公开(公告)号：US5663973A

公开(公告)日：1997-09-02

申请号：US661229

申请日：1996-06-10

申请人： Uwe Stamm ,  Ingo Klaft ,  Vadim Berger ,  Stefan Borneis ,  Peter Lokai

发明人： Uwe Stamm ,  Ingo Klaft ,  Vadim Berger ,  Stefan Borneis ,  Peter Lokai

IPC分类号： G02F1/39 ,  H01S3/10

CPC分类号： G02F1/39

摘要： A tunable narrowband source of a coherent radiation, comprisinga first optical parametric oscillator (OPO1) which includes at least one first optical parametric amplifier medium (K.sub.1) in a resonator (18, 20; 20, 34) or an optical parametric generator;at least one second optical parametric oscillator (OPO2) which includes at least one second optical parametric amplifier medium (K.sub.2) in a resonator (22, 24) and into which is coupled the output radiation (28; 28b) of the first optical parametric oscillator (OPO1);at least one third optical parametric amplifier medium (OPA) into which is coupled the output radiation (30) of the second optical parametric oscillator (OPO2); andmeans (12, 14, 16, 26) for generating and coupling the pump radiation (10, 10') into the first and second optical parametric oscillators (OPO1, OPO2) and into the third optical parametric amplifier medium OPA), whereinthe output radiation (28; 28b) of the first optical parametric oscillator (OPO1) which is coupled into the second optical parametric oscillator (OPO2) has a bandwidth which is smaller than the spacing of the only one longitudinal mode is excited and coupled into the third optical parametric amplifier medium (K.sub.3, K.sub.4) and amplified therein.

摘要翻译： 包括相干辐射的可调窄带源，包括第一光参量振荡器（OPO1），其包括在谐振器（18,20; 20,34）中的至少一个第一光参量放大器介质（K1）或光参量发生器; 至少一个第二光参量振荡器（OPO2），其包括在谐振器（22,24）中的至少一个第二光参量放大器介质（K2），其中耦合到所述第一光参量振荡器的输出辐射（28; 28b） （OPO1）; 至少一个第三光参量放大器介质（OPA），其耦合到所述第二光参量振荡器（OPO2）的输出辐射（30）; 以及用于产生并将泵浦辐射（10,10'）耦合到第一和第二光学参量振荡器（OPO1，OPO2）并进入第三光学参量放大器介质OPA的装置（12,14,16,26）），其中 耦合到第二光参量振荡器（OPO2）中的第一光参量振荡器（OPO1）的输出辐射（28; 28b）具有小于仅一个纵模的间隔的带宽被激发并耦合到第三光参参振荡器 光学参量放大器介质（K3，K4）并在其中放大。

公开(公告)号：US5896220A

公开(公告)日：1999-04-20

申请号：US906523

申请日：1997-08-05

申请人： Uwe Stamm ,  Ingo Klaft ,  Stefan Borneis ,  Vadim Berger ,  Peter Lokai

发明人： Uwe Stamm ,  Ingo Klaft ,  Stefan Borneis ,  Vadim Berger ,  Peter Lokai

IPC分类号： G02F1/39

CPC分类号： G02F1/39

摘要： A source of narrow-band coherent radiation has a first optical parametric oscillator (OPO 1) for producing seed radiation, and a second optical parametric oscillator (OPO 2), into which the seed radiation is input after passing through a wavelength-selective element (G). In order to stabilize and adjust the bandwidth of the radiation (14) emitted by the second optical parametric oscillator (OPO 2), radiation of this type is also input into the wavelength-selective element (G) and thereby analyzed, in order, in accordance with the analysis, to adjust the wavelength-selective element or the OPO 2.

摘要翻译： 窄带相干辐射源具有用于产生种子辐射的第一光学参量振荡器（OPO 1）和第二光学参量振荡器（OPO 2），种子辐射在通过波长选择元件之后被输入其中 G）。 为了稳定和调整由第二光参量振荡器（OPO 2）发射的辐射（14）的带宽，这种类型的辐射也被输入到波长选择元件（G）中，从而依次分析 按照分析，调整波长选择元素或OPO 2。

公开(公告)号：US5661595A

公开(公告)日：1997-08-26

申请号：US626505

申请日：1996-04-02

申请人： Uwe Stamm ,  Peter Lokai ,  Vadim Berger ,  Stefan Borneis

发明人： Uwe Stamm ,  Peter Lokai ,  Vadim Berger ,  Stefan Borneis

IPC分类号： G02F1/39

CPC分类号： G02F1/39

摘要： A tunable, optical, parametric oscillator including at least one non-linear optical crystal (10) comprises a first deflector mirror (18) arranged inside the resonator between the resonator mirror (12) and the crystal (10) to couple in the pump radiation (16) as well as a second deflector mirror (20) arranged outside the resonator behind a second resonator mirror (14) to separate the pump radiation (22) from the radiation (24) generated in the optical parametric oscillator.

摘要翻译： 包括至少一个非线性光学晶体（10）的可调谐光学参量振荡器包括布置在谐振器反射镜（12）和晶体（10）之间的谐振器内部的第一偏转镜（18），以在泵浦辐射 （16）以及布置在谐振器外部的第二谐振镜（14）之后的第二偏转镜（20），以将泵浦辐射（22）与在光学参量振荡器中产生的辐射（24）分离。

公开(公告)号：US07006541B2

公开(公告)日：2006-02-28

申请号：US10354945

申请日：2003-01-29

申请人： Peter Lokai ,  Thomas Schroeder ,  Juergen Kleinschmidt ,  Uwe Stamm ,  Klaus Wolfgang Vogler

发明人： Peter Lokai ,  Thomas Schroeder ,  Juergen Kleinschmidt ,  Uwe Stamm ,  Klaus Wolfgang Vogler

IPC分类号： H01S3/13

CPC分类号： H01S3/225 ,  H01S3/1392

摘要： A tunable laser system includes a gain medium and an optical resonator for generating a laser beam, and a spectral narrowing and tuning unit within the resonator. A detection and control unit controls a relative wavelength of the laser system. A wavelength calibration module calibrates the detection and control unit. The module contains more than one species each having an optical transition line within the tuning spectrum of the laser. A beam portion of the narrowed emission from the laser is directed through the wavelength calibration module and a beam portion is directed through the detection and control unit when the laser beam is scanned through the optical transition line of each of the species within the module. The detection and control unit is monitored and calibrated during the scanning.

公开(公告)号：US06608848B2

公开(公告)日：2003-08-19

申请号：US09849600

申请日：2001-05-04

申请人： Jürgen Kleinschmidt ,  Uwe Stamm ,  Klaus Vogler ,  Peter Lokai

发明人： Jürgen Kleinschmidt ,  Uwe Stamm ,  Klaus Vogler ,  Peter Lokai

IPC分类号： H01S313

CPC分类号： H01S3/1392 ,  H01S3/225

摘要： A wavelength calibration system determines an absolute wavelength of a narrowed spectral emission band of an excimer or molecular laser system. The system includes a module including an element which optically interacts with a component of an output beam of the laser within the tunable range of the laser system around the narrowed band. An inter-level resonance is detected by monitoring changes in voltage within the module, or photo-absorption is detected by photodetecting equipment. The absolute wavelength of the narrowed band is precisely determinable when the optical transitions occur and are detected. When the system specifically includes an ArF-excimer laser chamber, the module is preferably a galvatron containing an element that photo-absorbs around 193 nm and the element is preferably a gas or vapor selected from the group consisting of arsenic, carbon, oxygen, iron, gaseous hydrocarbons, halogenized hydrocarbons, carbon-contaminated inert gases, germanium and platinum vapor. When the system specifically includes F2-laser chamber, the module is preferably a galvatron containing an element that photo-absorbs around 157 nm and the element is preferably a gas or vapor selected from the group consisting of selenium, bromine and silicon. The module is alternatively a purge chamber configurable for purging with a photo-absorbing gas.

公开(公告)号：US06717973B2

公开(公告)日：2004-04-06

申请号：US09883097

申请日：2001-06-13

申请人： Dirk Basting ,  Sergei Govorkov ,  Juergen Kleinschmidt ,  Peter Lokai ,  Uwe Stamm

发明人： Dirk Basting ,  Sergei Govorkov ,  Juergen Kleinschmidt ,  Peter Lokai ,  Uwe Stamm

IPC分类号： H01S320

CPC分类号： H01S3/225 ,  B23K26/12 ,  B23K26/128 ,  B23K26/705 ,  G01J1/4257 ,  G03F7/70025 ,  G03F7/70558 ,  G03F7/70808 ,  H01S3/0014 ,  H01S3/0315 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/08059 ,  H01S3/1062 ,  H01S3/134 ,  H01S3/137 ,  H01S3/2258

摘要： A F2-laser includes a discharge chamber filled with a gas mixture including molecular fluorine for generating a spectral emission in a wavelength range between 157 nm and 158 nm including a primary line and a secondary line, multiple electrodes coupled with a power supply circuit for producing a pulsed discharge to energize the molecular fluorine, a resonator including the discharge chamber and an interferometric device for generating a laser beam having a bandwidth of less than 1 pm, and a wavelength monitor coupled in a feedback loop with a processor for monitoring a spectral distribution of the laser beam. The processor controls an interferometric spectrum of the interferometric device based on the monitored spectral distribution such that sidebands within the spectral distribution are substantially minimized.

摘要翻译： F2激光器包括填充有包括分子氟的气体混合物的放电室，用于在包括初级线和次级线的157nm和158nm之间的波长范围内产生光谱发射，多个电极与用于生产的电源电路 用于激发分子氟的脉冲放电，包括放电室的谐振器和用于产生具有小于1ms的带宽的激光束的干涉仪，以及耦合在反馈环路中的波长监测器，用于监测光谱分布 的激光束。 处理器基于监测的光谱分布来控制干涉测量装置的干涉光谱，使得光谱分布内的边带基本上最小化。

公开(公告)号：US06272158B1

公开(公告)日：2001-08-07

申请号：US09679592

申请日：2000-10-04

申请人： Jürgen Kleinschmidt ,  Uwe Stamm ,  Klaus Vogler ,  Peter Lokai

发明人： Jürgen Kleinschmidt ,  Uwe Stamm ,  Klaus Vogler ,  Peter Lokai

IPC分类号： H01S313

CPC分类号： H01S3/1392 ,  H01S3/225

摘要： A wavelength calibration system determines an absolute wavelength of a narrowed spectral emission band of an excimer or molecular laser system. The system includes a module including an element which optically interacts with a component of an output beam of the laser within the tunable range of the laser system around the narrowed band. An inter-level resonance is detected by monitoring changes in voltage within the module, or photo-absorption is detected by photodetecting equipment. The absolute wavelength of the narrowed band is precisely determinable when the optical transitions occur and are detected. When the system specifically includes an ArF-excimer laser chamber, the module is preferably a galvatron containing an element that photo-absorbs around 193 nm and the element is preferably a gas or vapor selected from the group consisting of arsenic, carbon, oxygen, iron, gaseous hydrocarbons, halogenized hydrocarbons, carbon-contaminated inert gases, germanium and platinum vapor. When the system specifically includes F2-laser chamber, the module is preferably a galvatron containing an element that photo-absorbs around 157 nm and the element is preferably a gas or vapor selected from the group consisting of selenium, bromine and silicon. The module is alternatively a purge chamber configurable for purging with a photo-absorbing gas.

摘要翻译： 波长校准系统确定准分子或分子激光系统的窄谱分光发射带的绝对波长。 该系统包括模块，该模块包括与激光系统的可变范围内的变窄带周围的激光输出光束的分量光学相互作用的元件。 通过监测模块内的电压变化来检测层间谐振，或者通过光电检测设备检测光吸收。 当发生光学转变并被检测时，窄带的绝对波长可以精确地确定。 当该系统具体包括ArF-准分子激光室时，该模块优选地是含有吸光约193nm的元素的加合加速器，该元件优选为选自砷，碳，氧，铁 ，气态烃，卤化烃，碳污染的惰性气体，锗和铂蒸气。 当该系统具体包括F2激光室时，该模块优选为含有吸收约157nm的元素的加合加速器，该元件优选为选自硒，溴和硅的气体或蒸汽。 该模块可选地是可配置为用光吸收气体吹扫的净化室。

公开(公告)号：US5671241A

公开(公告)日：1997-09-23

申请号：US658716

申请日：1996-06-05

申请人： Uwe Stamm ,  Peter Lokai

发明人： Uwe Stamm ,  Peter Lokai

IPC分类号： G02F1/39 ,  H01S3/10

CPC分类号： G02F1/39 ,  Y10S372/70

摘要： A tunable source of narrowband coherent radiation comprises a pulsed pump laser (10), an optical parametric oscillator or amplifier (12) and a so-called master oscillator (14). The narrowband output radiation of the master oscillator serves as seed radiation which is injected into the optical parametric oscillator or amplifier (12). In order to obtain a beam profile of the emitted output radiation as homogeneous as possible, optically imaging elements (28) are arranged in an optical delay line (24) for the partial pulses which pump the optical parametric oscillator or amplifier, which transform the spatial beam profile at the output (30) of the pump laser (10) with respect to amplitude, phase and, preferably, the divergence, too, into the crystal of the optical parametric oscillator or amplifier.

摘要翻译： 窄带相干辐射的可调谐源包括脉冲泵浦激光器（10），光参量振荡器或放大器（12）和所谓的主振荡器（14）。 主振荡器的窄带输出辐射用作注入光参量振荡器或放大器（12）的种子辐射。 为了获得尽可能均匀的发射的输出辐射的光束分布，光学成像元件（28）被布置在用于泵浦光学参量振荡器或放大器的部分脉冲的光学延迟线（24）中，该参数振荡器或放大器将空间 泵浦激光器（10）的输出端（30）相对于光学参数振荡器或放大器的振幅，相位以及优选的发散也是光束分布。

公开(公告)号：US6160832A

公开(公告)日：2000-12-12

申请号：US416344

申请日：1999-10-12

申请人： Jurgen Kleinschmidt ,  Uwe Stamm ,  Klaus Vogler ,  Peter Lokai

发明人： Jurgen Kleinschmidt ,  Uwe Stamm ,  Klaus Vogler ,  Peter Lokai

IPC分类号： H01S3/139 ,  H01S3/225 ,  H01S3/22

CPC分类号： H01S3/1392 ,  H01S3/225

摘要： A wavelength calibration system determines an absolute wavelength of a narrowed spectral emission band of an excimer or molecular laser system. The system includes a module including an element which optically interacts with a component of an output beam of the laser within the tunable range of the laser system around the narrowed band. An inter-level resonance is detected by monitoring changes in voltage within the module, or photo-absorption is detected by photodetecting equipment. The absolute wavelength of the narrowed band is precisely determinable when the optical transitions occur and are detected. When the system specifically includes an ArF-excimer laser chamber, the module is preferably a galvatron containing an element that photo-absorbs around 193 nm and the element is preferably a gas or vapor selected from the group consisting of arsenic, carbon, oxygen, iron, gaseous hydrocarbons, halogenized hydrocarbons, carbon-contaminated inert gases, germanium and platinum vapor. When the system specifically includes F.sub.2 -laser chamber, the module is preferably a galvatron containing an element that photo-absorbs around 157 nm and the element is preferably a gas or vapor selected from the group consisting of selenium, bromine and silicon. The module is alternatively a purge chamber configurable for purging with a photo-absorbing gas.

公开(公告)号：US5796513A

公开(公告)日：1998-08-18

申请号：US701715

申请日：1996-08-22

申请人： Uwe Stamm ,  Peter Lokai ,  Peter Genter ,  Ingo Klaft

发明人： Uwe Stamm ,  Peter Lokai ,  Peter Genter ,  Ingo Klaft

IPC分类号： G02F1/39 ,  H01S3/109

CPC分类号： G02F1/39

摘要： A laser arrangement for generating narrow-band, tunable coherent radiation has an optical parametric oscillator (10) and a tunable seed oscillator (20) whose emitted seed radiation can be set in a narrow-band fashion by means of at least one wavelength-selective element (30). In order to achieve simple tunability of the output radiation (38) of the OPO in conjunction with a narrow bandwidth, good spatial beam quality and high beam intensity without maladjustment of the OPO resonator, the lineshape, set using the wavelength-selective element (30), of the seed radiation I.sub.seed (.lambda.), and the intensity transmission function T.sub.opo, (.lambda.) of the non-pumped resonator (12, 14) of the OPO (10) are set in such a way that given tuning of the center wavelength .lambda..sub.max seed of the seed oscillator (20) in the middle between two neighboring transmission maxima of the intensity transmission function T.sub.opo (.lambda.) it holds for all wavelengths .lambda. not equal to .lambda..sub.max seed that: I.sub.seed (.lambda..sub.max seed).multidot.T.sub.opo (.lambda..sub.max seed)>I.sub.seed (.lambda.).multidot.T.sub.opo (.lambda.).

摘要翻译： 用于产生窄带可调谐相干辐射的激光装置具有光学参量振荡器（10）和可调谐种子振荡器（20），其发射的种子辐射可以通过至少一个波长选择性的窄带方式设置 元件（30）。 为了实现OPO的输出辐射（38）与窄带宽的良好的可调谐性，良好的空间光束质量和高光束强度，而OPO谐振器没有失调，使用波长选择元件（30 ），种子辐射Iseed（λ）和OPO（10）的非泵浦谐振器（12,14）的强度透射函数Topo（λ）被设置为使得中心的给定调谐 波长λmax种子振荡器（20）的种子振荡器（20）在中间的强度传输函数Topo（lambda）的两个相邻传输最大值之间的中间，它对于不等于λmax种子的所有波长λ所保持：Iseed（λmax seed）xTopo lambda max seed）> Iseed（lambda）xTopo（lambda）。