摘要:
A system is disclosed for safeguarding fab operators and workpieces such as semiconductor wafers from harm as a result of collision between an operator and a transport assembly for the workpieces as the workpieces are transported between tools and storage nests within a tool bay.
摘要:
The present invention is a unified spine structure that EFEM components, such as a wafer handling robot and a SMIF pod advance assembly, may mount to. The frame includes multiple vertical struts that are mounted to an upper support member and a lower support member. Structurally tying the vertical struts to the support members creates a rigid body to support the EFEM components. The vertical struts also provide a common reference that the EFEM components may align with. This eliminates the need for each EFEM component to align with respect to each other. Thus, if one EFEM component is removed it will not affect the alignment and calibration of the remaining secured EFEM components. The unified frame also creates an isolated storage area for the SMIF pod door and the port door within the environment that is isolated from the outside ambient conditions.
摘要:
The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.
摘要:
The present invention is a wafer engine for transporting wafers. The wafer engine includes a linear drive for moving the wafer along an x axis, a rotational drive for rotating the wafer about a theta axis, a linear drive for moving the wafer along a z axis, and a linear drive for moving the wafer along a radial axis. The linear drive for moving the wafer along a z axis is offset from the rotational drive. When the rotational drive rotates about the theta axis, both the z axis and radial axis drives are also rotated about the theta axis. Preferably, the linear drive for moving the wafer along a radial axis is a dual or rapid swap slide body mechanism having an upper and lower end effector. The slide body mechanism preferably also has means to align the wafer and perform various inspection and marking procedures.
摘要:
Conductive fibers of a combination of aramid and polyvinyl pyrrolidone (PVP) are disclosed having a strongly bonded metal coating applied by electroless plating. PVP increases adhesion of the fiber surface to the electroless plating. The preferred aramid is poly(p-phenylene terephthalamide).
摘要:
Apparatuses and methods for treatment of objects and the resulting products. The treatments are directed to improving friction, wear and service life. Methods may include decontaminating the surface being treated. The treated surface is texturized to better receive treatment materials jetted toward and impinged against the surface to release energy to form alloys. The jets may include carrier and/or impact particles to facilitate treatment and alloying. The materials may additionally infuse, diffuse, be captured by texture or folding or otherwise be incorporated in the substrate treatment area so as to form a skin which includes the treated surface and a subsurface zone which have the improved characteristics or other desired attributes. The treatments and apparatus therefor produce such alloying and incorporation of treatment materials without increasing the size of the object being treated.
摘要:
A terrestrial radio system for delivering to consumers data transmission services, Internet services, two-way capabilities and single-channel or multi-channel video programming, including national, regional and local television broadcast signals, as well as an apparatus and method thereof. The terrestrial radio system transmits terrestrial signals at satellite-allocated frequencies while mitigating interference with satellite signals to reuse satellite-allocated frequencies.
摘要:
A retaining arrangement retains a key holder of a type having a tag suspended from a ring with the ring also holding at least one key. The retaining arrangement includes a panel. A plurality of slots is defined by the panel. Each slot is shaped and dimensioned to receive the tag of the key holder through it such that the key of the key holder lies on one side of the panel and the tag lies on an opposed, operatively outer side of the panel.
摘要:
The invention is related to a rear view mirror assembly with a least two parts out of the group of part as: mirror frame, mirror base, mirror housing, mirror bezel, mirror glass, mirror lighting means, actuator, that must be connected during assembly process with at least one retention latch. This retention latch comprises a circular hood and a rectangular arm formed in a first part and to be inserted into an opening and shifted along a slot in a second part.
摘要:
The invention is related to a rear view mirror assembly with a least two parts out of the group of part as: mirror frame, mirror base, mirror housing, mirror bezel, mirror glass, mirror lighting means, actuator, that must be connected during assembly process with at least one retention latch. This retention latch comprises a circular hood and a rectangular arm formed in a first part and to be inserted into an opening and shifted along a slot in a second part.