公开(公告)号：US20050219493A1

公开(公告)日：2005-10-06

申请号：US10506540

申请日：2003-07-02

申请人： Yoshitada Oshida ,  Shigenobu Maruyama ,  Kazuo Kobayashi ,  Yoshihisa Osaka

发明人： Yoshitada Oshida ,  Shigenobu Maruyama ,  Kazuo Kobayashi ,  Yoshihisa Osaka

IPC分类号： G02B3/00 ,  G02B19/00 ,  G03F7/20 ,  H01L21/027 ,  G03B27/54

CPC分类号： G03F7/70075 ,  G02B3/005 ,  G02B3/0062 ,  G02B19/0014 ,  G02B19/0057 ,  G03F7/7005

摘要： The present invention provides a light exposure apparatus, and its method, comprising: an illumination optical system including: a light source array formed of a plural separate light sources arranged one-dimensionally or two-dimensionally; condensing optical system for condensing light emitted from each light source of the light source array; a light integrator for spatially decomposing the light condensed by the condensing optics, and thus generating a multitude of pseudo-secondary light sources; and a condenser lens for overlapping the light rays emitted from the multitude of pseudo-secondary light sources generated by the light integrator, and thus illuminating an illumination target region having a pattern to be exposed; and a projection optical system for projecting transmitted or reflected light onto an exposure target region of an exposure target object in order to expose the pattern to be exposed that is illuminated by the illumination optical system.

摘要翻译： 本发明提供一种曝光装置及其方法，包括：照明光学系统，包括：由一维或二维排列的多个单独的光源形成的光源阵列; 聚光光学系统，用于聚集从光源阵列的每个光源发射的光; 光积分器，用于空间分解由聚光光学器件聚光的光，从而产生大量的伪二次光源; 以及聚光透镜，用于将由光积分器产生的多个伪二次光源发射的光线重叠，从而照射具有待曝光图案的照明目标区域; 以及投影光学系统，用于将透射或反射的光投射到曝光目标物体的曝光目标区域上，以暴露由照明光学系统照射的待曝光图案。

公开(公告)号：US20080079921A1

公开(公告)日：2008-04-03

申请号：US11839863

申请日：2007-08-16

申请人： Yoshitada Oshida ,  Kazuo Kobayashi

发明人： Yoshitada Oshida ,  Kazuo Kobayashi

IPC分类号： G03B27/52

CPC分类号： G03F7/70291 ,  G03F7/70066 ,  G03F7/70075

摘要： An illumination apparatus and an exposure apparatus that achieves higher quality exposure to light and higher operating speed even where the ratio Hx/Hy between the transverse dimension Hx and the longitudinal dimension Hy of the plane of optical modulation of a two-dimensional optical space modulator is 1.5 or above, for instance, are to be provided. The focal distance fx in an x-direction and the focal distance fy in a y-direction of a second optical system that guides light emitted from an integrator to a two-dimensional optical space modulator are made different, in a ratio of fx/fy=1.6, for instance. In this way, the number of rod lenses in the integrator can be made equal between transverse and longitudinal directions and the value of Hx/Hy can be made 2.5 by bringing the aspect ratio dx:dy of rod lenses to 1.6:1, close to 1.

摘要翻译： 即使二维光学空间调制器的光学调制平面的横向尺寸Hx与纵向尺寸Hy之间的比率Hx / Hy为 例如提供1.5或以上。 将从积分器发射的光引导到二维光学空间调制器的第二光学系统的沿x方向的焦距fx和y方向的焦距fy被制成不同的fx / fy = 1.6，例如。 以这种方式，积分器中的棒状透镜的数量可以在横向和纵向方向上相等，并且通过将棒透镜的纵横比dx：dy设置为1.6:1，可以使得Hx / Hy的值为2.5 1。

公开(公告)号：US20070058149A1

公开(公告)日：2007-03-15

申请号：US11503976

申请日：2006-08-15

申请人： Yoshitada Oshida ,  Kazuo Kobayashi

发明人： Yoshitada Oshida ,  Kazuo Kobayashi

IPC分类号： G03B27/54

CPC分类号： G02B19/0057 ,  G02B19/0014 ,  G03F7/7005 ,  G03F7/70058

摘要： A lighting system and an exposure apparatus in which even if the outgoing optical axes of outgoing beams emitted from a plurality of LDs disposed on a flat plane are shifted, the efficiency of use of the beams can be improved, and the directivity of lighting can be enhanced. Diffused beams output from a plurality of LDs arrayed two-dimensionally are converted into high-directivity beams with spread angles equalized circumferentially by two kinds of cylindrical lenses. In this event, the optical axis of the beam emitted from each LD may tilt due to misalignment of the center of the beam with the optical axes of the corresponding cylindrical lenses. This tilt is corrected by a wedged glass. Thus, the optical axis of the beam output from each LD meets the optical axis in the entrance plane of an integrator.

摘要翻译： 一种照明系统和曝光装置，其中即使从布置在平面上的多个LD发射的出射光束的出射光轴偏移，也可以提高光束的使用效率，并且照明的方向性可以是 增强。 从二维排列的多个LD输出的扩散光束被转换成具有两个柱面透镜周向平行扩展角度的高指向性光束。 在这种情况下，从每个LD发射的光束的光轴可能由于光束的中心与对应的柱面透镜的光轴的不对准而倾斜。 这种倾斜由楔形玻璃校正。 因此，从每个LD输出的光束的光轴与积分器的入射面中的光轴相遇。

公开(公告)号：US07755741B2

公开(公告)日：2010-07-13

申请号：US11839863

申请日：2007-08-16

申请人： Yoshitada Oshida ,  Kazuo Kobayashi

发明人： Yoshitada Oshida ,  Kazuo Kobayashi

IPC分类号： G03B27/54 ,  G03B27/52 ,  G03B27/72

CPC分类号： G03F7/70291 ,  G03F7/70066 ,  G03F7/70075

摘要： An illumination apparatus and an exposure apparatus that achieves higher quality exposure to light and higher operating speed even where the ratio Hx/Hy between the transverse dimension Hx and the longitudinal dimension Hy of the plane of optical modulation of a two-dimensional optical space modulator is 1.5 or above, for instance, are to be provided. The focal distance fx in an x-direction and the focal distance fy in a y-direction of a second optical system that guides light emitted from an integrator to a two-dimensional optical space modulator are made different, in a ratio of fx/fy=1.6, for instance. In this way, the number of rod lenses in the integrator can be made equal between transverse and longitudinal directions and the value of Hx/Hy can be made 2.5 by bringing the aspect ratio dx:dy of rod lenses to 1.6:1, close to 1.

摘要翻译： 即使二维光学空间调制器的光学调制平面的横向尺寸Hx与纵向尺寸Hy之间的比率Hx / Hy为 例如提供1.5或以上。 将从积分器发射的光引导到二维光学空间调制器的第二光学系统的沿x方向的焦距fx和y方向的焦距fy被制成不同的fx / fy = 1.6，例如。 以这种方式，积分器中的棒状透镜的数量可以在横向和纵向方向上相等，并且通过将棒透镜的纵横比dx：dy设置为1.6:1，可以使得Hx / Hy的值为2.5 1。

公开(公告)号：US08404601B2

公开(公告)日：2013-03-26

申请号：US13494418

申请日：2012-06-12

申请人： Kazuo Kobayashi

发明人： Kazuo Kobayashi

IPC分类号： H01L21/31

摘要： A method of manufacturing a semiconductor device according to the present invention includes the steps of: (a) introducing hydrogen and oxygen on a SiC substrate; and (b) subjecting the hydrogen and the oxygen to a combustion reaction on the SiC substrate to form a gate oxide film being a silicon oxide film on a surface of the SiC substrate by the combustion reaction.

公开(公告)号：US20120081475A1

公开(公告)日：2012-04-05

申请号：US13231216

申请日：2011-09-13

申请人： Koichiro HARA ,  Kazuo Kobayashi

发明人： Koichiro HARA ,  Kazuo Kobayashi

IPC分类号： B41J2/045 ,  B41J2/16

CPC分类号： B41J2/14233

摘要： There is provided a liquid discharging head discharging a liquid, including: a channel unit having a liquid channel including a pressure chamber which has an opening at one surface of the channel unit; a piezoelectric element formed of a piezoelectric material; an intermediate member preventing the liquid in the pressure chamber and the piezoelectric element from making contact with each other; a first adhesive layer composed of a first adhesive and adhering the channel unit and the intermediate member, the first adhesive being a thermo-setting adhesive starting to be cured at a first temperature; and a second adhesive layer composed of a second adhesive and adhering the intermediate member and the piezoelectric element, the second adhesive starting to be cured at a second temperature lower than the first temperature.

摘要翻译： 提供了一种排出液体的液体排放头，包括：通道单元，其具有液体通道，该液体通道包括在通道单元的一个表面上具有开口的压力室; 由压电材料形成的压电元件; 防止压力室中的液体和压电元件彼此接触的中间构件; 第一粘合剂层，由第一粘合剂组成并粘合通道单元和中间构件，第一粘合剂是开始在第一温度下固化的热固性粘合剂; 以及第二粘合剂层，由第二粘合剂组成并粘合所述中间构件和所述压电元件，所述第二粘合剂在比所述第一温度低的第二温度下开始固化。

公开(公告)号：US08071709B2

公开(公告)日：2011-12-06

申请号：US12282664

申请日：2007-03-14

申请人： Mitsuru Kishine ,  Hirofumi Nishibayashi ,  Toshiki Ichisaka ,  Kazuo Kobayashi ,  Ryuji Tachibana ,  Tadashi Okawa ,  Katsumi Kihara

发明人： Mitsuru Kishine ,  Hirofumi Nishibayashi ,  Toshiki Ichisaka ,  Kazuo Kobayashi ,  Ryuji Tachibana ,  Tadashi Okawa ,  Katsumi Kihara

IPC分类号： C08G77/24

CPC分类号： C09K3/1018 ,  C08G77/24 ,  C08L27/16 ,  C08L83/04 ,  C08L2205/22 ,  C08L2666/14 ,  C08L83/00

摘要： The present invention provides a novel fluorine-containing rubber composite material having both of excellent fuel impermeability and excellent cold resistance, a fuel impermeable sealing material comprising the composite material and a process for preparing the composite material. The fluorine-containing rubber composite material comprises crosslinked particles of fluorine-containing silicone rubber dispersed in a fluorine-containing rubber. It is preferable that the fluorine-containing rubber comprises a vinylidene fluoride/tetrafluoroethylene/perfluoro vinyl ether copolymer, and the composite material has cold resistance of not more than −35° C. and fuel permeability of not more than 500 g·mm/m2·day. The fuel impermeable sealing material comprises the composite material. The process for preparing the composite material comprises a step for co-coagulation of a fluorine-containing rubber emulsion and an emulsion of crosslinked fluorine-containing silicone rubber.

摘要翻译： 本发明提供一种具有优异的燃料不渗透性和优异的耐寒性的新型含氟橡胶复合材料，包含该复合材料的燃料不可渗透的密封材料以及该复合材料的制备方法。 含氟橡胶复合材料包含分散在含氟橡胶中的含氟硅橡胶的交联颗粒。 含氟橡胶优选包含偏二氟乙烯/四氟乙烯/全氟乙烯基醚共聚物，复合材料的耐寒性不大于-35℃，燃料渗透率不大于500g·mm / m 2 ·天。 燃料不可渗透的密封材料包括复合材料。 制备复合材料的方法包括使含氟橡胶乳液和交联的含氟硅橡胶的乳液共混的步骤。

公开(公告)号：US20110165823A1

公开(公告)日：2011-07-07

申请号：US12748109

申请日：2010-03-26

申请人： Satoru IDE ,  Moriyuki Kashiwa ,  Kazuo Kobayashi ,  Noriyuki Motimaru ,  Eiichi Yamamoto ,  Tomio Kubo ,  Hiroaki Kida

发明人： Satoru IDE ,  Moriyuki Kashiwa ,  Kazuo Kobayashi ,  Noriyuki Motimaru ,  Eiichi Yamamoto ,  Tomio Kubo ,  Hiroaki Kida

IPC分类号： B24B1/00 ,  B24B41/00 ,  B24B7/10

CPC分类号： B24B37/00

摘要： A planarization apparatus and method that thins and planarizes a substrate by grinding and polishing the rear surface of the substrate with high throughput, and that fabricates a semiconductor substrate with reduced adhered contaminants. A planarization apparatus that houses various mechanism elements in semiconductor substrate loading/unloading stage chamber, a rear-surface polishing stage chamber, and a rear-surface grinding stage chamber. The throughput time of the rear-surface polishing stage that simultaneously polishes two substrates is typically about double the throughput time of the rear-surface grinding stage that grinds one substrate.

摘要翻译： 一种平面化装置和方法，其通过以高生产量研磨和抛光衬底的后表面来使衬底平坦化，并且制造具有减少的附着污染物的半导体衬底。 一种在半导体衬底装载/放电室中容纳各种机构元件的平面化装置，后表面抛光台室和后表面研磨台室。 同时抛光两个基材的后表面抛光阶段的生产时间通常是研磨一个基板的后表面研磨阶段的生产时间的两倍。

公开(公告)号：US07972809B2

公开(公告)日：2011-07-05

申请号：US10511436

申请日：2003-04-28

申请人： Kazuo Kobayashi ,  Yoshinori Kitagawa ,  Toshihiro Komeda ,  Nagako Kawashima ,  Yoshifumi Jigami ,  Yasunori Chiba

发明人： Kazuo Kobayashi ,  Yoshinori Kitagawa ,  Toshihiro Komeda ,  Nagako Kawashima ,  Yoshifumi Jigami ,  Yasunori Chiba

IPC分类号： C12P21/00 ,  C12N15/01

CPC分类号： C12P19/26 ,  C07K16/243 ,  C07K2317/21 ,  C12N1/14 ,  C12N9/0006 ,  C12N9/0008 ,  C12N9/1048 ,  C12N9/1051 ,  C12N9/2488 ,  C12N9/60 ,  C12N9/88 ,  C12N9/93 ,  C12P21/02 ,  C12Y101/01085 ,  C12Y101/03013 ,  C12Y102/01012 ,  C12Y302/01024 ,  C12Y402/01019 ,  C12Y603/02006

摘要： This invention is to provide a process for producing a glycoprotein comprising a mammalian type sugar chain, characterized in that the process comprises introducing an α-1,2-mannosidase gene into a methylotrophic yeast having a mutation of a sugar chain biosynthesizing enzyme gene, so that the α-1,2-mannosidase gene is expressed under the control of a potent promoter in the yeast; culturing in a medium the methylotrophic yeast cells with a heterologous gene transferred thereinto; and obtaining the glycoprotein comprising a mammalian type sugar chain from the culture. Using the newly created methylotrophic yeast having a sugar chain mutation, a neutral sugar chain identical with a high mannose type sugar chain produced by mammalian cells such as human cells, or a glycoprotein comprising such a neutral sugar chain, can be produced in a large amount at a high purity. By introducing a mammalian type sugar chain biosynthesizing gene into the above-described mutant, a mammalian type sugar chain, such as a hybrid or complex, or a protein comprising a mammalian type sugar chain can be efficiently produced.

摘要翻译： 本发明提供一种生产包含哺乳动物型糖链的糖蛋白的方法，其特征在于该方法包括将α-1,2-甘露糖苷酶基因导入具有糖链生物合成酶基因突变的甲基营养酵母中，因此 α-1,2-甘露糖苷酶基因在酵母中有效启动子的控制下表达; 在介质中培养具有转移到其中的异源基因的甲基营养酵母细胞; 从培养物中获得包含哺乳动物型糖链的糖蛋白。 使用新制造的具有糖链突变的甲基营养酵母，可以大量生产与由哺乳动物细胞如人细胞产生的高甘露糖型糖链或包含这种中性糖链的糖蛋白相同的中性糖链 纯度高。 通过将哺乳动物型糖链生物合成基因导入到上述突变体中，可以有效地制备哺乳动物型糖链，例如杂合体或复合物，或包含哺乳动物型糖链的蛋白质。

公开(公告)号：US07882635B2

公开(公告)日：2011-02-08

申请号：US12232880

申请日：2008-09-25

申请人： Hiroaki Wakayama ,  Kazuo Kobayashi

发明人： Hiroaki Wakayama ,  Kazuo Kobayashi

IPC分类号： B23P17/00 ,  B41J2/045

CPC分类号： B41J2/1646 ,  B41J2/161 ,  B41J2/1625 ,  B41J2/1626 ,  B41J2/1642 ,  B41J2202/03 ,  Y10T29/42 ,  Y10T29/435 ,  Y10T29/49126 ,  Y10T29/49128 ,  Y10T29/4913 ,  Y10T29/49401

摘要： A method for producing an ink-jet head includes forming a buffer layer on an upper surface of a vibration plate, and forming a piezoelectric precursor layer on an entire upper surface of a surface layer, the piezoelectric precursor layer being converted into a piezoelectric sheet. The buffer layer is formed of a material with which mutual diffusion between the piezoelectric precursor layer and the buffer layer is hardly caused as compared with mutual diffusion between the piezoelectric precursor layer and the vibration plate with which no buffer layer is provided. A stack, in which the buffer layer and the piezoelectric precursor layer are formed, is heated at a predetermined temperature, and the piezoelectric precursor layer is calcinated to form the piezoelectric sheet. It is possible to suppress the deterioration of the performance of the piezoelectric member.

摘要翻译： 一种喷墨头的制造方法，其特征在于，在振动板的上表面形成缓冲层，在表面层的整个上表面形成压电前体层，将压电体前体层转换为压电片。 与压电前体层和没有设置缓冲层的振动板之间的相互扩散相比，缓冲层由与压电前体层和缓冲层之间的相互扩散难以引起的材料形成。 在其中形成缓冲层和压电前体层的叠层在预定温度下被加热，并且将压电前体层煅烧以形成压电片。 可以抑制压电部件的性能的劣化。