Vacuum coating apparatus
    1.
    发明授权
    Vacuum coating apparatus 失效
    真空镀膜设备

    公开(公告)号:US06942768B2

    公开(公告)日:2005-09-13

    申请号:US10259973

    申请日:2002-09-27

    摘要: A system for coating band-shaped material, where the band-shaped material travels through at least one process chamber in which there is a vacuum, and at least one cooling roller. On the peripheral surface of each cooling roller are at least two magnetron sputter sources that are arranged separate from one another in magnetron chambers, which are formed by separate magnetron chamber walls and allow each chamber to be evacuated, so the pressure in the magnetron chamber can be maintained higher than that in the process chamber. The magnetron chamber walls and the magnetron sputter sources can be mounted on a common carriage, which is displaceable parallel to the cooling roller axis. The result is the reduction in the maintenance costs in cleaning of the magnetron chamber walls and at the same time improvement of the separation of gas between the magnetron chambers and the process chamber.

    摘要翻译: 用于涂覆带状材料的系统,其中带状材料穿过其中存在真空的至少一个处理室,以及至少一个冷却辊。 每个冷却辊的圆周表面上至少有两个磁控溅射源,这些磁控溅射源在磁控管腔室中彼此分开设置,这些磁控管是通过单独的磁控管壁形成的,并允许每个腔室被抽真空,因此磁控管腔中的压力可以 保持比处理室高。 磁控管室壁和磁控溅射源可以安装在平行于冷却辊轴线移动的公共托架上。 结果是在磁控管室壁的清洁中降低了维护成本,同时改善了磁控管室和处理室之间的气体分离。

    PROCESS AND APPARATUS FOR THE INTRODUCTION AND REMOVAL OF A SUBSTRATE INTO AND FROM A VACUUM COATING UNIT
    2.
    发明申请
    PROCESS AND APPARATUS FOR THE INTRODUCTION AND REMOVAL OF A SUBSTRATE INTO AND FROM A VACUUM COATING UNIT 审中-公开
    将基材引入和除去真空涂料单元的方法和装置

    公开(公告)号:US20100239762A1

    公开(公告)日:2010-09-23

    申请号:US12665953

    申请日:2008-06-23

    IPC分类号: B05D1/00 C23C14/56

    CPC分类号: C23C14/566

    摘要: An apparatus is provided for introduction and/or removal of a substrate into and/or from a process chamber of a vacuum coating unit that includes a process region adjoined by a lock chamber separable from surrounding atmosphere and from the process region by vacuum-tight lock gates. The process region encompasses a process chamber and a transfer chamber for altering transport speed. A vacuum-tight gate on the inlet side of a lock system is opened, the substrate is transported into the lock system and the gate is closed. Pressure in the lock system is subsequently matched to pressure in a subsequent space. An outlet-side gate of the lock system is opened and the substrate is transported from the lock system. The lock system includes a lock chamber and the adjoining transfer chamber. A passage between the transfer chamber and lock chamber remains open during introduction or removal of the substrate.

    摘要翻译: 提供一种用于将衬底引入和/或去除真空镀膜单元的处理室的设备,该真空镀膜单元包括由与周围大气隔开的锁定室邻接的工艺区域和通过真空密封锁定的工艺区域 大门 处理区域包括用于改变传送速度的处理室和传送室。 打开锁定系统入口侧的真空密封门,将基板运送到锁定系统中,并关闭门。 随后,锁系统中的压力与后续空间中的压力匹配。 打开锁定系统的出口侧门,并且从锁定系统传送衬底。 锁定系统包括锁定室和相邻的传送室。 在引入或移除基板期间,转移室和锁定室之间的通道保持打开。

    Actuating device for a power switch
    3.
    发明授权
    Actuating device for a power switch 有权
    电源开关的驱动装置

    公开(公告)号:US08835786B2

    公开(公告)日:2014-09-16

    申请号:US13505629

    申请日:2010-10-12

    IPC分类号: H01H5/06 H01H71/70

    CPC分类号: H01H71/70

    摘要: A switch includes a handle for activation and deactivation and an actuating device. The actuating device includes a motor drive, which tensions a spring held in a tensioned state by latching by way of a gear. Two spring pairs are provided for activation and deactivation. The two bridges are arranged, with the spring pairs thereof nested within each other and displaceable with respect to each other. The bridges facing each other are pressed apart from one another to tension the spring pairs, and an actuation element is arranged on the one bridge for activation and an actuation element is arranged on the other bridge for deactivation.

    摘要翻译: 开关包括用于启动和停用的手柄以及致动装置。 致动装置包括马达驱动器,该马达驱动器通过借助于齿轮的锁定来拉紧保持在张紧状态的弹簧。 提供两个弹簧对用于激活和停用。 布置两个桥,其弹簧对嵌套在彼此中并且可相对于彼此移位。 彼此面对的桥被彼此压紧以拉紧弹簧对,并且致动元件布置在一个桥上用于激活,并且致动元件布置在另一个桥上用于停用。

    SEPARATING DEVICE FOR PROCESS CHAMBERS OF VACUUM COATING INSTALLATION AND VACUUM COATING INSTALLATION
    6.
    发明申请
    SEPARATING DEVICE FOR PROCESS CHAMBERS OF VACUUM COATING INSTALLATION AND VACUUM COATING INSTALLATION 有权
    真空涂料安装过程中的分离装置和真空涂料安装

    公开(公告)号:US20090139452A1

    公开(公告)日:2009-06-04

    申请号:US12092328

    申请日:2006-11-21

    IPC分类号: C23C14/56

    CPC分类号: C23C14/568 C23C16/54

    摘要: A separating device for process chambers arranged one after the other in a vacuum coating installation for coating two-dimensional substrates comprises a separating element which can be fitted between two process chambers transversely in relation to the transporting direction of the substrates. The element comprises a passage for the substrate that is arranged in the region of the transporting plane of the substrate and formed by at least one through-opening provided in the separating element, and includes at least one closure, optionally closing or opening the passage. An intermediate chamber formed by intermediate chamber outer walls is also provided and the separating element is arranged inside the intermediate chamber and the intermediate chamber is subdivided into two intermediate chamber segments. In this configuration, the separating device forms a chamber of its own, arranged between two neighbouring process chambers.

    摘要翻译: 在用于涂覆二维基板的真空涂布装置中一个接一个地布置的用于处理室的分离装置包括分离元件,其可以相对于基板的输送方向横向地安装在两个处理室之间。 元件包括用于基底的通道,该通道布置在基板的输送平面的区域中并由设置在分离元件中的至少一个通孔形成,并且包括至少一个封闭件,可选地封闭或打开该通道。 还设置由中间室外壁形成的中间室,分离元件设置在中间室的内部,中间室被细分成两个中间室段。 在这种构造中,分离装置形成了它自己的室,它设置在两个相邻的处理室之间。

    Illumination means and inspection means having an illumination means
    7.
    发明申请
    Illumination means and inspection means having an illumination means 有权
    具有照明装置的照明装置和检查装置

    公开(公告)号:US20090086483A1

    公开(公告)日:2009-04-02

    申请号:US12286253

    申请日:2008-09-29

    IPC分类号: F21V1/00

    摘要: An illumination mean for the inspection of flat substrates is disclosed. The flat substrate includes an upper edge area, a lower edge area and a front area. The illumination means is formed as an annular segment and comprises an opening into which at least the edge area of the flat substrate extends. A plurality of light sources are arranged on an annular segment in a housing. Inside the housing, a reflective element is provided so that the light from the light sources does not impinge perpendicularly on the upper edge area, the lower edge area and the front area of the flat substrate.

    摘要翻译: 公开了用于检查平板基板的照明平均值。 平面基板包括上边缘区域,下边缘区域和前部区域。 照明装置形成为环形部分,并且包括至少平坦基板的边缘区域延伸到的开口。 多个光源布置在壳体中的环形部分上。 在壳体内部,设置反射元件,使得来自光源的光线不会垂直地照射在平坦基板的上边缘区域,下边缘区域和前部区域上。

    Transport device, in particular for use in a vacuum chamber
    8.
    发明授权
    Transport device, in particular for use in a vacuum chamber 失效
    运输装置,特别用于真空室

    公开(公告)号:US07490714B2

    公开(公告)日:2009-02-17

    申请号:US11411650

    申请日:2006-04-26

    IPC分类号: B65G15/10

    CPC分类号: B65G49/064 B65G2249/02

    摘要: A transport device is particularly suitable for use in a vacuum chamber for the transportation of a flat substrate through the vacuum chamber and comprises a belt conveyor with at least one flexible infinite belt guided around at least two deflection rollers, whereby at least one deflection roller can be driven, and further including a filling element positioned for filling at least the space contained by the infinite belt or belts. The air volume enclosed by the transport device is significantly reduced in comparison to conventional solutions by incorporating the filling element in the transport element. As a result, the volume to be evacuated from the vacuum chamber is reduced. The vacuum chamber can be evacuated and ventilated more rapidly. Nevertheless, the transport device is constructed so as to be maintenance-friendly. Maintenance work can be carried out easily, because the infinite belts and the deflection rollers are easily accessible. The transport device can also easily be upgraded in the case of existing vacuum chambers.

    摘要翻译: 输送装置特别适合用于真空室中,以便通过真空室输送平面基底,并且包括具有围绕至少两个偏转辊引导的至少一个柔性无限带的带式输送机,由此至少一个偏转辊可以 被驱动,并且还包括填充元件,该填充元件定位成用于至少填充由无限皮带或皮带包含的空间。 与常规解决方案相比,通过将填充元件结合在传送元件中,由输送装置封闭的空气体积显着减少。 结果,减少了从真空室排出的体积。 真空室可以更快地抽真空通风。 然而,运输装置的构造使得维修方便。 维护工作可以轻松进行,因为无缝的皮带和转向滚轮容易接近。 在现有的真空室的情况下,输送装置也可以容易地升级。

    Organic Component
    9.
    发明申请
    Organic Component 有权
    有机成分

    公开(公告)号:US20090009071A1

    公开(公告)日:2009-01-08

    申请号:US12158482

    申请日:2006-12-21

    IPC分类号: H01J1/62

    摘要: The invention relates to an organic component, in particular a light-emitting organic component, having an electrode (1; 2) and a counter electrode (2; 1) and also an arrangement of organic layers (3) which is arranged between the electrode (1; 2) and the counterelectrode (2; 1) and which is in electrical contact with the electrode (1; 2) and the counterelectrode (2; 1), the arrangement of organic layers (3) comprising charge carrier transport layers (4, 8) for transporting charge carriers injected from the electrode (1; 2) and from the counterelectrode (2; 1) into the arrangement of organic layers (3), and with an injection layer (5; 9) made from a molecular doping material being formed in the arrangement of organic layers (3) between the electrode (1; 2) and a charge carrier transport layer (4; 8) arranged opposite to the electrode (1; 2), which injection layer is in contact with the charge carrier transport layer (4; 8) arranged opposite to the electrode (1; 2), the molecular doping material having a molecular weight of at least 300 g/mol.

    摘要翻译: 本发明涉及具有电极(1; 2)和对电极(2; 1)的有机组分,特别是发光有机组分,还涉及一种有机层(3)的布置在电极 (1; 2)和反电极(2; 1),并与电极(1; 2)和反电极(2; 1)电接触,包括电荷载流子传输层 用于将从电极(1; 2)注入的电荷载流子和从反电极(2; 1)注入到有机层(3)的排列中的电荷载体和用分子的注入层(5; 9) 在电极(1; 2)和与电极(1; 2)相对布置的电荷载流子传输层(4; 8)之间的有机层(3)的排列中形成掺杂材料,该注入层与 与电极(1; 2)相对布置的电荷载流子传输层(4; 8),分子掺杂 材料的分子量至少为300g / mol。