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1.发明授权Method of manufacturing active matrix display device using insulation layer formed by the ale method 失效使用由ale方法形成的绝缘层制造有源矩阵显示装置的方法
公开(公告)号：US5374570A
公开(公告)日：1994-12-20
申请号：US109109
申请日：1993-08-19
IPC分类号： H01L29/78 , B82B1/00 , G02F1/1362 , G02F1/1368 , H01L21/28 , H01L21/316 , H01L21/336 , H01L21/77 , H01L21/84 , H01L29/786 , H01L21/265
CPC分类号： G02F1/1368 , H01L21/28008 , H01L21/31683 , H01L27/1214 , G02F1/136213
摘要： A method of manufacturing an active matrix display device, in which particular emphases are laid on the forming step of an insulation layer by the ALE method and the precedent and subsequent steps thereof, thereby insulation layer being anyone among gate insulation layer, inter-busline insulation layer, protection layer and auxiliary capacitor insulation layer comprised in the display device. The method of forming the insulation layer comprises the predetermined number of repeated cycles of the steps of subjecting a substrate to the vapor of a metal inorganic/organic compound, which can react with H.sub.2 O and/or O.sub.2 and form the metal oxide, under molecular flow condition for duration of depositing almost a single atomic layer, and next subjecting the surface of thus formed metal inorganic/organic compound layer to the H.sub.2 O vapor and/or O.sub.2 gas under molecular flow condition for duration of replacing the metal inorganic/organic compound layer to the metal oxide layer. The subsequent steps after forming of the insulation layer include deposition steps of silicon nitride and amorphous silicon layers using the same plasma CVD apparatus. The molecular flow condition is obtained by maintaining the pressure in a reaction chamber within a range between 1 and several tens of milli-Torr.
摘要翻译： 一种制造有源矩阵显示装置的方法，其中通过ALE方法及其先后的步骤在绝缘层的形成步骤上放置了特别的重点，由此绝缘层是栅极绝缘层，母线间绝缘 层，保护层和包括在显示装置中的辅助电容器绝缘层。 形成绝缘层的方法包括以下步骤的预定数量的重复循环：在分子流下使基底经受可与H 2 O和/或O 2反应并形成金属氧化物的金属无机/有机化合物的蒸气 在几乎单个原子层沉积的条件下，然后在分子流动条件下将由此形成的金属无机/有机化合物层的表面经受H 2 O蒸气和/或O 2气体，以将金属无机/有机化合物层替代为 金属氧化物层。 在形成绝缘层之后的后续步骤包括使用相同的等离子体CVD装置的氮化硅和非晶硅层的沉积步骤。 通过将反应室中的压力保持在1至数十毫乇之间的范围内来获得分子流动条件。
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公开(公告)号：US08134129B2
公开(公告)日：2012-03-13
申请号：US11989537
申请日：2006-07-28
申请人： Fuyuki Tokanai , Takahisa Sakurai , Shuichi Gunji , Takayuki Sumiyoshi , Teruyuki Okada , Tetsuro Endo , Yoshio Fujita
发明人： Fuyuki Tokanai , Takahisa Sakurai , Shuichi Gunji , Takayuki Sumiyoshi , Teruyuki Okada , Tetsuro Endo , Yoshio Fujita
IPC分类号： G01T1/00
CPC分类号： H01J43/246 , G01T1/2935 , H01J31/507 , H01J2231/5016
摘要： An object of the present invention is to provide a microchannel plate having excellent characteristics which enable to attain both high luminance and high resolution at the same time, a gas proportional counter using such a microchannel plate and an imaging device. The microchannel plate according to the present invention comprises a base body provided with a plurality of through holes (13) and having an insulating property, and is arranged in a gas atmosphere mainly containing an inert gas to constitute a proportional counter. The base body has photoelectric converter portions (1a, 1b) formed on at least inner walls of the plurality of through holes (13).
摘要翻译： 本发明的目的是提供一种具有优异特性的微通道板，其能够同时获得高亮度和高分辨率，使用这种微通道板和成像装置的气体比例计数器。 根据本发明的微通道板包括设置有多个通孔（13）并具有绝缘性的基体，并且布置在主要包含惰性气体的气体气氛中以构成比例计数器。 基体具有形成在多个通孔（13）的至少内壁上的光电转换部（1a，1b）。
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公开(公告)号：US06849832B2
公开(公告)日：2005-02-01
申请号：US10838484
申请日：2004-05-04
申请人： Tetsuro Endo , Hirotoshi Iwase , Seizo Kato , Masatoshi Ochiai
发明人： Tetsuro Endo , Hirotoshi Iwase , Seizo Kato , Masatoshi Ochiai
IPC分类号： H05B33/10 , C23C4/08 , C23C14/24 , C23C14/26 , H01L51/50 , C23C16/00 , C23C14/00 , F27B14/12 , F27B14/14
CPC分类号： C23C14/243 , C23C14/26
摘要： When electric current is caused to flow in an electric heater which is disposed on an elongated crucible, an evaporation material stored within the crucible and located under the electric heater is heated and the evaporation material is vaporized and discharged through an opening of the electric heater. Because a metal coating is applied to the outer surface of the elongated crucible, external radiation of heat from the crucible is reduced, and the heat generated by the electric heater is more efficiently used to increase the temperature of the evaporation material. In this manner, efficient heating for the interior of the elongated crucible and uniform temperature within the crucible can be achieved.
摘要翻译： 当在设置在细长的坩埚上的电加热器中使电流流动时，加热存储在坩埚内并位于电加热器下方的蒸发材料，蒸发材料通过电加热器的开口蒸发并排出。 由于将金属涂层施加到细长坩埚的外表面，所以来自坩埚的热量的外部辐射减少，并且由电加热器产生的热量更有效地用于提高蒸发材料的温度。 以这种方式，可以实现对细长坩埚内部的有效加热和坩埚内的均匀温度。
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公开(公告)号：US07526069B2
公开(公告)日：2009-04-28
申请号：US10571996
申请日：2004-09-15
IPC分类号： H01J5/18
CPC分类号： H01J35/18
摘要： The present invention relates to an X-ray tube capable of efficiently extracting X-rays of low energy and provided with a structure having excellent durability. The X-ray tube is provided with a silicon foil having a thickness of 3 μm or more but 30 μm or less as a part of a vessel body. The silicon foil is directly or indirectly affixed on the closed vessel in a state that the silicon foil covers the opening provided in the closed vessel, and functions as a transmission window of the closed vessel.
摘要翻译： 本发明涉及能够有效地提取低能量的X射线并具有耐久性优异的结构的X射线管。 X射线管设置有作为血管主体的一部分的厚度为3μm以上且30μm以下的硅箔。 在硅箔覆盖设置在密闭容器中的开口的状态下，硅箔直接或间接地固定在密闭容器上，并且用作封闭容器的透射窗。
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公开(公告)号：US20050183671A1
公开(公告)日：2005-08-25
申请号：US11068169
申请日：2005-02-28
申请人： Masatoshi Ochiai , Hirotoshi Iwase , Seizo Kato , Tetsuro Endo
发明人： Masatoshi Ochiai , Hirotoshi Iwase , Seizo Kato , Tetsuro Endo
CPC分类号： C23C14/243 , Y10T24/44641 , Y10T24/44769 , Y10T24/44855 , Y10T117/10
摘要： An electric heater is placed so as to cover an upper opening of a crucible. Then, a plurality of angle members are disposed along the side portions of the electric heater and are pressed and fixed by clamps. The clamp includes, at its bottom, a curved portion formed by bending a plate-like spring member into a convex shape, and generates pressing force between the curved portion and corresponding claw portions at the upper edge, thereby clamping the crucible.
摘要翻译： 放置电加热器以覆盖坩埚的上部开口。 然后，沿着电加热器的侧部设置多个角部件，并通过夹具按压固定。 夹具在其底部包括通过将板状弹簧构件弯曲成凸形而形成的弯曲部分，并且在弯曲部分和上边缘处的相应爪部之间产生压力，从而夹紧坩埚。
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公开(公告)号：US5546220A
公开(公告)日：1996-08-13
申请号：US386494
申请日：1995-02-10
申请人： Tetsuro Endo , Kiichiro Shinokura
发明人： Tetsuro Endo , Kiichiro Shinokura
CPC分类号： G02F1/377 , G02F2001/3546
摘要： An optical wavelength converter includes an optical wavelength converting element having a multimode waveguide of a core of a nonlinear optical material with a high temperature dependency or temperature coefficient of an index difference for the fundamental wave and secondary harmonic and a clad surrounding the multimode waveguide for converting a wavelength of a fundamental wave entering the multimode waveguide to a 1/2 wavelength of a secondary harmonic; and a temperature tuning device for changing a temperature of the clad and the multimode waveguide within a predetermined temperature range to maintain a phase matching temperature of the fundamental wave and the secondary harmonic in the optical wavelength converting element. The temperature tuner changes the temperature coefficient so as to select a pertinent pair of the fundamental wave and secondary harmonic modes for a wavelength conversion. The multimode waveguide structure has a large sectional area which enables output of a stable high power of secondary harmonic and is easily manufactured.
摘要翻译： 光波长转换器包括具有高温度依赖性的非线性光学材料的芯的多模波导的光波长转换元件或基波和二次谐波的折射率差的温度系数以及围绕多模波导的包层的转换 进入多模波导的基波的波长为+ E，二次谐波的1/2 + EE波长; 以及用于将包层和多模波导的温度改变到预定温度范围内的温度调节装置，以保持光波长转换元件中的基波和二次谐波的相位匹配温度。 温度调节器改变温度系数，以便选择波长转换的基波和二次谐波模式的一对。 多模波导结构具有大的截面面积，能够输出稳定的二次谐波高功率并容易制造。
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公开(公告)号：US5199097A
公开(公告)日：1993-03-30
申请号：US765734
申请日：1991-09-26
申请人： Kichiro Shinokura , Tetsuro Endo
发明人： Kichiro Shinokura , Tetsuro Endo
CPC分类号： G02F1/377 , G02F1/0147 , G02F2001/3546
摘要： An optical waveguide type light wavelength shifter device has a core made of a nonlinear optical crystal and a cladding. The optical waveguide type light wavelength shifter device is provided with a thermoelectric element so that wavelength variation of the second harmonic wave resulting from a variation in the wavelength of an incident light can be minimized.
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公开(公告)号：US20110155919A1
公开(公告)日：2011-06-30
申请号：US11989537
申请日：2006-07-28
申请人： Fuyuki Tokanai , Takahisa Sakurai , Shuichi Gunji , Takayuki Sumiyoshi , Teruyuki Okada , Tetsuro Endo , Yoshio Fujita
发明人： Fuyuki Tokanai , Takahisa Sakurai , Shuichi Gunji , Takayuki Sumiyoshi , Teruyuki Okada , Tetsuro Endo , Yoshio Fujita
CPC分类号： H01J43/246 , G01T1/2935 , H01J31/507 , H01J2231/5016
摘要： An object of the present invention is to provide a microchannel plate having excellent characteristics which enable to attain both high luminance and high resolution at the same time, a gas proportional counter using such a microchannel plate and an imaging device. The microchannel plate according to the present invention comprises a base body provided with a plurality of through holes (13) and having an insulating property, and is arranged in a gas atmosphere mainly containing an inert gas to constitute a proportional counter. The base body has photoelectric converter portions (1a, 1b) formed on at least inner walls of the plurality of through holes (13).
摘要翻译： 本发明的目的是提供一种具有优异特性的微通道板，其能够同时获得高亮度和高分辨率，使用这种微通道板和成像装置的气体比例计数器。 根据本发明的微通道板包括设置有多个通孔（13）并具有绝缘性的基体，并且布置在主要包含惰性气体的气体气氛中以构成比例计数器。 基体具有形成在多个通孔（13）的至少内壁上的光电转换部（1a，1b）。
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公开(公告)号：US20060280290A1
公开(公告)日：2006-12-14
申请号：US10571996
申请日：2004-09-15
CPC分类号： H01J35/18
摘要： The present invention relates to an X-ray tube capable of efficiently extracting X-rays of low energy and provided with a structure having excellent durability. The X-ray tube is provided with a silicon foil having a thickness of 3 μm or more but 30 μm or less as a part of a vessel body. The silicon foil is directly or indirectly affixed on the closed vessel in a state that the silicon foil covers the opening provided in the closed vessel, and functions as a transmission window of the closed vessel.
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公开(公告)号：US06911094B2
公开(公告)日：2005-06-28
申请号：US10838812
申请日：2004-05-04
申请人： Hirotoshi Iwase , Seizo Kato , Masatoshi Ochiai , Tetsuro Endo
发明人： Hirotoshi Iwase , Seizo Kato , Masatoshi Ochiai , Tetsuro Endo
CPC分类号： C23C14/26 , C23C14/243 , Y10T117/10
摘要： An evaporation apparatus comprises an elongated crucible having an upper opening and storing an evaporation material, an electric heater which covers the upper opening of the elongated crucible, generates heat by causing electric current to flow therein for heating the evaporation material stored in the crucible, and has an opening through which the evaporation material which is vaporized by heating can pass through, and a fixing member for pressing and fixing the electric heater onto the elongated crucible. Further, between the fixing member and the electric heater, an angle member having surface portions respectively fitting onto an edge portion of the upper surface and an upper portion of the side surface of the elongated crucible is provided along the longitudinal direction of the elongated crucible. A pressing force from the fixing member is made to exert onto the electric heater via the angle member to bring the electric heater into close contact with the elongated crucible.
摘要翻译： 蒸发装置包括具有上开口并存储蒸发材料的细长坩埚，覆盖细长坩埚的上开口的电加热器，通过使电流流入其中以加热存储在坩埚中的蒸发材料而产生热量，以及 具有通过加热蒸发的蒸发材料可以通过的开口，以及用于将电加热器按压并固定到细长坩埚上的固定构件。 此外，在固定构件和电加热器之间，沿着细长坩埚的长度方向设置有具有分别配合在上表面的边缘部分和细长坩埚的侧表面的上部的表面部分的角部件。 使来自固定部件的按压力经由角部件施加到电加热器上，使电加热器与细长的坩埚紧密接触。
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