DUAL-BULB LAMPHEAD CONTROL METHODOLOGY
    1.
    发明申请
    DUAL-BULB LAMPHEAD CONTROL METHODOLOGY 审中-公开
    双通道灯泡控制方法

    公开(公告)号:US20130122611A1

    公开(公告)日:2013-05-16

    申请号:US13669113

    申请日:2012-11-05

    IPC分类号: H05B37/02 H01L21/26 H01L21/66

    摘要: The present invention generally relates to methods of controlling UV lamp output to increase irradiance uniformity. The methods generally include determining a baseline irradiance within a chamber, determining the relative irradiance on a substrate corresponding to a first lamp and a second lamp, and determining correction or compensation factors based on the relative irradiances and the baseline irradiance. The lamps are then adjusted via closed loop control using the correction or compensation factors to individually adjust the lamps to the desired output. The lamps may optionally be adjusted to equal irradiances prior to adjusting the lamps to the desired output. The closed loop control ensures process uniformity from substrate to substrate. The irradiance measurement and the correction or compensation factors allow for adjustment of lamp set points due to chamber component degradation, chamber component replacement, or chamber cleaning.

    摘要翻译: 本发明一般涉及控制UV灯输出以增加辐照度均匀性的方法。 方法通常包括确定室内的基线辐照度,确定对应于第一灯和第二灯的衬底上的相对辐照度,以及基于相对辐照度和基线辐照度确定校正或补偿因子。 然后通过使用校正或补偿因子的闭环控制来调节灯,以将灯单独调节到期望的输出。 在将灯调节到期望的输出之前,灯可以可选地被调整为相等的辐照度。 闭环控制确保从基板到基板的工艺均匀性。 辐照度测量和校正或补偿因素允许由于室部件劣化,腔室部件更换或腔室清洁而调节灯具设定点。

    DUAL-BULB LAMPHEAD CONTROL METHODOLOGY
    2.
    发明申请
    DUAL-BULB LAMPHEAD CONTROL METHODOLOGY 有权
    双通道灯泡控制方法

    公开(公告)号:US20120129275A1

    公开(公告)日:2012-05-24

    申请号:US13011687

    申请日:2011-01-21

    IPC分类号: H01L21/26 H05B37/02

    摘要: The present invention generally relates to methods of controlling UV lamp output to increase irradiance uniformity. The methods generally include determining a baseline irradiance within a chamber, determining the relative irradiance on a substrate corresponding to a first lamp and a second lamp, and determining correction or compensation factors based on the relative irradiances and the baseline irradiance. The lamps are then adjusted via closed loop control using the correction or compensation factors to individually adjust the lamps to the desired output. The lamps may optionally be adjusted to equal irradiances prior to adjusting the lamps to the desired output. The closed loop control ensures process uniformity from substrate to substrate. The irradiance measurement and the correction or compensation factors allow for adjustment of lamp set points due to chamber component degradation, chamber component replacement, or chamber cleaning.

    摘要翻译: 本发明一般涉及控制UV灯输出以增加辐照度均匀性的方法。 方法通常包括确定室内的基线辐照度,确定对应于第一灯和第二灯的衬底上的相对辐照度,以及基于相对辐照度和基线辐照度确定校正或补偿因子。 然后通过使用校正或补偿因子的闭环控制来调节灯,以将灯单独调节到期望的输出。 在将灯调节到期望的输出之前,灯可以可选地被调整为相等的辐照度。 闭环控制确保从基板到基板的工艺均匀性。 辐照度测量和校正或补偿因素允许由于室部件劣化,腔室部件更换或腔室清洁而调节灯具设定点。

    Dual-bulb lamphead control methodology
    3.
    发明授权
    Dual-bulb lamphead control methodology 有权
    双灯泡灯头控制方法

    公开(公告)号:US08309421B2

    公开(公告)日:2012-11-13

    申请号:US13011687

    申请日:2011-01-21

    IPC分类号: H01L21/336 H01L21/76

    摘要: The present invention generally relates to methods of controlling UV lamp output to increase irradiance uniformity. The methods generally include determining a baseline irradiance within a chamber, determining the relative irradiance on a substrate corresponding to a first lamp and a second lamp, and determining correction or compensation factors based on the relative irradiances and the baseline irradiance. The lamps are then adjusted via closed loop control using the correction or compensation factors to individually adjust the lamps to the desired output. The lamps may optionally be adjusted to equal irradiances prior to adjusting the lamps to the desired output. The closed loop control ensures process uniformity from substrate to substrate. The irradiance measurement and the correction or compensation factors allow for adjustment of lamp set points due to chamber component degradation, chamber component replacement, or chamber cleaning.

    摘要翻译: 本发明一般涉及控制UV灯输出以增加辐照度均匀性的方法。 方法通常包括确定室内的基线辐照度,确定对应于第一灯和第二灯的衬底上的相对辐照度,以及基于相对辐照度和基线辐照度确定校正或补偿因子。 然后通过使用校正或补偿因子的闭环控制来调节灯,以将灯单独调节到期望的输出。 在将灯调节到期望的输出之前,灯可以可选地被调整为相等的辐照度。 闭环控制确保从基板到基板的工艺均匀性。 辐照度测量和校正或补偿因素允许由于室部件劣化,腔室部件更换或腔室清洁而调节灯具设定点。

    Apparatus and method for intravascular imaging
    9.
    发明申请
    Apparatus and method for intravascular imaging 审中-公开
    用于血管内成像的装置和方法

    公开(公告)号:US20060235299A1

    公开(公告)日:2006-10-19

    申请号:US11400996

    申请日:2006-04-10

    IPC分类号: A61M25/00

    摘要: A method and apparatus for intravascular imaging utilizes a rotating magnetic field generated outside of the patient's body to cause a substantially synchronous rotation of an ultrasonic signal inside the patient's body.

    摘要翻译: 用于血管内成像的方法和装置利用在患者身体外部产生的旋转磁场使得超声信号在患者体内的基本上同步的旋转。