公开(公告)号：US5251202A

公开(公告)日：1993-10-05

申请号：US883297

申请日：1992-05-14

申请人： Yujiro Kaneko ,  Wasaburo Ohta ,  Masashi Nakazawa ,  Michiaki Shinozuka ,  Isao Miyamoto ,  Hitoshi Nakamura ,  Toshihiko Yoshio ,  Masaaki Ishiyama ,  Yuuzi Onodera

发明人： Yujiro Kaneko ,  Wasaburo Ohta ,  Masashi Nakazawa ,  Michiaki Shinozuka ,  Isao Miyamoto ,  Hitoshi Nakamura ,  Toshihiko Yoshio ,  Masaaki Ishiyama ,  Yuuzi Onodera

IPC分类号： G11B7/24 ,  G11B7/243 ,  G11B7/252 ,  G11B7/258

CPC分类号： G11B7/258 ,  G11B7/24 ,  G11B7/243 ,  G11B7/252 ,  G11B2007/24306 ,  G11B7/2533 ,  G11B7/2534

摘要： An optical information recording medium is composed of a transparent substrate, a recording layer provided on the substrate, which is transparent with respect to a light beam for reproducing information recorded in the recording layer, a reflection layer provided on the recording layer, and an anti-reflection layer provided on the back side of the substrate opposite to the recording layer. The anti-reflection layer is composed of a plurality of overlaid layers, and at least one of the layers being a transparent electroconductive layer and the other layers are transparent insulating layers.

摘要翻译： 光学信息记录介质由透明基板，设置在基板上的相对于用于再现记录在记录层中的信息的光束透明的记录层，设置在记录层上的反射层和反射层 - 反射层，设置在与记录层相对的基板的背面。 防反射层由多个重叠层组成，并且至少一个层是透明导电层，其它层是透明绝缘层。

公开(公告)号：US5133849A

公开(公告)日：1992-07-28

申请号：US448740

申请日：1989-12-11

申请人： Mikio Kinoshita ,  Wasaburo Ohta ,  Tatsuya Sato ,  Masashi Nakazawa

发明人： Mikio Kinoshita ,  Wasaburo Ohta ,  Tatsuya Sato ,  Masashi Nakazawa

IPC分类号： C23C14/00 ,  C23C14/32 ,  H01J37/32

CPC分类号： H01J37/32422 ,  C23C14/0021 ,  C23C14/32

摘要： An apparatus for forming a thin film has a vacuum container to which an active gas, an inert gas or a mixture thereof is introduced, and a source of evaporation from which a substance is evaporated. A counter electrode is disposed in the vacuum container for holding a substrate for forming a thin film thereon in such a manner as to be opposed to the source of evaporation. A grid is disposed between the source of evaporation and the counter electrode and having openings which allow the evaporated substance to pass therethrough. A filament for thermionic emission is disposed between the grid and the source of evaporation. A target is also disposed between the filament and the source of evaporation for emitting sputtered particles. A power source device establishes predetermined electric potential relationships between the grid, the filament, and the target.

摘要翻译： 用于形成薄膜的装置具有引入活性气体，惰性气体或其混合物的真空容器和物质蒸发的蒸发源。 对置电极设置在真空容器中，用于保持用于在其上形成薄膜的基板以与蒸发源相对的方式。 在蒸发源和对电极之间设置有栅格，并且具有允许蒸发的物质通过的开口。 用于热电子发射的灯丝设置在电网和蒸发源之间。 在灯丝和蒸发源之间还设置靶，用于发射溅射的颗粒。 电源装置在电网，灯丝和目标之间建立预定的电位关系。

公开(公告)号：US5058527A

公开(公告)日：1991-10-22

申请号：US557375

申请日：1990-07-24

申请人： Wasaburo Ohta ,  Masashi Nakazawa

发明人： Wasaburo Ohta ,  Masashi Nakazawa

IPC分类号： C23C16/44 ,  C23C16/455 ,  C23C16/48

CPC分类号： C23C16/4557 ,  C23C16/45565 ,  C23C16/45568 ,  C23C16/487

摘要： A thin film forming apparatus for forming a thin film on a substrate with a vaporized source material being supplied from an external material supplying unit. The thin film forming apparatus comprises a vacuum chamber for providing a vacuum pressure at which the vaporized source material is deposited on the substrate, a material supplying part for supplying particles constituting the vaporized source material to the vacuum chamber, an electrode for holding the substrate, a grid for allowing the particles to travel from the material supplying part to the electrode through the grid, a filament for generating thermions to ionize the particles, a power supply for applying a voltage to the grid so that the grid has a positive potential when measured with respect to the electrode and with respect to the filament, a plurality of openings being formed on the material supplying part for directing the emitted particles from the plurality of openings toward the substrate, and an emission uniforming material for uniforming the quantity of the emitted particles.

摘要翻译： 一种用于在基板上形成薄膜的薄膜形成装置，其中蒸发源材料由外部材料供应单元供应。 薄膜形成装置包括：真空室，用于提供蒸镀源材料沉积在基板上的真空压力;将构成蒸发源材料的颗粒供应到真空室的材料供应部分;保持基板的电极; 用于允许颗粒通过栅格从材料供应部分移动到电极的栅格，用于产生用于离子化颗粒的热电离的细丝;用于向电网施加电压的电源，使得当测量时电网具有正电位 相对于电极和相对于灯丝，在材料供应部分上形成多个开口，用于将发射的颗粒从多个开口朝向基板引导，并且发射均匀化材料用于使发射颗粒的数量均匀化 。

公开(公告)号：US4966095A

公开(公告)日：1990-10-30

申请号：US392099

申请日：1989-08-10

申请人： Wasaburo Ohta ,  Masashi Nakazawa

发明人： Wasaburo Ohta ,  Masashi Nakazawa

IPC分类号： C23C14/32 ,  H01J37/32 ,  H01L21/203 ,  H01L21/285

CPC分类号： H01J37/32422 ,  C23C14/32

摘要： An apparatus for forming a thin film comprises a vacuum container evacuated to high vacuum and receiving a gas for vapor deposition, a source of evaporation in the container for evaporating a substance, a counter electrode in the container holding a substrate to be vapor-deposited such that the substrate opposes the source, a filament disposed between the source and the electrode for generating thermions, and a grid disposed between the filament and the electrode for allowing the evaporated substance to pass therethrough and accelerating the evaporated substance. An electrical potential power supply is connected to the electrode, the filament and the grid for maintaining the grid at a positive potential with respect to the electrode and the filament, and an electrical heating power supply is connected to the grid for supplying the grid with an electrical power so as to electrically heat the grid. A cover which surrounds the source, filament, and grid and which has an opening facing the electrode may be provided in the container to enable a stable plasma and uniform thin film to be obtained regardless of any change in the shape, size, or material of the container.

摘要翻译： 一种用于形成薄膜的装置包括抽真空至高真空并接收气相沉积的真空容器，用于蒸发物质的容器中的蒸发源，容纳待气相沉积的基板的容器中的对电极 衬底与源极相对，设置在源极和电极之间用于产生热量的细丝，以及布置在灯丝和电极之间的栅格，用于允许蒸发的物质通过并加速蒸发的物质。 将电位电源连接到电极，灯丝和栅格，用于将电网相对于电极和灯丝保持在正电位，并且电加热电源连接到电网以向电网供应 电力，以便电加热电网。 围绕源极，细丝和栅格并且具有面向电极的开口的盖可以设置在容器中，以使得能够获得稳定的等离子体和均匀的薄膜，而不管形状，尺寸或材料的任何变化如何 容器

公开(公告)号：US5368908A

公开(公告)日：1994-11-29

申请号：US727067

申请日：1991-07-08

申请人： Wasaburo Ohta ,  Isamu Orima ,  Masashi Nakazawa ,  Yuzi Onodera ,  Kazuhiro Umeki

发明人： Wasaburo Ohta ,  Isamu Orima ,  Masashi Nakazawa ,  Yuzi Onodera ,  Kazuhiro Umeki

IPC分类号： G11B7/24 ,  B32B3/00

CPC分类号： G11B7/24056 ,  Y10S428/913 ,  Y10S430/146 ,  Y10T428/31678

摘要： An optical information recording medium, for writing in and reading out information by a laser beam, is composed of a recording layer, an anti-reflection layer structure formed on an outer surface section on which the laser beam is directed to be focused, on the recording layer, and the anti-reflection layer structure includes one or more transparent electroconductive film layers.

摘要翻译： 用于通过激光束写入和读出信息的光学信息记录介质由形成在激光束被聚焦的外表面部分上的记录层，抗反射层结构组成， 记录层，抗反射层结构包括一个或多个透明导电膜层。

公开(公告)号：US5114559A

公开(公告)日：1992-05-19

申请号：US587998

申请日：1990-09-25

申请人： Wasaburo Ohta ,  Masashi Nakazawa ,  Mikio Kinoshita

发明人： Wasaburo Ohta ,  Masashi Nakazawa ,  Mikio Kinoshita

IPC分类号： C23C14/32 ,  H01J37/32

CPC分类号： H01J37/32422 ,  C23C14/32

摘要： A thin film deposition system includes an evacuated casing in which there is introduced an active gas or an inert gas or a mixture thereof. An evaporant carried by an evaporation source in the evacuated casing is evaporated and travels toward a substrate supported on the electrode. A filament for emitting thermions is disposed between the evaporation source and the electrode, and a grid for passing the evaporated material therethrough is disposed between the filament and the electrode. Power supplies are electrically connected to the evacuated casing, the evaporation source, the electrode, the filament, and the grid, for keeping the filament negative in potential with respect to the evacuated casing and the grid. Alternatively, the evacuated casing may not be connected to the power supplies so that the grid is kept positive with respect to the filament. The grid may be of a double-layer structure, with the gas inlet means connected to the grid.

摘要翻译： 薄膜沉积系统包括抽真空壳体，其中引入活性气体或惰性气体或其混合物。 由真空壳体中的蒸发源携带的蒸发器被蒸发并且朝着支撑在电极上的基板行进。 用于发射热量的灯丝设置在蒸发源和电极之间，并且用于使蒸发的材料通过的栅格设置在灯丝和电极之间。 电源电连接到抽真空的外壳，蒸发源，电极，灯丝和电网，用于将灯丝相对于抽真空的外壳和电网保持为负电位。 或者，抽真空的壳体可以不连接到电源，使得栅格相对于灯丝保持正。 栅格可以是双层结构，其中气体入口装置连接到栅格。

公开(公告)号：US4982696A

公开(公告)日：1991-01-08

申请号：US294377

申请日：1989-01-06

申请人： Mikio Kinoshita ,  Wasaburo Ohta ,  Masashi Nakazawa

发明人： Mikio Kinoshita ,  Wasaburo Ohta ,  Masashi Nakazawa

IPC分类号： C23C14/32

CPC分类号： C23C14/32

摘要： An apparatus for forming thin film includes a vacuum container to which an active gas, an inert gas, or a mixture thereof is introduced, a source of evaporation for evaporating a substance being evaporated in the vacuum container, a counter electrode disposed in the vacuum container and holding a substrate for forming a thin film thereon in such a manner as to be opposed to the source of evaporation, a grid disposed between the source of evaporation and the counter electrode and having openings which allow the substance being evaporated to pass therethrough, a filament for thermionic emission disposed between the grid and the source of evaporation and a power source device for establishing a predetermined electric potential relationship between the grid, the counter electrode, and the filament.

摘要翻译： 一种用于形成薄膜的设备包括：真空容器，其中引入了活性气体，惰性气体或其混合物，用于蒸发真空容器中蒸发的物质的蒸发源，设置在真空容器中的对电极 并且以与蒸发源相对的方式保持用于在其上形成薄膜的基板，设置在蒸发源和对电极之间并具有允许物质被蒸发的开口通过的栅格， 布置在栅格和蒸发源之间的热离子发射的灯丝和用于在栅格，对电极和灯丝之间建立预定的电势关系的电源装置。

公开(公告)号：US08937363B2

公开(公告)日：2015-01-20

申请号：US13426685

申请日：2012-03-22

申请人： Masashi Nakazawa ,  Tomoyuki Hirano

发明人： Masashi Nakazawa ,  Tomoyuki Hirano

IPC分类号： H01L31/00 ,  H01L27/146

CPC分类号： H01L27/14636 ,  H01L27/1464

摘要： A solid-state imaging device includes a photoelectric conversion film which is interposed between two transparent electrodes outside a semiconductor substrate, wherein a film surface of the photoelectric conversion film is provided so as to incline with respect to a front surface of the semiconductor substrate.

摘要翻译： 固态成像装置包括光电转换膜，该光电转换膜介于半导体衬底外部的两个透明电极之间，其中光电转换膜的膜表面设置成相对于半导体衬底的前表面倾斜。

公开(公告)号：US20100053400A1

公开(公告)日：2010-03-04

申请号：US12545924

申请日：2009-08-24

申请人： Harumi Ikeda ,  Masashi Nakazawa

发明人： Harumi Ikeda ,  Masashi Nakazawa

IPC分类号： H04N5/335 ,  H01L31/18

CPC分类号： H01L27/14603

摘要： Disclosed herein is a solid-state imaging device including: a semiconductor layer; a charge accumulation region configured to be formed inside the semiconductor layer and serve as part of a photodiode; and a reflective surface configured to be disposed inside or under the charge accumulation region and be so formed as to reflect light that has passed through the charge accumulation region and direct the light toward a center part of the charge accumulation region.

摘要翻译： 本文公开了一种固态成像装置，包括：半导体层; 电荷累积区域，被配置为形成在所述半导体层的内部并用作光电二极管的一部分; 以及被配置为设置在电荷累积区域的内部或下方的反射表面，并且被形成为反射已经通过电荷累积区域的光并将光引向电荷累积区域的中心部分。

公开(公告)号：US08129213B2

公开(公告)日：2012-03-06

申请号：US12545924

申请日：2009-08-24

申请人： Harumi Ikeda ,  Masashi Nakazawa

发明人： Harumi Ikeda ,  Masashi Nakazawa

IPC分类号： H01L21/00

CPC分类号： H01L27/14603

摘要： Disclosed herein is a solid-state imaging device including: a semiconductor layer; a charge accumulation region configured to be formed inside the semiconductor layer and serve as part of a photodiode; and a reflective surface configured to be disposed inside or under the charge accumulation region and be so formed as to reflect light that has passed through the charge accumulation region and direct the light toward a center part of the charge accumulation region.

摘要翻译： 本文公开了一种固态成像装置，包括：半导体层; 电荷累积区域，被配置为形成在所述半导体层的内部并用作光电二极管的一部分; 以及被配置为设置在电荷累积区域的内部或下方的反射表面，并且被形成为反射已经通过电荷累积区域的光并将光引向电荷累积区域的中心部分。