摘要:
The invention provides a heat reflecting glass plate with a six-layer coating excellent in optical characteristics and also in durability on a transparent glass plate. The coating consists of (1) a metal oxide film deposited on the glass surface, (2) a metal nitride or oxynitride film deposited on the oxide film, (3) a metal film of Ti, Zr, Ta, Cr, Ni-Cr or stainless steel deposited on the nitride or oxynitride film to a thickness of 30-150 .ANG., (4) a metal nitride or oxynitride film overlying the metal film, (5) a metal oxide film overlying the film (4) and (6) a film of an oxide or oxynitride of Si-Al, Si-Ti or a film of aluminum nitride or oxynitride deposited on the film (5) to a thickness greater than 300 .ANG.. The metal for the oxide films (1) and (5) is Ti, Zr, Ta, Sn or Cr, and the metal for the nitride or oxynitride films (2) and (4) is Ti, Zr, Ta, Cr, Ni-Cr or stainless steel. Each of the oxide films (1) and (5) is 200-1000 .ANG. in thickness, and each of the nitride or oxynitride films (2) and (4) is 300-200 .ANG. in thickness. The heat reflecting glass plate is not lower than 30% in transmittance for visible light, not higher than 60% in transmittance for solar radiation and not higher than 20% in reflectance for visible light.
摘要:
A MEMS oscillator having a feedback-type oscillation circuit including a MEMS resonator and an amplifier, a voltage control unit operable to control a bias voltage applied to an oscillating member of the MEMS resonator, and an auto gain control unit which receives an output from the amplifier and, based on a level of the output, to output an amplitude control signal for controlling a gain of the amplifier to the amplifier such that the level of the output from the amplifier comes to be a predetermined level, wherein the voltage control unit controls the bias voltage applied to the oscillating member based on an operating temperature of the MEMS resonator such that a peak gain of the MEMS resonator comes to have a predetermined value regardless of the operating temperature, and the voltage control unit derives the operating temperature of the MEMS resonator by monitoring the amplitude control signal.
摘要:
An object of the present invention is to provide an electret electrode having an improved surface charge density.An electret electrode 100 is constituted by forming a conductive film 111 on a substrate 102, laminating a first insulating film 112 and a second insulating film alternatively on the conductive film 111, and then disposing electret films 110a to 110d in which a lower surface, an upper surface and a side surface are covered with a third insulating film 114 and a fourth insulating film 115. Existing of the first insulating film 112 and the second insulating film 113 between the electret films 110a to 110d and the conductive film 111 enables an increase in electric field intensity in the film when the same electric charge is retained, while enables an increase in surface charge density (surface potential) when the electric field intensity is the same.
摘要:
Generating efficiency of a vibration power generating device, which generates power by vibration in the biaxial direction, is improved. The vibration power generating device is provided with: a first substrate (101) and a second substrate (106); a first electrode (104) formed on the first substrate; a fixed structural body (103); elastic structural bodies (102X, 102Y) which connect the first substrate and the fixed structural body with each other; and a second electrode (105) formed on the second substrate. Since the overlapping area of the electrodes is increased by arranging rectangular or square conductor parts (104a) of the first electrode and rectangular or square conductor parts (105a) of the second electrode in a checkerboard pattern, a generation region where power is generated by vibration is increased.
摘要:
A piezoelectric filter comprises a substrate and a plurality of piezoelectric resonators provided on the same substrate. Each piezoelectric resonator comprises a cavity formed in the substrate, a lower electrode formed on the substrate, covering the cavity, a piezoelectric material layer formed on the lower electrode, and an upper electrode formed on the piezoelectric material layer. At least one of the piezoelectric resonators has a cavity formed of a plurality of cells.
摘要:
A high frequency filter includes an inductor, a serial resonance circuit including an inductor and capacitors, a serial resonance circuit including an inductor and capacitors, and a varactor diode connected between a connection point between the capacitor and the capacitor and a connection point between the capacitor and the capacitor. A controller simultaneously changes two attenuation pole frequencies of the filter device by changing a capacitance of the varactor diode.
摘要:
A micromachine switch of the present invention is a micromachine switch for switching an electrical connection between signal electrodes in accordance with control signals from outside which include: a first control signal for electrically connecting the signal electrodes between which a signal is to be passed; and a second control signal for disconnecting the electrical connection between the signal electrodes. The micromachine switch comprises: a substrate; a rotating body provided on the substrate, which is rotatable on the substrate; a movable electrode provided on the rotating body; a first signal electrode, one end of which is electrically connected to one end of the movable electrode, and another end of which is provided on the substrate; a second signal electrode which is provided near the rotating body so as to be positioned such that a rotation of the rotating body causes the second signal electrode to be electrically connected to another end of the movable electrode; and a drive section for causing, in accordance with the first control signal, the rotating body to rotate until the rotating body is in such a position as to allow said another end of the movable electrode and the second signal electrode to be electrically connected, and for causing, in accordance with the second control signal, the rotating body to rotate until the rotating body is in such a position as to disconnect an electrical connection between said another end of the movable electrode and the second signal electrode.
摘要:
A first supporting section 30 is provided between a substrate section 40 and a second supporting section 20. The first supporting section 30 is structured by, e.g., a film formed from a material having a higher acoustic impedance than a piezoelectric body 11 and the substrate section 40, or a film formed from a material having a smaller Q value than the piezoelectric body 11 and substrate section 40. By inserting the first supporting section 30, most vibration from the second supporting section 20 toward the substrate section 40 is reflected (arrow a), and also a vibration having been transmitted to the substrate section 40 from the second supporting section 20 is prevented from reflecting at the bottom of the substrate section 40 and then returning in a direction of the vibration section 10 (arrow b).
摘要:
A series piezoelectric resonator 11 is connected in series between an input terminal 15a and an output terminal 15b. A first electrode of a parallel piezoelectric resonator 12a is connected to a connection point between the input terminal 15a and the series piezoelectric resonator 11, and a second electrode of the parallel piezoelectric resonator 12a is connected to a first terminal of an inductor 13a. A first electrode of a parallel piezoelectric resonator 12b is connected to a connection point between the series piezoelectric resonator 11 and the output terminal 15b, and a second electrode of the parallel piezoelectric resonator 12b is connected to a first terminal of an inductor 13b. Second terminals of the inductors 13a and 13b are grounded. An additional piezoelectric resonator 14 is connected between the second electrode of the parallel piezoelectric resonator 12a and the second electrode of the parallel piezoelectric resonator 12b.
摘要:
Three or more piezoelectric resonators having resonance frequencies different from one another are realized on the same substrate. First through third frequency adjustment layers 107a through 107c of first through third piezoelectric resonators 102a through 102c provided on the same substrate 101 are formed by varying, among the frequency adjustment layers, the ratio of area (depressions 109 and 110) to be etched to area not to be etched.