POSITIVE RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
    1.
    发明申请
    POSITIVE RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN 有权
    正电阻组合物和形成电阻图案的方法

    公开(公告)号:US20090068588A1

    公开(公告)日:2009-03-12

    申请号:US11816272

    申请日:2005-12-13

    IPC分类号: G03F7/004 G03F7/20

    摘要: A positive resist composition that includes a resin component (A) that exhibits increased alkali solubility under the action of acid, and an acid generator component (B) that generates acid on exposure to radiation, wherein the component (A) includes a structural unit (a1) represented by a general formula (a1-2) or (a1-4), a structural unit (a2) derived from an acrylate ester that contains a lactone-containing monocyclic or polycyclic group, and a structural unit (a3), which is different from the structural unit (a1) and the structural unit (a2), and is derived from an acrylate ester that contains an aliphatic cyclic group-containing non-acid-dissociable, dissolution-inhibiting group and contains no polar groups, and the component (B) includes an onium salt (B1) having an anion portion represented by a formula: R41—SO3−.

    摘要翻译: 包含在酸作用下表现出增加的碱溶性的树脂组分(A)的阳性抗蚀剂组合物和在暴露于辐射时产生酸的酸产生剂组分(B),其中组分(A)包括结构单元( a1)由(a1-2)或(a1-4)表示的结构单元(a2),由含有内酯单环或多环基团的丙烯酸酯衍生的结构单元(a2)和结构单元(a3) 与结构单元(a1)和结构单元(a2)不同,并且衍生自含有脂族环状基团的非酸解离性,溶解抑制基团且不含极性基团的丙烯酸酯,并且 组分(B)包括具有由式R 41 -SO 3 - 表示的阴离子部分的鎓盐(B1)。

    Positive resist composition and method of forming resist pattern
    2.
    发明授权
    Positive resist composition and method of forming resist pattern 有权
    正型抗蚀剂组合物和形成抗蚀剂图案的方法

    公开(公告)号:US07803512B2

    公开(公告)日:2010-09-28

    申请号:US11816272

    申请日:2005-12-13

    IPC分类号: G03F7/004 G03F7/30

    摘要: A positive resist composition that includes a resin component (A) that exhibits increased alkali solubility under the action of acid, and an acid generator component (B) that generates acid on exposure to radiation, wherein the component (A) includes a structural unit (a1) represented by a general formula (a1-2) or (a1-4), a structural unit (a2) derived from an acrylate ester that contains a lactone-containing monocyclic or polycyclic group, and a structural unit (a3), which is different from the structural unit (a1) and the structural unit (a2), and is derived from an acrylate ester that contains an aliphatic cyclic group-containing non-acid-dissociable, dissolution-inhibiting group and contains no polar groups, and the component (B) includes an onium salt (B1) having an anion portion represented by a formula: R41—SO3−.

    摘要翻译: 包含在酸作用下表现出增加的碱溶性的树脂组分(A)的阳性抗蚀剂组合物和在暴露于辐射时产生酸的酸产生剂组分(B),其中组分(A)包括结构单元( a1)由(a1-2)或(a1-4)表示的结构单元(a2),由含有内酯单环或多环基团的丙烯酸酯衍生的结构单元(a2)和结构单元(a3) 与结构单元(a1)和结构单元(a2)不同,并且衍生自含有脂族环状基团的非酸解离性,溶解抑制基团且不含极性基团的丙烯酸酯,并且 组分(B)包括具有由式R 41 -SO 3 - 表示的阴离子部分的鎓盐(B1)。

    Ventilation fan (ventilation system)
    3.
    发明授权
    Ventilation fan (ventilation system) 失效
    通风风机(通风系统)

    公开(公告)号:US4006672A

    公开(公告)日:1977-02-08

    申请号:US637710

    申请日:1975-12-04

    CPC分类号: F04D25/14 F24F13/20 F24F7/013

    摘要: A ventilation fan (ventilation system) which may be readily installed regardless of the length of a ventilation hole formed through the wall of a building even when the wall is of the double-wall type having an air insulating layer formed between the outer and inner wall members. The members of a duct frame are prefabricated in a factory and assembled at a job site in order to reduce the dimensions of the package, thereby reducing the packing and crating, storage and transportation costs.

    摘要翻译: 通风扇(通风系统)可以容易地安装,而不管通过建筑物的壁形成的通风孔的长度,即使当壁是具有在外壁和内壁之间形成的空气绝缘层的双壁型 会员 管道框架的构件在工厂预制并组装在作业现场,以减小包装的尺寸,从而减少包装和装箱,储存和运输成本。

    Resist composition and method of forming resist pattern
    4.
    发明授权
    Resist composition and method of forming resist pattern 有权
    抗蚀剂图案的抗蚀剂组成和方法

    公开(公告)号:US08354218B2

    公开(公告)日:2013-01-15

    申请号:US12820899

    申请日:2010-06-22

    IPC分类号: G03F7/039 G03F7/30

    摘要: A resist composition that includes a base component (A) that exhibits changed solubility in an alkali developing solution under the action of acid, an acid generator component (B) that generates acid upon exposure, and an epoxy resin (G). Also, a method of forming a resist pattern that includes using the above resist composition to form a resist film on the substrate, conducting exposure of the resist film, and alkali-developing the resist film to form a resist pattern.

    摘要翻译: 一种抗蚀剂组合物,其包含在酸性作用下在碱性显影液中显示出改变的溶解性的基础成分(A),曝光时产生酸的酸产生剂成分(B)和环氧树脂(G)。 另外,形成抗蚀剂图案的方法包括使用上述抗蚀剂组合物在基板上形成抗蚀剂膜,进行抗蚀剂膜的曝光,并对抗蚀剂膜进行碱显影以形成抗蚀图案。

    RESIST PATTERN FORMATION METHOD AND PATTERN MINIATURIZATION AGENT
    6.
    发明申请
    RESIST PATTERN FORMATION METHOD AND PATTERN MINIATURIZATION AGENT 审中-公开
    电阻图案形成方法和图案微型化试剂

    公开(公告)号:US20130089821A1

    公开(公告)日:2013-04-11

    申请号:US13702156

    申请日:2011-05-27

    申请人: Isao Hirano

    发明人: Isao Hirano

    IPC分类号: G03F7/32 G03F7/30

    摘要: A resist pattern formation method that includes a step (1) of forming a resist pattern on a support using a chemically amplified positive-type resist composition, a step (2) of applying a pattern miniaturization agent to the resist pattern, a step (3) of performing a bake treatment of the resist pattern to which the pattern miniaturization agent has been applied, and a step (4) of subjecting the resist pattern that has undergone the bake treatment to alkali developing, wherein the pattern miniaturization agent contains an acid generator component, and an organic solvent that does not dissolve the resist pattern formed in the step (1). Also, a pattern miniaturization agent used in the method.

    摘要翻译: 一种抗蚀剂图形形成方法,包括使用化学放大型正型抗蚀剂组合物在载体上形成抗蚀剂图案的工序(1),将图案微细化剂涂布在抗蚀剂图案上的工序(2),工序 )对已经涂敷图案微细化剂的抗蚀剂图案进行烘烤处理的步骤(4)和经过烘烤处理的抗蚀剂图案进行碱显影的工序(4),其中,图案微细化剂含有酸发生剂 组分和不溶解步骤(1)中形成的抗蚀剂图案的有机溶剂。 此外,该方法中使用的图案小型化剂。

    Box forming equipment
    8.
    发明授权
    Box forming equipment 失效
    箱式成型设备

    公开(公告)号:US5480371A

    公开(公告)日:1996-01-02

    申请号:US156820

    申请日:1993-11-24

    IPC分类号: B31B1/60 B31B5/80

    摘要: A box forming apparatus for folding and securing the bottom flaps of a box including a bottom flap folding mechanism and top pressing mechanism located above the bottom flap folding mechanism for controlling box lifting during a box folding operation. The novel features of the claimed invention allow for controlled guiding of a box frame throughout a folding and sealing operation.

    摘要翻译: 一种箱体形成装置,用于折叠和固定盒的底部折片,包括底部折页折叠机构和位于底部折页折叠机构上方的顶部按压机构,用于在箱子折叠操作期间控制盒子的提升。 要求保护的发明的新颖特征允许在整个折叠和密封操作中控制箱框的引导。

    Surface modifying material, method of forming resist pattern, and method of forming pattern
    10.
    发明授权
    Surface modifying material, method of forming resist pattern, and method of forming pattern 有权
    表面改性材料,形成抗蚀剂图案的方法和形成图案的方法

    公开(公告)号:US08735052B2

    公开(公告)日:2014-05-27

    申请号:US13047404

    申请日:2011-03-14

    IPC分类号: G03F7/30

    CPC分类号: C08F20/28 C08L63/00 G03F7/11

    摘要: A surface modifying material for forming a surface modifying layer provided between a substrate and a resist film, the surface modifying material including an epoxy resin having a weight average molecular weight of 1,000 to 50,000; a method of forming a resist pattern, including: forming a surface modifying layer on a substrate using the surface modifying material, forming a resist film on the substrate, on which the surface modified layer has been formed, using a resist composition, conducting exposure of the resist film, and alkali developing the resist film to form a resist pattern; and a method of forming a pattern, including: etching the substrate, on which a resist pattern has been formed by the method of forming a resist pattern.

    摘要翻译: 一种用于形成表面改性层的表面改性材料,其设置在基材和抗蚀剂膜之间,所述表面改性材料包括重均分子量为1,000至50,000的环氧树脂; 一种形成抗蚀剂图案的方法,包括:使用表面改性材料在基板上形成表面改性层,在其上形成有表面改性层的基板上形成抗蚀剂膜,使用抗蚀剂组合物,进行曝光 抗蚀剂膜和碱显影抗蚀剂膜以形成抗蚀剂图案; 以及形成图案的方法,包括:通过形成抗蚀剂图案的方法蚀刻已经形成抗蚀剂图案的基板。