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18 条记录 (耗时 0.017 秒)

    Resonator, ultrasonic die bonding head, and ultrasonic die bonding apparatus
    1.
    发明授权
    Resonator, ultrasonic die bonding head, and ultrasonic die bonding apparatus 失效
    谐振器，超声波芯片接合头和超声波芯片接合装置

    公开(公告)号：US07595582B2

    公开(公告)日：2009-09-29

    申请号：US11143646

    申请日：2005-06-03

    申请人： Yukio Ozaki ,  Toshinori Kasuga

    发明人： Yukio Ozaki ,  Toshinori Kasuga

    IPC分类号： H01L41/053

    CPC分类号： H01L24/75 ,  H01L24/81 ,  H01L2224/75 ,  H01L2224/75355 ,  H01L2224/81121 ,  H01L2224/81205 ,  H01L2224/81801 ,  H01L2924/01004 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01033 ,  H01L2924/01082

    摘要： A resonator 1 of the present invention includes: a vibrating member 13 holding an electronic component 12 and applying a vibration to the electronic component 12; and a depressing member 15 applying a depressing force for a side of a substrate 11 to the electronic component 12 through the vibrating member 13. The depressing member 15 includes: leg portions 15b which are disposed so as to leave spaces between the leg portions and both side faces 13a of the vibrating member 13 parallel with a vibration direction A; and supporting portions 15c through which the leg portions 15b and the side faces 13a of the vibrating member 13 are to be coupled to each other. With respect to a size of a cross section of each of the supporting portions 15c parallel with the side face 13a of the vibrating member 13, a length L2 along the vibration direction A of the vibrating member 13 is shorter than a length L1 along a depressing direction B of the depressing member 15.

    摘要翻译： 本发明的谐振器1包括：保持电子部件12并向电子部件12施加振动的振动部件13; 以及按压部件15，通过振动部件13向基板11的侧面施加按压力。按压部件15包括：腿部15b，其设置成在腿部与两者之间留有间隙 振动部件13的与振动方向A平行的侧面13a; 以及支撑部分15c，腿部15b和振动构件13的侧面13a将彼此联接。 对于与振动部件13的侧面13a平行的支撑部15c的截面尺寸，沿着振动部件13的振动方向A的长度L2比沿着振动部件13的振动方向A的长度L1短 按压构件15的方向B.

    POSITION MEASURING APPARATUS AND COATING APPARATUS
    4.
    发明申请
    POSITION MEASURING APPARATUS AND COATING APPARATUS 审中-公开
    位置测量装置和涂装装置

    公开(公告)号：US20100174398A1

    公开(公告)日：2010-07-08

    申请号：US12651879

    申请日：2010-01-04

    申请人： Taizan Kobayashi ,  Yukio Ozaki ,  Toshinori Kasuga ,  Yasuyuki Masuda ,  Nobuaki Kawashima

    发明人： Taizan Kobayashi ,  Yukio Ozaki ,  Toshinori Kasuga ,  Yasuyuki Masuda ,  Nobuaki Kawashima

    IPC分类号： B25J13/08 ,  G01C3/00 ,  G06F17/00

    CPC分类号： H01L21/681 ,  H01L21/6715

    摘要： A position measuring apparatus includes a distance measuring part which obtains at least three pieces of distance information between at least three measurement points on a measured plane of an object and a displacement sensor, an imaging part which images a projection image on the measured plane of the object, and a calculating part which obtains tilt information of the measured plane based on the at least three distance information pieces and obtains position information of the object based on the tilt information and the projection image.

    摘要翻译： 一种位置测量装置，包括距离测量部分，其在物体的测量平面上的至少三个测量点与位移传感器之间获得至少三条距离信息，在所测量的平面上对投影图像进行成像的成像部件 对象和计算部分，其基于所述至少三个距离信息获取所测量的平面的倾斜信息，并且基于倾斜信息和投影图像获得对象的位置信息。

    Oscillating apparatus
    6.
    发明授权
    Oscillating apparatus 失效
    摆动装置

    公开(公告)号：US07218030B2

    公开(公告)日：2007-05-15

    申请号：US11182753

    申请日：2005-07-18

    申请人： Toshinori Kasuga ,  Yukio Ozaki

    发明人： Toshinori Kasuga ,  Yukio Ozaki

    IPC分类号： H01L41/09

    CPC分类号： B23K20/10 ,  B06B1/0253

    摘要： An oscillating apparatus includes a driver generating a waveform signal based on a stored data for specifying a waveform so as to output the waveform signal to a transducer. A detector detects a phase difference between electric voltage and current supplied to the transducer. A memory unit holds gain data reflecting a characteristic of the transducer. The gain data specify gains corresponding to respective phase differences. An arithmetic unit calculates the frequency of the waveform based on the phase difference detected at the detector and a gain included in the gain data. The oscillating apparatus enables determination of a gain suitable to the transducer in view of the characteristic of the transducer. The frequency of the waveform signal is allowed to follow the change in the resonant frequency in a shorter period. The oscillation can thus be kept well.

    摘要翻译： 振荡装置包括驱动器，基于用于指定波形的存储数据产生波形信号，以便将波形信号输出到换能器。 检测器检测提供给换能器的电压和电流之间的相位差。 存储单元保持反映换能器特性的增益数据。 增益数据指定对应于各个相位差的增益。 算术单元基于检测器检测到的相位差和增益数据中包含的增益来计算波形的频率。 考虑到换能器的特性，振荡装置能够确定适合换能器的增益。 允许波形信号的频率在较短的时间内跟随谐振频率的变化。 因此振荡可以保持良好。

    Ultrasonic head
    7.
    发明申请
    Ultrasonic head 审中-公开
    超声波头

    公开(公告)号：US20060113351A1

    公开(公告)日：2006-06-01

    申请号：US11105437

    申请日：2005-04-14

    申请人： Yukio Ozaki ,  Toshinori Kasuga

    发明人： Yukio Ozaki ,  Toshinori Kasuga

    IPC分类号： B23K20/12

    CPC分类号： B23K20/106 ,  B23K2101/40 ,  H01L24/75 ,  H01L2224/0554 ,  H01L2224/05568 ,  H01L2224/05573 ,  H01L2224/16 ,  H01L2224/73204 ,  H01L2224/75 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01033 ,  H01L2924/01082 ,  H01L2924/351 ,  H01L2924/00 ,  H01L2224/05599 ,  H01L2224/0555 ,  H01L2224/0556

    摘要： An ultrasonic head 10a, which is used in an ultrasonic bonder for bonding an LSI chip and a substrate by using the ultrasonic vibration, includes: a protrusion 13a constituting a resonating apparatus 15 for contacting with the LSI chip and carrying out the ultrasonic vibration; a thermal conductive elastic body 17a placed on a surface of a main shaft 12 constituting the resonating apparatus 15; and a heater 16a which is placed on a surface of the thermal conductive elastic body 17a and produces a heat and gives the heat through the thermal conductive elastic body 17a and the main shaft 12 and protrusion 13a constituting the resonating apparatus 15 to a vicinity of a bonding portion between the LSI chip and the substrate.

    摘要翻译： 超声波头10a用于通过使用超声波振动来连接LSI芯片和基板的超声波焊接机中，包括：突起13a，其构成用于与LSI芯片接触并进行超声波振动的谐振装置15 ; 布置在构成谐振装置15的主轴12的表面上的导热弹性体17a; 以及加热器16a，其放置在导热性弹性体17a的表面上，并产生热量，并且通过导热弹性体17a和构成谐振装置15的主轴12和突起13a产生热量至 在LSI芯片和基板之间的接合部分附近。

    CLEANING APPARATUS AND METHOD
    8.
    发明申请
    CLEANING APPARATUS AND METHOD 审中-公开
    清洁装置和方法

    公开(公告)号：US20110240059A1

    公开(公告)日：2011-10-06

    申请号：US13073328

    申请日：2011-03-28

    申请人： Yukio OZAKI ,  Michinao Nomura ,  Mitsuo Takeuchi ,  Toshinori Kasuga

    发明人： Yukio OZAKI ,  Michinao Nomura ,  Mitsuo Takeuchi ,  Toshinori Kasuga

    IPC分类号： B08B3/00

    CPC分类号： B08B3/12 ,  B08B2203/0229

    摘要： A cleaning apparatus includes a supply unit to supply at least an initial amount of cleaning solution to a specific portion of an object to be cleaned, an agitator to induce agitation in the cleaning solution supplied to the object, an oscillating unit to oscillate the agitator, a drive unit to move any one of the object and the agitator so as to change a clearance between the object and the agitator, a detection unit to detect impedance of the oscillator, and a control unit to control the clearance by controlling the drive unit based on the impedance.

    摘要翻译： 清洁装置包括供给单元，该供给单元至少将初始量的清洗液供给到待清洗物体的特定部位，搅拌器，在供给到被检体的清洗液中引起搅动，振荡单元使振动器振荡， 用于移动物体和搅拌器中的任何一个以驱动物体和搅拌器之间的间隙的驱动单元，用于检测振荡器的阻抗的检测单元以及通过控制驱动单元来控制间隙的控制单元 阻抗。

    Oscillating apparatus
    10.
    发明申请
    Oscillating apparatus 失效
    摆动装置

    公开(公告)号：US20060208615A1

    公开(公告)日：2006-09-21

    申请号：US11182753

    申请日：2005-07-18

    申请人： Toshinori Kasuga ,  Yukio Ozaki

    发明人： Toshinori Kasuga ,  Yukio Ozaki

    IPC分类号： H02N2/00

    CPC分类号： B23K20/10 ,  B06B1/0253

    摘要： An oscillating apparatus includes a driver generating a waveform signal based on a stored data for specifying a waveform so as to output the waveform signal to a transducer. A detector detects a phase difference between electric voltage and current supplied to the transducer. A memory unit holds gain data reflecting a characteristic of the transducer. The gain data specify gains corresponding to respective phase differences. An arithmetic unit calculates the frequency of the waveform based on the phase difference detected at the detector and a gain included in the gain data. The oscillating apparatus enables determination of a gain suitable to the transducer in view of the characteristic of the transducer. The frequency of the waveform signal is allowed to follow the change in the resonant frequency in a shorter period. The oscillation can thus be kept well.

    摘要翻译： 振荡装置包括驱动器，基于用于指定波形的存储数据产生波形信号，以便将波形信号输出到换能器。 检测器检测提供给换能器的电压和电流之间的相位差。 存储单元保持反映换能器特性的增益数据。 增益数据指定对应于各个相位差的增益。 算术单元基于检测器检测到的相位差和增益数据中包含的增益来计算波形的频率。 考虑到换能器的特性，振荡装置能够确定适合换能器的增益。 允许波形信号的频率在较短的时间内跟随谐振频率的变化。 因此振荡可以保持良好。