POLYMER-BASED CARDIOVASCULAR BIOSENSORS, MANUFACTURE, AND USES THEREOF
    1.
    发明申请
    POLYMER-BASED CARDIOVASCULAR BIOSENSORS, MANUFACTURE, AND USES THEREOF 审中-公开
    基于聚合物的血管生物传感器,制造及其用途

    公开(公告)号:US20080302675A1

    公开(公告)日:2008-12-11

    申请号:US12134938

    申请日:2008-06-06

    IPC分类号: B44C1/22 G01N27/26

    摘要: A flexible, polymer-based biosensor deployable into the arterial system which can assess shear stress in the arterial geometry in the presence of time-varying component of blood flow. Also, a method of fabricating a biosensor which may be used for in vivo procedures, involving the sequential depositing onto a substrate of a silicon dioxide layer, a metal heating element on the silicon dioxide layer, and a biocompatible polymer on the heating element, followed by etching the polymer layer to provide holes to allow for electrode contact with the heating element. A second metal layer is then deposited to form electrodes, followed by a second biocompatible polymer layer to form the device structure and removing the fabricated biosensor from the substrate by etching the substrate. In addition, a method of determining intravascular shear stress by measuring the temperature, flow rate and pressure of a bodily fluid with a biocompatible biosensor is disclosed.

    摘要翻译: 柔性的基于聚合物的生物传感器可部署到动脉系统中,其可以在存在血流时变分量的情况下评估动脉几何形状中的剪切应力。 此外,制造可用于体内程序的生物传感器的方法,包括顺序沉积到二氧化硅层的基底上,二氧化硅层上的金属加热元件和加热元件上的生物相容性聚合物,随后 通过蚀刻聚合物层以提供孔以允许电极与加热元件接触。 然后沉积第二金属层以形成电极,随后是第二生物相容性聚合物层以形成器件结构,并通过蚀刻衬底从衬底去除所制造的生物传感器。 另外,公开了通过用生物相容性生物传感器测量体液的温度,流速和压力来确定血管内剪切应力的方法。

    MEMS VASCULAR SENSOR
    2.
    发明申请
    MEMS VASCULAR SENSOR 审中-公开
    MEMS血管传感器

    公开(公告)号:US20120215121A1

    公开(公告)日:2012-08-23

    申请号:US13461716

    申请日:2012-05-01

    IPC分类号: A61B5/027

    CPC分类号: B81C1/00246 G01N3/24

    摘要: A micromachined sensor for measuring vascular parameters, such as fluid shear stress, includes a substrate having a front-side surface, and a backside surface opposite the front-side surface. The sensor includes a diaphragm overlying a cavity etched within the substrate, and a heat sensing element disposed on the front-side surface of the substrate and on top of the cavity and the diaphragm. The heat sensing element is electrically couplable to electrode leads formed on the backside surface of the substrate. The sensor includes an electronic system connected to the backside surface and configured to measure a change in heat convection from the sensing element to surrounding fluid when the sensing element is heated by applying an electric current thereto, and further configured to derive from the change in heat convection vascular parameters such as the shear stress of fluid flowing past the sensing element.

    摘要翻译: 用于测量诸如流体剪切应力的血管参数的微加工传感器包括具有前侧表面的基底和与前侧表面相对的背侧表面。 传感器包括覆盖在衬底内蚀刻的空腔的膜片,以及设置在衬底的前侧表面上并且在空腔和隔膜顶部上的感热元件。 热敏元件可电连接到形成在基板的背面上的电极引线。 所述传感器包括连接到所述背面的电子系统,并且被配置为当通过向其施加电流来加热所述感测元件时,测量从所述感测元件到周围流体的热对流变化,并进一步被配置为从热变化 对流血管参数,例如流过感测元件的流体的剪切应力。

    MEMS vascular sensor
    3.
    发明授权
    MEMS vascular sensor 有权
    MEMS血管传感器

    公开(公告)号:US08216434B2

    公开(公告)日:2012-07-10

    申请号:US12041577

    申请日:2008-03-03

    IPC分类号: C23C14/34

    CPC分类号: B81C1/00246 G01N3/24

    摘要: A micromachined sensor for measuring vascular parameters, such as fluid shear stress, includes a substrate having a front-side surface, and a backside surface opposite the front-side surface. The sensor includes a diaphragm overlying a cavity etched within the substrate, and a heat sensing element disposed on the front-side surface of the substrate and on top of the cavity and the diaphragm. The heat sensing element is electrically couplable to electrode leads formed on the backside surface of the substrate. The sensor includes an electronic system connected to the backside surface and configured to measure a change in heat convection from the sensing element to surrounding fluid when the sensing element is heated by applying an electric current thereto, and further configured to derive from the change in heat convection vascular parameters such as the shear stress of fluid flowing past the sensing element.

    摘要翻译: 用于测量诸如流体剪切应力的血管参数的微加工传感器包括具有前侧表面的基底和与前侧表面相对的背侧表面。 传感器包括覆盖在衬底内蚀刻的空腔的膜片,以及设置在衬底的前侧表面上并且在空腔和隔膜顶部上的感热元件。 热敏元件可电连接到形成在基板的背面上的电极引线。 所述传感器包括连接到所述背面的电子系统,并且被配置为当通过向其施加电流来加热所述感测元件时,测量从所述感测元件到周围流体的热对流变化,并进一步被配置为从热变化 对流血管参数,例如流过感测元件的流体的剪切应力。

    Method of forming parylene-diaphragm piezoelectric acoustic transducers
    7.
    发明授权
    Method of forming parylene-diaphragm piezoelectric acoustic transducers 失效
    聚对二甲苯隔膜压电声换能器的形成方法

    公开(公告)号:US06857501B1

    公开(公告)日:2005-02-22

    申请号:US10089008

    申请日:2000-09-21

    IPC分类号: H04R17/00 H04R31/00 H04R7/00

    摘要: A micromachined acoustic transducer comprising a parylene diaphragm piezoelectric transducer. The parylene diaphragm has far lower stiffness than the silicon nitride. The method for fabricating the parylene diaphragm acoustic transducer utilizes a prestructured disphragm layer utilizing silicon nitride which is compatible with high temperature semiconductor process. A silicon nitride layer is patterned and partially removed after forming the parylene diaphragm layer in order to enhance the structural qualities of the parylene diaphragm. The diaphragm may be flat or dome-shaped.

    摘要翻译: 一种包含聚对二甲苯隔膜压电换能器的微机械声换能器。 聚对二甲苯隔膜的刚度低于氮化硅。 用于制造聚对二甲苯隔膜声换能器的方法利用与高温半导体工艺相兼容的利用氮化硅的预结构层状层。 在形成聚对二甲苯隔膜层之后,对氮化硅层进行构图和部分去除,以增强聚对二甲苯隔膜的结构质量。 隔膜可以是平的或圆顶形的。

    Acoustic wave micromixer using fresnel annular sector actuators
    8.
    发明授权
    Acoustic wave micromixer using fresnel annular sector actuators 失效
    声波微混合器使用菲涅尔环形扇形执行器

    公开(公告)号:US06682214B1

    公开(公告)日:2004-01-27

    申请号:US10089042

    申请日:2002-03-21

    IPC分类号: B01F1300

    摘要: A Fresnel Annular Sector Actuator (FASA) for micromixing of fluids, utilizes a self-focusing acoustic wave transducer which focuses acoustic waves through constructive wave interference. In the transducer, RF power is applied between the electrodes (sandwiching a piezoelectric film) with its frequency preferably corresponding to the thickness mode resonance of the piezoelectric film. Strong acoustic waves are generated over the electrode area, and interfere with each other as they propagate in the fluid. By proper design of the electrodes, and forming various combinations of the electrodes, wave focusing can be achieved. The mixing can be further enhanced by providing selective actuation and sequencing of the different segments by an RF signal source.

    摘要翻译: 用于液体微混合的菲涅尔环形扇形致动器(FASA)利用自聚焦声波传感器,其通过建构性的波干扰来聚焦声波。 在换能器中,RF电源施加在电极(夹持压电膜)之间,其频率优选地对应于压电膜的厚度模式共振。 在电极区域上产生强烈的声波,并且当它们在流体中传播时彼此干扰。 通过适当设计电极,并形成电极的各种组合,可实现波聚焦。 通过由RF信号源提供对不同段的选择性致动和排序,可以进一步增强混合。