摘要:
The invention relates to a method for the conversion of a gas or gas mixture and, in particular, a fluorinated gaseous effluent. According to the invention, at least one bond between two atoms of at least one molecule of the gas or gas mixture is broken under the influence of an electric and/or magnetic field to which the gas or gas mixture is subjected. The gas or gas mixture stream is injected through the electric and/or magnetic field in a non-rectilinear manner in order to increase the distance travelled by the gas molecules through the field and, in this way, increase the effectiveness of the conversion of the gas or gas mixture molecules.
摘要:
The invention relates to a method for destroying effluents issuing from a reactor, the said effluents being transported through at least one pump towards plasma means capable of destroying at least certain bonds in the molecules of the PFC or HFC type between the fluorine and the other elements of these molecules of the PFC or HFC type, in order to generate first species which are then converted to second gaseous, liquid or solid species before interaction of these second species with dry or wet purifying means. According to the invention, at least one reducing agent is injected upstream and/or downstream of the plasma, but upstream of the purifying means, in order to react with the first species created.
摘要:
A section of pipe, for a device for treating a gas by exciting the latter by way of incident microwave radiation suitable for producing a surface-wave plasma in the gas, including a discharge tube made of dielectric material intended to pass through the device in a region for concentrating the incident radiation. The tube comprises, over at least part of its length, a double wall.
摘要:
The invention relates to a plasma generating device that comprises at least one very high frequency source (>100 MHz) connected via an impedance adaptation device to an elongated conductor attached on a dielectric substrate, at least one means for cooling said conductor, and at least one gas supply in the vicinity of the dielectric substrate on a side opposite to that bearing the conductor. The invention also relates to plasma torches using said device.
摘要:
The invention relates to a microwave plasma exciter device which includes a waveguide (23) for concentrating the microwaves; and a plasma generator (110, 120) for forming a plasma, which are disposed in a microwave concentration zone.
摘要:
Provided is a device for the microwave-sustained plasma treatment of gases, which comprises a hollow structure forming a waveguide intended to be connected to a microwave generator, and means for making the gas to be treated flow through the said structure in a region in which the amplitude of the electric field associated with the incident wave is high. The means for making the gas flow comprise a plasma torch for producing a plasma in the gas. The torch comprises an injector made of an electrically conducting material mounted on a first large face of the said structure and extending so as to project through an orifice made in a second large face opposite the said first large face. A gap for passage of the incident waves lies around the injector.
摘要:
A process for treating perfluorinated and/or hydrofluorocarbon gases, comprising the steps ofcreating an atmospheric-pressure gas plasma in at least one hollow dielectric tube;making the gases to be treated flow through the at least one dielectric tube in contact with the plasma for the purpose of dissociating molecules of the gases into reactive compounds; andreacting the reactive compounds with a corresponding reactive element for the purpose of destroying them.
摘要:
A method and device for the preparation of a gas or mixture of gases containing molecular fluorine from a gas or mixture of gases derived from fluorine, wherein the fluorinated gas or mixture of gases, particularly nitrogen trifluoride NF2, is decomposed by cracking in a plasma of molecules of fluorinated gases in order to produce a mixture of atomic fluorine and other species resulting form said cracking, whereupon said mixture is subsequently cooled in a rapid manner (24), if necessary at a temperature of less than 500° C., in order to result in the formation of molecular fluorine of rat least 50% atomic fluorine thus formed and to minimize the recombination of fluorine atoms with other products arising from said cracking and to reform a fluorinated gas or mixture of gases, wherein the gaseous mixture containing F2 is recovered.
摘要翻译:一种用于从气体或来自氟的气体混合物制备含有分子氟的气体或气体混合物的方法和装置,其中氟化气体或气体混合物,特别是三氟化氮NF 2, 通过在氟化气体分子的等离子体中的裂解而分解,以便产生由所述裂化产生的原子氟和其它物质的混合物,随后所述混合物随后以快速方式(24)冷却,如果需要,在较低温度 为了导致形成大分子氟的最小50%的原子氟,并且使氟原子与由所述裂解产生的其它产物的重组最小化,并且重整氟化气体或气体混合物 ,其中回收含有F 2 N 2的气体混合物。
摘要:
The invention relates to a method for the treatment of gases comprising impurities, in which the gas, which is essentially at atmospheric pressure, is subjected to a radio-frequency inductive plasma (RF-ICP) discharge.
摘要:
An apparatus for the treatment of perfluorinated and/or hydrofluorocarbon gases, for the purpose of destroying them, is provided. The apparatus includes at least one high-frequency surface-wave exciter which produces surface waves, a waveguide designed to guide the surface waves produced by the at least one wave exciter to at least one hollow dielectric tube for (i) creating, when supplied with a carrier gas an atmospheric-pressure plasma and (ii) for dissociating the molecules of the perfluorinated and/or hydrofluorocarbon gases within the plasma in order to form reactive compounds, and at least one treatment unit for the reactive fluorinated compounds which is arranged on an exit side of a corresponding hollow dielectric tube.