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公开(公告)号：US20100132887A2
公开(公告)日：2010-06-03
申请号：US12435545
申请日：2009-05-05
申请人： Vincent Donnelly , Demetre Economou , Paul Ruchhoeft , Lin Xu , Sri Vemula , Manish Jain
发明人： Vincent Donnelly , Demetre Economou , Paul Ruchhoeft , Lin Xu , Sri Vemula , Manish Jain
CPC分类号： B29D11/00365 , B82Y30/00
摘要： A method is provided for creating a plurality of substantially uniform nano-scale features in a substantially parallel manner in which an array of micro-lenses is positioned on a surface of a substrate, where each micro-lens includes a hole such that the bottom of the hole corresponds to a portion of the surface of the substrate. A flux of charged particles, e.g., a beam of positive ions of a selected element, is applied to the micro-lens array. The flux of charged particles is focused at selected focal points on the substrate surface at the bottoms of the holes of the micro-lens array. The substrate is tilted at one or more selected angles to displace the locations of the focal points across the substrate surface. By depositing material or etching the surface of the substrate, several substantially uniform nanometer sized features may be rapidly created in each hole on the surface of the substrate in a substantially parallel manner.
摘要翻译： 提供了一种用于以基本上平行的方式产生多个基本均匀的纳米尺度特征的方法，其中微透镜阵列位于基底的表面上，其中每个微透镜包括孔，使得底部 孔对应于基板表面的一部分。 带电粒子的通量，例如所选元素的正离子束，被施加到微透镜阵列。 带电粒子的通量被聚焦在微透镜阵列的孔的底部的基底表面上的选定的焦点处。 衬底以一个或多个选定的角度倾斜，以便将焦点的位置移动穿过衬底表面。 通过沉积材料或蚀刻衬底的表面，可以以基本上平行的方式在衬底的表面上的每个孔中快速产生几个基本均匀的纳米尺寸的特征。
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公开(公告)号：US20070131646A1
公开(公告)日：2007-06-14
申请号：US11633233
申请日：2006-12-04
申请人： Vincent Donnelly , Demetre Economou , Paul Ruchhoeft , Lin Xu , Sri Vemula , Manish Jain
发明人： Vincent Donnelly , Demetre Economou , Paul Ruchhoeft , Lin Xu , Sri Vemula , Manish Jain
CPC分类号： B29D11/00365 , B82Y30/00
摘要： A method is provided for creating a plurality of substantially uniform nano-scale features in a substantially parallel manner in which an array of micro-lenses is positioned on a surface of a substrate, where each micro-lens includes a hole such that the bottom of the hole corresponds to a portion of the surface of the substrate. A flux of charged particles, e.g., a beam of positive ions of a selected element, is applied to the micro-lens array. The flux of charged particles is focused at selected focal points on the substrate surface at the bottoms of the holes of the micro-lens array. The substrate is tilted at one or more selected angles to displace the locations of the focal points across the substrate surface. By depositing material or etching the surface of the substrate, several substantially uniform nanometer sized features may be rapidly created in each hole on the surface of the substrate in a substantially parallel manner.
摘要翻译： 提供了一种用于以基本上平行的方式产生多个基本均匀的纳米尺度特征的方法，其中微透镜阵列位于基底的表面上，其中每个微透镜包括孔，使得底部 孔对应于基板表面的一部分。 带电粒子的通量，例如所选元素的正离子束，被施加到微透镜阵列。 带电粒子的通量被聚焦在微透镜阵列的孔的底部的基底表面上的选定的焦点处。 衬底以一个或多个选定的角度倾斜，以便将焦点的位置移动穿过衬底表面。 通过沉积材料或蚀刻衬底的表面，可以以基本上平行的方式在衬底表面上的每个孔中快速产生几个基本均匀的纳米尺寸的特征。
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公开(公告)号：US08030620B2
公开(公告)日：2011-10-04
申请号：US12435545
申请日：2009-05-05
申请人： Vincent M. Donnelly , Demetre J. Economou , Paul Ruchhoeft , Lin Xu , Sri Charan Vemula , Manish Kumar Jain
发明人： Vincent M. Donnelly , Demetre J. Economou , Paul Ruchhoeft , Lin Xu , Sri Charan Vemula , Manish Kumar Jain
CPC分类号： B29D11/00365 , B82Y30/00
摘要： A method is provided for creating a plurality of substantially uniform nano-scale features in a substantially parallel manner in which an array of micro-lenses is positioned on a surface of a substrate, where each micro-lens includes a hole such that the bottom of the hole corresponds to a portion of the surface of the substrate. A flux of charged particles, e.g., a beam of positive ions of a selected element, is applied to the micro-lens array. The flux of charged particles is focused at selected focal points on the substrate surface at the bottoms of the holes of the micro-lens array. The substrate is tilted at one or more selected angles to displace the locations of the focal points across the substrate surface. By depositing material or etching the surface of the substrate, several substantially uniform nanometer sized features may be rapidly created in each hole on the surface of the substrate in a substantially parallel manner.
摘要翻译： 提供了一种用于以基本上平行的方式产生多个基本均匀的纳米尺度特征的方法，其中微透镜阵列位于基底的表面上，其中每个微透镜包括孔，使得底部 孔对应于基板表面的一部分。 带电粒子的通量，例如所选元素的正离子束，被施加到微透镜阵列。 带电粒子的通量被聚焦在微透镜阵列的孔的底部的基底表面上的选定的焦点处。 衬底以一个或多个选定的角度倾斜，以便将焦点的位置移动穿过衬底表面。 通过沉积材料或蚀刻衬底的表面，可以以基本上平行的方式在衬底表面上的每个孔中快速产生几个基本均匀的纳米尺寸的特征。
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公开(公告)号：US07883839B2
公开(公告)日：2011-02-08
申请号：US11633233
申请日：2006-12-04
申请人： Vincent M Donnelly , Demetre J. Economou , Paul Ruchhoeft , Lin Xu , Sri Charan Vemula , Manish Kumar Jain
发明人： Vincent M Donnelly , Demetre J. Economou , Paul Ruchhoeft , Lin Xu , Sri Charan Vemula , Manish Kumar Jain
CPC分类号： B29D11/00365 , B82Y30/00
摘要： A method is provided for creating a plurality of substantially uniform nano-scale features in a substantially parallel manner in which an array of micro-lenses is positioned on a surface of a substrate, where each micro-lens includes a hole such that the bottom of the hole corresponds to a portion of the surface of the substrate. A flux of charged particles, e.g., a beam of positive ions of a selected element, is applied to the micro-lens array. The flux of charged particles is focused at selected focal points on the substrate surface at the bottoms of the holes of the micro-lens array. The substrate is tilted at one or more selected angles to displace the locations of the focal points across the substrate surface. By depositing material or etching the surface of the substrate, several substantially uniform nanometer sized features may be rapidly created in each hole on the surface of the substrate in a substantially parallel manner.
摘要翻译： 提供了一种用于以基本上平行的方式产生多个基本均匀的纳米尺度特征的方法，其中微透镜阵列位于基底的表面上，其中每个微透镜包括孔，使得底部 孔对应于基板表面的一部分。 带电粒子的通量，例如所选元素的正离子束，被施加到微透镜阵列。 带电粒子的通量被聚焦在微透镜阵列的孔的底部的基底表面上的选定的焦点处。 衬底以一个或多个选定的角度倾斜，以便将焦点的位置移动穿过衬底表面。 通过沉积材料或蚀刻衬底的表面，可以以基本上平行的方式在衬底表面上的每个孔中快速产生几个基本均匀的纳米尺寸的特征。
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公开(公告)号：US20090283215A1
公开(公告)日：2009-11-19
申请号：US12435545
申请日：2009-05-05
申请人： Vincent M. Donnelly , Demetre J. Economou , Paul Ruchhoeft , Lin Xu , Sri Charan Vemula , Manish Kumar Jain
发明人： Vincent M. Donnelly , Demetre J. Economou , Paul Ruchhoeft , Lin Xu , Sri Charan Vemula , Manish Kumar Jain
CPC分类号： B29D11/00365 , B82Y30/00
摘要： A method is provided for creating a plurality of substantially uniform nano-scale features in a substantially parallel manner in which an array of micro-lenses is positioned on a surface of a substrate, where each micro-lens includes a hole such that the bottom of the hole corresponds to a portion of the surface of the substrate. A flux of charged particles, e.g., a beam of positive ions of a selected element, is applied to the micro-lens array. The flux of charged particles is focused at selected focal points on the substrate surface at the bottoms of the holes of the micro-lens array. The substrate is tilted at one or more selected angles to displace the locations of the focal points across the substrate surface. By depositing material or etching the surface of the substrate, several substantially uniform nanometer sized features may be rapidly created in each hole on the surface of the substrate in a substantially parallel manner.
摘要翻译： 提供了一种用于以基本上平行的方式产生多个基本均匀的纳米尺度特征的方法，其中微透镜阵列位于基底的表面上，其中每个微透镜包括孔，使得底部 孔对应于基板表面的一部分。 带电粒子的通量，例如所选元素的正离子束，被施加到微透镜阵列。 带电粒子的通量被聚焦在微透镜阵列的孔的底部的基底表面上的选定的焦点处。 衬底以一个或多个选定角度倾斜，以便使焦点位置跨越衬底表面。 通过沉积材料或蚀刻衬底的表面，可以以基本上平行的方式在衬底表面上的每个孔中快速产生几个基本均匀的纳米尺寸的特征。
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公开(公告)号：US20120288852A1
公开(公告)日：2012-11-15
申请号：US13522319
申请日：2011-01-15
申请人： Richard Willson , Paul Ruchhoeft
发明人： Richard Willson , Paul Ruchhoeft
CPC分类号： G01N33/54306 , G01N15/10 , Y10T436/143333
摘要： A sensitive and specific method of detecting chemical species, viruses and microorganisms is presented to improve performance of molecular-recognition-based assays utilizing particles decorated with molecular recognition agents such as antibodies and DNA probes, and observing analyte-dependent changes in the response of the particles to forces such as magnetic or gravitational forces or Brownian thermal fluctuations.
摘要翻译： 提出了一种检测化学物质，病毒和微生物的敏感和具体方法，以提高利用分子识别剂如抗体和DNA探针装饰的颗粒的基于分子识别的测定的性能，并观察分子识别的测定反应中的分析物依赖性变化 颗粒到力或磁力或重力或布朗热波动。
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7.发明授权Device and method for manufacturing a particulate filter with regularly spaced micropores 有权用于制造具有规则间隔的微孔的微粒过滤器的装置和方法公开(公告)号：US08987688B2
公开(公告)日：2015-03-24
申请号：US12530978
申请日：2008-03-13
申请人： John C. Wolfe , Paul Ruchhoeft
发明人： John C. Wolfe , Paul Ruchhoeft
CPC分类号： G03B27/42 , B01D67/0034 , B01D71/48 , B01D2323/42 , B01D2325/028 , G03F7/0015 , Y10T428/249921
摘要： Various embodiments disclose devices and methods for fabricating microporous particulate filters with regularly spaced pores wherein sheet membrane substrates are exposed to energetic particle radiation through a mask and the damaged regions removed in a suitable developer. The required depth of field is achieved by using energetic particles to minimize diffraction and an energetic particle source with suitably small diameter.
摘要翻译： 各种实施方案公开了用于制造具有规则间隔开的孔的微孔微粒过滤器的装置和方法，其中片膜基底通过掩模暴露于高能粒子辐射，并且在合适的显影剂中除去损伤区域。 所需的景深是通过使用能量粒子来最小化衍射和具有适当小直径的能量粒子源实现的。
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公开(公告)号：US20100210009A1
公开(公告)日：2010-08-19
申请号：US12769169
申请日：2010-04-28
申请人： Richard C. Willson , Paul Ruchhoeft
发明人： Richard C. Willson , Paul Ruchhoeft
CPC分类号： G01N33/54373 , B82Y5/00 , C12Q1/6837 , Y10S436/805 , Y10S977/701 , Y10S977/702 , Y10S977/704 , Y10S977/705 , Y10S977/773 , Y10S977/774 , Y10S977/834 , Y10S977/92 , C12Q2563/155
摘要： Labels and methods of producing labels for use in clinical, analytical and pharmaceutical development assays are provided. Labels may comprise shape-encoded particles which may be coupled to ligands such as DNA, RNA and antibodies, where different shapes are used to identify which ligand(s) are present. Labels may also comprise reflectors, including retroreflectors and retroreflectors susceptible to analyte-dependent assembly for efficient homogeneous assays.
摘要翻译： 提供了生产用于临床，分析和药物开发测定的标签的标签和方法。 标签可以包括可以与诸如DNA，RNA和抗体的配体偶联的形状编码的颗粒，其中使用不同的形状来鉴定哪些配体存在。 标签还可以包括反射器，包括对分析物依赖性装配易于进行有效均匀测定的后向反射器和后向反射器。
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9.发明申请METHOD FOR TRANSLATING A STRUCTURED BEAM OF ENERGETIC PARTICLES ACROSS A SUBSTRATE IN TEMPLATE MASK LITHOGRAPHY 有权用于在模板掩模图中通过基板翻转结构化的能量粒子的方法公开(公告)号：US20090042137A1
公开(公告)日：2009-02-12
申请号：US12026445
申请日：2008-02-05
申请人： John C. Wolfe , Barry Craver , Paul Ruchhoeft
发明人： John C. Wolfe , Barry Craver , Paul Ruchhoeft
IPC分类号： G03F7/20
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y20/00 , B82Y40/00 , G03F7/201 , G03F7/203 , Y10S430/143
摘要： The present inventors have developed an accurate method for forming a plurality of images on a substrate. The present method provides an improved pattern replication technique that provides submicron resolution, for example 20 nm or less, especially 10 nm or less. The method may involve moving a structured beam of energetic radiation across a target substrate. The motion of an image of the template mask on the substrate is achieved by tilting a mask and substrate assembly relative to the axis of the incident beam. The technique does not require high precision motion of the template mask relative to the target substrate. The energetic radiation may comprise energetic particles. The technique is insensitive to particle energy and can be applied to uncharged, neutral particles.
摘要翻译： 本发明人开发了在基板上形成多个图像的精确方法。 本方法提供了提供亚微米分辨率的改进的图案复制技术，例如20nm或更小，特别是10nm或更小。 该方法可以涉及将目标基底上的能量辐射的结构化束移动。 通过使掩模和基板组件相对于入射光束的轴线倾斜来实现模板掩模在基板上的图像的运动。 该技术不需要模板掩模相对于目标衬底的高精度运动。 能量辐射可以包括高能粒子。 该技术对粒子能量不敏感，可应用于不带电的中性粒子。
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10.发明申请公开(公告)号：US20090073400A1
公开(公告)日：2009-03-19
申请号：US11856615
申请日：2007-09-17
申请人： John C. Wolfe , Paul Ruchhoeft
发明人： John C. Wolfe , Paul Ruchhoeft
CPC分类号： G03B27/42 , B01D67/0034 , B01D71/48 , B01D2323/42 , B01D2325/028 , G03F7/0015 , Y10T428/249921
摘要： Various embodiments disclose devices and methods for fabricating microporous particulate filters with regularly space pores wherein sheet membrane substrates are exposed to energetic particle radiation through a mask and the damaged regions removed in a suitable developer. The required depth of field is achieved by using energetic particles to minimize diffraction and an energetic particle source with suitably small diameter.
摘要翻译： 各种实施方案公开了用于制造具有规则空间孔的微孔微粒过滤器的装置和方法，其中片膜衬底通过掩模暴露于高能粒子辐射，并且在合适的显影剂中去除损伤区域。 所需的景深是通过使用能量粒子来最小化衍射和具有适当小直径的能量粒子源实现的。
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