Microwave Plasma Generating Plasma and Plasma Torches
    4.
    发明申请
    Microwave Plasma Generating Plasma and Plasma Torches 审中-公开
    微波等离子体发生等离子体和等离子体手电筒

    公开(公告)号:US20120018410A1

    公开(公告)日:2012-01-26

    申请号:US12679231

    申请日:2008-09-16

    IPC分类号: B23K9/00 H05H1/46

    摘要: The invention relates to a plasma generating device that comprises at least one very high frequency source (>100 MHz) connected via an impedance adaptation device to an elongated conductor attached on a dielectric substrate, at least one means for cooling said conductor, and at least one gas supply in the vicinity of the dielectric substrate on a side opposite to that bearing the conductor. The invention also relates to plasma torches using said device.

    摘要翻译: 本发明涉及一种等离子体产生装置,其包括至少一个通过阻抗适配装置连接到连接在电介质基底上的细长导体的非常高频源(> 100MHz),至少一个用于冷却所述导体的装置,至少 在与承载导体的那一侧相反的一侧在电介质基板附近的一个气体供应。 本发明还涉及使用所述装置的等离子体炬。

    Method for the Preparation of a Gas or Mixture of Gases Containing Molecular Fluorine
    8.
    发明申请
    Method for the Preparation of a Gas or Mixture of Gases Containing Molecular Fluorine 审中-公开
    制备含有分子氟的气体或气体混合物的方法

    公开(公告)号:US20080110744A1

    公开(公告)日:2008-05-15

    申请号:US11570111

    申请日:2005-06-26

    IPC分类号: B01D53/32 C25D17/00

    摘要: A method and device for the preparation of a gas or mixture of gases containing molecular fluorine from a gas or mixture of gases derived from fluorine, wherein the fluorinated gas or mixture of gases, particularly nitrogen trifluoride NF2, is decomposed by cracking in a plasma of molecules of fluorinated gases in order to produce a mixture of atomic fluorine and other species resulting form said cracking, whereupon said mixture is subsequently cooled in a rapid manner (24), if necessary at a temperature of less than 500° C., in order to result in the formation of molecular fluorine of rat least 50% atomic fluorine thus formed and to minimize the recombination of fluorine atoms with other products arising from said cracking and to reform a fluorinated gas or mixture of gases, wherein the gaseous mixture containing F2 is recovered.

    摘要翻译: 一种用于从气体或来自氟的气体混合物制备含有分子氟的气体或气体混合物的方法和装置,其中氟化气体或气体混合物,特别是三氟化氮NF 2, 通过在氟化气体分子的等离子体中的裂解而分解,以便产生由所述裂化产生的原子氟和其它物质的混合物,随后所述混合物随后以快速方式(24)冷却,如果需要,在较低温度 为了导致形成大分子氟的最小50%的原子氟,并且使氟原子与由所述裂解产生的其它产物的重组最小化,并且重整氟化气体或气体混合物 ,其中回收含有F 2 N 2的气体混合物。

    Process and apparatus for the treatment of perfluorinated and hydrofluorocarbon gases for the purpose of destroying them
    10.
    发明授权
    Process and apparatus for the treatment of perfluorinated and hydrofluorocarbon gases for the purpose of destroying them 有权
    用于处理全氟化氢和氢氟碳化合物气体的方法和设备,以摧毁它们

    公开(公告)号:US06290918B1

    公开(公告)日:2001-09-18

    申请号:US09347024

    申请日:1999-07-02

    IPC分类号: B01J1908

    摘要: An apparatus for the treatment of perfluorinated and/or hydrofluorocarbon gases, for the purpose of destroying them, is provided. The apparatus includes at least one high-frequency surface-wave exciter which produces surface waves, a waveguide designed to guide the surface waves produced by the at least one wave exciter to at least one hollow dielectric tube for (i) creating, when supplied with a carrier gas an atmospheric-pressure plasma and (ii) for dissociating the molecules of the perfluorinated and/or hydrofluorocarbon gases within the plasma in order to form reactive compounds, and at least one treatment unit for the reactive fluorinated compounds which is arranged on an exit side of a corresponding hollow dielectric tube.

    摘要翻译: 提供了用于处理全氟化和/或氢氟烃气体的装置,用于破坏它们。 该装置包括产生表面波的至少一个高频表面波激励器,设计成将由至少一个波激励器产生的表面波引导到至少一个中空电介质管的波导,用于(i)在被提供时产生 载气,大气压等离子体和(ii)用于解离等离子体内的全氟化和/或氢氟烃气体的分子以形成反应性化合物,以及至少一个反应性氟化合物的处理单元,其布置在 相应的中空电介质管的出口侧。