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    Dielectric thin film element, piezoelectric actuator and liquid discharge head, and method for manufacturing the same
    1.
    发明授权
    Dielectric thin film element, piezoelectric actuator and liquid discharge head, and method for manufacturing the same 有权
    电介质薄膜元件，压电致动器和排液头及其制造方法

    公开(公告)号：US07279825B2

    公开(公告)日：2007-10-09

    申请号：US11006639

    申请日：2004-12-08

    申请人： Toshihiro Ifuku ,  Takanori Matsuda ,  Tetsuro Fukui

    发明人： Toshihiro Ifuku ,  Takanori Matsuda ,  Tetsuro Fukui

    IPC分类号： H01L41/087

    CPC分类号： B41J2/1646 ,  B41J2/161 ,  B41J2/1642 ,  B41J2202/03 ,  H01L41/0815 ,  H01L41/0973 ,  H01L41/1876 ,  H01L41/316 ,  H01L41/319

    摘要： In piezoelectric thin films constituting crystalline dielectric thin film elements used for a piezoelectric actuator of a liquid discharge head, stress is generated in the crystallization step by heating due to the lattice misfit. Given this fact, by interposing between a substrate and intermediate layer which has a twin structure that absorbs the stress, film peeling and deterioration of the piezoelectric properties of the piezoelectric thin films are prevented. The intermediate layer is of a multi-layer structure which has a first intermediate layer comprising a twin structure thin film and a second intermediate layer which is the lower electrode, and because the substrate also serves as a lower electrode, the intermediate layer has a single layer structure comprising a twin structure thin film.

    摘要翻译： 在构成用于液体排出头的压电致动器的结晶电介质薄膜元件的压电薄膜中，由于晶格失配，通过加热在结晶步骤中产生应力。 鉴于这一事实，通过插入具有吸收应力的双结构的基板和中间层之间，防止了压电薄膜的膜剥离和压电性能的劣化。 中间层是具有包括双结构薄膜的第一中间层和作为下电极的第二中间层的多层结构，并且由于基板也用作下电极，所以中间层具有单个 层结构包括双结构薄膜。

    Ferroelectric thin film element, piezoelectric actuator and liquid discharge head
    6.
    发明授权
    Ferroelectric thin film element, piezoelectric actuator and liquid discharge head 有权
    铁电薄膜元件，压电致动器和液体排出头

    公开(公告)号：US07215067B2

    公开(公告)日：2007-05-08

    申请号：US10772260

    申请日：2004-02-06

    申请人： Toshihiro Ifuku ,  Tetsuro Fukui ,  Takanori Matsuda

    发明人： Toshihiro Ifuku ,  Tetsuro Fukui ,  Takanori Matsuda

    IPC分类号： H01L41/04 ,  H01L41/16 ,  H01L41/24

    CPC分类号： H01L41/094 ,  H01L41/316

    摘要： A ferroelectric thin film element comprises a substrate and an epitaxial ferroelectric thin film provided on the substrate. The thin film satisfies z/z0>1.003 and 0.997≦x/x0≦1.003, where a crystal face of said thin film parallel to a crystal face of a surface of the substrate is taken as a Z crystal face, a face spacing of the Z crystal face is taken as z, a face spacing of the Z crystal face of a material constituting the thin film in a bulk state is taken as z0, a crystal face of the thin film perpendicular to the Z crystal face is taken as an X crystal face, a face spacing of the X crystal face is taken as x and a face spacing of the X crystal face of the material constituting the thin film in a bulk state is taken as x0.

    摘要翻译： 铁电薄膜元件包括设置在基板上的基板和外延铁电薄膜。 薄膜满足z / z 0 > 1.003和0.997 <= X / X 0 <= 1.003，其中所述薄膜的晶面平行于晶体面 将基板的表面作为Z晶面，将Z晶面的面间隔作为z，将构成薄膜的材料的Z晶面的面间距设为z状， SUB> 0 ，将与Z晶面垂直的薄膜的晶面视为X晶面，将X晶面的面间距设为x，X晶面的面间距 构成薄膜的大块状态的材料为x <0>。

    Piezoelectric actuator and liquid discharge head using the same
    10.
    发明授权
    Piezoelectric actuator and liquid discharge head using the same 有权
    压电致动器和排液头使用相同

    公开(公告)号：US07999441B2

    公开(公告)日：2011-08-16

    申请号：US12237933

    申请日：2008-09-25

    申请人： Katsumi Aoki ,  Kenichi Takeda ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Tetsuro Fukui

    发明人： Katsumi Aoki ,  Kenichi Takeda ,  Toshihiro Ifuku ,  Takanori Matsuda ,  Tetsuro Fukui

    IPC分类号： H01L41/04

    CPC分类号： B41J2/14233 ,  B41J2202/03 ,  H01L41/0478 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/316 ,  H01L41/319

    摘要： The piezoelectric actuator includes a piezoelectric film between two electrode layers and a diaphragm. Assuming that: each elastic coefficient of all materials is isotropic and a distortion amount of the piezoelectric film by an electric field is isotropic in all in-plane directions; a point located on a diaphragm surface and having a maximum displacement when a predetermined electric field is applied to distort the piezoelectric film, is expressed by PδMAX; and a point located on a circumference of a reference-circle having PδMAX as a center and having a minimum difference in displacement from PδMAX is expressed by PδA, the diaphragm has a shape capable of determining an axis A1 set in a straight-line joining PδMAX and PδA, the diaphragm comprises a single-crystalline-material in which a plane orthogonal to A1 and perpendicular to an axis A2 on the diaphragm surface, is a {110}-plane, and the piezoelectric film is a {100}-single-orientation film.

    摘要翻译： 压电致动器包括在两个电极层和隔膜之间的压电膜。 假设：所有材料的每个弹性系数是各向同性的，并且通过电场的压电膜的失真量在所有面内方向都是各向同性的; 当施加预定电场以使压电膜失真时，位于膜片表面上并具有最大位移的点由PδMAX表示; 以PδMAX为中心并且具有与PδMAX的位移的最小差异的基准圆的圆周上的点由PδA表示，所述隔膜具有能够确定在直线接合PδMAX中设定的轴A1的形状 和PδA，所述隔膜包括其中与A1正交并垂直于所述膜表面上的轴线A2的平面为{110}面的单晶材料，并且所述压电膜为{100} - 单晶材料， 定向电影。