Wafer shape accuracy using symmetric and asymmetric instrument error signatures
    1.
    发明授权
    Wafer shape accuracy using symmetric and asymmetric instrument error signatures 有权
    使用对称和非对称仪器误差签名的晶圆形状精度

    公开(公告)号:US06594002B2

    公开(公告)日:2003-07-15

    申请号:US09918979

    申请日:2001-07-31

    IPC分类号: G01N2100

    摘要: A method to determine the systematic error of an instrument that measures features of a semiconductor wafer includes the following sequential steps. Collecting sensor data from measurement runs on front and back surfaces of a wafer while the wafer is oriented at different angles to the instrument for each run, yielding a front data set and a back data set for each angle. Then organizing the data in each set into a wafer-fixed coordinate frame. Reflecting all back surface data about a diameter of the wafer creates a reflected back data set. Subtracting the reflected back data from the front data for each wafer angle, and dividing the result by two, yields an averaged wafer shape for each load angle. Adding the reflected back data to the front data and dividing the result by two, yields an instrument signature for each load angle. The symmetric corrector is calculated by taking the average over all instrument signatures at each load angle. The symmetric corrector is successively rotated to the same angle as a front shape measurement and subtracted, yielding a calibrated wafer data set. A wafer mean is computed by averaging these calibrated wafer shape measurements. When the wafer mean is subtracted from the individual front side corrected shape measurements, a set of shape residual maps for each load angle results. The average of the aligned residuals is the asymmetric error. The systematic error is the sum of the symmetric and asymmetric errors.

    摘要翻译: 确定测量半导体晶片特征的仪器的系统误差的方法包括以下顺序步骤。 在晶片的前后表面上收集来自测量的传感器数据,同时晶片与每个运行的仪器以不同的角度定向,产生用于每个角度的前数据组和后数据组。 然后将每组中的数据组织成晶圆固定的坐标系。 反映关于晶片直径的所有背面数据产生反射回数据集。 从每个晶片角度的前面数据中减去反射回数据,并将结果除以2,得到每个负载角度的平均晶片形状。 将反射回数据添加到前端数据并将结果除以2,为每个负载角度产生一个仪器签名。 通过在每个负载角度取所有仪器签名的平均值来计算对称校正器。 将对称校正器依次旋转到与正面形状测量相同的角度并减去,得到校准的晶片数据集。 通过平均这些校准的晶片形状测量来计算晶片平均值。 当从各个正面校正形状测量值中减去晶片平均值时,产生用于每个负载角度的一组形状残差图。 对齐残差的平均值是非对称误差。 系统误差是对称误差和非对称误差之和。

    Data Management System
    2.
    发明申请
    Data Management System 有权
    数据管理系统

    公开(公告)号:US20100106686A1

    公开(公告)日:2010-04-29

    申请号:US12525746

    申请日:2008-02-05

    IPC分类号: G06F17/00 G06F12/16

    摘要: A data management system for managing the storage of data on primary and secondary storage from a primary information source having original file content to be stored including: a data file stub stored on primary storage; a data file stored on secondary storage; and wherein: the data file stub comprises original file meta data and additional stub meta data relevant to the data file; the data file comprises the original file content and additional file meta data relevant to the data file stub; the additional stub meta data includes location and information relevant to locate and recover the data file; the additional file meta data includes information relevant to the location and content of the stub; the additional stub meta data and additional file meta data being so formed and arranged that the data to be stored may be accessed without stateful middleware.

    摘要翻译: 一种数据管理系统,用于从具有要存储的原始文件内容的主信息源管理主存储和次存储上的数据的存储,包括:存储在主存储器上的数据文件存根; 存储在二级存储器上的数据文件; 并且其中:所述数据文件存根包括与所述数据文件相关的原始文件元数据和附加存根元数据; 数据文件包括与数据文件存根相关的原始文件内容和附加文件元数据; 附加存根元数据包括与定位和恢复数据文件相关的位置和信息; 附加文件元数据包括与存根的位置和内容相关的信息; 额外的存根元数据和附加文件元数据被形成和排列成使得可以在没有状态中间件的情况下访问要被存储的数据。

    Modular measurement while drilling sensor assembly
    3.
    发明授权
    Modular measurement while drilling sensor assembly 失效
    钻探传感器组件时进行模块化测量

    公开(公告)号:US5456106A

    公开(公告)日:1995-10-10

    申请号:US212230

    申请日:1994-03-14

    摘要: A modular measurement while drilling sensor assembly is presented. A typical cross-over assembly for mating with a measurement while drilling (MWD) tool is connected to a typical positive displacement mud motor (e.g., a Moineau motor). A modular sensor assembly comprises two portions, an upper drive shaft portion which includes a flexible shaft connected to the motor and a lower sensor portion and supported by a radial bearing. The lower end of the flexible shaft is connected to a hollowed shaft which extends beyond the lower end of the upper drive shaft portion and which is supported by a radial bearing. The lower sensor portion has a central channel extending longitudinally therethrough, with the lower portion of the hollowed shaft extending through this channel. The sensor portion may comprise any type of MWD sensor, however the present invention is preferably used with sensors (e.g., formation evaluation sensors) that benefit from obtaining measurements close to the bit. The lower end of the hollowed shaft is supported with a radial bearing and connected to a flexible shaft of an adjustable kick off assembly connected to the sensor portion. The adjustable kick off assembly allows the introduction of a kick off angle, generally between 0.degree. and 3.degree., in the assembly. The adjustable kick off assembly is connected to a typical bearing pack assembly. The lower end of the bearing pack assembly is typically connected to a drive shaft, a bit box and then the bit.

    摘要翻译: 介绍了钻孔传感器组件时的模块化测量。 与钻井(MWD)工具测量相配合的典型交叉组件连接到典型的正位移泥浆马达(例如Moineau马达)。 模块化传感器组件包括两个部分,上部驱动轴部分包括连接到电动机的柔性轴和下部传感器部分并由径向轴承支撑。 柔性轴的下端连接到中空轴,其延伸超过上驱动轴部分的下端并且由径向轴承支撑。 下传感器部分具有纵向延伸穿过其中的中心通道,中空轴的下部延伸穿过该通道。 传感器部分可以包括任何类型的MWD传感器,然而,本发明优选地与获得靠近该位的测量受益的传感器(例如地层评估传感器)一起使用。 中空轴的下端由径向轴承支撑并连接到连接到传感器部分的可调节的起跳组件的柔性轴。 可调节的启动组件允许在组件中引入一般在0°和3°之间的起跳角。 可调节的启动组件连接到典型的轴承组件。 轴承组件的下端通常连接到驱动轴,位盒,然后位。

    Downhole clock synchronization apparatus and methods for use in a borehole drilling environment
    4.
    发明申请
    Downhole clock synchronization apparatus and methods for use in a borehole drilling environment 有权
    井下时钟同步装置及其在井眼钻井环境中的使用方法

    公开(公告)号:US20050007259A1

    公开(公告)日:2005-01-13

    申请号:US10618269

    申请日:2003-07-09

    IPC分类号: G01V1/40 G01V3/00

    CPC分类号: G01V1/40

    摘要: Geophysical measurement system employed during the drilling of a well borehole. The system employs a reference clock disposed within equipment at the surface of the earth and a borehole assembly which houses a downhole clock and at least one sensor. The borehole assembly is operationally connected to a drill string, which advances the borehole. At least one synchronization shuttle apparatus containing a shuttle clock is conveyed downhole to the borehole assembly to synchronize the borehole clock with the reference clock. Reference and borehole clock synchronization is maintained at one millisecond or less over a period of days. Outputs from the reference clock and borehole clock and sensor are combined to obtain a measure of a geophysical parameter of interest. Although the measurement system is particularly applicable to seismic-while-drilling measurements, it can be used in a wide variety of clock driven geophysical measurements.

    摘要翻译: 钻井期间采用的地球物理测量系统。 系统采用设置在地球表面的设备内的参考时钟和容纳井下时钟和至少一个传感器的钻孔组件。 钻孔组件可操作地连接到钻柱,其推进钻孔。 包含穿梭时钟的至少一个同步穿梭装置在井下传送到钻孔组件以使钻孔时钟与参考时钟同步。 参考和井眼时钟同步在一段时间内保持在一毫秒或更短。 来自参考时钟和井眼时钟和传感器的输出被组合以获得感兴趣的地球物理参数的量度。 虽然测量系统特别适用于地震同时测井,但可用于各种时钟驱动的地球物理测量。

    Apparatus for coating articles
    5.
    发明授权
    Apparatus for coating articles 失效
    涂装物品的设备

    公开(公告)号:US4036169A

    公开(公告)日:1977-07-19

    申请号:US602512

    申请日:1975-08-07

    申请人: Peter Harvey

    发明人: Peter Harvey

    IPC分类号: B05C19/00

    CPC分类号: B05C19/00

    摘要: A layer of plastics material is applied to at least one selected surface of a metal article by a method in which the article is heated and positioned in such a way that the selected surface or surfaces is or are lowermost; a table having an upper surface or surfaces carrying a layer of powdered plastics material, said carrier surface or surfaces of the table being of a shape and area such that the surface or surfaces will wholly underlie the selected surface or surfaces of the article, is raised upwardly beneath the article to urge said carrier surface or surfaces against the overlying selected surface or surfaces and so transfer powder from the carrier surface or surfaces to the selected surface or surfaces; and the powdered material adhering to the selected surface or surfaces is permitted or caused to coalesce and form a plastics layer on the or each surface. Preferably powdered plastics material is applied to the carrier surface or surfaces by raising the table upwardly through a fluidized bed of powdered plastics material.

    摘要翻译: 一层塑料材料通过一种方法施加到金属制品的至少一个选定表面上,其中制品被加热和定位成使得所选择的表面或最下面的表面; 具有上表面或表面承载粉末状塑料材料层的工作台,所述载体表面或桌子的表面具有形状和区域,使得表面或表面将完全置于所选择的制品的表面或表面之下 在物品的上方向上推动所述载体表面或表面抵靠上覆的所选择的表面或表面,并且从而将粉末从载体表面或表面转移到所选择的表面上; 并且允许或者使附着在所选择的表面上的粉末材料在该表面或每个表面上聚结并形成塑料层。 优选地,将粉末状塑料材料通过将粉末状塑料材料的流化床向上提升到载体表面或表面上。

    Binding Device
    6.
    发明申请
    Binding Device 审中-公开
    装订装置

    公开(公告)号:US20090202320A1

    公开(公告)日:2009-08-13

    申请号:US12083413

    申请日:2006-10-06

    申请人: Peter Harvey

    发明人: Peter Harvey

    IPC分类号: B42B9/00

    CPC分类号: B42F11/00 B42F9/007

    摘要: A binding device (300) is useful for securing materials such as booklets and magazines in a ring binder. The device (300) has a perforated side (305) including holes (315) for securing the device (300) in a ring binder. A clamping side (310) includes an upper jaw (320) and a lower jaw (325). The upper jaw (320) and the lower jaw (325) each include a component (335) of a snap fit mechanism for securing the upper jaw (320) and the lower jaw (325) together along a longitudinal axis of the device (300).

    摘要翻译: 装订装置(300)可用于将诸如小册子和杂志的材料固定在环形活页夹中。 装置(300)具有穿孔侧(305),其包括用于将装置(300)固定在环形活页夹中的孔(315)。 夹紧侧(310)包括上钳口(320)和下钳口(325)。 上钳口(320)和下钳口(325)各自包括用于将上钳口(320)和下钳口(325)沿着装置(300)的纵向轴线固定在一起的卡扣配合机构的部件(335) )。

    Aerial optical cable and its method of manufacture
    7.
    发明授权
    Aerial optical cable and its method of manufacture 失效
    航空光缆及其制造方法

    公开(公告)号:US4869573A

    公开(公告)日:1989-09-26

    申请号:US181370

    申请日:1988-04-14

    摘要: An optical cable, especially suitable for use as an aerial cable, comprises a circumferentially rigid flexible tube which is of composite form and comprises a plurality of elongate flexible bodies helically laid up together, each of which bodies is of a cross-section approximating to a sector of an annulus and comprises extruded electrically insulating plastics material and a mulitiplicity of longitudinally stressed elongate flexible non-metallic reinforcing elements encapsulated in said plastics material, e.g. polypropylene or nylon, the multiplicity of non-metallic reinforcing elements being substantially evenly distributed throughout the cross-sectional area of the body. An outer protective non-metallic sheath surrounds the tube and at least one flexible optical guide, e.g. a separate optical fibre, optical bundle or optical fibre ribbon structure, is housed in the bore of and is movable relative to the tube.

    摘要翻译: 特别适合用作架空电缆的光缆包括周向刚性的柔性管,其为复合形式,并且包括螺旋地铺设在一起的多个细长柔性体,每个主体的截面近似于 环形部分包括挤出的电绝缘塑料材料和包封在所述塑料材料中的纵向应力细长的柔性非金属增强元件的多重性,例如 聚丙烯或尼龙,多个非金属增强元件基本上均匀分布在整个身体的横截面区域。 外部保护性非金属护套围绕管和至少一个柔性光导,例如, 单独的光纤,光束或光纤带结构被容纳在孔中并且可相对于管移动。

    Dead end fitting for use in overhead electric and optical transmission
systems
    8.
    发明授权
    Dead end fitting for use in overhead electric and optical transmission systems 失效
    用于架空电和光传输系统的死端接头

    公开(公告)号:US4496212A

    公开(公告)日:1985-01-29

    申请号:US466742

    申请日:1983-02-15

    申请人: Peter Harvey

    发明人: Peter Harvey

    CPC分类号: H02G7/056

    摘要: A simple and inexpensive dead end fitting for securing an overhead conductor loosely housing an optical guide to a tower comprises a sleeve of malleable metal or metal alloy, open at each of its ends, for compression jointing to the conductor; a steel termination in screw threaded engagement with the sleeve and having a clevis for securing the fitting to a tower; and a lug welded to the sleeve for effecting electrical connection to a jumper cable. The lug engages in a notch in the adjacent end of the termination to lock positively the screw threaded engagement between the sleeve and termination.

    摘要翻译: 用于固定将光导体松动地容纳在塔架中的架空导体的简单且廉价的死端配件包括:可延展的金属或金属合金的套管,在其每个端部处开放,用于压缩接合到导体; 与所述套筒螺纹接合并具有用于将所述配件固定到塔架的U形夹的钢终端; 以及焊接到套筒上的凸耳,以实现与跳线电缆的电连接。 凸耳接合在端子的相邻端部的凹口中,以正确地锁定套筒和端子之间的螺纹接合。

    Overhead electric and optical transmission systems
    9.
    发明授权
    Overhead electric and optical transmission systems 失效
    架空电力和光传输系统

    公开(公告)号:US4494822A

    公开(公告)日:1985-01-22

    申请号:US389682

    申请日:1982-06-18

    申请人: Peter Harvey

    发明人: Peter Harvey

    CPC分类号: G02B6/4422 G02B6/444

    摘要: In an inexpensive and simple method of effecting a joint between two overhead electric conductors incorporating optical fibres or between an overhead electric conductor incorporating an optical fibre and an optical cable extending to a sub-station or other location, at least a part of each or the overhead conductor is introduced into a metal sleeve extending from a wall of a metal housing and the sleeve is compression jointed to the conductor to effect a mechanical and electrical joint between the conductor and the housing. The part of the conductor protruding into the housing is cut back and a joint is effected between the optical fibres of the two overhead conductors or between the optical fibres of the overhead conductor and the optical cable that has been introduced into the housing. The housing is sealed to render it fluid tight and is preferably filled with petroleum jelly. An elongate metal shroud may be assembled around the metal housing and be so shaped as to provide aerodynamic and corona protection.

    摘要翻译: 在一种廉价且简单的方法来实现包含光纤的两个架空电导线之间或者在包括光纤的架空电导体和延伸到子站或其他位置的光缆之间的接头,每个或 架空导体被引入从金属壳体的壁延伸的金属套筒中,并且套筒被压接在导体上以实现导体和壳体之间的机械和电连接。 突出到壳体中的导体的部分被切断,并且在两个架空导体的光纤之间或架空导体的光纤和已经被引入到壳体中的光缆之间进行接合。 壳体被密封以使其流体密封,并且优选地填充有果冻。 细长的金属护罩可以围绕金属壳体组装并且被成形为提供空气动力学和电晕保护。

    Cable support systems
    10.
    发明授权
    Cable support systems 失效
    电缆支持系统

    公开(公告)号:US4223175A

    公开(公告)日:1980-09-16

    申请号:US960866

    申请日:1978-11-15

    IPC分类号: A62C3/16 H02G3/04 H01B7/34

    CPC分类号: A62C3/16 H02G3/0412

    摘要: An electric cable support system is provided having means for supporting electric cables and an elongate metal duct housing said support means and divided transversely into separately formed parts that are detachably secured together, the internal surface of at least a part of the length of the elongate duct is lined with a continuous wall of thermal insulating material and/or absorbing material comprising a closed envelope, or at least two closed envelopes arranged adjacent one another, containing non-flammable evaporative cooling fluid. Preferably, the or each envelope is made of a flexible material which will melt at a temperature at or near the boiling point of the cooling fluid. In the event of an external fire, when the temperature of the duct wall is sufficient to melt the flexible material of an envelope, the cooling fluid will start to evaporate and cool the duct interior.

    摘要翻译: 电缆支撑系统设置有用于支撑电缆的装置和容纳所述支撑装置的细长金属导管,并横向划分成可拆卸地固定在一起的单独形成的部分,细长导管长度的至少一部分的内表面 内衬有绝热材料和/或吸收材料的连续壁,其包括封闭的封套或彼此相邻布置的至少两个封闭的信封,其包含不可燃的蒸发冷却流体。 优选地,每个包封由柔性材料制成,该柔性材料将在冷却流体的沸点或接近冷却流体的温度下熔化。 在外部火灾的情况下,当管道壁的温度足以熔化外壳的柔性材料时,冷却液将开始蒸发并冷却管道内部。