公开(公告)号：US09046549B2

公开(公告)日：2015-06-02

申请号：US13710718

申请日：2012-12-11

申请人： Yoshihiro Higashi ,  Michiko Hara ,  Hideaki Fukuzawa ,  Yoshihiko Fuji ,  Hiromi Yuasa ,  Tomohiko Nagata

发明人： Yoshihiro Higashi ,  Michiko Hara ,  Hideaki Fukuzawa ,  Yoshihiko Fuji ,  Hiromi Yuasa ,  Tomohiko Nagata

IPC分类号： G01R3/00 ,  G01L9/16 ,  G01L1/12 ,  G01L9/00 ,  A61B5/021

CPC分类号： G01R3/00 ,  A61B5/02141 ,  A61B2562/0247 ,  G01L1/125 ,  G01L9/0048 ,  G01L9/16 ,  Y10T29/49007

摘要： According to one embodiment, a method for manufacturing a pressure sensing device includes preparing a sensor unit and a mounting substrate. The sensor unit includes: a membrane body; and an element unit provided on the membrane body. The element unit includes: a first electrode; a second electrode; and a first magnetic layer provided between the first electrode and the second electrode and having magnetization in a first direction. The mounting substrate includes: a base; a first electrode pad provided on the base; and a second electrode pad provided on the base and provided apart from the first electrode pad. The method further includes joining the first electrode pad to the first electrode while heated, and joining the second electrode pad to the second electrode while heated, with an external magnetic field along the first direction applied to the sensor unit.

摘要翻译： 根据一个实施例，用于制造压力感测装置的方法包括制备传感器单元和安装基板。 传感器单元包括：膜体; 以及设置在膜体上的元件单元。 元件单元包括：第一电极; 第二电极; 以及设置在第一电极和第二电极之间并且在第一方向上具有磁化的第一磁性层。 安装基板包括：基座; 设置在基座上的第一电极焊盘; 以及设置在基座上并与第一电极焊盘分开设置的第二电极焊盘。 该方法还包括在加热时将第一电极焊盘接合到第一电极，并且在加热时将第二电极焊盘接合到第二电极，沿着施加到传感器单元的第一方向的外部磁场。

公开(公告)号：US20130255069A1

公开(公告)日：2013-10-03

申请号：US13710718

申请日：2012-12-11

申请人： Yoshihiro HIGASHI ,  Michiko Hara ,  Hideaki Fukuzawa ,  Yoshihiko Fuji ,  Hiromi Yuasa ,  Tomohiko Nagata

发明人： Yoshihiro HIGASHI ,  Michiko Hara ,  Hideaki Fukuzawa ,  Yoshihiko Fuji ,  Hiromi Yuasa ,  Tomohiko Nagata

IPC分类号： G01R3/00

CPC分类号： G01R3/00 ,  A61B5/02141 ,  A61B2562/0247 ,  G01L1/125 ,  G01L9/0048 ,  G01L9/16 ,  Y10T29/49007

摘要： According to one embodiment, a method for manufacturing a pressure sensing device includes preparing a sensor unit and a mounting substrate. The sensor unit includes: a membrane body; and an element unit provided on the membrane body. The element unit includes: a first electrode; a second electrode; and a first magnetic layer provided between the first electrode and the second electrode and having magnetization in a first direction. The mounting substrate includes: a base; a first electrode pad provided on the base; and a second electrode pad provided on the base and provided apart from the first electrode pad. The method further includes joining the first electrode pad to the first electrode while heated, and joining the second electrode pad to the second electrode while heated, with an external magnetic field along the first direction applied to the sensor unit.

摘要翻译： 根据一个实施例，用于制造压力感测装置的方法包括制备传感器单元和安装基板。 传感器单元包括：膜体; 以及设置在膜体上的元件单元。 元件单元包括：第一电极; 第二电极; 以及设置在第一电极和第二电极之间并且在第一方向上具有磁化的第一磁性层。 安装基板包括：基座; 设置在基座上的第一电极焊盘; 以及设置在基座上并与第一电极焊盘分开设置的第二电极焊盘。 该方法还包括在加热时将第一电极焊盘接合到第一电极，并且在加热时将第二电极焊盘接合到第二电极，沿着施加到传感器单元的第一方向的外部磁场。

公开(公告)号：US6108167A

公开(公告)日：2000-08-22

申请号：US150926

申请日：1998-09-10

申请人： Kohichi Tateyama ,  Hiroaki Yoda ,  Tadahiko Kobayashi ,  Hiromi Sakata ,  Michiko Hara ,  Akio Hori ,  Takashi Koizumi ,  Tomohiko Nagata

发明人： Kohichi Tateyama ,  Hiroaki Yoda ,  Tadahiko Kobayashi ,  Hiromi Sakata ,  Michiko Hara ,  Akio Hori ,  Takashi Koizumi ,  Tomohiko Nagata

IPC分类号： G11B5/31 ,  G11B5/39 ,  G11B5/187

CPC分类号： G11B5/3109 ,  G11B5/3146 ,  G11B5/3153 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3967

摘要： At least one magnetic pole out of a pair of magnetic poles is provided with a T-shaped magnetic pole having a magnetic pole chip at the position contacting with a magnetic gap and an auxiliary magnetic pole which is wider than thereof. The proximity of an air bearing surface of the T-shaped magnetic pole is composed of a laminated film containing a magnetic material layer with a high saturated magnetic flux density which composes the magnetic pole chip and a portion of the auxiliary magnetic pole and a magnetic material layer with a low saturated magnetic flux density which composes the remaining portion of the auxiliary magnetic pole. When the front portion of the magnetic pole with the track width of 1.8 .mu.m or less is composed of a laminated film containing a magnetic material layer having a high saturated magnetic flux density and a magnetic material layer having a low saturated magnetic flux density, the thickness of the magnetic material layer having the high saturated magnetic flux density is 0.5 .mu.m or more. According to the above described magnetic pole, the magnetic saturation near the tip portion of the magnetic pole is controlled, so that preferable magnetic field strength and magnetic field gradient can be attained when the track width is narrowed.

摘要翻译： 在一对磁极中的至少一个磁极设置有在与磁隙接触的位置处具有磁极片的T形磁极和比其宽的辅助磁极。 T形磁极的空气轴承表面的接近度由包含构成磁极片和辅助磁极的一部分的磁性材料层和具有高饱和磁通密度的磁性材料层的叠层膜构成， 具有构成辅助磁极的剩余部分的低饱和磁通密度的层。 当轨道宽度为1.8μm或更小的磁极的前部由包含具有高饱和磁通密度的磁性材料层和具有低饱和磁通密度的磁性材料层的层叠膜构成时， 具有高饱和磁通密度的磁性材料层的厚度为0.5μm以上。 根据上述磁极，控制磁极尖端部附近的磁饱和，从而当磁道宽度变窄时可以获得优选的磁场强度和磁场梯度。

公开(公告)号：US06751846B2

公开(公告)日：2004-06-22

申请号：US10401869

申请日：2003-03-31

申请人： Susumu Hashimoto ,  Michiko Hara ,  Tomohiko Nagata ,  Kohichi Tateyama ,  Masatoshi Yoshikawa ,  Takeo Sakakubo ,  Hiroaki Yoda ,  Akio Hori ,  Takashi Koizumi

发明人： Susumu Hashimoto ,  Michiko Hara ,  Tomohiko Nagata ,  Kohichi Tateyama ,  Masatoshi Yoshikawa ,  Takeo Sakakubo ,  Hiroaki Yoda ,  Akio Hori ,  Takashi Koizumi

IPC分类号： G11B5127

CPC分类号： G11B5/313 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3967 ,  Y10T29/49044

摘要： A method for manufacturing a magnetic head which includes a lower write pole having a projection, an upper write pole having a projection opposed to the projection of the lower write pole, and a magnetic gap interposed between the projection of the upper write pole and the projection of the lower write pole, comprising: a first step of making the magnetic gap on the projection of the lower write pole; a second step of making a non-magnetic material layer on the lower write pole, the non-magnetic material layer having a projection on its top surface in positional alignment with the projection of the lower write pole; a third step of making a mask layer on the non-magnetic material layer, the mask layer having an opening in which the top surface of the projection of the non-magnetic material layer is exposed; a fourth step of making a curved recess in the non-magnetic material layer by isotropically etching the non-magnetic material layer through the opening of the mask layer; a fifth step of making an approximately tapered recess down from the bottom of the curved recess by anisotropically etching the non-magnetic material layer through the opening of the mask layer; and a sixth step of making the upper write pole by burying a magnetic material in the tapered recess and the curved recess is provided.

摘要翻译： 一种用于制造磁头的方法，该磁头包括具有突出部的下部写入极，具有与下部写入磁极的突起相对的突出部的上部写入磁极，以及插入在上部写入磁极和突起之间的磁隙 包括：使下部写入极的投影上的磁隙形成的第一步骤; 在下写入磁极上制作非磁性材料层的第二步骤，非磁性材料层在其顶表面上具有与下写入磁极的突起位置对准的突起; 在非磁性材料层上形成掩模层的第三步骤，所述掩模层具有露出所述非磁性材料层的突起的顶表面的开口; 通过所述掩模层的开口对所述非磁性材料层进行各向同性蚀刻来制造所述非磁性材料层中的弯曲凹部的第四工序; 第五步骤，通过通过掩模层的开口各向异性蚀刻非磁性材料层，从弯曲凹槽的底部向下形成大致锥形的凹陷; 并且提供通过将磁性材料埋入锥形凹部和弯曲凹部中来制造上部写入极的第六步骤。

公开(公告)号：US06564445B1

公开(公告)日：2003-05-20

申请号：US09536743

申请日：2000-03-28

申请人： Susumu Hashimoto ,  Michiko Hara ,  Tomohiko Nagata ,  Kohichi Tateyama ,  Masatoshi Yoshikawa ,  Takeo Sakakubo ,  Hiroaki Yoda ,  Akio Hori ,  Takashi Koizumi

发明人： Susumu Hashimoto ,  Michiko Hara ,  Tomohiko Nagata ,  Kohichi Tateyama ,  Masatoshi Yoshikawa ,  Takeo Sakakubo ,  Hiroaki Yoda ,  Akio Hori ,  Takashi Koizumi

IPC分类号： G11B5127

CPC分类号： G11B5/313 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3967 ,  Y10T29/49044

摘要： A method for manufacturing a magnetic head which includes a lower write pole having a projection, an upper write pole having a projection opposed to the projection of the lower write pole, and a magnetic gap interposed between the projection of the upper write pole and the projection of the upper write pole, comprising: a first step of making the magnetic gap on the projection of the lower write pole; a second step of making a non-magnetic material layer on the lower write pole, the non-magnetic material layer having a projection on its top surface in positional alignment with the projection of the lower write pole; a third step of making a mask layer on the non-magnetic material layer, the mask layer having an opening in which the top surface of the projection of the non-magnetic material layer is exposed; a fourth step of making a curved recess in the non-magnetic material layer by isotropically etching the non-magnetic material layer through the opening of the mask layer; a fifth step of making an approximately tapered recess down from the bottom of the curved recess by anisotropically etching the non-magnetic material layer through the opening of the mask layer; and a sixth step of making the upper write pole by burying a magnetic material in the tapered recess and the curved recess is provided.

公开(公告)号：US06304415B1

公开(公告)日：2001-10-16

申请号：US09615783

申请日：2000-07-13

申请人： Kohichi Tateyama ,  Hiroaki Yoda ,  Tadahiko Kobayashi ,  Hiromi Sakata ,  Michiko Hara ,  Akio Hori ,  Takashi Koizumi ,  Tomohiko Nagata

发明人： Kohichi Tateyama ,  Hiroaki Yoda ,  Tadahiko Kobayashi ,  Hiromi Sakata ,  Michiko Hara ,  Akio Hori ,  Takashi Koizumi ,  Tomohiko Nagata

IPC分类号： G11B531

CPC分类号： G11B5/3109 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/3153 ,  G11B5/3163 ,  G11B5/3967

摘要： At least one magnetic pole out of a pair of magnetic poles is provided with a T-shaped magnetic pole having a magnetic pole chip at the position contacting with a magnetic gap and an auxiliary magnetic pole which is wider than thereof. The proximity of an air bearing surface of the T-shaped magnetic pole is composed of a laminated film containing a magnetic material layer with a high saturated magnetic flux density which composes the magnetic pole chip and a portion of the auxiliary magnetic pole and a magnetic material layer with a low saturated magnetic flux density which composes the remaining portion of the auxiliary magnetic pole. When the front portion of the magnetic pole with the track width of 1.8 &mgr;m or less is composed of a laminated film containing a magnetic material layer having a high saturated magnetic flux density and a magnetic material layer having a low saturated magnetic flux density, the thickness of the magnetic material layer having the high saturated magnetic flux density is 0.5 &mgr;m or more. According to the above described magnetic pole, the magnetic saturation near the tip portion of the magnetic pole is controlled, so that preferable magnetic field strength and magnetic field gradient can be attained when the track width is narrowed.

摘要翻译： 在一对磁极中的至少一个磁极设置有在与磁隙接触的位置处具有磁极片的T形磁极和比其宽的辅助磁极。 T形磁极的空气轴承表面的接近度由包含构成磁极片和辅助磁极的一部分的磁性材料层和具有高饱和磁通密度的磁性材料层的叠层膜构成， 具有构成辅助磁极的剩余部分的低饱和磁通密度的层。 当磁道宽度为1.8μm或更小的磁极的前部由包含具有高饱和磁通密度的磁性材料层和具有低饱和磁通密度的磁性材料层的层叠膜构成时，厚度 具有高饱和磁通密度的磁性材料层的厚度为0.5μm以上。 根据上述磁极，控制磁极尖端部附近的磁饱和，从而当磁道宽度变窄时可以获得优选的磁场强度和磁场梯度。

公开(公告)号：US06198597B1

公开(公告)日：2001-03-06

申请号：US09153858

申请日：1998-09-16

申请人： Kohichi Tateyama ,  Hiroaki Yoda ,  Atsuhito Sawabe ,  Naoyuki Inoue ,  Akio Hori ,  Tadahiko Kobayashi ,  Hiromi Sakata ,  Michiko Hara ,  Takasi Koizumi ,  Tomohiko Nagata ,  Takeo Sakakubo ,  Kei Sakoda

发明人： Kohichi Tateyama ,  Hiroaki Yoda ,  Atsuhito Sawabe ,  Naoyuki Inoue ,  Akio Hori ,  Tadahiko Kobayashi ,  Hiromi Sakata ,  Michiko Hara ,  Takasi Koizumi ,  Tomohiko Nagata ,  Takeo Sakakubo ,  Kei Sakoda

IPC分类号： G11B531

CPC分类号： G11B5/3113 ,  G11B5/3116 ,  G11B5/3163

摘要： A thin-film magnetic head comprises a magnetic gap disposed to be positioned on an air bearing surface of the magnetic head, a pair of magnetic poles disposed to hold the magnetic gap therebetween, and a coil positioned between the pair of the magnetic poles to intersect the magnetic poles, wherein at least one of the magnetic poles being composed of a T-shaped magnetic pole, the T-shaped magnetic pole comprising a front part of a magnetic pole contacting with the magnetic gap, an intermediate part of a magnetic pole lying on the front part, and a rear part of a magnetic pole lying on the intermediate part, wherein a width of the front part roughly defines a track width, the rear part has a wider width in a direction of track width than a width of the front part, and the intermediate part contacts with the rear part at an entire width of the rear part at the air bearing surface and has a narrower width at a contacting face with the front part than the width of the rear part.

摘要翻译： 薄膜磁头包括设置在磁头的空气轴承表面上的磁隙，设置成保持磁隙的一对磁极和位于一对磁极之间的线圈，以相交 磁极，其中至少一个磁极由T形磁极组成，T形磁极包括与磁隙接触的磁极的前部，位于磁极的中间部分 在前部的前部和位于中间部的磁极的后部，前部的宽度大致限定轨道宽度，后部在轨道宽度方向上的宽度比宽度宽 前部，并且中间部分在后部的空气轴承表面的整个宽度处与后部接触，并且在与前部的接触面处具有比后部的宽度更窄的宽度。

公开(公告)号：US20080088981A1

公开(公告)日：2008-04-17

申请号：US11984865

申请日：2007-11-23

申请人： Yuuzo Kamiguchi ,  Hiromi Yuasa ,  Tomohiko Nagata ,  Hiroaki Yoda

发明人： Yuuzo Kamiguchi ,  Hiromi Yuasa ,  Tomohiko Nagata ,  Hiroaki Yoda

IPC分类号： G11B5/33

CPC分类号： B82Y10/00 ,  B82Y25/00 ,  G01R33/093 ,  G11B5/3903 ,  G11B2005/3996 ,  G11C11/15

摘要： There is provided a practical magnetoresistance effect element which has an appropriate value of resistance, which can be sensitized and which has a small number of magnetic layers to be controlled, and a magnetic head and magnetic recording and/or reproducing system using the same. Ina magnetoresistance effect element wherein a sense current is caused to flow in a direction perpendicular to the plane of the film, if a pinned layer and a free layer have a stacked construction of a magnetic layer and a non-magnetic layer or a stacked construction of a magnetic layer and a magnetic layer, it is possible to provide a practical magnetoresistance effect element which has an appropriate value of resistance, which can be sensitized and which has a small number of magnetic layers, while effectively utilizing the scattering effect depending on spin.

摘要翻译： 提供了一种具有适当的电阻值的实用磁阻效应元件，其可以被敏化并且具有少量的要控制的磁性层，以及使用该电阻的磁头和磁记录和/或再现系统。 Ina磁阻效应元件，其中如果被钉扎层和自由层具有磁性层和非磁性层的堆叠结构，则使感测电流在垂直于膜的平面的方向上流动，或堆叠结构 磁性层和磁性层，可以提供具有适当的电阻值的实用磁阻效应元件，其可以被敏化并且具有少量的磁性层，同时有效地利用依赖于自旋的散射效应。

公开(公告)号：US07295407B2

公开(公告)日：2007-11-13

申请号：US11760254

申请日：2007-06-08

申请人： Hiromi Yuasa ,  Hiroaki Yoda ,  Yuzo Kamiguchi ,  Tomohiko Nagata

发明人： Hiromi Yuasa ,  Hiroaki Yoda ,  Yuzo Kamiguchi ,  Tomohiko Nagata

IPC分类号： G11B5/39

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G01R33/093 ,  G11B5/00 ,  G11B5/3912 ,  G11B5/3919 ,  G11B5/3922 ,  G11B5/3929 ,  G11B5/398 ,  H01F10/324 ,  H01L43/08

摘要： A magnetoresistance effect element a stacked film including a magnetization fixed layer in which the direction of magnetization is substantially fixed to one direction, and a magnetization free layer in which the direction of magnetization varies in response to an external magnetic field, an electrode connected to a part of a principal plane of the stacked film, the magnetoresistance effect element having a resistance varying in response to a relative angle between the direction of magnetization in the magnetization fixed layer and the direction of magnetization in the magnetization free layer, a sense current detecting the variation of the resistance being applied to the film planes of the magnetization fixed layer and the magnetization free layer via the electrode in a direction substantially perpendicular to the magnetization fixed layer and the magnetization free layer. The electrode includes a pillar electrode portion substantially perpendicularly extending from the principal plane of the stacked film, and a feed portion extending substantially in parallel to the principal plane of the stacked film and the pillar electrode portion has two conductive layers in the central portion and outer peripheral portion thereof, and the sense current being caused to flow in the opposite directions to each other in the central portion and the outer peripheral portion.

摘要翻译： 一种磁阻效应元件，包括磁化方向基本上固定在一个方向上的磁化固定层和磁化方向响应于外部磁场而变化的磁化自由层的堆叠膜，连接到 磁阻效应元件的电阻响应于磁化固定层中的磁化方向与磁化自由层中的磁化方向之间的相对角度而变化的磁阻效应元件的一部分， 在与磁化固定层和磁化自由层基本垂直的方向上，通过电极施加到磁化固定层和无磁化层的膜平面上的电阻的变化。 所述电极包括从所述层叠膜的主面大致垂直延伸的柱状电极部和与所述层叠膜的主面大致平行地延伸的供电部，所述柱电极部在所述中央部和外部具有两个导电层 其周边部分，并且感测电流在中心部分和外周部分中沿相反方向流动。

公开(公告)号：US20070230065A1

公开(公告)日：2007-10-04

申请号：US11760254

申请日：2007-06-08

申请人： Hiromi YUASA ,  Hiroaki Yoda ,  Yuzo Kamiguchi ,  Tomohiko Nagata

发明人： Hiromi YUASA ,  Hiroaki Yoda ,  Yuzo Kamiguchi ,  Tomohiko Nagata

IPC分类号： G11B5/127

CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G01R33/093 ,  G11B5/00 ,  G11B5/3912 ,  G11B5/3919 ,  G11B5/3922 ,  G11B5/3929 ,  G11B5/398 ,  H01F10/324 ,  H01L43/08

摘要： A magnetoresistance effect element a stacked film including a magnetization fixed layer in which the direction of magnetization is substantially fixed to one direction, and a magnetization free layer in which the direction of magnetization varies in response to an external magnetic field, an electrode connected to a part of a principal plane of the stacked film, the magnetoresistance effect element having a resistance varying in response to a relative angle between the direction of magnetization in the magnetization fixed layer and the direction of magnetization in the magnetization free layer, a sense current detecting the variation of the resistance being applied to the film planes of the magnetization fixed layer and the magnetization free layer via the electrode in a direction substantially perpendicular to the magnetization fixed layer and the magnetization free layer. The electrode includes a pillar electrode portion substantially perpendicularly extending from the principal plane of the stacked film, and a feed portion extending substantially in parallel to the principal plane of the stacked film and the pillar electrode portion has two conductive layers in the central portion and outer peripheral portion thereof, and the sense current being caused to flow in the opposite directions to each other in the central portion and the outer peripheral portion.

摘要翻译： 一种磁阻效应元件，包括磁化方向基本上固定在一个方向上的磁化固定层和磁化方向响应于外部磁场而变化的磁化自由层的堆叠膜，连接到 磁阻效应元件的电阻响应于磁化固定层中的磁化方向与磁化自由层中的磁化方向之间的相对角度而变化的磁阻效应元件的一部分， 在与磁化固定层和磁化自由层基本垂直的方向上，通过电极施加到磁化固定层和无磁化层的膜平面上的电阻的变化。 所述电极包括从所述层叠膜的主面大致垂直延伸的柱状电极部和与所述层叠膜的主面大致平行地延伸的供电部，所述柱电极部在所述中央部和外部具有两个导电层 其周边部分，并且感测电流在中心部分和外周部分中沿相反方向流动。