公开(公告)号：US20210292246A1

公开(公告)日：2021-09-23

申请号：US17342212

申请日：2021-06-08

Applicant: Watlow Electric Manufacturing Company

Inventor： Brent ELLIOT ,  Dennis George REX ,  Guleid HUSSEN ,  Michael PARKER ,  Jason STEPHENS

IPC: C04B37/02 ,  B32B1/08 ,  B32B15/04 ,  B32B15/20 ,  H02G3/22 ,  H05G2/00

Abstract: An electrical termination unit or feedthrough which may be used for routing electrical conductors through a chamber wall, or otherwise across a barrier between isolated atmospheric conditions. The electrical termination unit may have aluminum as the interface material to the chamber interface and may utilize a ceramic insulator. The electrical termination unit may have the aluminum used as the interface brazed directly to a ceramic surface of the insulator. The aluminum that forms the chamber interface may be formed within a hollow ceramic tube in the same process step that brazes the aluminum to the ceramic tube with a hermetic joint. Machining subsequent to the brazing of the aluminum to the ceramic insulator may allow for achievement of the final form desired. A method for manufacturing such an electrical termination unit.

公开(公告)号：US20230347436A1

公开(公告)日：2023-11-02

申请号：US18347662

申请日：2023-07-06

Applicant: WATLOW ELECTRIC MANUFACTURING COMPANY

Inventor： Michael PARKER ,  Alfred Grant ELLIOT ,  Brent Donald Alfred ELLIOT ,  Frank BALMA ,  Richard Erich SCHUSTER ,  Dennis George REX ,  Alexander VEYTSER

IPC: B32B18/00 ,  B32B9/00 ,  B23K35/28 ,  B23K35/00 ,  B32B7/14 ,  H01L21/67 ,  H05B1/00 ,  B32B15/20 ,  B23K1/19 ,  B23K1/20 ,  H01L21/687 ,  B23K1/00 ,  C04B35/645 ,  F16B9/00 ,  B32B3/30 ,  C04B37/00 ,  B32B9/04 ,  H01L21/683

CPC classification number: B23K1/0008 ,  B23K1/0016 ,  B23K1/19 ,  B23K1/20 ,  B23K35/005 ,  B23K35/286 ,  B32B3/30 ,  B32B7/14 ,  B32B9/005 ,  B32B9/04 ,  B32B9/041 ,  B32B15/20 ,  B32B18/00 ,  C04B35/645 ,  C04B37/001 ,  C04B37/006 ,  F16B9/00 ,  H01L21/67103 ,  H01L21/6831 ,  H01L21/6833 ,  H01L21/68757 ,  H01L21/68785 ,  H05B1/00 ,  B23K2103/10 ,  C04B2237/84 ,  Y10T403/46 ,  Y10T428/31504 ,  Y10T428/31678

Abstract: An electrostatic chuck includes a ceramic top plate layer made of a beryllium oxide material, a ceramic bottom plate layer made of a beryllium oxide material, a ceramic middle plate layer disposed between the ceramic top plate layer and the ceramic bottom plate layer, an electrode layer disposed between the ceramic top plate layer and the ceramic middle plate layer, and a heater layer disposed between the ceramic middle plate layer and the ceramic bottom plate layer. The electrode layer joins and hermetically seals the ceramic top plate layer to the ceramic middle plate layer, and the heater layer joins and hermetically seals the ceramic middle plate layer to the ceramic bottom plate layer.

公开(公告)号：US20230058143A1

公开(公告)日：2023-02-23

申请号：US17981962

申请日：2022-11-07

Applicant: WATLOW ELECTRIC MANUFACTURING COMPANY

Inventor： Alfred Grant ELLIOT ,  Brent Donald Alfred ELLIOT ,  Frank BALMA ,  Richard Erich SCHUSTER ,  Dennis George REX ,  Alexander VEYTSER

IPC: H01L21/02 ,  H01L21/67 ,  H01L21/687 ,  H05B3/28

Abstract: A multi-zone heater with a plurality of thermocouples such that different heater zones can be monitored for temperature independently. The independent thermocouples may have their leads routed out from the shaft of the heater in a channel that is closed with a joining process that results in hermetic seal adapted to withstand both the interior atmosphere of the shaft and the process chemicals in the process chamber. The thermocouple and its leads may be enclosed with a joining process in which a channel cover is brazed to the heater plate with aluminum.