公开(公告)号：US08871552B2

公开(公告)日：2014-10-28

申请号：US13808894

申请日：2011-02-09

申请人： Satoshi Tokuda ,  Koichi Tanabe ,  Toshinori Yoshimuta ,  Hiroyuki Kishihara ,  Masatomo Kaino ,  Akina Yoshimatsu ,  Toshiyuki Sato ,  Shoji Kuwabara

发明人： Satoshi Tokuda ,  Koichi Tanabe ,  Toshinori Yoshimuta ,  Hiroyuki Kishihara ,  Masatomo Kaino ,  Akina Yoshimatsu ,  Toshiyuki Sato ,  Shoji Kuwabara

IPC分类号： H01L21/00 ,  H01L21/20 ,  H01L31/18 ,  H01L31/115 ,  H01L21/02 ,  H01L31/0296 ,  H01L27/146

CPC分类号： H01L21/02573 ,  H01L21/02562 ,  H01L21/0262 ,  H01L27/14659 ,  H01L27/14692 ,  H01L27/14696 ,  H01L31/02966 ,  H01L31/115 ,  H01L31/1832 ,  Y02E10/50

摘要： Although Cl (chlorine) is no longer supplied in the course of a first process in which a detecting layer formed by a polycrystalline film or a polycrystalline lamination film by vapor deposition or sublimation is formed, an additional source (e.g., HCl of Cl-containing gas) other than a source is supplied at the start or in the course of the first process. Thus, the detecting layer as the polycrystalline film or the polycrystalline lamination film of CdTe, ZnTe, or CdZnTe can be doped with Cl uniformly in a thickness direction from the start until the end of the first process in film formation. As a result, uniform crystal particles and uniform detection characteristics can be achieved.

摘要翻译： 尽管在通过气相沉积或升华形成由多晶膜或多晶层压膜形成的检测层的第一工艺过程中不再提供Cl（氯），但另外的源（例如，含Cl 气体）在第一个过程的开始或过程中被提供。 因此，作为多晶膜的检测层或CdTe，ZnTe或CdZnTe的多晶层叠膜可以从成膜的第一工序开始到结束的厚度方向均匀地掺杂Cl。 结果，可以实现均匀的结晶粒子和均匀的检测特性。

公开(公告)号：US09985150B2

公开(公告)日：2018-05-29

申请号：US13639318

申请日：2011-02-21

申请人： Toshinori Yoshimuta ,  Satoshi Tokuda ,  Koichi Tanabe ,  Hiroyuki Kishihara ,  Masatomo Kaino ,  Akina Yoshimatsu ,  Toshiyuki Sato ,  Shoji Kuwabara

发明人： Toshinori Yoshimuta ,  Satoshi Tokuda ,  Koichi Tanabe ,  Hiroyuki Kishihara ,  Masatomo Kaino ,  Akina Yoshimatsu ,  Toshiyuki Sato ,  Shoji Kuwabara

IPC分类号： H01L31/0236 ,  H01L27/146

CPC分类号： H01L31/0236 ,  H01L27/14636 ,  Y02E10/50

摘要： A graphite substrate is processed to have surface unevenness in a range of 1 μm to 8 μm. Thereby, a semiconductor film to be laminated on the graphite substrate has a stable film quality, and thus adhesion of the graphite substrate and the semiconductor layer can be enhanced. When an electron blocking layer is interposed between the graphite substrate and the semiconductor layer, the electron blocking layer is thin and thus the surface unevenness of the graphite substrate is transferred onto the electron blocking layer. Consequently, the electron blocking layer also has surface unevenness approximately in such range. Thus, almost the same effect as a configuration in which the semiconductor layer is directly connected to the graphite substrate can be produced.

公开(公告)号：US20130026468A1

公开(公告)日：2013-01-31

申请号：US13639318

申请日：2011-02-21

申请人： Toshinori Yoshimuta ,  Satoshi Tokuda ,  Koichi Tanabe ,  Hiroyuki Kishihara ,  Masatomo Kaino ,  Akina Yoshimatsu ,  Toshiyuki Sato ,  Shoji Kuwabara

发明人： Toshinori Yoshimuta ,  Satoshi Tokuda ,  Koichi Tanabe ,  Hiroyuki Kishihara ,  Masatomo Kaino ,  Akina Yoshimatsu ,  Toshiyuki Sato ,  Shoji Kuwabara

IPC分类号： H01L31/0368

CPC分类号： H01L31/0236 ,  H01L27/14636 ,  Y02E10/50

摘要： A graphite substrate is processed to have surface unevenness in a range of 1 μm to 8 μm. Thereby, a semiconductor film to be laminated on the graphite substrate has a stable film quality, and thus adhesion of the graphite substrate and the semiconductor layer can be enhanced. When an electron blocking layer is interposed between the graphite substrate and the semiconductor layer, the electron blocking layer is thin and thus the surface unevenness of the graphite substrate is transferred onto the electron blocking layer. Consequently, the electron blocking layer also has surface unevenness approximately in such range. Thus, almost the same effect as a configuration in which the semiconductor layer is directly connected to the graphite substrate can be produced.

摘要翻译： 将石墨基板加工成具有1μm至8μm范围内的表面凹凸。 因此，层叠在石墨基板上的半导体膜具有稳定的膜质量，因此可以提高石墨基板和半导体层的粘附性。 当在石墨基板和半导体层之间插入电子阻挡层时，电子阻挡层薄，因此石墨基板的表面凹凸被转印到电子阻挡层上。 因此，电子阻挡层也具有大致在这样的范围内的表面凹凸。 因此，可以制造与将半导体层直接连接到石墨基板的结构几乎相同的效果。

公开(公告)号：US20130115731A1

公开(公告)日：2013-05-09

申请号：US13808894

申请日：2011-02-09

申请人： Satoshi Tokuda ,  Koichi Tanabe ,  Toshinori Yoshimuta ,  Hiroyuki Kishihara ,  Masatomo Kaino ,  Akina Yoshimatsu ,  Toshiyuki Sato ,  Shoji Kuwabara

发明人： Satoshi Tokuda ,  Koichi Tanabe ,  Toshinori Yoshimuta ,  Hiroyuki Kishihara ,  Masatomo Kaino ,  Akina Yoshimatsu ,  Toshiyuki Sato ,  Shoji Kuwabara

IPC分类号： H01L31/0368

CPC分类号： H01L21/02573 ,  H01L21/02562 ,  H01L21/0262 ,  H01L27/14659 ,  H01L27/14692 ,  H01L27/14696 ,  H01L31/02966 ,  H01L31/115 ,  H01L31/1832 ,  Y02E10/50

摘要： Although Cl (chlorine) is no longer supplied in the course of a first process in which a detecting layer formed by a polycrystalline film or a polycrystalline lamination film by vapor deposition or sublimation is formed, an additional source (e.g., HCl of Cl-containing gas) other than a source is supplied at the start or in the course of the first process. Thus, the detecting layer as the polycrystalline film or the polycrystalline lamination film of CdTe, ZnTe, or CdZnTe can be doped with Cl uniformly in a thickness direction from the start until the end of the first process in film formation. As a result, uniform crystal particles and uniform detection characteristics can be achieved.

摘要翻译： 尽管在通过气相沉积或升华形成由多晶膜或多晶层压膜形成的检测层的第一工艺过程中不再提供Cl（氯），但另外的源（例如，含Cl 气体）在第一个过程的开始或过程中被提供。 因此，作为多晶膜的检测层或CdTe，ZnTe或CdZnTe的多晶层叠膜可以从成膜的第一工序开始到结束的厚度方向均匀地掺杂Cl。 结果，可以实现均匀的结晶粒子和均匀的检测特性。

公开(公告)号：US20120140881A1

公开(公告)日：2012-06-07

申请号：US13270258

申请日：2011-10-11

申请人： Akina Yoshimatsu ,  Koichi Tanabe ,  Satoshi Tokuda ,  Toshinori Yoshimuta ,  Hiroyuki Kishihara ,  Masatomo Kaino ,  Toshiyuki Sato ,  Shoji Kuwabara

发明人： Akina Yoshimatsu ,  Koichi Tanabe ,  Satoshi Tokuda ,  Toshinori Yoshimuta ,  Hiroyuki Kishihara ,  Masatomo Kaino ,  Toshiyuki Sato ,  Shoji Kuwabara

IPC分类号： G01T1/24 ,  G01N23/04

CPC分类号： G01T1/247 ,  H04N5/32 ,  H04N5/347 ,  H04N5/378

摘要： A drive controller varies a bias voltage applied from a bias supply to a conversion layer based on the presence or absence of binning, that is, for a case of carrying out binning where switching elements are driven on the basis of a plurality of rows at a time by a gate drive circuit, and for a case of carrying out no binning where the switching elements are driven on a row-by-row basis by the gate drive circuit. Therefore, in the case of a fluoroscopic mode for acquiring images with binning, a lowering of a dynamic range can be suppressed. In the case of a radiographic mode with no binning, spatial resolution can be made high. That is, a high dynamic range and high spatial resolution can be optimized according to modes of operation.

摘要翻译： 驱动控制器基于是否存在分档来改变从偏置电源施加到转换层的偏置电压，即，对于在基于多个行的驱动开关元件的情况下执行合并的情况， 并且对于通过栅极驱动电路逐行驱动开关元件的情况下，不执行合并的情况。 因此，在采用分档获取图像的透视模式的情况下，可以抑制动态范围的降低。 在没有合并的射线照相模式的情况下，可以使空间分辨率高。 也就是说，可以根据操作模式优化高动态范围和高空间分辨率。

公开(公告)号：US20140246744A1

公开(公告)日：2014-09-04

申请号：US14009210

申请日：2012-03-19

申请人： Masatomo Kaino ,  Satoshi Tokuda ,  Toshinori Yoshimuta ,  Hiroyuki Kishihara ,  Akina Yoshimatsu ,  Toshiyuki Sato ,  Shoji Kuwabara

发明人： Masatomo Kaino ,  Satoshi Tokuda ,  Toshinori Yoshimuta ,  Hiroyuki Kishihara ,  Akina Yoshimatsu ,  Toshiyuki Sato ,  Shoji Kuwabara

IPC分类号： H01L31/18 ,  H01L31/0272

CPC分类号： H01L31/18 ,  A61B6/4233 ,  H01L27/14676 ,  H01L27/14696 ,  H01L31/0272

摘要： A graphite substrate is accommodated into a chamber where vacuum drawing is performed via a pump. Thereafter, carbon is heated under vacuum, whereby impurities in the carbon are evaporated causing the carbon to be purified. The carbon in the graphite substrate is purified, achieving suppression of the impurities as donor/acceptor elements and also metallic elements in the semiconductor layer of 0.1 ppm or less, the impurities being contained in the carbon in the graphite substrate. As a result, occurrence of leak current or an abnormal leak point enables to be suppressed, and thus abnormal crystal growth in the semiconductor layer enables to be suppressed.

摘要翻译： 将石墨基板容纳在通过泵进行真空拉拔的室中。 此后，在真空下加热碳，由此碳中的杂质被蒸发，使得碳被净化。 纯化石墨基质中的碳，实现作为供体/受体元素的杂质以及半导体层中的金属元素抑制为0.1ppm以下，杂质包含在石墨基板中的碳中。 结果，能够抑制漏电流或异常泄漏点的发生，能够抑制半导体层的异常晶体生长。

公开(公告)号：US06407374B1

公开(公告)日：2002-06-18

申请号：US09650846

申请日：2000-08-29

申请人： Toshiyuki Sato ,  Satoshi Tokuda ,  Kenji Sato ,  Junichi Suzuki ,  Shinya Hirasawa ,  Naoyuki Hori ,  Toshinori Yoshimuta ,  Hidetoshi Kishimoto

发明人： Toshiyuki Sato ,  Satoshi Tokuda ,  Kenji Sato ,  Junichi Suzuki ,  Shinya Hirasawa ,  Naoyuki Hori ,  Toshinori Yoshimuta ,  Hidetoshi Kishimoto

IPC分类号： H01L2700

CPC分类号： H01L27/14601 ,  H01L27/1464

摘要： A two-dimensional array type detecting device of the invention is formed of a detecting side substrate, and a readout side substrate laminated together. In the detecting side substrate, a high resistivity responsive semiconductor film is laminated on a substrate through a common electrode therebetween, and semiconductor films for connection are formed for the respective sections corresponding to a two-dimensional array arrangement. Therefore, leak and expansion of carriers produced in the high resistivity responsive semiconductor are prevented in a direct conversion system, wherein light or radiation enters from a side of the glass substrate, in which the common electrode is not formed. Thus, a detecting sensitivity and space resolution can be improved. Namely, a dynamic range is large, and a crosstalk is small.

摘要翻译： 本发明的二维阵列型检测装置由检测侧基板和层叠在一起的读出侧基板构成。 在检测侧基板中，通过它们之间的公共电极在基板上层叠高电阻率响应半导体膜，并且对应于二维阵列布置的各个部分形成用于连接的半导体膜。 因此，在直接转换系统中防止在高电阻率响应半导体中产生的载流子的泄漏和膨胀，其中光或辐射从未形成公共电极的玻璃基板的一侧进入。 因此，可以提高检测灵敏度和空间分辨率。 也就是说，动态范围大，串扰小。

公开(公告)号：US06344370B1

公开(公告)日：2002-02-05

申请号：US09543673

申请日：2000-04-06

申请人： Yoshihiro Izumi ,  Osamu Teranuma ,  Toshiyuki Sato ,  Satoshi Tokuda ,  Toshinori Yoshimuta

发明人： Yoshihiro Izumi ,  Osamu Teranuma ,  Toshiyuki Sato ,  Satoshi Tokuda ,  Toshinori Yoshimuta

IPC分类号： H01L2100

CPC分类号： H01L27/14609 ,  H01L27/14676 ,  H01L27/1469

摘要： In a method of the present invention for fabricating a two-dimensional image detector in which a light/radiations detection element is applied, an upper electrode, a first charge blocking layer, and a semiconductor layer having photoconductivity are provided on support substrate in the stated order, and thereafter, a surface of the semiconductor layer is sprayed with ceramic particles by means of an abrasive grain jet nozzle. The abrasive grain jet nozzle repeatedly makes a high-speed reciprocating motion in an X direction at constant cycles while jetting the ceramic particles to the entirety of the surface of the semiconductor layer of the counter substrate moving in a Y direction, so that the surface of the semiconductor layer is subjected to a flattening treatment. This enables to provide a two-dimensional image detector in which a light/radiations detection element that provides effective improvement of a charge blocking effect and suppression of deterioration of reliability is applied.

摘要翻译： 在本发明的用于制造其中施加有光/辐射检测元件的二维图像检测器的方法中，上述电极，第一电荷阻挡层和具有光电导性的半导体层设置在所述的支撑基板上 然后通过磨粒喷射喷嘴将陶瓷颗粒喷射到半导体层的表面。 磨粒喷射喷嘴在X方向上以恒定的周期重复地进行高速往复运动，同时将陶瓷颗粒喷射到在Y方向上移动的对向基板的半导体层的整个表面，使得表面 对半导体层进行扁平化处理。 这使得能够提供二维图像检测器，其中应用提供有效改善电荷阻挡效应并抑制可靠性劣化的光/辐射检测元件。

公开(公告)号：US20050272181A1

公开(公告)日：2005-12-08

申请号：US11136601

申请日：2005-05-23

申请人： Junichi Suzuki ,  Nobuya Nagafune ,  Kenji Sato ,  Toshinori Yoshimuta ,  Toshiyuki Sato

发明人： Junichi Suzuki ,  Nobuya Nagafune ,  Kenji Sato ,  Toshinori Yoshimuta ,  Toshiyuki Sato

IPC分类号： G01T1/24 ,  H01L21/00 ,  H01L23/34 ,  H01L27/14 ,  H01L31/00 ,  H01L31/18 ,  H04N5/32

CPC分类号： H01L31/0203 ,  H01L21/6715 ,  H01L2924/0002 ,  H01L2924/00

摘要： Because a restricting plate 27 is disposed using a spacer 25, an upper plate 15 is allowed to expand upward when resin is injected, but unnecessary overexpansion is restricted by the restricting plate 27. Therefore the injection of a slightly larger amount of resin 37 does not cause a distortion or breakage of the upper plate 15 and a large amount resin 37 than the predetermined amount may be injected. As a result, damage to the upper plate 15 by the injection of the resin 37 and damage to the upper plate 15, the exfoliation of the radiation sensitive layer, and the like caused by the curing of the resin 37 may be prevented and damage to the flat panel radiation detector 1 may be prevented thereby.

摘要翻译： 由于使用间隔件25设置限位板27，所以当注入树脂时允许上板15向上膨胀，但限制板27限制了不必要的过度膨胀。 因此，注入稍大量的树脂37不会引起上板15的变形或断裂，并且可以注入大于预定量的大量树脂37。 结果，可以防止树脂37的注入和上板15的损坏对上板15的损伤，由树脂37的固化引起的辐射敏感层的剥离等， 可以防止平板辐射检测器1。

公开(公告)号：US07659131B2

公开(公告)日：2010-02-09

申请号：US11136601

申请日：2005-05-23

申请人： Junichi Suzuki ,  Nobuya Nagafune ,  Kenji Sato ,  Toshinori Yoshimuta ,  Toshiyuki Sato

发明人： Junichi Suzuki ,  Nobuya Nagafune ,  Kenji Sato ,  Toshinori Yoshimuta ,  Toshiyuki Sato

IPC分类号： H01L21/00

CPC分类号： H01L31/0203 ,  H01L21/6715 ,  H01L2924/0002 ,  H01L2924/00

摘要： Because a restricting plate 27 is disposed using a spacer 25, an upper plate 15 is allowed to expand upward when resin is injected, but unnecessary overexpansion is restricted by the restricting plate 27. Therefore the injection of a slightly larger amount of resin 37 does not cause a distortion or breakage of the upper plate 15 and a large amount resin 37 than the predetermined amount may be injected. As a result, damage to the upper plate 15 by the injection of the resin 37 and damage to the upper plate 15, the exfoliation of the radiation sensitive layer, and the like caused by the curing of the resin 37 may be prevented and damage to the flat panel radiation detector 1 may be prevented thereby.

摘要翻译： 由于使用间隔件25设置有限制板27，因此当注入树脂时允许上板15向上膨胀，但限制板27限制了不必要的过度膨胀。因此，注入稍大量的树脂37不会 引起上板15的变形或断裂，并且可以注入大于预定量的大量树脂37。 结果，可以防止树脂37的注入和上板15的损坏对上板15的损伤，由树脂37的固化引起的辐射敏感层的剥离等， 可以防止平板辐射检测器1。