公开(公告)号：US07267002B2

公开(公告)日：2007-09-11

申请号：US11185751

申请日：2005-07-21

申请人： Toshikazu Itakura ,  Toshiki Isogai

发明人： Toshikazu Itakura ,  Toshiki Isogai

IPC分类号： G01R27/26 ,  G01N19/00

CPC分类号： G01D5/24 ,  G01D5/2405 ,  G01N27/223

摘要： A capacitance type physical quantity detector includes a sensor unit of which the capacitance varies depending upon a change in the physical quantity and a C-V converter unit which converts a change in the capacitance of said sensor unit into a voltage. The C-V converter unit includes an operational amplifier, a feedback capacitor, switching means connected in parallel with said feedback capacitor, a reference voltage-generating circuit for applying a reference voltage to the operational amplifier, and a drive voltage-generating circuit for applying a drive voltage to said sensor unit. At least any one of the feedback capacitance of said feedback capacitor, the reference voltage formed by said reference voltage-generating circuit or the drive voltage formed by said drive voltage-generating circuit varies depending upon the temperature to correct temperature characteristics of the sensor unit.

摘要翻译： 电容型物理量检测器包括其电容根据物理量的变化而变化的传感器单元和将所述传感器单元的电容变化转换为电压的C-V转换器单元。 CV转换器单元包括运算放大器，反馈电容器，与所述反馈电容并联连接的开关装置，用于向运算放大器施加参考电压的基准电压产生电路，以及用于施加驱动的驱动电压产生电路 电压到所述传感器单元。 所述反馈电容器的反馈电容，所述参考电压产生电路形成的参考电压或由所述驱动电压产生电路形成的驱动电压中的至少一个根据温度而变化，以校正传感器单元的温度特性。

公开(公告)号：US20070169535A1

公开(公告)日：2007-07-26

申请号：US11727994

申请日：2007-03-29

申请人： Toshikazu Itakura ,  Toshiki Isogai

发明人： Toshikazu Itakura ,  Toshiki Isogai

IPC分类号： G01N27/22 ,  G01R31/27 ,  G01R31/28

CPC分类号： G01N27/223

摘要： An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.

摘要翻译： 检查装置检查具有集成在一个芯片中的传感器部分和电路部分的湿度传感器。 检查装置包括：检查室，用于容纳晶片，其中多个湿度传感器被设置为晶片状态的传感器芯片; 用于接触电路部分的电极焊盘的探针; 电连接到探针的测试器，用于检查湿度传感器的电特性; 以及用于控制检查室中的温度和湿度的温度 - 湿度控制部分。

公开(公告)号：US20060201232A1

公开(公告)日：2006-09-14

申请号：US11362822

申请日：2006-02-28

申请人： Toshikazu Itakura ,  Toshiki Isogai

发明人： Toshikazu Itakura ,  Toshiki Isogai

IPC分类号： G01N35/00

CPC分类号： G01N27/223

摘要： An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.

摘要翻译： 检查装置检查具有集成在一个芯片中的传感器部分和电路部分的湿度传感器。 检查装置包括：检查室，用于容纳晶片，其中多个湿度传感器被设置为晶片状态的传感器芯片; 用于接触电路部分的电极焊盘的探针; 电连接到探针的测试器，用于检查湿度传感器的电特性; 以及用于控制检查室中的温度和湿度的温度 - 湿度控制部分。

公开(公告)号：US20060096371A1

公开(公告)日：2006-05-11

申请号：US11265280

申请日：2005-11-03

申请人： Toshiki Isogai ,  Toshikazu Itakura

发明人： Toshiki Isogai ,  Toshikazu Itakura

IPC分类号： G01N27/22 ,  G01R3/00

CPC分类号： G01N27/223 ,  Y10T29/49007

摘要： A capacitive humidity sensor includes a semiconductor substrate, a protective layer and a humidity sensitive section including a pair of comb electrodes and a humidity sensitive layer having a dielectric constant, which changes in accordance with humidity. The comb electrodes are disposed on one surface of the semiconductor substrate through the protective layer to face each other with a predetermined gap. An interface between the protective layer and the humidity sensitive layer is planarized so that the sensor prevents a hysteresis in a variation of capacitance. For example, a surface of the protective layer can be made flat by polishing.

摘要翻译： 电容式湿度传感器包括半导体衬底，保护层和湿度敏感部分，其包括一对梳状电极和根据湿度而变化的介电常数的湿度敏感层。 梳状电极通过保护层设置在半导体衬底的一个表面上，以预定间隙彼此面对。 保护层和湿度敏感层之间的界面被平坦化，使得传感器防止电容变化中的滞后。 例如，可以通过抛光使保护层的表面平坦化。

公开(公告)号：US20080257037A1

公开(公告)日：2008-10-23

申请号：US12081513

申请日：2008-04-17

申请人： Toshiki Isogai ,  Toshikazu Itakura

发明人： Toshiki Isogai ,  Toshikazu Itakura

IPC分类号： G01N27/22

CPC分类号： G01N27/225

摘要： A capacitive humidity sensor includes: a humidity sensing element with a humidity sensitive film and electrodes; and a processing circuit. The film has a dielectric constant variable in accordance with moisture. The electrodes detect capacitance of the film and outputs a signal corresponding to the capacitance. The processing circuit processes the signal. The film is made of inorganic material having fine pores for adsorbing the moisture. A diameter of the fine pores is set to be a predetermined diameter so that capillary tube aggregation phenomenon occurs at a predetermined relative humidity. The capacitance of the film has a change rate with respect to the relative humidity. The change rate in case of the relative humidity higher than the predetermined relative humidity is larger than that in case of the relative humidity lower than the predetermined relative humidity.

摘要翻译： 电容式湿度传感器包括：具有湿敏膜和电极的湿度感测元件; 和处理电路。 该膜具有根据水分变化的介电常数。 电极检测胶片的电容并输出对应于电容的信号。 处理电路处理该信号。 该膜由具有用于吸附水分的细孔的无机材料制成。 细孔的直径设定为规定的直径，使得在规定的相对湿度下发生毛细管聚集现象。 膜的电容相对于相对湿度具有变化率。 在相对湿度高于预定相对湿度的情况下的变化率大于相对湿度低于预定相对湿度的情况。

公开(公告)号：US07213441B2

公开(公告)日：2007-05-08

申请号：US11362822

申请日：2006-02-28

申请人： Toshikazu Itakura ,  Toshiki Isogai

发明人： Toshikazu Itakura ,  Toshiki Isogai

IPC分类号： G01N21/00

CPC分类号： G01N27/223

摘要： An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.

摘要翻译： 检查装置检查具有集成在一个芯片中的传感器部分和电路部分的湿度传感器。 检查装置包括：检查室，用于容纳晶片，其中多个湿度传感器被设置为晶片状态的传感器芯片; 用于接触电路部分的电极焊盘的探针; 电连接到探针的测试器，用于检查湿度传感器的电特性; 以及用于控制检查室中的温度和湿度的温度 - 湿度控制部分。

公开(公告)号：US20050285221A1

公开(公告)日：2005-12-29

申请号：US11151440

申请日：2005-06-14

申请人： Toshikazu Itakura ,  Toshiki Isogai

发明人： Toshikazu Itakura ,  Toshiki Isogai

IPC分类号： B60R21/00 ,  B60W10/06 ,  B60W10/20 ,  B60W30/06 ,  B62D6/00 ,  B62D15/02 ,  G01S15/93 ,  G05D1/02 ,  H01G7/00 ,  H01G17/00 ,  H01L27/06 ,  H01L27/08 ,  H01L29/00 ,  H01L29/92 ,  H01L29/93 ,  H01L29/94

CPC分类号： H01L27/0805 ,  B60T2201/10 ,  B60W10/06 ,  B60W10/20 ,  H01L27/0629 ,  H01L29/93 ,  H01L29/94

摘要： A capacitance device includes a dielectric film, the first electrode and the second electrode. One of the two electrodes is divided into a plurality of electrode portions. Each of the divided electrode portions is connected with each other through switching transistors so that appropriate portions contributing to the capacitance can be selected. The device can vary its capacitance with high accuracy.

摘要翻译： 电容器件包括电介质膜，第一电极和第二电极。 两个电极中的一个被分成多个电极部分。 每个分割的电极部分通过开关晶体管彼此连接，从而可以选择有助于电容的适当部分。 该器件可以高精度地改变其电容。

公开(公告)号：US07673493B2

公开(公告)日：2010-03-09

申请号：US11727994

申请日：2007-03-29

申请人： Toshikazu Itakura ,  Toshiki Isogai

发明人： Toshikazu Itakura ,  Toshiki Isogai

IPC分类号： G01N21/00

CPC分类号： G01N27/223

摘要： An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.

摘要翻译： 检查装置检查具有集成在一个芯片中的传感器部分和电路部分的湿度传感器。 检查装置包括：检查室，用于容纳晶片，其中多个湿度传感器被设置为晶片状态的传感器芯片; 用于接触电路部分的电极焊盘的探针; 电连接到探头的用于检查湿度传感器的电特性的测试器; 以及用于控制检查室中的温度和湿度的温度 - 湿度控制部分。

公开(公告)号：US07481107B2

公开(公告)日：2009-01-27

申请号：US11633450

申请日：2006-12-05

申请人： Toshikazu Itakura ,  Toshiki Isogai

发明人： Toshikazu Itakura ,  Toshiki Isogai

IPC分类号： H02H3/00

CPC分类号： G01N27/223

摘要： A humidity sensor includes: a substrate; a pair of electrodes on the substrate; a humidity sensitive member between the electrodes having a capacitance changeable in accordance with humidity; an output element connecting to the electrodes in order to detect a capacitance of the humidity sensitive member and outputting a signal corresponding to the capacitance; and a setting member for setting a maximum amount of moisture in the humidity sensitive member to be a standard maximum amount of moisture. The humidity sensitive member is capable of absorbing a moisture up to the maximum amount of moisture. The setting member includes at least one of an element for reducing the maximum amount of moisture and an element for increasing the maximum amount of moisture.

摘要翻译： 湿度传感器包括：基板; 基板上的一对电极; 所述电极之间的湿度敏感部件具有可根据湿度而变化的电容; 连接到电极的输出元件，以便检测湿度敏感元件的电容并输出对应于电容的信号; 以及将湿度敏感部件中的最大湿度设定为标准最大湿度的设定部件。 湿度敏感部件能够吸收水分达到最大量的水分。 设置构件包括用于减少最大量的水分的元素和用于增加最大量的水分的元素中的至少一个。

公开(公告)号：US07430904B2

公开(公告)日：2008-10-07

申请号：US11265280

申请日：2005-11-03

申请人： Toshiki Isogai ,  Toshikazu Itakura

发明人： Toshiki Isogai ,  Toshikazu Itakura

IPC分类号： G01N27/22

CPC分类号： G01N27/223 ,  Y10T29/49007

摘要： A capacitive humidity sensor includes a semiconductor substrate, a protective layer and a humidity sensitive section including a pair of comb electrodes and a humidity sensitive layer having a dielectric constant, which changes in accordance with humidity. The comb electrodes are disposed on one surface of the semiconductor substrate through the protective layer to face each other with a predetermined gap. An interface between the protective layer and the humidity sensitive layer is planarized so that the sensor prevents a hysteresis in a variation of capacitance. For example, a surface of the protective layer can be made flat by polishing.

摘要翻译： 电容式湿度传感器包括半导体衬底，保护层和湿度敏感部分，其包括一对梳状电极和根据湿度而变化的介电常数的湿度敏感层。 梳状电极通过保护层设置在半导体衬底的一个表面上，以预定间隙彼此面对。 保护层和湿度敏感层之间的界面被平坦化，使得传感器防止电容变化中的滞后。 例如，可以通过抛光使保护层的表面平坦化。