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公开(公告)号：US08885684B2
公开(公告)日：2014-11-11
申请号：US14123903
申请日：2011-06-20
CPC分类号： H01S3/041 , H01S3/03 , H01S3/036 , H01S3/076 , H01S3/081 , H01S3/0816 , H01S3/0971 , H01S3/2232
摘要： A CO2 gas laser device according to the present invention amplifies CO2 laser light that oscillates repeatedly in short pulses having a pulse width of 100 ns or less, and cools a CO2 laser gas which is excited by continuous discharge by circulating the CO2 laser gas by means of forced convection. Therein, an angle θ defined by the optical axis of the amplified CO2 laser beam and the flow direction of the CO2 laser gas caused by the forced convection is determined by both a discharge cross sectional area and a discharge length of a volume in which the CO2 laser gas is excited by discharge, whereby increasing the gain of pulsed laser to achieve pulsed laser light having an extremely high average output power.
摘要翻译： 根据本发明的二氧化碳气体激光装置放大以脉冲宽度为100ns以下的短脉冲重复振荡的CO 2激光，并通过循环CO 2激光气体的方式冷却通过连续放电而激发的CO 2激光气体 的强制对流。 其中，角度和角度; 由放大的CO 2激光束的光轴限定，并且由强制对流引起的CO 2激光气体的流动方向由放电截面积和其中激发CO 2激光气体的体积的放电长度 从而增加脉冲激光器的增益以实现具有极高平均输出功率的脉冲激光。
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2.发明授权Gas discharge laser oscillator and gas discharge laser amplifier providing linearly polarized light 有权气体放电激光振荡器和气体放电激光放大器提供线性偏振光公开(公告)号：US08958453B2
公开(公告)日：2015-02-17
申请号：US13496892
申请日：2010-09-17
CPC分类号： H01S3/0385 , H01S3/08036 , H01S3/08054 , H01S3/081
摘要： A laser oscillator includes: a optical resonator having an orthogonal mirror and a partial reflection mirror; a laser gas acting as a laser medium; and a 90-degree folding mirror acting as a polarization selecting element. The orthogonal mirror has two reflecting surfaces orthogonal to each other. The 90-degree folding mirror is arranged such that the polarization direction of the laser oscillated light is parallel to the reference axis set in a plane perpendicular to an optical axis of the optical resonator. The orthogonal mirror is arranged such that the polarization direction of the laser oscillated light is parallel to the valley line of the orthogonal mirror. This configuration can compensate anisotropy of optical characteristics in a laser medium, and stably generate linearly polarized laser light having excellent isotropy in a simple manner.
摘要翻译： 激光振荡器包括：具有正交反射镜和部分反射镜的光学谐振器; 作为激光介质的激光气体; 以及用作偏振选择元件的90度折叠镜。 正交反射镜具有彼此正交的两个反射表面。 90度折射镜被配置为使得激光振荡光的偏振方向平行于垂直于光学谐振器的光轴的平面中的参考轴。 正交反射镜被布置成使得激光振荡的光的偏振方向平行于正交反射镜的谷线。 这种构造可以补偿激光介质中的光学特性的各向异性，并且以简单的方式稳定地产生具有优异各向同性的线偏振激光。
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公开(公告)号：US20140112362A1
公开(公告)日：2014-04-24
申请号：US14123903
申请日：2011-06-20
IPC分类号： H01S3/041
CPC分类号： H01S3/041 , H01S3/03 , H01S3/036 , H01S3/076 , H01S3/081 , H01S3/0816 , H01S3/0971 , H01S3/2232
摘要： A CO2 gas laser device according to the present invention amplifies CO2 laser light that oscillates repeatedly in short pulses having a pulse width of 100 ns or less, and cools a CO2 laser gas which is excited by continuous discharge by circulating the CO2 laser gas by means of forced convection. Therein, an angle θ defined by the optical axis of the amplified CO2 laser beam and the flow direction of the CO2 laser gas caused by the forced convection is determined by both a discharge cross sectional area and a discharge length of a volume in which the CO2 laser gas is excited by discharge, whereby increasing the gain of pulsed laser to achieve pulsed laser light having an extremely high average output power.
摘要翻译： 根据本发明的二氧化碳气体激光装置放大以脉冲宽度为100ns以下的短脉冲重复振荡的CO 2激光，并通过循环CO 2激光气体的方式冷却通过连续放电而激发的CO 2激光气体 的强制对流。 其中，角度和角度; 由放大的CO 2激光束的光轴限定，并且由强制对流引起的CO 2激光气体的流动方向由放电截面积和其中激发CO 2激光气体的体积的放电长度 从而增加脉冲激光器的增益以实现具有极高平均输出功率的脉冲激光。
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公开(公告)号：US20120182604A1
公开(公告)日：2012-07-19
申请号：US13496892
申请日：2010-09-17
CPC分类号： H01S3/0385 , H01S3/08036 , H01S3/08054 , H01S3/081
摘要： A laser oscillator includes: a optical resonator having an orthogonal mirror and a partial reflection mirror; a laser gas acting as a laser medium; and a 90-degree folding mirror acting as a polarization selecting element. The orthogonal mirror has two reflecting surfaces orthogonal to each other. The 90-degree folding mirror is arranged such that the polarization direction of the laser oscillated light is parallel to the reference axis set in a plane perpendicular to an optical axis of the optical resonator. The orthogonal mirror is arranged such that the polarization direction of the laser oscillated light is parallel to the valley line of the orthogonal mirror. This configuration can compensate anisotropy of optical characteristics in a laser medium, and stably generate linearly polarized laser light having excellent isotropy in a simple manner.
摘要翻译： 激光振荡器包括：具有正交反射镜和部分反射镜的光学谐振器; 作为激光介质的激光气体; 以及用作偏振选择元件的90度折叠镜。 正交反射镜具有彼此正交的两个反射表面。 90度折射镜被配置为使得激光振荡光的偏振方向平行于垂直于光学谐振器的光轴的平面中的参考轴。 正交反射镜被布置成使得激光振荡的光的偏振方向平行于正交反射镜的谷线。 这种构造可以补偿激光介质中的光学特性的各向异性，并且以简单的方式稳定地产生具有优异各向同性的线偏振激光。
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公开(公告)号：US08873599B2
公开(公告)日：2014-10-28
申请号：US13824432
申请日：2011-08-26
CPC分类号： H01S3/038 , H01S3/036 , H01S3/2232 , H01S2301/203
摘要： A tri-axially orthogonal gas laser device in which an optical axis of an optical resonator, a direction in which a laser gas is supplied into the optical resonator, and a direction of discharge for exciting the laser gas are mutually orthogonal to one another, the device including: an exciting unit including a blower supplying the laser gas in −X direction to the optical axis of the optical resonator, and a discharge electrode pair which is shifted on a gas upstream side with respect to the optical axis; and an exciting unit including a blower for supplying the laser gas in +X direction to the optical axis of the optical resonator, and a discharge electrode pair which is shifted on a gas upstream side with respect to the optical axis
摘要翻译： 将光谐振器的光轴，向光谐振器供给激光气体的方向以及使激光气体激发的方向相互正交的三轴正交气体激光装置相互正交， 该装置包括：激励单元，其包括向所述光学谐振器的光轴向-X方向供给激光气体的鼓风机;以及在相对于所述光轴的气体上游侧移动的放电电极对; 以及激励单元，其包括用于将激光气体沿+ X方向供给到光谐振器的光轴的鼓风机，以及在相对于光轴的气体上游侧移动的放电电极对
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公开(公告)号：US20130341309A1
公开(公告)日：2013-12-26
申请号：US14003678
申请日：2012-03-13
IPC分类号： B23K26/00
CPC分类号： B23K26/00 , B23K26/046 , B23K26/0643 , B23K26/0665 , B23K26/707
摘要： A laser machining apparatus, including: a laser light source; a transparent member that is set on an optical path of a laser beam and transmits the laser beam; a contact type temperature difference sensor, set on a surface of the transparent member outside an irradiation range of the laser beam, for detecting a temperature difference between a surface of the transparent member, which is spaced apart from a center of the transparent member by a first distance, and another surface of the transparent member, which is spaced apart from the center of the transparent member by a second distance larger than the first distance; and a controller correcting a focal position based on the temperature difference detected by the contact type temperature difference sensor to stabilize a beam diameter of the laser beam condensed onto a machining object.
摘要翻译： 一种激光加工装置，包括：激光光源; 透明构件，其被设置在激光束的光路上并透射激光束; 接触式温度差传感器，设置在所述透明构件的表面上，位于所述激光束的照射范围之外，用于检测所述透明构件的与所述透明构件的中心间隔开的表面之间的温度差 第一距离和透明构件的另一个表面，其与透明构件的中心距离大于第一距离的第二距离; 以及控制器，基于由接触型温度差传感器检测的温度差校正焦点位置，以稳定在加工对象物上聚光的激光束的光束直径。
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公开(公告)号：US20130235894A1
公开(公告)日：2013-09-12
申请号：US13824432
申请日：2011-08-26
IPC分类号： H01S3/038
CPC分类号： H01S3/038 , H01S3/036 , H01S3/2232 , H01S2301/203
摘要： A tri-axially orthogonal gas laser device in which an optical axis of an optical resonator, a direction in which a laser gas is supplied into the optical resonator, and a direction of discharge for exciting the laser gas are mutually orthogonal to one another, the device including: an exciting unit including a blower supplying the laser gas in −X direction to the optical axis of the optical resonator, and a discharge electrode pair which is shifted on a gas upstream side with respect to the optical axis; and an exciting unit including a blower for supplying the laser gas in +X direction to the optical axis of the optical resonator, and a discharge electrode pair which is shifted on a gas upstream side with respect to the optical axis
摘要翻译： 将光谐振器的光轴，向光谐振器供给激光气体的方向以及使激光气体激发的方向相互正交的三轴正交气体激光装置相互正交， 该装置包括：激励单元，其包括向所述光学谐振器的光轴向-X方向供给激光气体的鼓风机;以及在相对于所述光轴的气体上游侧移动的放电电极对; 以及激励单元，其包括用于将激光气体沿+ X方向供给到光谐振器的光轴的鼓风机，以及在相对于光轴的气体上游侧移动的放电电极对
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公开(公告)号：US09289850B2
公开(公告)日：2016-03-22
申请号：US14003678
申请日：2012-03-13
IPC分类号： B23K26/046 , B23K26/064 , B23K26/70 , B23K26/00 , B23K26/04 , B23K26/06
CPC分类号： B23K26/00 , B23K26/046 , B23K26/0643 , B23K26/0665 , B23K26/707
摘要： A laser machining apparatus, including: a laser light source; a transparent member that is set on an optical path of a laser beam and transmits the laser beam; a contact type temperature difference sensor, set on a surface of the transparent member outside an irradiation range of the laser beam, for detecting a temperature difference between a surface of the transparent member, which is spaced apart from a center of the transparent member by a first distance, and another surface of the transparent member, which is spaced apart from the center of the transparent member by a second distance larger than the first distance; and a controller correcting a focal position based on the temperature difference detected by the contact type temperature difference sensor to stabilize a beam diameter of the laser beam condensed onto a machining object.
摘要翻译： 一种激光加工装置，包括：激光光源; 透明构件，其被设置在激光束的光路上并透射激光束; 接触式温度差传感器，设置在所述透明构件的表面上，位于所述激光束的照射范围之外，用于检测所述透明构件的与所述透明构件的中心间隔开的表面之间的温度差 第一距离和透明构件的另一个表面，其与透明构件的中心距离大于第一距离的第二距离; 以及控制器，基于由接触型温度差传感器检测的温度差校正焦点位置，以稳定在加工对象物上聚光的激光束的光束直径。
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公开(公告)号：US06414749B1
公开(公告)日：2002-07-02
申请号：US09459925
申请日：1999-12-14
申请人： Tatsuki Okamoto , Yukio Sato , Junichi Nishimae , Hiroyuki Kawano
发明人： Tatsuki Okamoto , Yukio Sato , Junichi Nishimae , Hiroyuki Kawano
IPC分类号： G06K974
CPC分类号： G06K9/00046
摘要： An uneven-pattern reading apparatus includes a detecting prism having a detecting surface on which an uneven pattern is placed, an incident surface upon which an incident light beam for illuminating the uneven pattern is incident, and an emergent surface from which a light beam reflected from the uneven pattern on the detecting surface is emergent, angles between the respective detecting, incident, and emergent surfaces providing that the incident light beam is applied to the uneven pattern and the light reflected from the detecting surface is emergent from the emergent surface; an incident-light-beam converger for causing an incident light beam from a light source to be incident upon the incident surface after collimating or converging the incident light beam; an imaging device for detecting a reflected image emergent from the detecting prism; a converging optical system for collimating or converging the emergent light beam emergent from the emergent surface; and a processing device for identifying the uneven pattern on the basis of the image picked up by the imaging device, wherein an imaging surface of the imaging device is located closer to an emergent surface side than a focusing position of the converging optical system.
摘要翻译： 不均匀图案读取装置包括：检测棱镜，其具有设置有不平坦图案的检测面，入射面，用于照射不均匀图案的入射光束入射的入射面;以及出射表面， 检测表面上的不均匀图案出现，使得入射光束被施加到不均匀图案并且从检测表面反射的光的各个检测入射和出射表面之间的角度从出射表面出射; 用于使来自光源的入射光束在入射光束准直或会聚之后入射到入射面上的入射光束会聚; 用于检测从所述检测棱镜出射的反射图像的成像装置; 用于使出射光束从出射表面出射的准直或会聚的会聚光学系统; 以及处理装置，用于基于由成像装置拾取的图像来识别不均匀图案，其中，成像装置的成像表面位于比会聚光学系统的聚焦位置更靠近出射表面侧。
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公开(公告)号：US5144199A
公开(公告)日：1992-09-01
申请号：US637636
申请日：1991-01-04
申请人： Masakazu Taki , Kenji Yoshizawa , Junichi Nishimae
发明人： Masakazu Taki , Kenji Yoshizawa , Junichi Nishimae
CPC分类号： H01J65/044 , C23C16/482
摘要： A microwave discharge light source device in which one side of a discharge space in which a plasma emission takes place is defined by a transparent dielectric member. A transparent microwave reflecting member is disposed in a position such as to face the discharge space through the dielectric member. A microwave having an electric field component in the direction of thickness of the dielectric member is introduced into the dielectric member through the coupling at an end surface of the dielectric member so that a microwave electric field is formed in the discharge space, and so that the plasma emission medium emits light by electric discharge. The light thus emitted is extracted through the transparent microwave reflecting member.
摘要翻译： 其中发生等离子体发射的放电空间的一侧由透明电介质构件限定的微波放电光源装置。 透明微波反射部件设置在通过电介质部件与放电空间相对的位置。 具有电介质部件厚度方向的电场成分的微波通过电介质部件的端面的耦合引入电介质部件，使得在放电空间内形成微波电场， 等离子体发射介质通过放电发光。 通过透明微波反射部件提取发出的光。
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