Methods of Processing Semiconductor Substrates In Forming Scribe Line Alignment Marks
    1.
    发明申请
    Methods of Processing Semiconductor Substrates In Forming Scribe Line Alignment Marks 有权
    在形成划线对准标记中处理半导体衬底的方法

    公开(公告)号:US20110287630A1

    公开(公告)日:2011-11-24

    申请号:US13196524

    申请日:2011-08-02

    IPC分类号: H01L21/308 H01L21/302

    摘要: A method of processing a semiconductor substrate in forming scribe line alignment marks includes forming pitch multiplied non-circuitry features within scribe line area of a semiconductor substrate. Individual of the features, in cross-section, have a maximum width which is less than a minimum photolithographic feature dimension used in lithographically patterning the substrate. Photoresist is deposited over the features. Such is patterned to form photoresist blocks that are individually received between a respective pair of the features in the cross-section. Individual of the features of the respective pairs have a laterally innermost sidewall in the cross-section. Individual of the photoresist blocks have an opposing pair of first pattern edges in the cross-section that are spaced laterally inward of the laterally innermost sidewalls of the respective pair of the features. Individual of the photoresist blocks have an opposing pair of second pattern edges in the cross-section that self-align laterally outward of the first pattern edges to the laterally innermost sidewalls of the features during the patterning.

    摘要翻译: 在形成划线对准标记中处理半导体衬底的方法包括在半导体衬底的划线区域内形成间距倍数非电路特征。 在横截面中,特征的个体具有小于在光刻图案化基底中使用的最小光刻特征尺寸的最大宽度。 光刻胶沉积在特征上。 将其图案化以形成在横截面中单独地接收在相应的一对特征之间的光致抗蚀剂块。 各对的特征的个体在横截面中具有横向最内侧的侧壁。 光致抗蚀剂块的个体在横截面中具有相对的一对第一图案边缘,其横向相对于相应的一对特征的横向最内侧的侧壁向内间隔开。 光致抗蚀剂块的个体在横截面中具有相对的一对第二图案边缘,其在图案化期间自动对准第一图案边缘的横向外侧到特征的侧向最内侧。

    Methods of processing semiconductor substrates in forming scribe line alignment marks
    2.
    发明授权
    Methods of processing semiconductor substrates in forming scribe line alignment marks 有权
    在形成划线对准标记时处理半导体衬底的方法

    公开(公告)号:US08003482B2

    公开(公告)日:2011-08-23

    申请号:US12622171

    申请日:2009-11-19

    IPC分类号: H01L21/302

    摘要: A method of processing a semiconductor substrate in forming scribe line alignment marks includes forming pitch multiplied non-circuitry features within scribe line area of a semiconductor substrate. Individual of the features, in cross-section, have a maximum width which is less than a minimum photolithographic feature dimension used in lithographically patterning the substrate. Photoresist is deposited over the features. Such is patterned to form photoresist blocks that are individually received between a respective pair of the features in the cross-section. Individual of the features of the respective pairs have a laterally innermost sidewall in the cross-section. Individual of the photoresist blocks have an opposing pair of first pattern edges in the cross-section that are spaced laterally inward of the laterally innermost sidewalls of the respective pair of the features. Individual of the photoresist blocks have an opposing pair of second pattern edges in the cross-section that self-align laterally outward of the first pattern edges to the laterally innermost sidewalls of the features during the patterning.

    摘要翻译: 在形成划线对准标记中处理半导体衬底的方法包括在半导体衬底的划线区域内形成间距倍数非电路特征。 在横截面中,特征的个体具有小于在光刻图案化基底中使用的最小光刻特征尺寸的最大宽度。 光刻胶沉积在特征上。 将其图案化以形成在横截面中单独地接收在相应的一对特征之间的光致抗蚀剂块。 各对的特征的个体在横截面中具有横向最内侧的侧壁。 光致抗蚀剂块的个体在横截面中具有相对的一对第一图案边缘,其横向相对于相应的一对特征的横向最内侧的侧壁向内间隔开。 光致抗蚀剂块的个体在横截面中具有相对的一对第二图案边缘,其在图案化期间自动对准第一图案边缘的横向外侧到特征的侧向最内侧。

    METHODS OF PROCESSING SEMICONDUCTOR SUBSTRATES IN FORMING SCRIBE LINE ALIGNMENT MARKS
    3.
    发明申请
    METHODS OF PROCESSING SEMICONDUCTOR SUBSTRATES IN FORMING SCRIBE LINE ALIGNMENT MARKS 有权
    在形成筛选线对齐标记中加工半导体基板的方法

    公开(公告)号:US20110117719A1

    公开(公告)日:2011-05-19

    申请号:US12622171

    申请日:2009-11-19

    IPC分类号: H01L21/306

    摘要: A method of processing a semiconductor substrate in forming scribe line alignment marks includes forming pitch multiplied non-circuitry features within scribe line area of a semiconductor substrate. Individual of the features, in cross-section, have a maximum width which is less than a minimum photolithographic feature dimension used in lithographically patterning the substrate. Photoresist is deposited over the features. Such is patterned to form photoresist blocks that are individually received between a respective pair of the features in the cross-section. Individual of the features of the respective pairs have a laterally innermost sidewall in the cross-section. Individual of the photoresist blocks have an opposing pair of first pattern edges in the cross-section that are spaced laterally inward of the laterally innermost sidewalls of the respective pair of the features. Individual of the photoresist blocks have an opposing pair of second pattern edges in the cross-section that self-align laterally outward of the first pattern edges to the laterally innermost sidewalls of the features during the patterning.

    摘要翻译: 在形成划线对准标记中处理半导体衬底的方法包括在半导体衬底的划线区域内形成间距倍数非电路特征。 在横截面中,特征的个体具有小于在光刻图案化基底中使用的最小光刻特征尺寸的最大宽度。 光刻胶沉积在特征上。 将其图案化以形成在横截面中单独地接收在相应的一对特征之间的光致抗蚀剂块。 各对的特征的个体在横截面中具有横向最内侧的侧壁。 光致抗蚀剂块的个体在横截面中具有相对的一对第一图案边缘,其横向相对于相应的一对特征的横向最内侧的侧壁向内间隔开。 光致抗蚀剂块的个体在横截面中具有相对的一对第二图案边缘,其在图案化期间自动对准第一图案边缘的横向外侧到特征的侧向最内侧。

    Methods of processing semiconductor substrates in forming scribe line alignment marks
    4.
    发明授权
    Methods of processing semiconductor substrates in forming scribe line alignment marks 有权
    在形成划线对准标记时处理半导体衬底的方法

    公开(公告)号:US08673780B2

    公开(公告)日:2014-03-18

    申请号:US13196524

    申请日:2011-08-02

    IPC分类号: H01L21/302 H01L21/308

    摘要: A method of processing a semiconductor substrate in forming scribe line alignment marks includes forming pitch multiplied non-circuitry features within scribe line area of a semiconductor substrate. Individual of the features, in cross-section, have a maximum width which is less than a minimum photolithographic feature dimension used in lithographically patterning the substrate. Photoresist is deposited over the features. Such is patterned to form photoresist blocks that are individually received between a respective pair of the features in the cross-section. Individual of the features of the respective pairs have a laterally innermost sidewall in the cross-section. Individual of the photoresist blocks have an opposing pair of first pattern edges in the cross-section that are spaced laterally inward of the laterally innermost sidewalls of the respective pair of the features. Individual of the photoresist blocks have an opposing pair of second pattern edges in the cross-section that self-align laterally outward of the first pattern edges to the laterally innermost sidewalls of the features during the patterning.

    摘要翻译: 在形成划线对准标记中处理半导体衬底的方法包括在半导体衬底的划线区域内形成间距倍数非电路特征。 在横截面中,特征的个体具有小于在光刻图案化基底中使用的最小光刻特征尺寸的最大宽度。 光刻胶沉积在特征上。 将其图案化以形成在横截面中单独地接收在相应的一对特征之间的光致抗蚀剂块。 各对的特征的个体在横截面中具有横向最内侧的侧壁。 光致抗蚀剂块的个体在横截面中具有相对的一对第一图案边缘,其横向相对于相应的一对特征的横向最内侧的侧壁向内间隔开。 光致抗蚀剂块的个体在横截面中具有相对的一对第二图案边缘,其在图案化期间自动对准第一图案边缘的横向外侧到特征的侧向最内侧。

    Formulations For Reaction Injection Molding And For Spray Systems
    5.
    发明申请
    Formulations For Reaction Injection Molding And For Spray Systems 失效
    反应注射成型和喷雾系统配方

    公开(公告)号:US20100160592A1

    公开(公告)日:2010-06-24

    申请号:US12444870

    申请日:2008-01-09

    IPC分类号: C08G18/32 B05D1/02 B29C45/18

    摘要: This invention provides articles made by reaction injection molding and spray coatings, and processes for forming such articles and coatings. The coatings and articles are polyureas or polyurea-urethanes. The ingredients used to form the coatings and articles comprise at least (A) an aromatic polyisocyanate and (B) a mixture formed from components comprised of (i) at least one polyol and/or at least one polyetheramine, (ii) an aromatic primary diamine, and (iii) an aliphatic secondary diamine which has about twelve to about forty carbon atoms and in which the having amino hydrocarbyl groups are secondary or tertiary hydrocarbyl groups.

    摘要翻译: 本发明提供了通过反应注射成型和喷涂制成的制品,以及用于形成这种制品和涂料的方法。 涂料和制品是聚脲或聚脲 - 氨基甲酸酯。 用于形成涂料和制品的成分至少包含(A)芳族多异氰酸酯和(B)由(i)至少一种多元醇和/或至少一种聚醚胺组成的组分形成的混合物,(ii) 二胺,和(iii)具有约十二至约四十个碳原子并且其中具有氨基烃基是仲或叔烃基的脂族二胺。

    Aromatic amine curatives and their use
    6.
    发明授权
    Aromatic amine curatives and their use 失效
    芳香胺固化剂及其用途

    公开(公告)号:US06509434B1

    公开(公告)日:2003-01-21

    申请号:US09528837

    申请日:2000-03-20

    IPC分类号: C08G1832

    CPC分类号: C08G18/3868 C08G18/10

    摘要: Mixtures of isomeric alkylthiated mononuclear aromatic amines comprising in the range of about 30 to about 70 mole percent of (i) at least one 3,5-di(alkyl-thio)-2,6-diamino-1-alkylbenzene and in the range of about 30 to about 70 mole percent of at least one 3,5-di(alkylthio)-2,4-diamino-1-alkylbenzene, such mixture containing at least about 90 mole percent of (i) and (ii), and optionally containing up to 10 mole percent of one or more isomers of (i) and/or (ii). An alkyl group may be present as a substituent in lieu of a hydrogen atom in the remaining ring position. These mixtures are useful as curatives or extenders in processes for making polyurethanes, polyurethane-ureas, and polyureas.

    摘要翻译: 异构烷基化的单核芳香族胺的混合物,其包含(i)至少一种3,5-二(烷基 - 硫代)-2,6-二氨基-1-烷基苯的约30至约70摩尔%范围内, 约30至约70摩尔%的至少一种3,5-二(烷硫基)-2,4-二氨基-1-烷基苯,该混合物含有至少约90摩尔%的(ⅰ)和(ⅱ),和 任选地含有至多10摩尔%的(i)和/或(ii)的一种或多种异构体。 烷基可以作为取代基代替其余环位置上的氢原子。 这些混合物可用作制备聚氨酯,聚氨酯 - 脲和聚脲的方法中的固化剂或增量剂。

    Stabilization of (hydrocarbylthio) aromatic amines against odor formation
    7.
    发明授权
    Stabilization of (hydrocarbylthio) aromatic amines against odor formation 失效
    (烃基硫代)芳族胺对气味形成的稳定化

    公开(公告)号:US5840984A

    公开(公告)日:1998-11-24

    申请号:US880547

    申请日:1997-06-23

    CPC分类号: C07C319/26

    摘要: Odor formation during storage of (hydrocarbylthio)aromatic amines due to formation and release of odoriferous sulfur-containing species such as dihydrocarbyldisulfides, is suppressed. To accomplish this, a small amount of N,N-dihydrocarbylhydroxylamine odor-inhibitor (e.g., N,N-diethylhydroxylamine) is blended with the (hydrocarbylthio)aromatic amine. This enables products such as a mixture of 3,5-di(methylthio)-2,4-diaminotoluene and 3,5-di(methylthio)-2,6-diaminotoluene) to be stored for long periods of time with significantly reduced formation and release of odoriferous sulfur-containing species.

    摘要翻译: 抑制由于含有臭味的含硫物质如二烃基二硫化物的形成和释放而在(烃硫基)芳族胺储存期间的气味形成。 为了实现这一点,将少量的N,N-二烃基羟胺气味抑制剂(例如N,N-二乙基羟胺)与(烃硫基)芳族胺共混。 这使得诸如3,5-二(甲硫基)-2,4-二氨基甲苯和3,5-二(甲硫基)-2,6-二氨基甲苯的混合物的产物能够长时间储存​​,同时显着减少了形成 并释放有气味的含硫物质。

    Automatic height control for a laterally pivoted harvester header
    8.
    发明授权
    Automatic height control for a laterally pivoted harvester header 失效
    横向枢转收割机接头的自动高度控制

    公开(公告)号:US4776153A

    公开(公告)日:1988-10-11

    申请号:US833932

    申请日:1986-02-27

    IPC分类号: A01D41/14 A01D75/28 A01D67/00

    摘要: In a combine harvester, an array of ground engaging skid shoes or feelers spans the header platform and is divided into right- and left-hand groups, each group associated with a position sensor switch. Each switch transmits to an electrohydraulic control system, a signal representative of the relative position of the skid shoe closest to the ground in its half of the platform. The combined left- and/or right-hand signals are transduced to control platform vertical adjustment and lateral tilt automatically. In one embodiment, a pair of lift cylinders, acting in unison, control platform elevation while a third cylinder is dedicated to tilt control. In other embodiments, paired lift cylinders are controllable independently, to provide both height and tilt control. Supporting the feeder conveyor lower shaft and the header main drive shaft in the laterally pivotable lower forward portion of the feederhouse permits direct transfer of crop material from the platform auger to the feederhouse conveyor and also simplifies header drive arrangements.

    摘要翻译: 在联合收割机中,一系列地面接触的滑板鞋或者探头跨越头部平台,并分为右组和左组,各组与位置传感器开关相关联。 每个开关向电动液压控制系统发送代表在平台的一半中最靠近地面的滑动鞋的相对位置的信号。 左右信号的组合被转换成自动控制平台的垂直调整和横向倾斜。 在一个实施例中,一对起作用的气缸一致地控制平台高度,而第三气缸专用于倾斜控制。 在其他实施例中,成对提升缸是独立控制的,以提供高度和倾斜控制。 在饲养室的侧向可枢转的下部前部支撑进料器输送机下轴和集管主驱动轴,允许将作物材料从平台螺旋钻直接传送到饲养室输送机,并且还简化了头部驱动装置。

    Cascade heat recovery with coproduct gas production
    9.
    发明授权
    Cascade heat recovery with coproduct gas production 失效
    级联热回收与副产气生产

    公开(公告)号:US4617182A

    公开(公告)日:1986-10-14

    申请号:US769230

    申请日:1985-08-26

    CPC分类号: C01B13/0292 Y02P20/129

    摘要: A process for the integration of a chemical absorption separation of oxygen and nitrogen from air with a combustion process is set forth wherein excess temperature availability from the combustion process is more effectively utilized to desorb oxygen product from the absorbent and then the sensible heat and absorption reaction heat is further utilized to produce a high temperature process stream. The oxygen may be utilized to enrich the combustion process wherein the high temperature heat for desorption is conducted in a heat exchange preferably performed with a pressure differential of less than 10 atmospheres which provides considerable flexibility in the heat exchange.

    摘要翻译: 阐述了一种从燃烧过程中将氧和氮与空气的化学吸收分离相结合的方法,其中来自燃烧过程的过量温度可用性更有效地用于从吸收剂中解吸氧产物,然后显着的热和吸收反应 进一步利用热量来生产高温工艺流。 氧气可用于富集燃烧过程,其中用于解吸的高温热在优选以小于10个大气压的压力差进行的热交换中进行,这在热交换中提供相当大的灵活性。

    Linear drive unit for vibratory conveyor
    10.
    发明授权
    Linear drive unit for vibratory conveyor 失效
    用于振动输送机的直线驱动单元

    公开(公告)号:US4356911A

    公开(公告)日:1982-11-02

    申请号:US170248

    申请日:1980-07-18

    申请人: William R. Brown

    发明人: William R. Brown

    IPC分类号: B65G27/08 B65G27/24 B65G27/32

    CPC分类号: B65G27/08 B65G27/32

    摘要: A vibratory conveyor has a continuous trough that extends over one or more linear drive units. Each drive unit has an elongated base that extends longitudinally of the conveyor. The base is resiliently mounted to a fixed support. A trough support is disposed parallel to the base. A driver is arranged to move the trough support longitudinally of the conveyor and relative to the base. A plurality of leaf springs extend in an at rest position generally perpendicular to the direction of linear drive, longitudinally of the conveyor. These leaf springs interconnect the base and the trough support at longitudinally spaced locations. The base and the trough support are disposed laterally of each other in a horizontal plane. Preferably, the leaf springs are mounted for pivotal movement about axes extending laterally of the conveyor between the base and the trough support. Such movement adjusts the transverse angle of inclination between one side of the leaf spring and a vertical line. This adjustment can be made without changing the direction in which the leaf springs extend in an at rest position between the base and the trough support, and the adjustment provides a desired vibration angle for the trough. The angular difference between the transverse angles of inclination at the sides of the various leaf springs provides for rotational motion of the trough support relative to the base. This motion compensates for rotational motion of the drive unit on its fixed support due to inertia forces.

    摘要翻译: 振动输送机具有在一个或多个线性驱动单元上延伸的连续槽。 每个驱动单元具有沿输送机纵向延伸的细长底座。 基座弹性地安装到固定支架上。 槽支架平行于底座设置。 驱动器被布置成使输送机纵向移动槽支撑件并相对于底座。 多个板簧在大致垂直于线性驱动方向的静止位置处延伸,沿着输送机的纵向延伸。 这些板簧在纵向间隔开的位置处连接底座和槽支撑件。 基部和槽支撑件在水平面中彼此横向地设置。 优选地,板簧安装成围绕在基部和槽支撑件之间的输送机横向延伸的轴线的枢转运动。 这种移动调节板簧的一侧与垂直线之间的横向倾斜角度。 可以在不改变板簧在基座和槽支撑件之间的静止位置处延伸的方向的情况下进行该调节,并且调节为槽提供期望的振动角。 在各种板簧的侧面处的横向倾斜角之间的角度差提供了槽支撑件相对于底座的旋转运动。 该运动由于惯性力补偿驱动单元在其固定支撑件上的旋转运动。