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公开(公告)号:US09793472B2
公开(公告)日:2017-10-17
申请号:US15179971
申请日:2016-06-10
申请人: Yong-Seok Chung , Yoonjong Song , Yongkyu Lee , Gwanhyeob Koh
发明人: Yong-Seok Chung , Yoonjong Song , Yongkyu Lee , Gwanhyeob Koh
IPC分类号: H01L21/302 , H01L43/12 , H01L21/266 , H01L21/027
CPC分类号: H01L43/12 , H01L21/0273 , H01L21/266 , H01L27/228
摘要: The inventive concepts provide a method for forming a hard mask pattern. The method includes forming a hard mask layer on an etch target layer disposed on a substrate, forming a photoresist pattern having an opening exposing one region of the hard mask layer, performing an oxygen ion implantation process on the one region using the photoresist pattern as a mask to form an oxidized portion in the one region, and patterning the hard mask layer using the oxidized portion as an etch mask.
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公开(公告)号:US09711716B2
公开(公告)日:2017-07-18
申请号:US15246519
申请日:2016-08-24
申请人: Myoungsu Son , Kiseok Suh , Gwanhyeob Koh , KyungTae Nam , Yoonjong Song
发明人: Myoungsu Son , Kiseok Suh , Gwanhyeob Koh , KyungTae Nam , Yoonjong Song
CPC分类号: H01L43/12 , H01L27/224 , H01L27/228 , H01L43/02 , H01L43/08
摘要: A magnetic memory device and a method for manufacturing the magnetic memory device are disclosed. The method includes forming a first interlayer insulating layer on a substrate, forming a first conductive pattern that penetrates the first interlayer insulating layer, forming a mold insulating layer that includes first and second mold insulating layers on the first interlayer insulating layer, forming a second conductive pattern that penetrates the first and second mold insulating layers and the first interlayer insulating layer, and forming a magnetic tunnel junction pattern on the second conductive pattern. The first mold insulating layer is in contact with the first conductive pattern, and the second mold insulating layer is disposed on the first mold insulating layer.
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公开(公告)号:US10164170B2
公开(公告)日:2018-12-25
申请号:US15622064
申请日:2017-06-13
申请人: Kiseok Suh , Byoungjae Bae , Gwanhyeob Koh , Yoonjong Song , Kilho Lee
发明人: Kiseok Suh , Byoungjae Bae , Gwanhyeob Koh , Yoonjong Song , Kilho Lee
摘要: A first lower interconnection structure and a second lower interconnection structure are formed using a first design rule on a first region of a substrate and a second region of the substrate, respectively. A memory element is formed on the first lower interconnection structure. The memory element includes a bottom electrode, a magnetic tunnel junction and a top electrode stacked on each other. An upper conductive line and an upper interconnection line are formed using a second design rule larger than the first design rule on the first lower interconnection structure and the second lower interconnection structure, respectively. The first lower interconnection structure, the memory element and the upper conductive line are stacked on each other so that the memory element is interposed between the first lower interconnection structure and the upper conductive line.
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公开(公告)号:US09911787B2
公开(公告)日:2018-03-06
申请号:US15187929
申请日:2016-06-21
申请人: Kiseok Suh , Gwanhyeob Koh , Yoonjong Song
发明人: Kiseok Suh , Gwanhyeob Koh , Yoonjong Song
CPC分类号: H01L27/228 , H01L28/00 , H01L43/02 , H01L43/08 , H01L43/12
摘要: A semiconductor device includes an active region defining an isolation region. First and second cell interconnection structures are on the active region and the isolation region, and have line shapes that are parallel to each other. An isolation pattern is on the active region and the isolation region. The isolation pattern is between the first and second cell interconnection structures. Contact structures are between the first and second cell interconnection structures. The contact structures are at both sides of the isolation pattern and overlap the active region. Insulating patterns are between the first and second cell interconnection structures. The insulating patterns are at both sides of the isolation pattern and overlap the isolation region. Common source regions are under the first and second cell interconnection structures. The common source regions are in the active region. An isolating gate pattern that has a line shape is under the isolation pattern.
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公开(公告)号:US20170110507A1
公开(公告)日:2017-04-20
申请号:US15187929
申请日:2016-06-21
申请人: Kiseok SUH , Gwanhyeob Koh , Yoonjong Song
发明人: Kiseok SUH , Gwanhyeob Koh , Yoonjong Song
CPC分类号: H01L27/228 , H01L28/00 , H01L43/02 , H01L43/08 , H01L43/12
摘要: A semiconductor device includes an active region defining an isolation region. First and second cell interconnection structures are on the active region and the isolation region, and have line shapes that are parallel to each other. An isolation pattern is on the active region and the isolation region. The isolation pattern is between the first and second cell interconnection structures. Contact structures are between the first and second cell interconnection structures. The contact structures are at both sides of the isolation pattern and overlap the active region. Insulating patterns are between the first and second cell interconnection structures. The insulating patterns are at both sides of the isolation pattern and overlap the isolation region. Common source regions are under the first and second cell interconnection structures. The common source regions are in the active region. An isolating gate pattern that has a line shape is under the isolation pattern.
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公开(公告)号:US09691816B2
公开(公告)日:2017-06-27
申请号:US14964251
申请日:2015-12-09
申请人: Shinhee Han , Kilho Lee , Yoonjong Song
发明人: Shinhee Han , Kilho Lee , Yoonjong Song
CPC分类号: H01L43/02 , G11C11/161 , H01L27/222 , H01L27/224 , H01L27/226 , H01L43/08 , H01L43/12
摘要: Magnetic memory devices are provided. A magnetic memory device includes a Magnetic Tunnel Junction (MTJ) structure on a contact. Moreover, the magnetic memory device includes an insulating structure and an electrode between the MTJ structure and the contact. In some embodiments, a first contact area of the electrode with the MTJ structure is smaller than a second contact area of the insulating structure with the MTJ structure.
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公开(公告)号:US20170125666A1
公开(公告)日:2017-05-04
申请号:US15404325
申请日:2017-01-12
申请人: Shinhee Han , Kilho Lee , Yoonjong Song
发明人: Shinhee Han , Kilho Lee , Yoonjong Song
CPC分类号: H01L43/02 , G11C11/161 , H01L27/222 , H01L27/224 , H01L27/226 , H01L43/08 , H01L43/12
摘要: Magnetic memory devices are provided. A magnetic memory device includes a Magnetic Tunnel Junction (MTJ) structure on a contact. Moreover, the magnetic memory device includes an insulating structure and an electrode between the MTJ structure and the contact. In some embodiments, a first contact area of the electrode with the MTJ structure is smaller than a second contact area of the insulating structure with the MTJ structure.
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公开(公告)号:US20160218145A1
公开(公告)日:2016-07-28
申请号:US14964251
申请日:2015-12-09
申请人: Shinhee Han , Kilho Lee , Yoonjong Song
发明人: Shinhee Han , Kilho Lee , Yoonjong Song
CPC分类号: H01L43/02 , G11C11/161 , H01L27/222 , H01L27/224 , H01L27/226 , H01L43/08 , H01L43/12
摘要: Magnetic memory devices are provided. A magnetic memory device includes a Magnetic Tunnel Junction (MTJ) structure on a contact. Moreover, the magnetic memory device includes an insulating structure and an electrode between the MTJ structure and the contact. In some embodiments, a first contact area of the electrode with the MTJ structure is smaller than a second contact area of the insulating structure with the MTJ structure.
摘要翻译: 提供磁存储器件。 磁存储器件包括在触点上的磁隧道结(MTJ)结构。 此外,磁存储器件包括绝缘结构和MTJ结构与触点之间的电极。 在一些实施例中,具有MTJ结构的电极的第一接触面积小于具有MTJ结构的绝缘结构的第二接触面积。
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公开(公告)号:US09954164B2
公开(公告)日:2018-04-24
申请号:US15588776
申请日:2017-05-08
申请人: Daeeun Jeong , Yoonjong Song
发明人: Daeeun Jeong , Yoonjong Song
摘要: Disclosed is a method for manufacturing a magnetic memory device. The method for manufacturing a magnetic memory device comprises sequentially forming a first magnetic layer, a tunnel barrier layer, and a second magnetic layer on a substrate, forming a boron absorption layer on the second magnetic layer, sequentially forming a metal capping layer and an oxygen donor layer on the boron absorption layer, and performing a heat treatment process to diffuse at least a portion of oxygen atoms included in the oxygen donor layer into the metal capping layer and the boron absorption layer. The metal capping layer has a greater oxygen diffusivity than the oxygen donor layer.
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公开(公告)号:US20180006215A1
公开(公告)日:2018-01-04
申请号:US15588776
申请日:2017-05-08
申请人: Daeeun Jeong , Yoonjong Song
发明人: Daeeun Jeong , Yoonjong Song
摘要: Disclosed is a method for manufacturing a magnetic memory device. The method for manufacturing a magnetic memory device comprises sequentially forming a first magnetic layer, a tunnel barrier layer, and a second magnetic layer on a substrate, forming a boron absorption layer on the second magnetic layer, sequentially forming a metal capping layer and an oxygen donor layer on the boron absorption layer, and performing a heat treatment process to diffuse at least a portion of oxygen atoms included in the oxygen donor layer into the metal capping layer and the boron absorption layer. The metal capping layer has a greater oxygen diffusivity than the oxygen donor layer.
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