Microstructure Separation Filters
    5.
    发明申请
    Microstructure Separation Filters 审中-公开
    微结构分离过滤器

    公开(公告)号:US20160067634A1

    公开(公告)日:2016-03-10

    申请号:US14846154

    申请日:2015-09-04

    申请人: Imagine TF, LLC

    IPC分类号: B01D29/07

    摘要: Microstructure separation filters are provided herein, as well as chromatography and other separation devices. An exemplary filter device includes a microstructure filter has a plurality of layers of alternating sacrificial and/or structural material which have been etched to create inlet channels and outlet channels. Adjacent ones of the inlet channels and the outlet channels are spaced apart from one another by cross channels that filter a fluid from the inlet channels to the outlet channels. The cross channels include filter features formed by etching away of a portion of the layers. The device also includes a housing configured to receive the microstructure filter.

    摘要翻译: 本文提供微结构分离过滤器,以及色谱法和其他分离装置。 示例性的过滤器装置包括微结构过滤器,其具有已经被蚀刻以形成入口通道和出口通道的多个交替的牺牲和/或结构材料层。 相邻的入口通道和出口通道通过将流体从入口通道过滤到出口通道的交叉通道彼此间隔开。 交叉通道包括通过蚀刻掉一部分层而形成的过滤器特征。 该装置还包括构造成接收微结构滤波器的壳体。

    PROCESS FOR MANUFACTURING A MICROMECHANICAL STRUCTURE HAVING A BURIED AREA PROVIDED WITH A FILTER
    6.
    发明申请
    PROCESS FOR MANUFACTURING A MICROMECHANICAL STRUCTURE HAVING A BURIED AREA PROVIDED WITH A FILTER 审中-公开
    制造具有过滤器的烧结区域的微观结构的方法

    公开(公告)号:US20150175410A1

    公开(公告)日:2015-06-25

    申请号:US14133290

    申请日:2013-12-18

    IPC分类号: B81C1/00

    摘要: A process for manufacturing a micromechanical structure envisages: forming a buried cavity within a body of semiconductor material, separated from a top surface of the body by a first surface layer; and forming an access duct for fluid communication between the buried cavity and an external environment. The method envisages: forming an etching mask on the top surface at a first access area; forming a second surface layer on the top surface and on the etching mask; carrying out an etch such as to remove, in a position corresponding to the first access area, a portion of the second surface layer, and an underlying portion of the first surface layer not covered by the etching mask until the buried cavity is reached, thus forming both the first access duct and a filter element, set between the first access duct and the same buried cavity.

    摘要翻译: 微机械结构的制造方法设想:在半导体材料体内形成通过第一表面层从主体顶表面分离的掩埋腔; 以及形成用于在所述掩埋腔和外部环境之间流体连通的进入管。 该方法设想:在第一进入区域的顶表面上形成蚀刻掩模; 在顶表面和蚀刻掩模上形成第二表面层; 进行蚀刻,以在对应于第一进入区域的位置中移除第二表面层的一部分,以及未被蚀刻掩模覆盖的第一表面层的下面部分,直到达到掩埋空腔,因此 形成第一进入管道和过滤元件,设置在第一进入管道和相同的掩埋空腔之间。

    Method of producing nanopatterned templates
    10.
    发明授权
    Method of producing nanopatterned templates 有权
    生成纳米图案模板的方法

    公开(公告)号:US08361337B2

    公开(公告)日:2013-01-29

    申请号:US12049541

    申请日:2008-03-17

    IPC分类号: B31D3/00

    摘要: Nanopatterned substrates can be prepared by a method that includes forming a block copolymer film on a substrate, annealing the block copolymer film, surface reconstructing the annealed block copolymer film, coating an etch-resistant layer on the surface reconstructed block copolymer film, etching the resist-coated block copolymer film to create an etched article comprising a nanopatterned substrate, and separating the etch-resistant layer and the block copolymer film from the nanopatterned substrate. The method is applicable to a wide variety of substrate materials, avoids any requirement for complicated procedures to produce long-range order in the block copolymer film, and avoids any requirement for metal functionalization of the block copolymer.

    摘要翻译: 纳米图案化的基材可以通过包括在基材上形成嵌段共聚物膜,退火嵌段共聚物膜,重整退火的嵌段共聚物膜的表面,在表面重整的嵌段共聚物膜上涂覆耐蚀刻层,蚀刻抗蚀剂 涂覆的嵌段共聚物膜以产生包含纳米图案化基材的蚀刻制品,并将该耐蚀刻层和嵌段共聚物膜与纳米图案化的基材分离。 该方法适用于各种基板材料,避免了在嵌段共聚物膜中产生长距离顺序的复杂程序的任何要求,并且避免了对嵌段共聚物的金属官能化的任何要求。