-
公开(公告)号：US06942768B2
公开(公告)日：2005-09-13
申请号：US10259973
申请日：2002-09-27
CPC分类号： C23C14/564 , C23C14/562 , C23C14/568
摘要： A system for coating band-shaped material, where the band-shaped material travels through at least one process chamber in which there is a vacuum, and at least one cooling roller. On the peripheral surface of each cooling roller are at least two magnetron sputter sources that are arranged separate from one another in magnetron chambers, which are formed by separate magnetron chamber walls and allow each chamber to be evacuated, so the pressure in the magnetron chamber can be maintained higher than that in the process chamber. The magnetron chamber walls and the magnetron sputter sources can be mounted on a common carriage, which is displaceable parallel to the cooling roller axis. The result is the reduction in the maintenance costs in cleaning of the magnetron chamber walls and at the same time improvement of the separation of gas between the magnetron chambers and the process chamber.
摘要翻译： 用于涂覆带状材料的系统，其中带状材料穿过其中存在真空的至少一个处理室，以及至少一个冷却辊。 每个冷却辊的圆周表面上至少有两个磁控溅射源，这些磁控溅射源在磁控管腔室中彼此分开设置，这些磁控管是通过单独的磁控管壁形成的，并允许每个腔室被抽真空，因此磁控管腔中的压力可以 保持比处理室高。 磁控管室壁和磁控溅射源可以安装在平行于冷却辊轴线移动的公共托架上。 结果是在磁控管室壁的清洁中降低了维护成本，同时改善了磁控管室和处理室之间的气体分离。
-
公开(公告)号：US20100291393A1
公开(公告)日：2010-11-18
申请号：US12842497
申请日：2010-07-23
CPC分类号： C03C17/36 , C03C17/3618 , C03C17/3626 , C03C17/3644 , C03C17/366 , C03C17/3681 , C03C17/3694 , C23C14/027 , C23C14/08 , C23C14/352 , Y10T428/31504 , Y10T428/31663
摘要： A layer system that can be annealed comprises a transparent substrate, preferably a glass substrate, and a first layer sequence which is applied directly to the substrate or to one or more bottom layers that are deposited onto the substrate. The layer sequence includes a substrate-proximal blocking layer, a selective layer and a substrate-distal blocking layer. Also provided is a method for producing a layer system that can be annealed and has a sufficient quality even under critical climatic conditions and/or undefined conditions of the substrate. During the heat treatment (annealing, bending), the color location of the layer system is maintained substantially stable and the color location can be widely varied at a low emissivity of the layer system. For this purpose, a first dielectric intermediate layer is interposed between the substrate-proximal blocking layer and the selective layer and is configured as a substoichiometric gradient layer.
摘要翻译： 可退火的层系统包括透明衬底，优选玻璃衬底，以及直接施加到衬底或沉积到衬底上的一个或多个底层的第一层序列。 层序列包括基底近端阻挡层，选择层和底物远侧阻断层。 还提供了即使在临界气候条件和/或基板的未定义条件下也可以进行退火并具有足够质量的层系统的制造方法。 在热处理（退火，弯曲）期间，层系统的颜色位置保持基本稳定，并且颜色位置可以在层系统的低发射率下广泛变化。 为此，第一电介质中间层介于基底近端阻挡层和选择层之间，并被构造为亚化学计量梯度层。
-
公开(公告)号：US20080057319A1
公开(公告)日：2008-03-06
申请号：US11575985
申请日：2005-09-21
CPC分类号： C03C17/36 , C03C17/3618 , C03C17/3626 , C03C17/3644 , C03C17/366 , C03C17/3681 , C03C17/3694 , C23C14/027 , C23C14/08 , C23C14/352 , Y10T428/31504 , Y10T428/31663
摘要： A layer system that can be annealed comprises a transparent substrate, preferably a glass substrate, and a first layer sequence which is applied directly to the substrate or to one or more bottom layers that are deposited onto the substrate. The layer sequence includes a substrate-proximal blocking layer, a selective layer and a substrate-distal blocking layer. Also provided is a method for producing a layer system that can be annealed and has a sufficient quality even under critical climatic conditions and/or undefined conditions of the substrate. During the heat treatment (annealing, bending), the color location of the layer system is maintained substantially stable and the color location can be widely varied at a low emissivity of the layer system. For this purpose, a first dielectric intermediate layer is interposed between the substrate-proximal blocking layer and the selective layer and is configured as a substoichiometric gradient layer.
摘要翻译： 可退火的层系统包括透明衬底，优选玻璃衬底，以及直接施加到衬底或沉积到衬底上的一个或多个底层的第一层序列。 层序列包括基底近端阻挡层，选择层和底物远侧阻断层。 还提供了即使在临界气候条件和/或基板的未定义条件下也可以进行退火并具有足够质量的层系统的制造方法。 在热处理（退火，弯曲）期间，层系统的颜色位置保持基本稳定，并且颜色位置可以在层系统的低发射率下广泛变化。 为此，第一电介质中间层介于基底近端阻挡层和选择层之间，并被构造为亚化学计量梯度层。
-
公开(公告)号：US08828194B2
公开(公告)日：2014-09-09
申请号：US11575985
申请日：2005-09-21
CPC分类号： C03C17/36 , C03C17/3618 , C03C17/3626 , C03C17/3644 , C03C17/366 , C03C17/3681 , C03C17/3694 , C23C14/027 , C23C14/08 , C23C14/352 , Y10T428/31504 , Y10T428/31663
摘要： A layer system that can be annealed comprises a transparent substrate, preferably a glass substrate, and a first layer sequence which is applied directly to the substrate or to one or more bottom layers that are deposited onto the substrate. The layer sequence includes a substrate-proximal blocking layer, a selective layer and a substrate-distal blocking layer. Also provided is a method for producing a layer system that can be annealed and has a sufficient quality even under critical climatic conditions and/or undefined conditions of the substrate. During the heat treatment (annealing, bending), the color location of the layer system is maintained substantially stable and the color location can be widely varied at a low emissivity of the layer system. For this purpose, a first dielectric intermediate layer is interposed between the substrate-proximal blocking layer and the selective layer and is configured as a substoichiometric gradient layer.
摘要翻译： 可退火的层系统包括透明衬底，优选玻璃衬底，以及直接施加到衬底或沉积到衬底上的一个或多个底层的第一层序列。 层序列包括基底近端阻挡层，选择层和底物远侧阻断层。 还提供了即使在临界气候条件和/或基板的未定义条件下也可以进行退火并具有足够质量的层系统的制造方法。 在热处理（退火，弯曲）期间，层系统的颜色位置保持基本稳定，并且颜色位置可以在层系统的低发射率下广泛变化。 为此，第一电介质中间层介于基底近端阻挡层和选择层之间，并被构造为亚化学计量梯度层。
-
5.发明授权Vacuum coating system comprising a transport unit for transporting substrates 失效真空镀膜系统，包括用于输送基材的输送单元公开(公告)号：US08127712B2
公开(公告)日：2012-03-06
申请号：US12280931
申请日：2007-07-09
申请人： Reinhardt Bauer , Frank Hupka , Andreas Heisig , Johannes Struempfel , Hans-Christian Hecht , Wolfgang Erbkamm
发明人： Reinhardt Bauer , Frank Hupka , Andreas Heisig , Johannes Struempfel , Hans-Christian Hecht , Wolfgang Erbkamm
CPC分类号： B65G37/005 , B65G15/24 , C23C14/568
摘要： A vacuum coating unit having a pair of side by side transport devices for transporting substrates in a transport direction. Each transport device includes at least one first endless conveyor running in the transport direction and having a conveying element guided around at least two guide rollers or pulleys. The conveying element is located at a distance from a guide device extending in the transport direction parallel to the conveying element in such a way that the ends of the substrates can be introduced into the gap between the conveying element and the guide device of the transport devices and can be moved in the transport direction by the displacement of the conveying elements.
摘要翻译： 一种真空镀膜装置，具有一对并排运送装置，用于在输送方向上输送基材。 每个输送装置包括至少一个在输送方向上运行的第一环形输送机，并具有围绕至少两个导辊或滑轮引导的输送元件。 输送元件位于与沿输送方向平行于输送元件延伸的引导装置一定距离处，使得基板的端部能够被引入到输送元件和输送装置的引导装置之间的间隙中 并且可以通过输送元件的位移在输送方向上移动。
-
公开(公告)号：US08197222B2
公开(公告)日：2012-06-12
申请号：US12306956
申请日：2007-07-04
IPC分类号： F04B37/02
摘要： A highly efficient getter pump with low maintenance requirements is applied to a vacuum coating installation, allowing a substrate to be coated to remain uncontaminated by a dusting of getter material. The getter pump comprises a pump housing with an exposure opening. The housing has a getter body, of getter material that essentially closes the exposure opening and can move in relation to the exposure opening. An inner sub-section of the surface of the getter body points towards the interior of the pump housing and an outer sub-section points towards the exterior of the pump housing through the exposure opening. The positions of the inner and outer sub-sections are interchangeable by movement of the getter body. The getter pump is equipped with a device for removing getter material from the inner sub-section.
摘要翻译： 将具有低维护要求的高效吸气泵应用于真空涂布设备，使得可以通过吸气剂材料的除尘来涂覆基材以保持未被污染。 吸气泵包括具有曝光开口的泵壳体。 壳体具有吸气体，吸气剂材料基本上封闭曝光开口并且可以相对于曝光开口移动。 吸气体表面的内部子部分指向泵壳体的内部，并且外部子部分通过曝光开口指向泵壳体的外部。 内部和外部子部分的位置可以通过吸气体的移动而互换。 吸气泵配备有用于从内部子部分去除吸气剂材料的装置。
-
公开(公告)号：US20090202362A1
公开(公告)日：2009-08-13
申请号：US12306956
申请日：2007-07-04
摘要： A highly efficient getter pump with low maintenance requirements is applied to a vacuum coating installation, allowing a substrate to be coated to remain uncontaminated by a dusting of getter material. The getter pump comprises a pump housing with an exposure opening. The housing has a getter body, of getter material that essentially closes the exposure opening and can move in relation to the exposure opening. An inner sub-section of the surface of the getter body points towards the interior of the pump housing and an outer sub-section points towards the exterior of the pump housing through the exposure opening. The positions of the inner and outer sub-sections are interchangeable by movement of the getter body. The getter pump is equipped with a device for removing getter material from the inner sub-section.
摘要翻译： 将具有低维护要求的高效吸气泵应用于真空涂布设备，使得可以通过吸气剂材料的除尘来涂覆基材以保持未被污染。 吸气泵包括具有曝光开口的泵壳体。 壳体具有吸气体，吸气剂材料基本上封闭曝光开口并且可以相对于曝光开口移动。 吸气体表面的内部子部分指向泵壳体的内部，并且外部子部分通过曝光开口指向泵壳体的外部。 内部和外部子部分的位置可以通过吸气体的移动而互换。 吸气泵配备有用于从内部子部分去除吸气剂材料的装置。
-
公开(公告)号：US08367226B2
公开(公告)日：2013-02-05
申请号：US12842497
申请日：2010-07-23
IPC分类号： B32B15/04
CPC分类号： C03C17/36 , C03C17/3618 , C03C17/3626 , C03C17/3644 , C03C17/366 , C03C17/3681 , C03C17/3694 , C23C14/027 , C23C14/08 , C23C14/352 , Y10T428/31504 , Y10T428/31663
摘要： A layer system that can be annealed comprises a transparent substrate, preferably a glass substrate, and a first layer sequence which is applied directly to the substrate or to one or more bottom layers that are deposited onto the substrate. The layer sequence includes a substrate-proximal blocking layer, a selective layer and a substrate-distal blocking layer. Also provided is a method for producing a layer system that can be annealed and has a sufficient quality even under critical climatic conditions and/or undefined conditions of the substrate. During the heat treatment (annealing, bending), the color location of the layer system is maintained substantially stable and the color location can be widely varied at a low emissivity of the layer system. For this purpose, a first dielectric intermediate layer is interposed between the substrate-proximal blocking layer and the selective layer and is configured as a substoichiometric gradient layer.
摘要翻译： 可退火的层系统包括透明衬底，优选玻璃衬底，以及直接施加到衬底或沉积到衬底上的一个或多个底层的第一层序列。 层序列包括基底近端阻挡层，选择层和底物远侧阻断层。 还提供了即使在临界气候条件和/或基板的未定义条件下也可以进行退火并具有足够质量的层系统的制造方法。 在热处理（退火，弯曲）期间，层系统的颜色位置保持基本稳定，并且颜色位置可以在层系统的低发射率下广泛变化。 为此，第一电介质中间层介于基底近端阻挡层和选择层之间，并被构造为亚化学计量梯度层。
-
公开(公告)号：US20050145488A1
公开(公告)日：2005-07-07
申请号：US10508819
申请日：2003-03-24
CPC分类号： H01J37/3405
摘要： A tube magnetron for a vacuum coating applications such as plasma sputtering is provided with a hollow rotating tube target arrangement and a magnet system. The hollow rotating tube target arrangement has longitudinally extended target plates that are fixed to a target support. The target plates in cross section are arranged adjacent to each other to form a polygon. The magnet system generates a magnetic field which extends through the tube target arrangement. The magnet system is configured so that generated magnet field has in cross section two maxima arranged in the axial longitudinal direction of the tube target arrangement. The tube magnetron is configured for use with sputtering targets that are in the form of target plates. The target plates may be made from ceramics, ceramic-like and/or high-melting point materials. Materials such as ITO, zinc oxide, silicon can be efficiently and uniformly sputter coated on substrates.
摘要翻译： 用于诸如等离子体溅射的真空涂覆应用的管磁控管设置有中空旋转管目标装置和磁体系统。 中空旋转管目标装置具有固定到目标支撑件的纵向延伸的目标板。 横截面中的目标板彼此相邻地布置以形成多边形。 磁体系统产生延伸穿过管目标装置的磁场。 磁体系统构造成使得所产生的磁场在管目标装置的轴向方向上具有两个最大值的横截面。 管磁控管配置为与目标板形式的溅射靶配合使用。 目标板可以由陶瓷，陶瓷样和/或高熔点材料制成。 诸如ITO，氧化锌，硅的材料可以有效地均匀地溅射涂覆在基片上。
-
公开(公告)号：US20060225652A1
公开(公告)日：2006-10-12
申请号：US11400856
申请日：2006-04-10
IPC分类号： C23C16/00
CPC分类号： C23C14/566
摘要： The invention concerns an apparatus for vacuum coating of substrates of various sizes that consists of lock chambers at the entrance and at the exit and several processing chambers arranged one behind the other as well as of a conveying system for the sequential transport of substrates with a certain substrate width through the lock chambers and for their continuous transport through the coating chambers. The lock and processing chambers each have a chamber width that corresponds to the substrate width, and the lock chamber is characterized by a loading area AL having a width b and a length l that indicates the size of substrate that can be accommodated. The object of the apparatus according to the invention is to better utilize the coatable area of each processing chamber so that less coating material is wasted. The object is solved by making the ratio R of width to length R=w/l greater than a minimum ratio Rmin where Rmin =0.95−0.019 AL.
摘要翻译： 本发明涉及一种用于真空涂覆各种尺寸的基板的设备，其包括在入口处和出口处的锁定室以及一个彼此相邻布置的多个处理室以及用于以一定的顺序输送基板的输送系统 衬底宽度通过锁定室并且连续地通过涂覆室传送。 锁和处理室各自具有对应于基板宽度的室宽度，并且锁定室的特征在于具有宽度b的负载区域A和表示基板尺寸的长度l 可以容纳。 根据本发明的装置的目的是更好地利用每个处理室的可涂覆区域，从而浪费较少的涂层材料。 通过使宽度与长度R的比R大于最小比R min min来解决该目的，其中R min min = 0.95-0.019A L 。
-
-
-
-
-
-
-
-
-
搜索结果
23 条记录 (耗时 0.015 秒)
