公开(公告)号：US4987303A

公开(公告)日：1991-01-22

申请号：US504538

申请日：1990-04-04

申请人： Tsugiko Takase ,  Hideo Adachi ,  Takao Okada ,  Hisanari Shimazu ,  Hideo Tomabechi

发明人： Tsugiko Takase ,  Hideo Adachi ,  Takao Okada ,  Hisanari Shimazu ,  Hideo Tomabechi

IPC分类号： G01B7/34 ,  G01B7/00 ,  G01B7/28 ,  G01N37/00 ,  G01Q10/04 ,  G01Q20/00 ,  G01Q60/10 ,  G02B21/00 ,  G02B21/26 ,  G05D3/10 ,  H01J37/28

CPC分类号： G01Q20/04 ,  B82Y35/00 ,  G01B7/003 ,  G01B7/28 ,  G01Q70/02 ,  G02B21/002 ,  Y10S977/861 ,  Y10S977/872

摘要： A scanning tunnel microscope includes a piezo-actuator movable in a direction Z perpendicular to the surface of a sample and provided with a scanning probe projected downward from the bottom thereof. The scanning probe is moved in the direction Z by the piezo-actuator. The piezo-actuator includes a position measuring probe projected therefrom, parallel to the surface of the sample, from the lower end of one side thereof. A reference sample having concaves formed on a surface thereof at predetermined intervals is fixed to the piezo-actuator. When the scanning probe is moved in the direction Z, the position measuring probe is moved along the reference sample, so that tunnel current having a waveform which reproduces the shape of the concaved surface of the reference sample is detected. Thus, the moving distance of the scanning probe can be obtained from the waveform of tunnel current detected.

摘要翻译： 扫描隧道显微镜包括可在垂直于样品表面的方向Z上移动的压电致动器，并且具有从其底部向下突出的扫描探针。 扫描探针通过压电致动器沿Z方向移动。 压电致动器包括从其一侧的下端平行于样品的表面从其突出的位置测量探针。 具有在其表面上以预定间隔形成的凹部的参考样品被固定到压电致动器。 当扫描探针沿Z方向移动时，位置测量探头沿参考样本移动，从而检测具有再现参考样本的凹面形状的波形的隧道电流。 因此，可以从检测到的隧道电流的波形获得扫描探针的移动距离。

公开(公告)号：USD335888S

公开(公告)日：1993-05-25

申请号：US621550

申请日：1990-12-03

申请人： Takao Okada ,  Tsugiko Takase ,  Shuzo Mishima ,  Hisanari Shimazu ,  Akira Yagi ,  Hiroko Ota ,  Hirofumi Miyamoto ,  Takaaki Takenobu

设计人： Takao Okada ,  Tsugiko Takase ,  Shuzo Mishima ,  Hisanari Shimazu ,  Akira Yagi ,  Hiroko Ota ,  Hirofumi Miyamoto ,  Takaaki Takenobu

公开(公告)号：US5083022A

公开(公告)日：1992-01-21

申请号：US589491

申请日：1990-09-27

申请人： Hirofumi Miyamoto ,  Tsugiko Takase ,  Takao Okada ,  Shuzo Mishima ,  Hiroko Ohta

发明人： Hirofumi Miyamoto ,  Tsugiko Takase ,  Takao Okada ,  Shuzo Mishima ,  Hiroko Ohta

IPC分类号： G01B7/34 ,  G01N27/00 ,  G01Q10/02 ,  G01Q20/02 ,  G01Q30/02 ,  G01Q60/10 ,  H01J37/28 ,  H01J37/00

CPC分类号： G01Q70/02 ,  B82Y35/00 ,  G01Q10/02 ,  G01Q30/025 ,  G01Q60/16 ,  B82Y20/00 ,  Y10S977/869

摘要： A scanning tunneling microscope includes an observation optical system for optically observing the surface of an object. The optical system is fixed on an optical system fixing member. The optical system is moved in a direction (Z-direction) vertical to the surface of the object by means of a motor, whereby the focal point of the optical system is adjusted. An STM measurement probe supported by an optically transparent member is disposed between the optical system and the object. When the object is optically observed, the probe is displaced from the focal point by means of a micrometer. Thus, an optical observation image of the surface of the object, which is not affected by the shadow of the probe, can be obtained. When the STM measurement is carried out, a probe unit enables the probe to scan the surface of the object, and an STM image is obtained by a conventional method.

公开(公告)号：US5138159A

公开(公告)日：1992-08-11

申请号：US727005

申请日：1991-07-08

申请人： Tsugiko Takase ,  Takao Okada

发明人： Tsugiko Takase ,  Takao Okada

IPC分类号： G01B7/34 ,  G01B11/30 ,  G01N37/00 ,  G01Q10/00 ,  G01Q20/02 ,  G01Q30/04 ,  G01Q60/02 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q60/22 ,  G01Q70/10 ,  G02B21/00 ,  H01J37/28

CPC分类号： G01Q60/16 ,  B82Y20/00 ,  B82Y35/00 ,  G01Q60/22 ,  Y10S977/852 ,  Y10S977/861

摘要： White light emitted from a light source is made incident on a spectroscope via a lens. The light from the spectroscope is converged by a lens and fed to one end of an optical fiber. The other end of the fiber is provided with a probe. The probe has a pointed end portion coated with a total reflection film and a transparent electrically conductive film. The probe is attached to a cylindrical piezoelectric actuator via a metal frame. Thus, the probe is scanned along the surface of a sample, and the distance between the probe and the surface of the sample is controlled. The light emitted from the tip of the probe and transmitted through the sample is converged by a lens system and radiated on a photoelectrical conversion element. The output from the photoelectrical conversion element is processed by a signal processor, and the processed result is displayed on a display. A driver circuit scans the probe along the surface of the sample, and controls the distance between the probe and the sample upon receiving a tunnel current. The output from the driver circuit is processed by the signal processor and an STM image is displayed on the display.

摘要翻译： 从光源发出的白光通过透镜入射到分光镜上。 来自分光镜的光由透镜会聚并馈送到光纤的一端。 纤维的另一端设置有探针。 探针具有涂覆有全反射膜和透明导电膜的尖端部分。 探头通过金属框架连接到圆柱形压电致动器。 因此，沿着样品的表面扫描探针，并且控制探针与样品表面之间的距离。 从探针的尖端发射并透过样品的光由透镜系统会聚并辐射到光电转换元件上。 光电转换元件的输出由信号处理器处理，处理结果显示在显示器上。 驱动电路沿着样品的表面扫描探头，并在接收隧道电流时控制探头与样品之间的距离。 来自驱动电路的输出由信号处理器处理，STM图像显示在显示器上。

公开(公告)号：US5059793A

公开(公告)日：1991-10-22

申请号：US591457

申请日：1990-10-01

申请人： Hirofumi Miyamoto ,  Takao Okada ,  Tsugiko Takase ,  Shuzo Mishima ,  Hiroko Ota

发明人： Hirofumi Miyamoto ,  Takao Okada ,  Tsugiko Takase ,  Shuzo Mishima ,  Hiroko Ota

IPC分类号： G01N27/00 ,  G01Q10/00 ,  G01Q30/06 ,  G01Q60/16

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  Y10S977/851

摘要： A scanning tunneling microscope includes a piezoelectric driver expanding and contracting according to a voltage applied thereto to adjust the distance between a sample and a probe. A servo circuit outputs a servo voltage to control the expansion and contraction of the piezoelectric driver to keep a tunnel current flowing between the sample and the probe at a constant value. A correction voltage generating circuit generates a given correction voltage to correct a voltage to be applied to the piezoelectric driver. An adding circuit adds the servo voltage and the correction voltage together and supplies an added output to the piezoelectric driver. A control circuit controls the correction voltage according to the servo voltage to set the added output to a given reference voltage.

公开(公告)号：US5041783A

公开(公告)日：1991-08-20

申请号：US475169

申请日：1990-02-05

申请人： Hiroko Ohta ,  Tsugiko Takase ,  Shuzo Mishima ,  Hirofumi Miyamoto ,  Takao Okada

发明人： Hiroko Ohta ,  Tsugiko Takase ,  Shuzo Mishima ,  Hirofumi Miyamoto ,  Takao Okada

IPC分类号： G01B7/34 ,  G01N27/00 ,  G01N37/00 ,  G01Q30/02 ,  G01Q30/08 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q60/38 ,  G01R31/00 ,  H01J37/00 ,  H01J37/28

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q30/025 ,  G01Q70/02 ,  Y10S977/861

摘要： A probe unit includes a disk-like substrate made of transparent material, a transparent electrode coated on all over the substrate, and a metal wire whose sharp tip is projected vertically and upwardly from the center of the substrate through the transparent electrode. The metal wire is made of Pt-Ir, which incudes a sharp tip projected from the upper surface of the substrate and a stem embedded in a hole of the electrode and fixed to the electrode and substrate by conductive adhesive.

公开(公告)号：US5296704A

公开(公告)日：1994-03-22

申请号：US821123

申请日：1992-01-14

申请人： Shuzo Mishima ,  Takao Okada ,  Tsugiko Takase ,  Hiroko Ota ,  Hirofumi Miyamoto

发明人： Shuzo Mishima ,  Takao Okada ,  Tsugiko Takase ,  Hiroko Ota ,  Hirofumi Miyamoto

IPC分类号： G01Q20/02 ,  G01B7/34 ,  G01B21/30 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/04 ,  G01Q30/02 ,  G01Q30/20 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q70/04 ,  H01J37/00

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q30/025 ,  G01Q30/08 ,  G01Q30/18 ,  Y10S977/869

摘要： A scanning tunneling microscope has an STM unit including a probe for scanning the surface of an object. The STM unit has at its outer peripheral surface a cylindrical enclosing member extending towards an object table. When the object is observed, the object table is elevated or the STM unit is lowered, so that the enclosing member is urged upon the table. The table and the STM unit constitute one body. As a result, relative movement between the object and the probe can be prevented, and also influence due to vibration can be prevented. In addition, the enclosing member isolates the object and the probe from the outside space, whereby electric noise, magnetic noise, sound noise and air flow are shielded. Thus, the influence due to external vibration can be reduced, and the stability is enhanced.

摘要翻译： 扫描隧道显微镜具有包括用于扫描物体表面的探针的STM单元。 STM单元在其外周表面具有朝向物台延伸的圆柱形封闭构件。 当观察对象时，对象表被升高或者STM单元被降低，使得封闭构件被推到桌子上。 表和STM单元构成一体。 结果，可以防止物体和探针之间的相对运动，并且还可以防止由振动引起的影响。 此外，封闭构件将物体和探针与外部空间隔离，由此屏蔽电噪声，磁噪声，声音噪声和空气流。 因此，可以降低由外部振动引起的影响，提高稳定性。

公开(公告)号：US5289004A

公开(公告)日：1994-02-22

申请号：US866748

申请日：1992-04-10

申请人： Takao Okada ,  Akira Yagi ,  Yasuhiro Sugawara ,  Seizo Morita ,  Tsugiko Takase

发明人： Takao Okada ,  Akira Yagi ,  Yasuhiro Sugawara ,  Seizo Morita ,  Tsugiko Takase

IPC分类号： G01Q10/00 ,  G01Q10/06 ,  G01Q20/02 ,  G01Q60/04 ,  G01Q60/12 ,  G01Q60/14 ,  G01Q60/38 ,  H01J37/00

CPC分类号： G01Q60/12 ,  B82Y35/00 ,  G01Q10/065 ,  G01Q20/02 ,  G01Q60/04 ,  G01Q60/14 ,  Y10S977/861 ,  Y10S977/863 ,  Y10S977/868

摘要： A scanning probe microscope comprises a cantilever having a conductive probe positioned near a sample, an actuator for moving the sample to and away from the probe, a circuit for applying a bias voltage between the probe and sample to produce a tunnel current therebetween, a circuit for detecting the produced tunnel current, a circuit for detecting the amount of displacement of the probe resultant from interatomic forces acting between atomics of the probe and sample, thereby producing signals, a circuit for providing the actuator for feedback in response to the output signals from the circuit to retain constant the distance between the probe and sample, thereby causing the actuator to move the sample, a circuit for forming an STS image data from the detected tunnel current, a circuit for forming an STM image data from the detected tunnel current, and a circuit for forming an AFM image data. Thus, the STS, STP and AFM images are separately obtained simultaneously.

摘要翻译： 扫描探针显微镜包括具有位于样品附近的导电探针的悬臂，用于将样品移动到远离探针的致动器，用于在探针和样品之间施加偏置电压以在其间产生隧道电流的电路，电路 用于检测产生的隧道电流的电路，用于检测由探针和样品的原子间作用的原子间力产生的探针的位移量，从而产生信号的电路，用于响应于来自 保持探针和样品之间的距离恒定的电路，从而使致动器移动样本，从检测到的隧道电流形成STS图像数据的电路，用于从检测到的隧道电流形成STM图像数据的电路， 以及用于形成AFM图像数据的电路。 因此，STS，STP和AFM图像同时分别获得。

公开(公告)号：US5260824A

公开(公告)日：1993-11-09

申请号：US511054

申请日：1990-04-19

申请人： Takao Okada ,  Shuzo Mishima ,  Tsugiko Takase ,  Hirofumi Miyamoto ,  Hiroko Ohta ,  Yasushi Satoh ,  Yoshimitsu Enomoto ,  Toshiaki Matsuzawa ,  Yuzo Nakamura ,  Hiroshi Kajimura

发明人： Takao Okada ,  Shuzo Mishima ,  Tsugiko Takase ,  Hirofumi Miyamoto ,  Hiroko Ohta ,  Yasushi Satoh ,  Yoshimitsu Enomoto ,  Toshiaki Matsuzawa ,  Yuzo Nakamura ,  Hiroshi Kajimura

IPC分类号： G01B7/34 ,  G01B21/30 ,  G01L5/00 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/02 ,  G01Q60/38 ,  G02B4/00 ,  G01B5/28 ,  G01N23/00

CPC分类号： G01Q60/38 ,  B82Y35/00 ,  G01Q20/02 ,  G01Q30/025 ,  Y10S977/87

摘要： An atomic force microscope comprises a probe having a sharply-pointed tip end. The probe is supported on the free end portion of a cantilever and is close to the surface of a specimen. When an interatomic force is produced, the cantilever is deformed, and the probe is displaced. The displacement of the probe is detected by an optical system. A light beam emitted from a light source is collimated by a lens, and reflected by a polarized beam-splitter, and also by a half-mirror. Then, the light beam passes through a quarter wavelength plate and an objective lens, such that the light is converged on the cantilever. The reflected light beam from the cantilever returns along the same optical path and passes through the splitter. The light beam is divided into two light beams at the splitter. These two light beams are reflected by respective prisms and are then incident on respective photodetectors. These photodetectors detect the displacement of the probe.

公开(公告)号：US6127681A

公开(公告)日：2000-10-03

申请号：US460076

申请日：1990-02-05

申请人： Chiaki Sato ,  Kiyozo Koshiishi ,  Sadao Shigetomi ,  Shuzo Mishima ,  Tsugiko Takase

发明人： Chiaki Sato ,  Kiyozo Koshiishi ,  Sadao Shigetomi ,  Shuzo Mishima ,  Tsugiko Takase

IPC分类号： A61K31/41 ,  A61K31/433 ,  A61K31/535 ,  A61P25/02 ,  A61P27/02 ,  C07D285/10 ,  C07D417/00 ,  C07D417/12 ,  G01B7/34 ,  G01B21/30 ,  G01N27/00 ,  G01N37/00 ,  G01Q30/02 ,  G01Q60/10 ,  G01Q60/16 ,  G02B21/00 ,  H01L41/09 ,  G12B21/20

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  C07D285/10 ,  C07D417/12 ,  G01Q30/025 ,  G02B21/002 ,  H01L41/092 ,  H02N2/023 ,  H02N2/028 ,  Y10S977/869

摘要： A scanning tunnel microscope is arranged by a combination of an optical microscope and a tunnel scanning unit. The scanning tunnel unit includes a probe held to be spaced apart from a sample placed on a sample table by a predetermined interval in an axial direction, and an actuator for axially moving the sample table and the probe to a tunnel region and relatively and three-dimensionally driving the sample table and the probe. An objective lens and the probe are arranged such that the axis of the probe of the scanning tunnel unit is aligned with an optical axis of the objective lens of the optical microscope. The sample and the probe are axially moved and brought into the tunnel region, and the sample is scanned in its surface direction while the sample and the probe are finely moved in the axial direction and a tunnel current is kept constant, thereby performing an STM observation of an observation surface of the sample. The objective lens of the optical microscope is axially moved to obtain an in-focus state, and the field of the STM observation surface is observed as an optical microscopic image through an eyepiece lens.

摘要翻译： PCT No.PCT / JP88 / 00804 Sec。 371 1990年2月5日第 102（e）日期1990年2月5日PCT提交1988年8月12日PCT公布。 公开号WO89 / 01603 日期1989年2月23日扫描隧道显微镜通过光学显微镜和隧道扫描单元的组合布置。 扫描隧道单元包括：保持与沿轴向方向预定间隔放置在样品台上的样品间隔开的探针;以及用于将样品台和探针轴向移动到隧道区域的致动器， 在尺寸上驱动样品台和探针。 物镜和探针被布置成使得扫描隧道单元的探针的轴线与光学显微镜的物镜的光轴对准。 样品和探针被轴向移动并进入隧道区域，并且在样品和探针沿轴向细微移动并且隧道电流保持恒定的同时沿其表面方向扫描样品，从而进行STM观察 的样品的观察表面。 轴向移动光学显微镜的物镜以获得对焦状态，并且通过目镜透镜观察STM观察表面的场作为光学显微镜图像。