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1.发明授权Method and system for identifying etch end points in semiconductor circuit fabrication 失效用于识别半导体电路制造中的蚀刻端点的方法和系统公开(公告)号：US06381008B1
公开(公告)日：2002-04-30
申请号：US09318402
申请日：1999-05-25
申请人： Wayne A. Branagh , Robert C. Fry , Juan C. Ivaldi , Jason A. Rivers , Michael R. Dyas , Robert M. Brown, Jr.
发明人： Wayne A. Branagh , Robert C. Fry , Juan C. Ivaldi , Jason A. Rivers , Michael R. Dyas , Robert M. Brown, Jr.
IPC分类号： G01J318
CPC分类号： G01J3/18 , G01J3/0229 , G01J3/443
摘要： Disclosed is a spectrometer system with unique wavelength resolution improving relative positioning of diffraction grating and detector. Also disclosed is a modified evolving windowed factor analysis based method of detecting semiconductor etch end points which is particularly well suited for use in real time monitoring and process control. Use of wavelength group selecting mask filters is also disclosed.
摘要翻译： 公开了具有独特波长分辨率的光谱仪系统，改善衍射光栅和检测器的相对定位。 还公开了一种基于改进的基于窗口因子分析的检测半导体蚀刻终点的方法，其特别适用于实时监测和过程控制。 还公开了使用波长组选择掩模滤波器。
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2.发明授权High efficiency continuous flow through fractional-volatilization separator system, and method of use 失效通过分级挥发分离器系统的高效率连续流动及其使用方法
公开(公告)号：US5792663A
公开(公告)日：1998-08-11
申请号：US722781
申请日：1996-09-27
CPC分类号： H01J49/0431 , B01D1/22 , G01N1/40 , G01N2001/4033 , Y10T436/24 , Y10T436/25875
摘要： Fractional-volatilization separation systems and methods are disclosed which enable a stable, continuous, non-bubbling liquid flow, essentially constant surface area/volume ratio, temperature controlled, fractional volatilization of volatile/semi-volatile components in a liquid analyte or component containing sample. The fractional volatilization separator system can be utilized in small scale analytical and large scale chemical purification, concentration and desalinization applications. Continuous rapid removal of residual liquid sample can provide concentrated non-volatile component/analyte solution, and allows quick and easy washout between sequential use with different liquid samples. Examples of relevant analytical chemistry applications of the present invention system are found in conjunction with long-path absorbance-cell "cold-vapor" mercury analyzers, cold vapor mercury fluorescense photometers, infrared spectrophotometers, organic mass spectrometers, plasma emission spectrometers, and plasma mass spectrometers.
摘要翻译： 公开了分散挥发分离系统和方法，其能够在液体分析物或含部件的样品中实现稳定，连续，非鼓泡液体流动，基本恒定的表面积/体积比，温度控制，挥发性/半挥发性组分的分数挥发 。 分级挥发分离系统可用于小规模分析和大规模化学纯化，浓缩和脱盐应用。 残留液体样品的连续快速去除可以提供浓缩的非挥发性成分/分析物溶液，并且允许在不同液体样品的顺序使用之间快速和容易地冲洗。 本发明系统的相关分析化学应用的实例结合长途吸收 - 电池“冷蒸气”汞分析仪，冷汽汞汞荧光光度计，红外分光光度计，有机质谱仪，等离子体发射光谱仪和等离子体质量 光谱仪
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3.发明授权公开(公告)号：US06580507B2
公开(公告)日：2003-06-17
申请号：US09797932
申请日：2001-03-02
申请人： Robert C. Fry , Michael R. Dyas
发明人： Robert C. Fry , Michael R. Dyas
IPC分类号： G01N2100
CPC分类号： G01N21/05 , G01N21/0303 , G01N2021/0346 , G01N2201/0639
摘要： Disclosed is a multiple longitudinal flow cell channel electromagnetic radiation absorption or fluorescence monitoring system wherein a source of electromagnetic radiation is positioned to input electromagnetic radiation to each of the longitudinal flow cell channels, and wherein a single low cost, low drift, preferably linear and sensitized to UV, array detector system is positioned to directly simultaneously monitor electromagnetic radiation from at least two of the longitudinal flow cell channels, at different locations thereupon.
摘要翻译： 公开了一种多纵向流动池通道电磁辐射吸收或荧光监测系统，其中定位电磁辐射源以将电磁辐射输入到每个纵向流动池通道，并且其中单个低成本，低漂移，优选线性和致敏 到UV阵列检测器系统被定位成直接同时监视来自至少两个纵向流动池通道的电磁辐射，在其上的不同位置。
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4.发明授权Analytical laser ablation of solid samples for ICP, ICP-MS, and FAG-MS analysis 有权用于ICP，ICP-MS和FAG-MS分析的固体样品的分析激光烧蚀公开(公告)号：US08274735B2
公开(公告)日：2012-09-25
申请号：US12283698
申请日：2008-09-14
IPC分类号： G02B21/26
CPC分类号： B23K26/032 , G01N21/71
摘要： The present invention facilitates improvements in laser ablation of solid samples to be analyzed by an external inductively coupled plasma (ICP) emission spectrometer, ICP/mass-spectrometer (ICP-MS), or flowing afterglow (FAG) mass spectrometer (FAG-MS) for elemental analysis (ICP and ICP-MS) or molecular analysis (FAG-MS). A novel invention mirror-with-hole beam combiner eliminates chromatic aberration in the invention sample view and allows rad-hardening the laser ablation invention for use in a radiation hot cell for analysis of high activity nuclear waste. Many other novel invention rad-hardening attributes facilitate a comprehensive rad-hardened laser ablation system (the world's first). In other embodiments, invention novelties include unusually large homogeneous focused laser spot diameters, unusually long laser objective lens focal length, wide range operationally variable laser path length with built-in re-alignment, operationally variable demagnification ratio and diameter of the focused laser spot, the use of significantly higher powered SMR lasers in a large spot diameter to facilitate high sensitivity bulk analysis of solid samples, a demountable and gravitationally self-sealing stack assembly laser ablation cell, and the world's first auto-samplers (mechanized sample changers) for analytical laser ablation.
摘要翻译： 本发明有助于通过外部电感耦合等离子体（ICP）发射光谱仪，ICP /质谱仪（ICP-MS）或流动余辉（FAG）质谱仪（FAG-MS）分析的固体样品的激光烧蚀的改进， 用于元素分析（ICP和ICP-MS）或分子分析（FAG-MS）。 一种新颖的本发明的反射孔光束组合器消除了本发明样品视图中的色差，并允许将激光烧蚀发明进行辐照硬化用于辐射热电池用于高活性核废料的分析。 许多其他新颖的发明Rad硬化属性有助于全面的Rad硬化激光烧蚀系统（世界第一）。 在其他实施例中，本发明的新颖性包括异常大的均匀聚焦激光光斑直径，异常长的激光物镜焦距，具有内置重新对准的宽范围可操作变化的激光路径长度，可聚焦激光光斑的可操作变化的缩小比和直径， 使用显着更高功率的SMR激光器在大的光斑直径，以促进固体样品，可拆卸和重力自密封堆叠组件激光烧蚀电池的高灵敏度批量分析，以及世界上第一个用于分析的自动采样器（机械化样品转换器） 激光烧蚀。
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5.发明申请Analytical laser ablation of solid samples for ICP, ICP-MS, and FAG-MS analysis 有权用于ICP，ICP-MS和FAG-MS分析的固体样品的分析激光烧蚀公开(公告)号：US20090073586A1
公开(公告)日：2009-03-19
申请号：US12283698
申请日：2008-09-14
CPC分类号： B23K26/032 , G01N21/71
摘要： The present invention facilitates improvements in laser ablation of solid samples to be analyzed by an external inductively coupled plasma (ICP) emission spectrometer, ICP/mass-spectrometer (ICP-MS), or flowing afterglow (FAG) mass spectrometer (FAG-MS) for elemental analysis (ICP and ICP-MS) or molecular analysis (FAG-MS). A novel invention mirror-with-hole beam combiner eliminates chromatic aberration in the invention sample view and allows rad-hardening the laser ablation invention for use in a radiation hot cell for analysis of high activity nuclear waste. Many other novel invention rad-hardening attributes facilitate a comprehensive rad-hardened laser ablation system (the world's first). In other embodiments, invention novelties include unusually large homogeneous focused laser spot diameters, unusually long laser objective lens focal length, wide range operationally variable laser path length with built-in re-alignment, operationally variable demagnification ratio and diameter of the focused laser spot, the use of significantly higher powered SMR lasers in a large spot diameter to facilitate high sensitivity bulk analysis of solid samples, a demountable and gravitationally self-sealing stack assembly laser ablation cell, and the world's first auto-samplers (mechanized sample changers) for analytical laser ablation.
摘要翻译： 本发明有助于通过外部电感耦合等离子体（ICP）发射光谱仪，ICP /质谱仪（ICP-MS）或流动余辉（FAG）质谱仪（FAG-MS）分析的固体样品的激光烧蚀的改进， 用于元素分析（ICP和ICP-MS）或分子分析（FAG-MS）。 一种新颖的本发明的反射孔光束组合器消除了本发明样品视图中的色差，并允许将激光烧蚀发明进行辐照硬化用于辐射热电池用于高活性核废料的分析。 许多其他新颖的发明Rad硬化属性有助于全面的Rad硬化激光烧蚀系统（世界第一）。 在其他实施例中，本发明的新颖性包括异常大的均匀聚焦激光光斑直径，异常长的激光物镜焦距，具有内置重新对准的宽范围可操作变化的激光路径长度，可聚焦激光光斑的可操作变化的缩小比和直径， 使用显着更高功率的SMR激光器在大的光斑直径，以促进固体样品，可拆卸和重力自密封堆叠组件激光烧蚀电池的高灵敏度批量分析，以及世界上第一个用于分析的自动采样器（机械化样品转换器） 激光烧蚀。
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公开(公告)号：US09079268B2
公开(公告)日：2015-07-14
申请号：US13573554
申请日：2012-09-24
CPC分类号： B23K26/032 , B23K26/361 , G01N21/71 , G01N21/718 , G02B5/0891
摘要： This invention is improved laser ablation of solid samples analyzed by inductively coupled plasma (ICP), ICP mass spectrometry, or flowing afterglow mass spectrometry. A mirror-with-hole eliminates chromatic aberration in sample viewing and allows rad-hardening for radiation hot cell analysis of nuclear waste. Other attributes facilitate comprehensively rad-hardened laser ablation. Additional improvements include large, homogeneous laser spots, long-focus objective lenses, variable laser path length with built-in re-alignment, variable demagnification ratio, higher powered SMR lasers with larger spots enabling sensitive bulk solids analysis, demountable gravitationally self sealing stack assembly sample ablation cells, and laser ablation sample changers.
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7.发明授权Multiple laser diode electromagnetic radiation source in multiple electrophoresis channel systems 失效多激光二极管电磁辐射源在多个电泳通道系统中公开(公告)号：US06361672B1
公开(公告)日：2002-03-26
申请号：US09350741
申请日：1999-07-09
申请人： Jianzhong Zhu , Robert C. Fry , Arthur P. D'Silva
发明人： Jianzhong Zhu , Robert C. Fry , Arthur P. D'Silva
IPC分类号： G01N2726
CPC分类号： G01N21/645
摘要： The present invention is a multiple channel electrophoresis system which includes a multiple laser diode illumination source. The multiple laser diode illumination source has a plurality of individual laser diodes, each of which is situated so as to provide independent fluorescence inducing illumination to one of the electrophoresis channels in the multiple channel electrophoresis system. The channels in the multiple channel electrophoresis system can be of many embodiments. And use of the present invention system in a multiple angle light scattering mode is also described.
摘要翻译： 本发明是一种多通道电泳系统，其包括多个激光二极管照明源。 多激光二极管照明源具有多个单独的激光二极管，每个激光二极管的位置是为了向多通道电泳系统中的一个电泳通道提供独立的荧光诱导照明。 多通道电泳系统中的通道可以是许多实施方案。 还描述了以多角度光散射模式使用本发明系统。
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8.发明授权System and method for producing nebulized sample analyte containing solution for introduction to sample analysis systems 失效用于产生雾化样品分析物的系统和方法，用于引入样品分析系统
公开(公告)号：US6002097A
公开(公告)日：1999-12-14
申请号：US144893
申请日：1998-09-01
CPC分类号： G01N21/714
摘要： The present invention is a system for nebulizing sample analyte containing solutions which allows liquid solution and gas entry, and is tyically utilized in combination or integration with an interface for directing sample analyte containing solution which is nebulized. The present invention provides improvement in the form of system design that prevents sample delivery tube component damage, sample solution electrical charging, sample solution "re-nebulization" effects, and sample analyte carry-over memory effects during a present invention method of use for introducing nebulized sample analyte containing solution into, for instance, a mass-spectrometer sample analysis system.
摘要翻译： 本发明是一种用于雾化含有溶液的溶液的系统，其允许液体溶液和气体进入，并且与用于引导被雾化的样品分析物含有溶液的界面组合或整合地暴露性地使用。 本发明提供了在本发明的引入方法中使用的系统设计形式的改进，其防止样品输送管组分损伤，样品溶液充电，样品溶液“再雾化”效应和样品分析物携带记忆效应 将含有溶液的雾化样品分析物加入到例如质谱仪样品分析系统中。
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9.发明申请Analytical laser ablation of solid samples for ICP, ICP-MS, and FAG-MS analysis 审中-公开用于ICP，ICP-MS和FAG-MS分析的固体样品的分析激光烧蚀公开(公告)号：US20150165550A1
公开(公告)日：2015-06-18
申请号：US13573554
申请日：2012-09-24
CPC分类号： B23K26/032 , B23K26/361 , G01N21/71 , G01N21/718 , G02B5/0891
摘要： This invention is improved laser ablation of solid samples analyzed by inductively coupled plasma (ICP), ICP mass spectrometry, or flowing afterglow mass spectrometry. A mirror-with-hole eliminates chromatic aberration in sample viewing and allows rad-hardening for radiation hot cell analysis of nuclear waste. Other attributes facilitate comprehensively rad-hardened laser ablation. Additional improvements include large, homogeneous laser spots, long-focus objective lenses, variable laser path length with built-in re-alignment, variable demagnification ratio, higher powered SMR lasers with larger spots enabling sensitive bulk solids analysis, demountable gravitationally self sealing stack assembly sample ablation cells, and laser ablation sample changers.
摘要翻译： 本发明是通过电感耦合等离子体（ICP），ICP质谱或流动余辉质谱分析的固体样品的改进的激光烧蚀。 镜像孔消除样品观察中的色差，并允许放射硬化用于核废料的辐射热电池分析。 其他属性便于全面放射硬化激光烧蚀。 附加的改进包括大的均匀的激光点，长焦点物镜，具有内置重新对准的可变激光路径长度，可变的缩小比率，具有较大斑点的较高功率的SMR激光器，可进行敏感的散装固体分析，可拆卸的重力自密封堆叠组件 样品消融细胞和激光切割取样器。
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10.发明授权Long-path absorbance-cell imaging system with decreased system element parameter change based sensitivity and method of use 失效长途吸收细胞成像系统具有降低的系统元素参数变化的灵敏度和使用方法
公开(公告)号：US5815276A
公开(公告)日：1998-09-29
申请号：US944280
申请日：1997-10-06
申请人： Robert C. Fry
发明人： Robert C. Fry
CPC分类号： G01N21/05
摘要： A long-path absorbance-cell optical imaging system, appropriate for use in cold vapor mercury analysis, which long-path absorbance-cell optical imaging system achieves decreased internal reflection mediated system-element-parameter-change-based sensitivity in use, by appropriate placement of apertures, is disclosed.
摘要翻译： 一种适用于冷汽汞分析的长途吸光度光学成像系统，其长途吸光度光学成像系统通过适当的方式实现内反射介导的基于系统元素参数变化的灵敏度的降低 公开了孔的放置。
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