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公开(公告)号：US08265114B2
公开(公告)日：2012-09-11
申请号：US13124865
申请日：2010-03-18
申请人： Yasuhiro Nagatomo , Takeshi Uchida
发明人： Yasuhiro Nagatomo , Takeshi Uchida
IPC分类号： H01S5/00
CPC分类号： H01S5/18 , B82Y20/00 , H01S5/0601 , H01S5/105 , H01S5/205 , H01S5/3203 , H01S5/3211 , H01S5/34333 , H01S5/42
摘要： A surface emitting laser having a laminated structure has a first region and a second region. The first region is a region having at least one guided mode, a propagation mode in which light is propagated in the in-plane direction of a substrate at a laser oscillation wavelength. The second region is a region having a substrate radiation mode in which light is emitted to the side of the substrate at the laser oscillation wavelength.
摘要翻译： 具有层叠结构的表面发射激光器具有第一区域和第二区域。 第一区域是具有至少一个引导模式的区域，其中光以激光振荡波长在基板的面内方向上传播的传播模式。 第二区域是具有基板辐射模式的区域，其中光以激光振荡波长发射到基板的侧面。
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公开(公告)号：US07869483B2
公开(公告)日：2011-01-11
申请号：US12425745
申请日：2009-04-17
IPC分类号： H01S3/08
CPC分类号： H01S5/187 , H01S5/105 , H01S5/3211 , H01S5/32341
摘要： A surface emitting laser which oscillates at a wavelength λ of a blue band, including a photonic crystal layer including a photonic crystal structure, an active layer provided on one surface of the photonic crystal layer, and an electrode provided on the other surface of the photonic crystal layer for injecting electric current into the active layer. The photonic crystal structure has a thickness of 100 nm or more. A laser beam is emitted toward a direction opposite to a side of the photonic crystal layer on which the electrode is provided.
摘要翻译： 一种表面发射激光器，其以包括光子晶体结构的光子晶体层，设置在光子晶体层的一个表面上的有源层和设置在光子晶体的另一个表面上的电极在蓝色波段的波长λ处振荡 用于将电流注入有源层的晶体层。 光子晶体结构的厚度为100nm以上。 激光束朝向与设置有电极的光子晶体层的一侧相反的方向发射。
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公开(公告)号：US20090262775A1
公开(公告)日：2009-10-22
申请号：US12425745
申请日：2009-04-17
IPC分类号： H01S5/18
CPC分类号： H01S5/187 , H01S5/105 , H01S5/3211 , H01S5/32341
摘要： A surface emitting laser which oscillates at a wavelength X of a blue band, including a photonic crystal layer including a photonic crystal structure, an active layer provided on one surface of the photonic crystal layer, and an electrode provided on the other surface of the photonic crystal layer for injecting electric current into the active layer. The photonic crystal structure has a thickness of 100 nm or more. A laser beam is emitted toward a direction opposite to a side of the photonic crystal layer on which the electrode is provided.
摘要翻译： 一种表面发射激光器，其以包括光子晶体结构的光子晶体层，设置在光子晶体层的一个表面上的有源层和设置在光子晶体的另一个表面上的电极在蓝色波段的波长X处振荡 用于将电流注入有源层的晶体层。 光子晶体结构的厚度为100nm以上。 激光束朝向与设置有电极的光子晶体层的一侧相反的方向发射。
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公开(公告)号：US08416826B2
公开(公告)日：2013-04-09
申请号：US13061983
申请日：2010-04-08
申请人： Yasuhiro Nagatomo , Takeshi Uchida
发明人： Yasuhiro Nagatomo , Takeshi Uchida
IPC分类号： H01S5/00
CPC分类号： H01S5/2027 , H01S5/1039 , H01S5/105 , H01S5/18319
摘要： The present invention provides a photonic crystal surface emitting laser with which an arbitrary beam shape can be obtained and which enables design with a high degree of freedom. The surface emitting laser including a photonic crystal having a resonance mode in an in-plane direction parallel to a substrate includes a reflecting mirror for reflecting light emitted from the photonic crystal in a normal direction of the substrate and a spacer layer interposed between the reflecting mirror and the photonic crystal, wherein a nonuniform in-plane distribution is provided to the characteristics of one of the reflecting mirror and the spacer layer, so that a Q-value, which is a resonator characteristic in the normal direction of the substrate in the surface emitting laser, has a nonuniform in-plane distribution.
摘要翻译： 本发明提供一种可以获得任意波束形状的光子晶体表面发射激光器，并且能够以高自由度进行设计。 包括具有平行于衬底的面内方向的共振模式的光子晶体的表面发射激光器包括：反射镜，用于反射沿着基板的法线方向从光子晶体发射的光;以及间隔层，其设置在反射镜之间 和光子晶体，其中对反射镜和间隔层之一的特性提供不均匀的面内分布，使得作为表面中的基板的法线方向的共振器特性的Q值 发射激光器具有不均匀的面内分布。
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公开(公告)号：US08149892B2
公开(公告)日：2012-04-03
申请号：US12183122
申请日：2008-07-31
申请人： Yasuhiro Nagatomo , Takeshi Uchida
发明人： Yasuhiro Nagatomo , Takeshi Uchida
CPC分类号： H01S5/18 , H01S5/105 , H01S5/20 , H01S5/42 , H01S2301/14
摘要： In a structure having a two-dimensional photonic crystal in which structures having different refractive indices are disposed at a two-dimensional period and comprising a structure emitting in a direction perpendicular to a resonance direction of light propagating in the in-plane direction of the two-dimensional photonic crystal, wherein the structure comprises a one-dimensional photonic crystal in which components having different refractive indices are arranged at a one-dimensional period, and, the light propagating in the in-plane direction of the two-dimensional photonic crystal is reflected by a photonic band edge of the one-dimensional photonic crystal.
摘要翻译： 在具有二维光子晶体的结构中，其中具有不同折射率的结构被设置在二维周期，并且包括沿垂直于在两个方向上的平面内方向传播的光的谐振方向垂直的方向发射的结构 其中所述结构包括一维光子晶体，其中具有不同折射率的分量以一维周期排列，并且在二维光子晶体的面内方向上传播的光是 由一维光子晶体的光子带边缘反射。
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公开(公告)号：US20110216796A1
公开(公告)日：2011-09-08
申请号：US13124865
申请日：2010-03-18
申请人： Yasuhiro Nagatomo , Takeshi Uchida
发明人： Yasuhiro Nagatomo , Takeshi Uchida
IPC分类号： H01S5/18
CPC分类号： H01S5/18 , B82Y20/00 , H01S5/0601 , H01S5/105 , H01S5/205 , H01S5/3203 , H01S5/3211 , H01S5/34333 , H01S5/42
摘要： A surface emitting laser having a laminated structure has a first region and a second region. The first region is a region having at least one guided mode as a propagation mode in which light is propagated in the in-plane direction of a substrate at a laser oscillation wavelength. The second region is a region having a substrate radiation mode in which light is emitted to the side of the substrate at the laser oscillation wavelength.
摘要翻译： 具有层叠结构的表面发射激光器具有第一区域和第二区域。 第一区域是具有至少一个引导模式作为传播模式的区域，其中光以激光振荡波长在基板的面内方向上传播。 第二区域是具有基板辐射模式的区域，其中光以激光振荡波长发射到基板的侧面。
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公开(公告)号：US20110158280A1
公开(公告)日：2011-06-30
申请号：US13061983
申请日：2010-04-08
申请人： Yasuhiro Nagatomo , Takeshi Uchida
发明人： Yasuhiro Nagatomo , Takeshi Uchida
IPC分类号： H01S5/026
CPC分类号： H01S5/2027 , H01S5/1039 , H01S5/105 , H01S5/18319
摘要： The present invention provides a photonic crystal surface emitting laser with which an arbitrary beam shape can be obtained and which enables design with a high degree of freedom. The surface emitting laser including a photonic crystal having a resonance mode in an in-plane direction parallel to a substrate includes a reflecting mirror for reflecting light emitted from the photonic crystal in a normal direction of the substrate and a spacer layer interposed between the reflecting mirror and the photonic crystal, wherein a nonuniform in-plane distribution is provided to the characteristics of one of the reflecting mirror and the spacer layer, so that a Q-value, which is a resonator characteristic in the normal direction of the substrate in the surface emitting laser, has a nonuniform in-plane distribution.
摘要翻译： 本发明提供一种可以获得任意波束形状的光子晶体表面发射激光器，并且能够以高自由度进行设计。 包括具有平行于衬底的面内方向的共振模式的光子晶体的表面发射激光器包括：反射镜，用于反射沿着基板的法线方向从光子晶体发射的光;以及间隔层，其设置在反射镜之间 和光子晶体，其中对反射镜和间隔层之一的特性提供不均匀的面内分布，使得作为表面中的基板的法线方向的共振器特性的Q值 发射激光器具有不均匀的面内分布。
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公开(公告)号：US20090074026A1
公开(公告)日：2009-03-19
申请号：US12183122
申请日：2008-07-31
申请人： Yasuhiro Nagatomo , Takeshi Uchida
发明人： Yasuhiro Nagatomo , Takeshi Uchida
CPC分类号： H01S5/18 , H01S5/105 , H01S5/20 , H01S5/42 , H01S2301/14
摘要： In a structure having a two-dimensional photonic crystal in which structures having different refractive indices are disposed at a two-dimensional period and comprising a structure emitting in a direction perpendicular to a resonance direction of light propagating in the in-plane direction of the two-dimensional photonic crystal, wherein the structure comprises a one-dimensional photonic crystal in which components having different refractive indices are arranged at a one-dimensional period, and, the light propagating in the in-plane direction of the two-dimensional photonic crystal is reflected by a photonic band edge of the one-dimensional photonic crystal.
摘要翻译： 在具有二维光子晶体的结构中，其中具有不同折射率的结构被设置在二维周期，并且包括沿垂直于在两个方向上的平面内方向传播的光的谐振方向垂直的方向发射的结构 其中所述结构包括一维光子晶体，其中具有不同折射率的分量以一维周期排列，并且在二维光子晶体的面内方向上传播的光是 由一维光子晶体的光子带边缘反射。
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公开(公告)号：US08855158B2
公开(公告)日：2014-10-07
申请号：US13820436
申请日：2011-09-14
CPC分类号： H01S5/105 , B82Y20/00 , H01S5/18 , H01S5/187 , H01S5/2009 , H01S5/34 , H01S5/34333 , H01S2301/185
摘要： Provided is a two-dimensional photonic crystal surface emitting laser that enables easy laser oscillation with two-dimensionally symmetric intensity distribution, using a photonic crystal of a lattice structure having different lengths of primitive translation vectors in plane, realized in a two-dimensional photonic crystal surface emitting laser including an active layer, and a two-dimensional photonic crystal having a two-dimensionally periodic refractive index profile disposed in a vicinity of the active layer. The two-dimensional photonic crystal has a lattice structure where two primitive translation vectors in plane have different lengths, a shape of a member forming lattice points included in a unit cell of the lattice structure has anisotropy with respect to directions of the two primitive translation vectors, and the anisotropy of the shape of the member permits a difference of a coupling coefficient to be smaller than a case where the shape of the member is isotropic.
摘要翻译： 提供一种二维光子晶体表面发射激光器，其使用在平面中具有不同长度的原始平移矢量的晶格结构的光子晶体，能够容易地进行具有二维对称强度分布的激光振荡，在二维光子晶体 包括有源层的表面发射激光器和具有设置在有源层附近的具有二维周期性折射率分布的二维光子晶体。 二维光子晶体具有晶格结构，其中平面中的两个原始平移向量具有不同的长度，形成格子结构的单位单元中的晶格点的成员的形状相对于两个原始翻译矢量的方向具有各向异性 ，并且构件的形状的各向异性允许耦合系数的差异小于构件的形状各向同性的情况。
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公开(公告)号：US08842710B2
公开(公告)日：2014-09-23
申请号：US13058561
申请日：2010-07-27
CPC分类号： H01S5/1228 , H01L21/02389 , H01L21/02538 , H01L21/0254 , H01L21/02579 , H01L21/02667 , H01S5/1017 , H01S5/1231 , H01S5/2059 , H01S5/2095 , H01S5/32341
摘要： There are provided a process for producing a semiconductor device and a semiconductor device which allow conductivity distribution to be formed without making refractive index distributed even in a material system of a semiconductor difficult to be subjected to ion implantation. The process for producing a semiconductor device includes the steps of forming a semiconductor layer containing a dopant; forming a concave and convex structure on the semiconductor layer by partially removing the semiconductor layer; and forming a conductivity distribution reflecting the concave and convex structure in the semiconductor layer by performing heat treatment on the semiconductor layer in which the concave and convex structure has been formed at a temperature at which a material forming the semiconductor layer causes mass transport and filling up a hole of a concave portion of the concave and convex structure with the material forming the semiconductor layer.
摘要翻译： 提供了一种用于制造半导体器件和半导体器件的方法，其允许在不使难以进行离子注入的半导体的材料体系中即使在不使折射率分布的情况下形成导电性分布。 制造半导体器件的方法包括以下步骤：形成含有掺杂剂的半导体层; 通过部分去除半导体层在半导体层上形成凹凸结构; 并且在形成半导体层的材料导致大量运输和填充的温度下对形成有凹凸结构的半导体层进行热处理，形成反映半导体层中的凹凸结构的导电率分布 所述凹凸结构的凹部的孔与所述材料形成所述半导体层。
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