公开(公告)号：US06225032B1

公开(公告)日：2001-05-01

申请号：US09139399

申请日：1998-08-25

申请人： Toshinori Hasegawa ,  Masaki Inaba ,  Akio Saitoh ,  Akira Goto ,  Masao Furukawa ,  Shin Ishimatsu ,  Miki Ito

发明人： Toshinori Hasegawa ,  Masaki Inaba ,  Akio Saitoh ,  Akira Goto ,  Masao Furukawa ,  Shin Ishimatsu ,  Miki Ito

IPC分类号： G03F700

CPC分类号： B41J2/1634 ,  B41J2/162 ,  B41J2/1637 ,  Y10S430/146

摘要： A method for manufacturing liquid jet recording heads, each provided with discharge ports to discharge liquid, a discharge port plate having the discharge ports arranged therefor, and performing ablation processing of holes becoming the discharge ports by use of a mask for projecting the image of the mask onto the discharge port plate with coherent laser beam as light source, comprises the following steps of forming water-repellent layer on the surface of the discharge port plate on the liquid discharge side; and of performing the ablation processing by irradiating the laser beam from the reverse side of the surface of discharge port plate having the water-repellent layer formed thereon in a state of such surface being arranged to be under the atmosphere containing fluorine atom, and forming the discharge ports, at the same time, enabling the substance containing the fluorine atom excited by the laser beam to adhere to the surface having the water-repellent layer formed thereon. In this manner, the throughput of product manufacture is enhanced without any provision of extra processing steps to remove the byproducts to be created by the irradiation of laser beam, hence contributing to a significant cost reduction of the manufacture of liquid jet recording heads.

摘要翻译： 一种液体喷射记录头的制造方法，每个液体喷射记录头均具有用于排出液体的排出口，具有排出口的排出口板，并且通过使用用于投影所述排出口的图像的掩模对成为排出口的孔进行消融处理 将具有相干激光束作为光源的排出口板掩模，包括在排液侧的排出口板的表面上形成防水层的步骤; 并且通过在形成有所述防水层的排出口板的表面的背面照射激光束，在这样的表面被布置在含有氟原子的气氛的状态下进行烧蚀处理，并且形成 排出口，同时使含有被激光束激发的氟原子的物质粘附到形成有防水层的表面上。 以这种方式，增加了产品生产的吞吐量，而没有任何额外的处理步骤来除去由激光束照射产生的副产品，从而有助于大大降低液体喷射记录头的制造成本。

公开(公告)号：US6071677A

公开(公告)日：2000-06-06

申请号：US41746

申请日：1998-03-13

申请人： Shin Ishimatsu ,  Masaki Inaba ,  Akio Saito ,  Akira Goto ,  Masao Furukawa ,  Toshinori Hasegawa ,  Miki Ito

发明人： Shin Ishimatsu ,  Masaki Inaba ,  Akio Saito ,  Akira Goto ,  Masao Furukawa ,  Toshinori Hasegawa ,  Miki Ito

IPC分类号： B23K26/00 ,  B23K26/04 ,  B23K26/06 ,  B41J2/16

CPC分类号： B41J2/1642 ,  B23K26/04 ,  B23K26/066 ,  B23K26/364 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1637 ,  Y10S430/146

摘要： A laser working method which can easily and accurately work a fine and complicated shape by irradiation of a laser beam is provided. When a plurality of channel grooves are laser worked on a second board constituting a liquid jet recording head and projections are laser worked on the joint surface of groove walls between the channel grooves and the like, the projections are first worked and formed by irradiating the laser beam through a first mask pattern of a high space frequency arranged by transmitting portions to work the projections and light shielding portions. After that, the channel grooves are worked and formed by irradiating the laser beam through a second mask pattern of a low space frequency arranged by transmitting portions to work the channel grooves and light shielding portions. The formation of a secondary product due to the laser working can be reduced. Even when the laser working secondary product exists, the influence by the secondary product can be reduced and the working can be performed. A fine and complicated shape can be stably and cheaply worked.

摘要翻译： 提供了一种能够通过激光束的照射容易且精确地进行精细而复杂的形状的激光加工方法。 当在构成液体喷射记录头的第二板激光加工多个通道槽时，在通道槽等之间的槽壁的接合表面上激光加工突起，通过照射激光来首先加工和形成突起 通过透射部分布置的高空间频率的第一掩模图案来射出以工作突起和遮光部分。 之后，通过通过透射部分布置的低空间频率的第二掩模图案照射激光束来加工和形成通道槽，以对通道槽和遮光部分进行加工。 可以减少由激光加工引起的二次产品的形成。 即使存在激光二次加工产品，也可以减少副产品的影响，进行加工。 精细复杂的形状可以稳定和廉价地工作。

公开(公告)号：US6048049A

公开(公告)日：2000-04-11

申请号：US947943

申请日：1997-10-09

申请人： Shin Ishimatsu ,  Masaki Inaba ,  Tsutomu Abe ,  Akira Goto ,  Masao Furukawa ,  Kouichi Omata ,  Toshinori Hasegawa ,  Miki Ito

发明人： Shin Ishimatsu ,  Masaki Inaba ,  Tsutomu Abe ,  Akira Goto ,  Masao Furukawa ,  Kouichi Omata ,  Toshinori Hasegawa ,  Miki Ito

IPC分类号： B23K26/00 ,  B23K26/06 ,  B23K26/38 ,  B41J2/14 ,  B41J2/16 ,  B41J2/135

CPC分类号： B41J2/1634 ,  B23K26/066 ,  B41J2/1404 ,  B41J2/1604 ,  B41J2/1623 ,  B41J2002/14379

摘要： A laser processing method comprises at least one of a laser light source, a beam shaping optical system for shaping laser beams, a mask having specific patterns corresponding to the processing configuration of a work, an illumination optical system for illuminating the mask, and a projection optical system for focusing the pattern images of the mask on the processing surface of the work by a specific magnification. This mask is provided with an extinct portion smaller than the quotient of the resolution and specific magnification of the projection optical system. With the method thus arranged, a work can be processed to provide complicated three-dimensional grooves having irregularities in the direction of laser irradiation by one-time processing. Also, the extinct portions make it possible to easily and finely adjust the extinction so that the precision of work processing is enhanced.

摘要翻译： 激光加工方法包括激光光源，用于成形激光束的光束整形光学系统，具有对应于工件的处理结构的特定图案的掩模，用于照亮掩模的照明光学系统和投影 光学系统，用于将掩模的图案图像以特定放大倍率聚焦在工件的处理表面上。 该掩模具有比投影光学系统的分辨率和特定放大率的商小的绝灭部分。 利用如此布置的方法，可以处理工件以通过一次处理来提供在激光照射方向上具有不规则性的复杂的三维凹槽。 此外，绝食部分使得可以容易且精细地调节消光，从而提高加工加工的精度。

公开(公告)号：US06668454B2

公开(公告)日：2003-12-30

申请号：US09207768

申请日：1998-12-09

申请人： Toshinori Hasegawa ,  Masaki Inaba ,  Akio Saito ,  Akira Goto ,  Masao Furukawa ,  Shin Ishimatsu ,  Miki Itoh

发明人： Toshinori Hasegawa ,  Masaki Inaba ,  Akio Saito ,  Akira Goto ,  Masao Furukawa ,  Shin Ishimatsu ,  Miki Itoh

IPC分类号： B21D5376

CPC分类号： B41J2/1637 ,  B23K26/066 ,  B23K26/389 ,  B23K2103/42 ,  B23K2103/50 ,  B41J2/1601 ,  B41J2/1634 ,  Y10T29/49083 ,  Y10T29/49401 ,  Y10T29/49609

摘要： A method for manufacturing a liquid-discharging recording head can prevent deviation in the dimensions and the pitch of grooves, serving as liquid channels, and holes, serving as discharging ports, and generation of burrs around discharging ports while maintaining the grooves and the holes to desired sizes and without increasing a time required for the processing when forming the grooves and the holes by projecting a laser beam. When performing ablation processing of the liquid-channel grooves or the discharging ports in a top-plate blank by projecting the laser beam, the processing is performed by changing the energy density per unit time of the laser beam continuously or stepwise by adjusting the oscillation voltage or the oscillation frequency of the laser beam, attenuating the laser beam, or moving a substance to be processed along the optical axis.

摘要翻译： 液体排出记录头的制造方法能够防止作为排出口的作为液体通道的槽的尺寸和间距的偏差，以及在排出口周围产生毛边，同时将槽和孔保持为 期望的尺寸，并且不增加通过投影激光束来形成凹槽和孔时的处理所需的时间。 当通过投影激光进行顶板坯料中的液槽或排出口的烧蚀处理时，通过调整振荡电压来连续或逐步地改变激光束的每单位时间的能量密度来进行处理 或激光束的振荡频率，衰减激光束，或沿着光轴移动被处理物质。

公开(公告)号：US08714711B2

公开(公告)日：2014-05-06

申请号：US13596634

申请日：2012-08-28

申请人： Shimpei Otaka ,  Takayuki Ono ,  Masao Furukawa ,  Jun Hinami ,  Takeshi Shibata ,  Ryo Shimamura ,  Takanori Enomoto ,  Tomohiro Takahashi ,  Masashi Ishikawa

发明人： Shimpei Otaka ,  Takayuki Ono ,  Masao Furukawa ,  Jun Hinami ,  Takeshi Shibata ,  Ryo Shimamura ,  Takanori Enomoto ,  Tomohiro Takahashi ,  Masashi Ishikawa

IPC分类号： B41J2/05 ,  B41J2/14 ,  B41J2/16

CPC分类号： B41J2/14024 ,  B41J2/1623

摘要： A liquid recording head includes a protective layer having resistance to liquid and an adhesiveness improving film disposed on a second surface of a silicon substrate, opposite to a first surface. The first surface and the second surface have a plane direction (100). The protective layer is disposed in a peripheral region of an opening of a liquid supply port. A liquid ejection chip is bonded to a head substrate with an adhesive so that the liquid supply port communicates with a liquid introduction port on a side of the second surface of the silicon substrate.

摘要翻译： 液体记录头包括具有耐液体的保护层和设置在硅基板的与第一表面相对的第二表面上的粘合性改进膜。 第一表面和第二表面具有平面方向（100）。 保护层设置在液体供给口的开口的周边区域。 液体喷射芯片用粘合剂粘合到头基板上，使得液体供给口与硅基板的第二表面侧的液体导入口连通。

公开(公告)号：US07829135B2

公开(公告)日：2010-11-09

申请号：US11447395

申请日：2006-06-06

申请人： Yuji Tsuruoka ,  Takashi Mori ,  Nobuhito Yamaguchi ,  Masao Furukawa ,  Seiichi Kamiya

发明人： Yuji Tsuruoka ,  Takashi Mori ,  Nobuhito Yamaguchi ,  Masao Furukawa ,  Seiichi Kamiya

IPC分类号： C23C28/00

CPC分类号： H05K3/4664 ,  C23C4/123 ,  H05K3/125 ,  H05K2203/013

摘要： In the process of forming, on a substrate, a multi-layered circuit pattern with layers each having a portion made of the same material throughout the different layers in the direction in which the different layers are stacked, the position of nozzles with respect to the substrate when at least one of the layers is formed is shifted from that when the other layers are formed.

摘要翻译： 在基板上形成多层电路图案的层叠体，各层具有由层叠不同层的方向的整个不同层中由相同材料构成的部分，喷嘴的位置相对于 当形成至少一个层时的衬底偏离了当形成其它层时的衬底。

公开(公告)号：US20060292496A1

公开(公告)日：2006-12-28

申请号：US11455865

申请日：2006-06-20

申请人： Masao Furukawa ,  Yuji Tsuruoka ,  Takashi Mori ,  Nobuhito Yamaguchi ,  Seiichi Kamiya

发明人： Masao Furukawa ,  Yuji Tsuruoka ,  Takashi Mori ,  Nobuhito Yamaguchi ,  Seiichi Kamiya

IPC分类号： G03F7/00

CPC分类号： H05K3/125 ,  H05K3/245 ,  H05K3/4664 ,  H05K2201/09881 ,  H05K2203/013 ,  H05K2203/1476 ,  Y10S428/901

摘要： A circuit pattern forming method is provided which can reduce a possibility of undesired short-circuits being produced in the circuit by satellites formed when fabricating a conductive pattern and thereby can form a highly reliable printed circuit board. To that end, this invention overlappingly draws a conductive pattern and an insulating pattern of a predetermined thickness by scanning a liquid ejection head and a substrate relative to each other a plurality of times while ejecting droplets of a conductive pattern forming solution and an insulating pattern forming solution. When forming the conductive pattern and the insulating pattern that adjoin each other on the substrate, the step of forming the insulating pattern of at least one scan is executed between the conductive pattern forming steps that are executed the plurality of times until the conductive pattern has a predetermined thickness.

摘要翻译： 提供一种电路图案形成方法，其可以减少在制造导电图案时形成的卫星在电路中产生不期望的短路的可能性，从而可以形成高可靠性的印刷电路板。 为此，本发明通过在喷射导电图案形成溶液和形成绝缘图形的液滴的同时多次扫描液体喷射头和基板而重叠地绘制预定厚度的导电图案和绝缘图案 解。 当在基板上形成彼此相邻的导电图案和绝缘图案时，在多次执行的导电图案形成步骤之间执行形成至少一个扫描的绝缘图案的步骤，直到导电图案具有 预定厚度。

公开(公告)号：US20060288932A1

公开(公告)日：2006-12-28

申请号：US11455637

申请日：2006-06-20

申请人： Takashi Mori ,  Yuji Tsuruoka ,  Masao Furukawa ,  Seiichi Kamiya ,  Nobuhito Yamaguchi

发明人： Takashi Mori ,  Yuji Tsuruoka ,  Masao Furukawa ,  Seiichi Kamiya ,  Nobuhito Yamaguchi

IPC分类号： B05C5/00 ,  H01L21/20 ,  H01L21/31

CPC分类号： H05K3/125 ,  H05K3/107 ,  H05K3/465 ,  H05K3/4664 ,  H05K2201/09881 ,  H05K2203/013

摘要： The present invention is intended to provide a highly reliable circuit pattern forming device which can cause a conductive solution to land on the substrate with high precision and which, when forming a multilayer printed circuit board, prevents closely arranged wires from becoming short-circuited. To realize this objective, this invention forms a circuit pattern by ejecting onto the substrate the droplets of insulating solution and the droplets of conductive solution while moving the liquid ejection unit and the substrate relative to each other. During this process, when both of the droplets are landed close together on the substrate, the droplets of insulating solution are made to land on the substrate prior to the droplets of conductive solution.

摘要翻译： 本发明旨在提供一种高可靠性的电路图案形成装置，其能够使导电溶液以高精度落在基板上，并且当形成多层印刷电路板时，防止紧密布置的布线短路。 为了实现该目的，本发明通过在液体喷射单元和基板相对于彼此移动的同时，在基板上喷射绝缘溶液的液滴和导电溶液的液滴而形成电路图案。 在该过程中，当两个液滴都在基板上靠近一起时，使绝缘溶液的液滴在导电溶液液滴之前落在基板上。

公开(公告)号：US07127374B2

公开(公告)日：2006-10-24

申请号：US10238631

申请日：2002-09-11

申请人： Naoyuki Nagafuchi ,  Masao Furukawa

发明人： Naoyuki Nagafuchi ,  Masao Furukawa

IPC分类号： G06F11/00

CPC分类号： G05B23/027 ,  G05B23/0286 ,  H02J2003/001 ,  Y04S10/522

摘要： When an abnormality or a sign of abnormality occurs in an electric power generating facility, an appropriate operating support can be made in a short time.The electric power facility operation remote supporting method in accordance with the present invention is characterized by that an abnormality or a sign of abnormality is judged based on at least one of information on an operating state of the electric power generating facility and information on time-varying characteristics of components in the electric power generating facility, and a service mode is set based on the judged information of the abnormality or the sign of abnormality, preset abnormality corrective data and preset service modes.

公开(公告)号：US06895289B2

公开(公告)日：2005-05-17

申请号：US10291778

申请日：2002-11-12

申请人： Katsuhito Shimizu ,  Tooru Kimura ,  Yoshio Maruyama ,  Yukiko Mouri ,  Satoru Shimizu ,  Hidekazu Fujimura ,  Masao Furukawa ,  Yoshiharu Hayashi ,  Yasushi Hayasaka

发明人： Katsuhito Shimizu ,  Tooru Kimura ,  Yoshio Maruyama ,  Yukiko Mouri ,  Satoru Shimizu ,  Hidekazu Fujimura ,  Masao Furukawa ,  Yoshiharu Hayashi ,  Yasushi Hayasaka

IPC分类号： G06F17/30 ,  G05B19/42

CPC分类号： G06F17/30575 ,  G06F17/30011 ,  Y10S707/99953 ,  Y10S707/99954

摘要： Documents used for process control can be managed and maintained from a document server and a terminal. In order to update the documents quickly so that an operated process is always kept in the most preferable state of operation, the document server stores and manages production documents used for actually controlling and monitoring a control system plant, whereas the terminal system is used to refer and edit plant documents. The terminal can synchronize contents of the plant documents in the document server with those in the control system before storing the synchronized plant documents in the terminal.

摘要翻译： 用于过程控制的文档可以从文档服务器和终端进行管理和维护。 为了快速更新文档，操作过程始终保持在最佳操作状态，文件服务器存储和管理用于实际控制和监控控制系统设备的生产文件，而终端系统用于引用 并编辑植物文件。 在将同步的工厂文档存储在终端中之前，终端可以将文档服务器中的工厂文档的内容与控制系统中的工厂文档的内容进行同步。