摘要:
A silicon nitride substrate comprises a substrate comprising a silicon nitride sintered body, and a plurality of granular bodies containing silicon and integrated to a principal surface of the substrate, wherein a plurality of needle crystals or column crystals comprising mainly silicon nitride are extended from a portion of the granular bodies. A brazing material is applied to a principal surface of the substrate, and a circuit member and a heat radiation member are arranged on the applied brazing material, and bonded by heating. Because of a plurality of granular bodies integrated to the principal surface of the substrate, and a plurality of the needle crystals or the column crystals extended from a portion of the granular bodies, a high anchor effect is produced so that the circuit member and the heat radiation member are firmly bonded to the silicon nitride substrate.
摘要:
[Problem] To provide a filter whose initial collection efficiency can be increased and whose pressure loss increase can be suppressed.[Means to solve the problem] A ceramic filter includes: numerous crystalline masses bound to one another each formed of aggregation of columnar crystals, wherein a number of large diameter pores are present between the numerous crystalline masses, and small diameter pores are present between the numerous columnar crystals forming the crystalline mass.
摘要:
A process for manufacturing a ceramic filter includes mixing silicon, yttrium oxide-doped zirconia, magnesium-aluminum spinel, silicon nitride, a pore-forming material, and a binder to form a ceramic precursor; extruding the ceramic precursor into a generally honeycomb shaped monolithic filter precursor or into a single filter tube precursor; drying the filter precursor or filter tube precursor to form a dried ceramic precursor; heating the dried ceramic precursor to remove the binder; and sintering to form the silicon nitride ceramic filter.
摘要:
A silicon nitride cutting tool comprising a sintered product is disclosed. The sintered product comprises silicon nitride, at least one rare earth element compound, and a magnesium compound. The silicon nitride cutting tool further comprises a surface region and an inside region comprising the sintered product with varying content ratios of component compounds to provide enhanced wear and fracture resistance.
摘要:
In the silicon nitride substrate concerning an embodiment of the invention, degree of in-plane orientation fa of β type silicon nitride is 0.4-0.8. Here, degree of in-plane orientation fa can be determined by the rate of the diffracted X-ray intensity in each lattice plane orientation in β type silicon nitride. As a result of research by the inventors, it turned out that both high fracture toughness and high thermal conductivity are acquired, when degree of in-plane orientation fa was 0.4-0.8. Along the thickness direction, both the fracture toughness of 6.0 MPa·m1/2 or higher and the thermal conductivity of 90 W/m·K or higher can be attained.
摘要:
A sintered refractory block based on silicon carbide (SiC) with a silicon nitride (Si3N4) bond, for the manufacture of a aluminium electrolysis vessel, characterized in that it comprises, expressed in percentage by weight, at least 0.05% boron and/or between 0.05 and 1.2% calcium.
摘要翻译:一种基于具有氮化硅(Si 3 N 4)键的碳化硅(SiC)的烧结耐火块,用于制造铝电解容器,其特征在于,其包含以百分比表示的至少0.05%的硼和/或在 0.05和1.2%的钙。
摘要:
A method for preparing a high-pressure phase cubic spinel-type silicon nitride includes housing a molding containing low-pressure phase silicon nitride powder and a metal powder in a cylindrical container, arranging an explosive in the cylindrical container so as to surround the molding, and exploding the explosive to compress the molding. An X-ray diffraction pattern of the high-pressure phase cubic spinel-type silicon nitride produced according to the method of the present invention shows a maximum peak having a full width at half maximum of 0.65 degrees or less. TG-DTA analysis of the cubic spinel-type silicon nitride shows a weight change starting temperature of 700 to 1100° C.
摘要:
Composite materials containing silicon, titanium, carbon, and nitrogen, formed by spark plasma sintering of ceramic starting materials to a high relative density, demonstrate unusually high electrical conductivity as well as high-performance mechanical and chemical properties including hardness, fracture toughness, and corrosion resistance. This combination of electrical, mechanical, and chemical properties makes these composites useful as electrical conductors in applications where high-performance materials are needed due to exposure to extreme conditions such as high temperatures, mechanical stresses, and corrosive environments.
摘要:
An electrostatic chuck is provided. Implemented according to an embodiment of the present invention is an electrostatic chuck comprising: a silicon nitride sintered body; a surface modification layer covering at least a portion of the external surface of the silicon nitride sintered body and having corrosion resistance and plasma resistance; and an electrostatic electrode laid inside the silicon nitride sintered body. Therefore, the electrostatic chuck includes a ceramic sintered body of silicon nitride, and thus has excellent plasma resistance, chemical resistance, and thermal shock resistance while exhibiting an equivalent or similar level of heat dissipation performance compared to ceramic sintered bodies of aluminum nitride that have been conventionally widely used, so that the electrostatic chuck can be widely used in semiconductor processes.
摘要:
Disclosed are ceramic powder compositions that include Si, N, O, C, Mg, and/or Mn in tailored combinations of different crystalline phases for producing high temperature resistant and high strength ceramic products. In some aspects, a ceramic powder for producing high temperature-resistant and/or high mechanical strength materials comprises a silicon nitride (Si3N4) powder, comprising Si3N4 particles having a size within a range of 30 nm to 700 nm, wherein the Si3N4 powder include alpha and beta phase silicon nitride in an amount up to about 1-100% vol; and an impurity constituent intermixed with the Si3N4 powder within the ceramic powder, the impurity constituent comprising at least one of silicon (Si), nitrogen (N), oxygen (O), carbon (C), magnesium (Mg), or manganese (Mn), wherein the impurity constituent constitutes less than about 0.1% wt to 15% wt of the ceramic powder.