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    Aluminum nitride sintered body, electronic functional material, and electrostatic chuck
    4.
    发明授权
    Aluminum nitride sintered body, electronic functional material, and electrostatic chuck 有权
    氮化铝烧结体，电子功能材料和静电吸盘

    公开(公告)号：US5998321A

    公开(公告)日：1999-12-07

    申请号：US152296

    申请日：1998-09-14

    申请人： Yuji Katsuda ,  Kiyoshi Araki ,  Tsuneaki Ohashi

    发明人： Yuji Katsuda ,  Kiyoshi Araki ,  Tsuneaki Ohashi

    IPC分类号： C04B35/581 ,  H01L21/683

    CPC分类号： H01L21/6833 ,  C04B35/581 ,  Y10T279/23

    摘要： This invention relates to an aluminum nitride sintered body comprising aluminum nitride crystal grains, in which the grains have a given content of a rare earth element (a conversion content as an oxide thereof), a given average grain size, and a given spin amount per unit mg of aluminum obtained from a spectrum as measured by an electron spin resonance method. The aluminum nitride sintered body is used in an electronic functional material and an electrostatic chuck.

    摘要翻译： 本发明涉及包含氮化铝晶粒的氮化铝烧结体，其中颗粒具有给定含量的稀土元素（其转化率为其氧化物），给定的平均晶粒尺寸和给定的自旋量 从通过电子自旋共振法测定的光谱获得的单位mg的铝。 氮化铝烧结体用于电子功能材料和静电吸盘。

    Electrically heated substrate with multiple ceramic parts each having different volume resitivities
    5.
    发明授权
    Electrically heated substrate with multiple ceramic parts each having different volume resitivities 有权
    具有多个陶瓷部件的电加热衬底，每个陶瓷部件具有不同的体积电阻率

    公开(公告)号：US06294771B2

    公开(公告)日：2001-09-25

    申请号：US09753481

    申请日：2001-01-03

    申请人： Yuji Katsuda ,  Kiyoshi Araki ,  Tsuneaki Ohashi

    发明人： Yuji Katsuda ,  Kiyoshi Araki ,  Tsuneaki Ohashi

    IPC分类号： H01L21205

    CPC分类号： H05B3/748 ,  H05B3/283 ,  H05B3/74 ,  Y10T29/49083

    摘要： A heater comprising a substrate having a heating surface to treat a substance to be heated on the substrate, a heating element embedded in the substrate, and a resistance control part, wherein the substrate comprises a first ceramic material and the resistance control part comprises a second ceramic material which has higher volume resistivity than that of the first ceramics.

    摘要翻译： 一种加热器，包括具有用于处理在基板上被加热物质的加热面的基板，嵌入基板的加热元件和电阻控制部，其中，所述基板包括第一陶瓷材料，所述电阻控制部包括第二 具有比第一陶瓷体积电阻率高的陶瓷材料。

    Semiconductor supporting device
    7.
    发明授权
    Semiconductor supporting device 失效
    半导体支持装置

    公开(公告)号：US6051303A

    公开(公告)日：2000-04-18

    申请号：US122894

    申请日：1998-07-28

    申请人： Yuji Katsuda ,  Kiyoshi Araki ,  Tsuneaki Ohashi

    发明人： Yuji Katsuda ,  Kiyoshi Araki ,  Tsuneaki Ohashi

    IPC分类号： B23Q3/15 ,  C04B35/581 ,  G03F7/20 ,  H01L21/683 ,  H02N13/00 ,  B32B3/24 ,  B32B9/00

    CPC分类号： G03F7/70691 ,  H01L21/6831 ,  Y10T279/23 ,  Y10T428/24322 ,  Y10T428/24331 ,  Y10T428/24339 ,  Y10T428/24347

    摘要： A semiconductor-supporting device comprising a substrate made of an aluminum nitride-based ceramic material and having a semiconductor-placing surface, wherein an orientation degree of the aluminum nitride-based ceramic material specified by the following formula is not less than 1.1 and not more than 2.0.Orientation degree=[I'(002)/I'(100)]/[I(002)/I(100)]in which in an X-ray diffraction measurement, I'(002) is a diffraction intensity of a (002) face of the aluminum nitride-based ceramic material when X-rays are irradiated from the semiconductor-placing surface, I'(100) is a diffraction intensity of a (100) face of the aluminum nitride-based ceramic material when X-rays are irradiated from the semiconductor-placing surface, I(002) is a diffraction intensity of the (002) face of the aluminum nitride ceramic according to a JCPDS Card No. 25-1133, and I(100) is a diffraction intensity of the (100) face of the aluminum nitride ceramic according to a JCPDS Card No. 25-1133.

    摘要翻译： 一种半导体支撑装置，包括由氮化铝基陶瓷材料制成并具有半导体放置表面的衬底，其中由下式确定的氮化铝基陶瓷材料的取向度不小于1.1，而不是更大 在其中在X射线衍射测量中，I'（002）是衍射强度（I）（002）/ I'（100）] / [I（002）/ I（100） 当从半导体放置表面照射X射线时，氮化铝基陶瓷材料的（002）面的I'（100）是氮化铝基陶瓷材料的（100）面的衍射强度 当从半导体放置面照射X射线时，I（002）是根据JCPDS卡号25-1133的氮化铝陶瓷的（002）面的衍射强度，I（100）是 根据JCPDS卡号25-1133的氮化铝陶瓷的（100）面的衍射强度。

    Electrically heated substrate with multiple ceramic parts each having different volume restivities
    9.
    发明授权
    Electrically heated substrate with multiple ceramic parts each having different volume restivities 有权
    具有多个陶瓷部件的电加热衬底，每个陶瓷部件具有不同的体积恢复性

    公开(公告)号：US06204489B1

    公开(公告)日：2001-03-20

    申请号：US09218701

    申请日：1998-12-22

    申请人： Yuji Katsuda ,  Kiyoshi Araki ,  Tsuneaki Ohashi

    发明人： Yuji Katsuda ,  Kiyoshi Araki ,  Tsuneaki Ohashi

    IPC分类号： H01L21205

    CPC分类号： H05B3/748 ,  H05B3/283 ,  H05B3/74 ,  Y10T29/49083

    摘要： A heater including a substrate having a heating surface to treat a substance to be heated on the substrate, a heating element embedded in the substrate, and a resistance control part. The substrate includes a first ceramic material and the resistance control part includes a second ceramic material which has higher volume resistivity than that of the first ceramic material.

    摘要翻译： 一种加热器，包括具有用于处理基板上待加热物质的加热面的基板，嵌入基板的加热元件和电阻控制部。 基板包括第一陶瓷材料，并且电阻控制部分包括具有比第一陶瓷材料的体积电阻率更高的体积电阻率的第二陶瓷材料。