Piezoelectric/electrostrictive film type device and method of manufacturing the same
    7.
    发明申请
    Piezoelectric/electrostrictive film type device and method of manufacturing the same 有权
    压电/电致伸缩薄膜型器件及其制造方法

    公开(公告)号:US20060066176A1

    公开(公告)日:2006-03-30

    申请号:US11233391

    申请日:2005-09-22

    IPC分类号: H01L41/18

    摘要: There is disclosed a piezoelectric/electrostrictive film type device 1 provided with: a thin substrate 2 made of a ceramic; and a piezoelectric/electrostrictive operating portion 5 disposed on the substrate 2 and constituted by successively laminating a lower electrode film 3a, a piezoelectric/electrostrictive film 4 containing a large number of crystal particles constituted of a piezoelectric/electrostrictive composition, and an upper electrode film 3b. The piezoelectric/electrostrictive composition contains one or more alkali metal elements selected from the group consisting of lithium (Li), potassium (K), and sodium (Na), and one or more metal elements selected from the group consisting of niobium (Nb), tantalum (Ta), antimony (Sb), and silver (Ag) (however, surely containing niobium (Nb), and circle equivalent diameters of 90% or more of the large number of crystal particles are in a range of 0.3 to 50 μm. It is possible to exhibit a superior piezoelectric/electrostrictive characteristic without containing lead (Pb) and obtain an especially large displacement.

    摘要翻译: 公开了一种压电/电致伸缩膜型器件1,其设置有:由陶瓷制成的薄基片2; 以及压电/电致伸缩操作部分5,其设置在基板2上,并且通过连续地层叠下电极膜3a,包含大量由压电/电致伸缩组合物构成的晶体颗粒和上电极的压电/电致伸缩膜4 电影3 b。 压电/电致伸缩组合物含有一种或多种选自锂(Li),钾(K)和钠(Na)的碱金属元素,以及一种或多种选自铌(Nb) ,钽(Ta),锑(Sb)和银(Ag)(然而,确实含有铌(Nb),圆当量直径为90%以上的大量结晶粒子的范围为0.3〜50 可以显示出优异的压电/电致伸缩特性,而不含铅(Pb),并获得特别大的位移。

    Piezoelectric/electrostrictive film type device and method of manufacturing the same
    10.
    发明授权
    Piezoelectric/electrostrictive film type device and method of manufacturing the same 有权
    压电/电致伸缩薄膜型器件及其制造方法

    公开(公告)号:US07332851B2

    公开(公告)日:2008-02-19

    申请号:US11233391

    申请日:2005-09-22

    IPC分类号: H01L41/187

    摘要: A piezoelectric/electrostrictive film device is provided including a thin ceramic substrate and a piezoelectric/electrostrictive operating portion disposed on the substrate. The piezoelectric/electrostrictive operating portion includes a lower electrode film, a piezoelectric/electrostrictive film including a large number of crystal particles having a piezoelectric/electrostrictive composition, and an upper electrode film successively laminated on the substrate. The piezoelectric/electrostrictive composition excludes lead and contains one or more alkali metal elements selected from the group consisting of lithium, potassium, and sodium, and one or more metal elements selected from the group consisting of niobium, tantalum, antimony, and silver. Circle equivalent diameters of at least 90% of the crystal particles in the piezoelectric/electrostrictive film are in a range of 0.3 to 50 μm.

    摘要翻译: 提供一种压电/电致伸缩膜装置,其包括薄陶瓷基板和设置在基板上的压电/电致伸缩操作部分。 压电/电致伸缩操作部分包括下电极膜,包括大量具有压电/电致伸缩组合物的晶体颗粒的压电/电致伸缩膜以及依次层压在基板上的上电极膜。 压电/电致伸缩组合物不包括铅,并含有一种或多种选自锂,钾和钠的碱金属元素,以及一种或多种选自铌,钽,锑和银的金属元素。 压电/电致伸缩膜中晶体颗粒的至少90%的圆当量直径在0.3-50μm的范围内。