公开(公告)号：US20230347436A1

公开(公告)日：2023-11-02

申请号：US18347662

申请日：2023-07-06

申请人： WATLOW ELECTRIC MANUFACTURING COMPANY

发明人： Michael PARKER ,  Alfred Grant ELLIOT ,  Brent Donald Alfred ELLIOT ,  Frank BALMA ,  Richard Erich SCHUSTER ,  Dennis George REX ,  Alexander VEYTSER

IPC分类号： B32B18/00 ,  B32B9/00 ,  B23K35/28 ,  B23K35/00 ,  B32B7/14 ,  H01L21/67 ,  H05B1/00 ,  B32B15/20 ,  B23K1/19 ,  B23K1/20 ,  H01L21/687 ,  B23K1/00 ,  C04B35/645 ,  F16B9/00 ,  B32B3/30 ,  C04B37/00 ,  B32B9/04 ,  H01L21/683

CPC分类号： B23K1/0008 ,  B23K1/0016 ,  B23K1/19 ,  B23K1/20 ,  B23K35/005 ,  B23K35/286 ,  B32B3/30 ,  B32B7/14 ,  B32B9/005 ,  B32B9/04 ,  B32B9/041 ,  B32B15/20 ,  B32B18/00 ,  C04B35/645 ,  C04B37/001 ,  C04B37/006 ,  F16B9/00 ,  H01L21/67103 ,  H01L21/6831 ,  H01L21/6833 ,  H01L21/68757 ,  H01L21/68785 ,  H05B1/00 ,  B23K2103/10 ,  C04B2237/84 ,  Y10T403/46 ,  Y10T428/31504 ,  Y10T428/31678

摘要： An electrostatic chuck includes a ceramic top plate layer made of a beryllium oxide material, a ceramic bottom plate layer made of a beryllium oxide material, a ceramic middle plate layer disposed between the ceramic top plate layer and the ceramic bottom plate layer, an electrode layer disposed between the ceramic top plate layer and the ceramic middle plate layer, and a heater layer disposed between the ceramic middle plate layer and the ceramic bottom plate layer. The electrode layer joins and hermetically seals the ceramic top plate layer to the ceramic middle plate layer, and the heater layer joins and hermetically seals the ceramic middle plate layer to the ceramic bottom plate layer.

公开(公告)号：US20230058143A1

公开(公告)日：2023-02-23

申请号：US17981962

申请日：2022-11-07

申请人： WATLOW ELECTRIC MANUFACTURING COMPANY

发明人： Alfred Grant ELLIOT ,  Brent Donald Alfred ELLIOT ,  Frank BALMA ,  Richard Erich SCHUSTER ,  Dennis George REX ,  Alexander VEYTSER

IPC分类号： H01L21/02 ,  H01L21/67 ,  H01L21/687 ,  H05B3/28

摘要： A multi-zone heater with a plurality of thermocouples such that different heater zones can be monitored for temperature independently. The independent thermocouples may have their leads routed out from the shaft of the heater in a channel that is closed with a joining process that results in hermetic seal adapted to withstand both the interior atmosphere of the shaft and the process chemicals in the process chamber. The thermocouple and its leads may be enclosed with a joining process in which a channel cover is brazed to the heater plate with aluminum.