公开(公告)号：US20080257037A1

公开(公告)日：2008-10-23

申请号：US12081513

申请日：2008-04-17

申请人： Toshiki Isogai ,  Toshikazu Itakura

发明人： Toshiki Isogai ,  Toshikazu Itakura

IPC分类号： G01N27/22

CPC分类号： G01N27/225

摘要： A capacitive humidity sensor includes: a humidity sensing element with a humidity sensitive film and electrodes; and a processing circuit. The film has a dielectric constant variable in accordance with moisture. The electrodes detect capacitance of the film and outputs a signal corresponding to the capacitance. The processing circuit processes the signal. The film is made of inorganic material having fine pores for adsorbing the moisture. A diameter of the fine pores is set to be a predetermined diameter so that capillary tube aggregation phenomenon occurs at a predetermined relative humidity. The capacitance of the film has a change rate with respect to the relative humidity. The change rate in case of the relative humidity higher than the predetermined relative humidity is larger than that in case of the relative humidity lower than the predetermined relative humidity.

摘要翻译： 电容式湿度传感器包括：具有湿敏膜和电极的湿度感测元件; 和处理电路。 该膜具有根据水分变化的介电常数。 电极检测胶片的电容并输出对应于电容的信号。 处理电路处理该信号。 该膜由具有用于吸附水分的细孔的无机材料制成。 细孔的直径设定为规定的直径，使得在规定的相对湿度下发生毛细管聚集现象。 膜的电容相对于相对湿度具有变化率。 在相对湿度高于预定相对湿度的情况下的变化率大于相对湿度低于预定相对湿度的情况。

公开(公告)号：US07213441B2

公开(公告)日：2007-05-08

申请号：US11362822

申请日：2006-02-28

申请人： Toshikazu Itakura ,  Toshiki Isogai

发明人： Toshikazu Itakura ,  Toshiki Isogai

IPC分类号： G01N21/00

CPC分类号： G01N27/223

摘要： An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.

摘要翻译： 检查装置检查具有集成在一个芯片中的传感器部分和电路部分的湿度传感器。 检查装置包括：检查室，用于容纳晶片，其中多个湿度传感器被设置为晶片状态的传感器芯片; 用于接触电路部分的电极焊盘的探针; 电连接到探针的测试器，用于检查湿度传感器的电特性; 以及用于控制检查室中的温度和湿度的温度 - 湿度控制部分。

公开(公告)号：US20050285221A1

公开(公告)日：2005-12-29

申请号：US11151440

申请日：2005-06-14

申请人： Toshikazu Itakura ,  Toshiki Isogai

发明人： Toshikazu Itakura ,  Toshiki Isogai

IPC分类号： B60R21/00 ,  B60W10/06 ,  B60W10/20 ,  B60W30/06 ,  B62D6/00 ,  B62D15/02 ,  G01S15/93 ,  G05D1/02 ,  H01G7/00 ,  H01G17/00 ,  H01L27/06 ,  H01L27/08 ,  H01L29/00 ,  H01L29/92 ,  H01L29/93 ,  H01L29/94

CPC分类号： H01L27/0805 ,  B60T2201/10 ,  B60W10/06 ,  B60W10/20 ,  H01L27/0629 ,  H01L29/93 ,  H01L29/94

摘要： A capacitance device includes a dielectric film, the first electrode and the second electrode. One of the two electrodes is divided into a plurality of electrode portions. Each of the divided electrode portions is connected with each other through switching transistors so that appropriate portions contributing to the capacitance can be selected. The device can vary its capacitance with high accuracy.

摘要翻译： 电容器件包括电介质膜，第一电极和第二电极。 两个电极中的一个被分成多个电极部分。 每个分割的电极部分通过开关晶体管彼此连接，从而可以选择有助于电容的适当部分。 该器件可以高精度地改变其电容。

公开(公告)号：US07222531B2

公开(公告)日：2007-05-29

申请号：US11253703

申请日：2005-10-20

申请人： Toshiki Isogai ,  Toshikazu Itakura

发明人： Toshiki Isogai ,  Toshikazu Itakura

IPC分类号： G01N22/27

CPC分类号： G01N27/223

摘要： A capacitive humidity sensor for detecting a humidity change includes a first sensor element having a first capacitance, a second sensor element having a second capacitance and connected in series with the first sensor element, and a humidity sensitive layer having a dielectric constant, which changes in accordance with humidity. The first and the second capacitances change with respect to the humidity change at a different rate. The humidity is detected using the different capacitances of the first and the second sensor elements. The humidity sensitive layer is formed to each sensor element so that each sensor element can be effectively protected.

摘要翻译： 用于检测湿度变化的电容式湿度传感器包括具有第一电容的第一传感器元件，具有第二电容并与第一传感器元件串联连接的第二传感器元件和具有介电常数的湿度敏感层， 按照湿度。 第一和第二电容以不同的速率相对于湿度变化而变化。 使用第一和第二传感器元件的不同电容来检测湿度。 对每个传感器元件形成湿度敏感层，从而可以有效地保护每个传感器元件。

公开(公告)号：US20060048572A1

公开(公告)日：2006-03-09

申请号：US11220543

申请日：2005-09-08

申请人： Toshiki Isogai ,  Masato Ishihara ,  Michitaka Hayashi ,  Toshikazu Itakura

发明人： Toshiki Isogai ,  Masato Ishihara ,  Michitaka Hayashi ,  Toshikazu Itakura

IPC分类号： G01N27/22 ,  H01L21/4763

CPC分类号： G01N27/223 ,  Y10T29/49007

摘要： A capacitance type humidity sensor includes: a detection substrate including a detection portion on a first side of the detection substrate; and a circuit board including a circuit portion. The detection portion detects humidity on the basis of capacitance change of the detection portion. The circuit portion processes the capacitance change as an electric signal. The detection substrate further includes a sensor pad on a second side of the detection substrate. The sensor pad is electrically connected to the detection portion through a conductor in a through hole of the detection substrate.

摘要翻译： 电容式湿度传感器包括：检测基板，其包括在检测基板的第一侧上的检测部分; 以及包括电路部分的电路板。 检测部根据检测部的电容变化来检测湿度。 电路部分将电容变化作为电信号进行处理。 检测基板还包括在检测基板的第二侧上的传感器焊盘。 传感器垫通过检测基板的通孔中的导体与检测部电连接。

公开(公告)号：US07267002B2

公开(公告)日：2007-09-11

申请号：US11185751

申请日：2005-07-21

申请人： Toshikazu Itakura ,  Toshiki Isogai

发明人： Toshikazu Itakura ,  Toshiki Isogai

IPC分类号： G01R27/26 ,  G01N19/00

CPC分类号： G01D5/24 ,  G01D5/2405 ,  G01N27/223

摘要： A capacitance type physical quantity detector includes a sensor unit of which the capacitance varies depending upon a change in the physical quantity and a C-V converter unit which converts a change in the capacitance of said sensor unit into a voltage. The C-V converter unit includes an operational amplifier, a feedback capacitor, switching means connected in parallel with said feedback capacitor, a reference voltage-generating circuit for applying a reference voltage to the operational amplifier, and a drive voltage-generating circuit for applying a drive voltage to said sensor unit. At least any one of the feedback capacitance of said feedback capacitor, the reference voltage formed by said reference voltage-generating circuit or the drive voltage formed by said drive voltage-generating circuit varies depending upon the temperature to correct temperature characteristics of the sensor unit.

摘要翻译： 电容型物理量检测器包括其电容根据物理量的变化而变化的传感器单元和将所述传感器单元的电容变化转换为电压的C-V转换器单元。 CV转换器单元包括运算放大器，反馈电容器，与所述反馈电容并联连接的开关装置，用于向运算放大器施加参考电压的基准电压产生电路，以及用于施加驱动的驱动电压产生电路 电压到所述传感器单元。 所述反馈电容器的反馈电容，所述参考电压产生电路形成的参考电压或由所述驱动电压产生电路形成的驱动电压中的至少一个根据温度而变化，以校正传感器单元的温度特性。

公开(公告)号：US20070169535A1

公开(公告)日：2007-07-26

申请号：US11727994

申请日：2007-03-29

申请人： Toshikazu Itakura ,  Toshiki Isogai

发明人： Toshikazu Itakura ,  Toshiki Isogai

IPC分类号： G01N27/22 ,  G01R31/27 ,  G01R31/28

CPC分类号： G01N27/223

摘要： An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.

摘要翻译： 检查装置检查具有集成在一个芯片中的传感器部分和电路部分的湿度传感器。 检查装置包括：检查室，用于容纳晶片，其中多个湿度传感器被设置为晶片状态的传感器芯片; 用于接触电路部分的电极焊盘的探针; 电连接到探针的测试器，用于检查湿度传感器的电特性; 以及用于控制检查室中的温度和湿度的温度 - 湿度控制部分。

公开(公告)号：US20060201232A1

公开(公告)日：2006-09-14

申请号：US11362822

申请日：2006-02-28

申请人： Toshikazu Itakura ,  Toshiki Isogai

发明人： Toshikazu Itakura ,  Toshiki Isogai

IPC分类号： G01N35/00

CPC分类号： G01N27/223

摘要： An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.

摘要翻译： 检查装置检查具有集成在一个芯片中的传感器部分和电路部分的湿度传感器。 检查装置包括：检查室，用于容纳晶片，其中多个湿度传感器被设置为晶片状态的传感器芯片; 用于接触电路部分的电极焊盘的探针; 电连接到探针的测试器，用于检查湿度传感器的电特性; 以及用于控制检查室中的温度和湿度的温度 - 湿度控制部分。

公开(公告)号：US20060096371A1

公开(公告)日：2006-05-11

申请号：US11265280

申请日：2005-11-03

申请人： Toshiki Isogai ,  Toshikazu Itakura

发明人： Toshiki Isogai ,  Toshikazu Itakura

IPC分类号： G01N27/22 ,  G01R3/00

CPC分类号： G01N27/223 ,  Y10T29/49007

摘要： A capacitive humidity sensor includes a semiconductor substrate, a protective layer and a humidity sensitive section including a pair of comb electrodes and a humidity sensitive layer having a dielectric constant, which changes in accordance with humidity. The comb electrodes are disposed on one surface of the semiconductor substrate through the protective layer to face each other with a predetermined gap. An interface between the protective layer and the humidity sensitive layer is planarized so that the sensor prevents a hysteresis in a variation of capacitance. For example, a surface of the protective layer can be made flat by polishing.

摘要翻译： 电容式湿度传感器包括半导体衬底，保护层和湿度敏感部分，其包括一对梳状电极和根据湿度而变化的介电常数的湿度敏感层。 梳状电极通过保护层设置在半导体衬底的一个表面上，以预定间隙彼此面对。 保护层和湿度敏感层之间的界面被平坦化，使得传感器防止电容变化中的滞后。 例如，可以通过抛光使保护层的表面平坦化。

公开(公告)号：US07673493B2

公开(公告)日：2010-03-09

申请号：US11727994

申请日：2007-03-29

申请人： Toshikazu Itakura ,  Toshiki Isogai

发明人： Toshikazu Itakura ,  Toshiki Isogai

IPC分类号： G01N21/00

CPC分类号： G01N27/223

摘要： An inspection device inspects a humidity sensor having a sensor portion and a circuit portion, which are integrated into one chip. The inspection device includes: an inspection chamber for accommodating a wafer, in which a plurality of humidity sensors are disposed as a sensor chip in a wafer state; a probe for contacting an electrode pad of the circuit portion; a tester electrically connected to the probe for inspecting electric properties of the humidity sensor; and a temperature-humidity control portion for controlling a temperature and a humidity in the inspection chamber.

摘要翻译： 检查装置检查具有集成在一个芯片中的传感器部分和电路部分的湿度传感器。 检查装置包括：检查室，用于容纳晶片，其中多个湿度传感器被设置为晶片状态的传感器芯片; 用于接触电路部分的电极焊盘的探针; 电连接到探头的用于检查湿度传感器的电特性的测试器; 以及用于控制检查室中的温度和湿度的温度 - 湿度控制部分。