括在其上设置有第一和第二类型的滤色器之后，在透明基板上沿第一方向安装和滚动干膜。

公开(公告)号：US20090152560A1

公开(公告)日：2009-06-18

申请号：US11991360

申请日：2006-05-29

申请人： Toshifumi Yagi ,  Toshihide Tsubata ,  Yoshinori Shimada

发明人： Toshifumi Yagi ,  Toshihide Tsubata ,  Yoshinori Shimada

IPC分类号： H01L33/00 ,  H01L21/28

CPC分类号： G02F1/13458 ,  G02F1/133707 ,  G02F1/1368 ,  G02F2001/13712 ,  H01L27/124 ,  H01L27/1288 ,  H01L29/41733 ,  H01L29/42384 ,  H01L29/4908

摘要： After forming a gate electrode (4a) in a first step, a gate insulating film (5), a semiconductor film (8) and a conducting film (12) including a transparent conducting film (9) are stacked, and on the thus obtained multilayered body (18), a resist pattern (13a) including a first opening (14a) for exposing the conducting film (12) therein and a second opening (14b) having a bottom portion (B) above the gate electrode (4a) is formed. Portions of the conducting film (12) and the semiconductor film (8) exposed in the first opening (14a) are etched, the bottom portion (B) of the second opening (14b) is removed for exposing the conducting film (12) therein, and the exposed conducting film (12) is etched, so as to form a TFT (20) in a second step. A pixel electrode (5a), a protection masking layer (17a) and a projection (17b) are formed in a third step.

摘要翻译： 在第一步骤中形成栅电极（4a）之后，堆叠包括透明导电膜（9）的栅绝缘膜（5），半导体膜（8）和导电膜（12） 多层体（18），包括用于将导电膜（12）暴露的第一开口（14a）和在栅电极（4a）上方具有底部（B）的第二开口（14b）的抗蚀剂图案（13a） 形成。 蚀刻在第一开口（14a）中暴露的导电膜（12）和半导体膜（8）的一部分，去除第二开口（14b）的底部（B），以将导电膜（12）暴露在其中 ，并且暴露的导电膜（12）被蚀刻，以便在第二步骤中形成TFT（20）。 在第三步骤中形成像素电极（5a），保护屏蔽层（17a）和突起（17b）。

公开(公告)号：US20090033846A1

公开(公告)日：2009-02-05

申请号：US11815783

申请日：2006-07-07

申请人： Naoshi Yamada ,  Toshihide Tsubata ,  Hidehiko Yamaguchi ,  Yoshinori Shimada

发明人： Naoshi Yamada ,  Toshihide Tsubata ,  Hidehiko Yamaguchi ,  Yoshinori Shimada

IPC分类号： G02F1/1333 ,  G02F1/1339

CPC分类号： G02F1/1339 ,  G02F1/1333 ,  G02F1/133514

摘要： In a liquid crystal display device, an array substrate and a CF substrate arranged face to face with each other. A liquid crystal layer is provided between the array substrate and the CF substrate. The array substrate and the CF substrate are bonded together by a sealing member containing a photo curing material. The array substrate has a surface opposed to the CF substrate. Metal wires are provided in the circumferential portion of the opposed surface. A transparent film is disposed between the metal wires and the sealing member.

摘要翻译： 在液晶显示装置中，相互配置的阵列基板和CF基板。 在阵列基板和CF基板之间设置液晶层。 阵列基板和CF基板通过含有光固化材料的密封构件接合在一起。 阵列基板具有与CF基板相对的表面。 金属线设置在相对表面的圆周部分中。 透明膜设置在金属线和密封构件之间。

公开(公告)号：US07948586B2

公开(公告)日：2011-05-24

申请号：US11815783

申请日：2006-07-07

申请人： Naoshi Yamada ,  Toshihide Tsubata ,  Hidehiko Yamaguchi ,  Yoshinori Shimada

发明人： Naoshi Yamada ,  Toshihide Tsubata ,  Hidehiko Yamaguchi ,  Yoshinori Shimada

IPC分类号： G02F1/1333 ,  G02F1/1339

CPC分类号： G02F1/1339 ,  G02F1/1333 ,  G02F1/133514

摘要： In a liquid crystal display device, an array substrate and a CF substrate are arranged face to face with each other. A liquid crystal layer is provided between the array substrate and the CF substrate. The array substrate and the CF substrate are bonded together by a sealing member containing a photo curing material. The array substrate has a surface opposed to the CF substrate. Metal wires are provided in the circumferential portion of the opposed surface. A transparent film is disposed between the metal wires and the sealing member.

摘要翻译： 在液晶显示装置中，阵列基板和CF基板彼此面对地配置。 在阵列基板和CF基板之间设置液晶层。 阵列基板和CF基板通过含有光固化材料的密封构件接合在一起。 阵列基板具有与CF基板相对的表面。 金属线设置在相对表面的圆周部分中。 透明膜设置在金属线和密封构件之间。

公开(公告)号：US06448578B1

公开(公告)日：2002-09-10

申请号：US09369913

申请日：1999-08-06

申请人： Yoshinori Shimada ,  Masao Kawaguchi ,  Hiroshi Ishibashi ,  Yukinobu Nakata ,  Keiichi Akamatsu

发明人： Yoshinori Shimada ,  Masao Kawaguchi ,  Hiroshi Ishibashi ,  Yukinobu Nakata ,  Keiichi Akamatsu

IPC分类号： H01L2904

CPC分类号： G02F1/136286 ,  G02F2001/13629 ,  G02F2001/136295 ,  H01L29/458 ,  H01L29/4908

摘要： In a thin-film transistor to be used in an active matrix liquid crystal display device, each of a gate signal line, a source signal line, and a drain extraction electrode has a three-layer structure. Specifically, each of these members is made up of a lower layer made of a titanium film, an intermediate layer made of an aluminum film, and an upper layer made of a titanium film containing nitrogen. Since the respective upper layers, in contact with a gate insulating film or an interlayer insulating film made of a silicon nitride film, are made of titanium films containing nitrogen, they have superior adhesion to the silicon nitride film. Consequently, film peeling, etc. during the manufacturing process can be suppressed. Further, providing the titanium film beneath the aluminum film contributes to reduction of the resistance of the aluminum film.

摘要翻译： 在用于有源矩阵液晶显示装置的薄膜晶体管中，栅极信号线，源极信号线和漏极引出电极都具有三层结构。 具体地，这些构件中的每一个由由钛膜制成的下层，由铝膜制成的中间层和由含氮的钛膜制成的上层构成。 由于与栅极绝缘膜或由氮化硅膜形成的层间绝缘膜接触的各个上层由含有氮的钛膜制成，因此它们对氮化硅膜具有优异的粘附性。 因此，可以抑制制造过程中的膜剥离等。 此外，在铝膜下方提供钛膜有助于降低铝膜的电阻。