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公开(公告)号：US20100196528A1
公开(公告)日：2010-08-05
申请号：US12695936
申请日：2010-01-28
CPC分类号： G11B5/855
摘要： According to one embodiment, a stamper includes patterns corresponding to recording tracks or recording bits in a data region and patterns corresponding to information in a servo region formed in protrusions and recesses on a front side of the stamper, in which an inner periphery and an outer periphery are processed and, on a back side, an inner peripheral edge, an outer peripheral edge and a main surface of the back side lie on the same plane.
摘要翻译： 根据一个实施例，压模包括对应于数据区域中的记录轨道或记录位的图案，以及对应于形成在压模正面上的突起和凹陷中的伺服区域中的信息的图案，其中内周和外 周边被处理，并且在背面上，内侧边缘，外周边缘和后侧的主表面位于同一平面上。
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公开(公告)号：US20110262580A1
公开(公告)日：2011-10-27
申请号：US13077537
申请日：2011-03-31
摘要： According to one embodiment, a stamper manufacturing method comprises electroless plating by using a master includes a substrate, a conductive underlayer formed on the substrate and having catalytic activity, projecting patterns having no catalytic activity and partially formed on a surface of the conductive underlayer having catalytic activity, and regions in which the conductive underlayer having catalytic activity is exposed between the projecting patterns to deposite selectively an amorphous conductive layer between the projecting patterns and in the regions in which the conductive underlayer is exposed, and forming stamper projections, electroplating on the stamper projections includes the projecting patterns and the amorphous conductive layer by using the amorphous conductive layer and the conductive underlayer as electrodes to form a stamper main body made of a crystalline metal, and releasing a stamper includes the stamper projections and the stamper main body from the master.
摘要翻译： 根据一个实施例，压模制造方法包括使用主体的无电镀，其包括基板，形成在基板上的具有催化活性的导电底层，具有催化活性的突出图案，并部分地形成在具有催化作用的导电底层的表面上 活性和其中具有催化活性的导电底层在突出图案之间暴露的区域，以选择性地沉积在突出图案之间的非晶导体层和导电底层暴露的区域中，并且形成压模突起，在压模上电镀 突起包括通过使用非晶导体层和导电底层作为电极形成由结晶金属制成的压模主体的突出图案和非晶导体层，并且释放压模包括压模主体和压模主体 。
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公开(公告)号：US20100213069A1
公开(公告)日：2010-08-26
申请号：US12712045
申请日：2010-02-24
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G11B5/855 , Y10T428/24612
摘要： According to one embodiment, a master plate for producing a stamper includes a substrate, and patterns of protrusions and recesses formed on the substrate and corresponding to patterns of recording tracks or recording bits in data areas and to information in servo areas, in which the protrusion has a structure in which a first metal layer, a silicon layer and a second metal layer are stacked on the substrate and a metal oxide film is formed on a surface of the protrusion.
摘要翻译： 根据一个实施例，用于制造压模的主板包括基板，并且形成在基板上并对应于数据区域中的记录轨迹或记录位的图案以及伺服区域中的信息的突起和凹陷的图案，其中突起 具有在基板上层叠第一金属层，硅层和第二金属层的结构，在突起的表面上形成金属氧化物膜。
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公开(公告)号：US20100186877A1
公开(公告)日：2010-07-29
申请号：US12691491
申请日：2010-01-21
IPC分类号： B32B37/02
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a stamper includes forming a first stamper from a master plate having lands and grooves through electroforming, forming a second stamper, a width of which is GW, from the first stamper through electroforming, forming a lamination film with a thickness of LLT on the second stamper, forming, on the lamination film, a second releasing layer, a transfer layer with a thickness of TLT and a third electroforming layer with a thickness of ELT, peeling off the transfer layer and the third electroforming layer from the second stamper to form a third stamper, and isotropically etching the transfer layer on the third stamper in an etching thickness of ET to reduce a width of lands of the third stamper, in which the following relations are satisfied: 10 nm≦ELT and ET≦TLT.
摘要翻译： 根据一个实施例，制造压模的方法包括通过电铸从具有焊盘和槽的母板形成第一压模，通过电铸从第一压模形成其宽度为GW的第二压模，形成层压膜 在第二压模上具有LLT的厚度，在层压膜上形成第二释放层，厚度为TLT的转印层和具有ELT厚度的第三电铸层，剥离转印层和第三电铸 从而形成第三压模，并且以蚀刻厚度的ET对第三压模上的转印层进行各向同性蚀刻，以减小第三压模的焊盘的宽度，其中满足以下关系：10nm＆nlE; ELT 和ET＆nlE; TLT。
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公开(公告)号：US20100314253A1
公开(公告)日：2010-12-16
申请号：US12814415
申请日：2010-06-11
IPC分类号： C25D1/10
CPC分类号： C25D1/10
摘要： According to one embodiment, a three dimensional structure of a stamper is subject to etch by supplying a pulsed electric currentelectric current to the surface of the stamper.
摘要翻译： 根据一个实施例，通过向压模的表面提供脉冲电流电流来对压模的三维结构进行蚀刻。
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公开(公告)号：US20100155365A1
公开(公告)日：2010-06-24
申请号：US12641135
申请日：2009-12-17
CPC分类号： G11B5/855 , C23C14/04 , C23C14/185 , C23C14/34
摘要： According to one embodiment, when forming first, second, and third stampers by transferring three-dimensional patterns of a master, a height adjusting layer having a film thickness greater on the upper surface of a projection than on the bottom surface of a recess is formed between the second stamper and a second release layer, and the surface of the third stamper is etched with an acidic solution having a pH of less than 3.
摘要翻译： 根据一个实施例，当通过传送主机的三维图案来形成第一，第二和第三压模时，形成在突起的上表面上比在凹部的底表面上具有更大的膜厚度的高度调节层 在第二压模和第二剥离层之间，并且用pH小于3的酸性溶液蚀刻第三压模的表面。
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公开(公告)号：US20130075361A1
公开(公告)日：2013-03-28
申请号：US13528348
申请日：2012-06-20
申请人： Yoshiaki KAWAMONZEN , Yasuaki OOTERA , Akiko YUZAWA , Naoko KIHARA , Yoshiyuki KAMATA , Hiroyuki HIEDA , Norikatsu SASAO , Ryosuke YAMAMOTO , Takeshi OKINO , Tomoyuki MAEDA , Takuya SHIMADA
发明人： Yoshiaki KAWAMONZEN , Yasuaki OOTERA , Akiko YUZAWA , Naoko KIHARA , Yoshiyuki KAMATA , Hiroyuki HIEDA , Norikatsu SASAO , Ryosuke YAMAMOTO , Takeshi OKINO , Tomoyuki MAEDA , Takuya SHIMADA
IPC分类号： B44C1/22
CPC分类号： B44C1/227 , B41M5/00 , B81C1/0046 , B81C2201/0153 , B82Y10/00 , B82Y40/00 , G03F7/0002 , H01L21/0337 , Y10T156/1041
摘要： A pattern forming method according to an embodiment includes: forming a pattern film on a first substrate, the pattern film having a concave-convex pattern, the pattern film being made of a material containing a first to-be-imprinted agent; forming a material film on a second substrate, the material film containing a second to-be-imprinted agent having a higher etching rate than an etching rate of the first to-be-imprinted agent; transferring the concave-convex pattern of the pattern film onto the material film by applying pressure between the first substrate and the second substrate, with the pattern film being positioned to face the material film, and by curing the second to-be-imprinted agent; detaching the first substrate from the pattern film; and removing the material film by etching, to leave the pattern film on the second substrate.
摘要翻译： 根据实施例的图案形成方法包括：在第一基板上形成图案膜，所述图案膜具有凹凸图案，所述图案膜由包含第一待打印剂的材料制成; 在第二基板上形成材料膜，所述材料膜含有蚀刻速率高于第一待打印剂的蚀刻速率的第二待定印剂; 通过在第一基板和第二基板之间施加压力将图案膜的凹凸图案转印到材料膜上，图案膜定位成面对材料膜，并且通过固化第二待打印剂; 从图案膜分离第一衬底; 并通过蚀刻去除材料膜，以将图案膜留在第二基板上。
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8.发明申请METHOD OF MANUFACTURING MOLD AND METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM 有权制造模具的方法和制造磁记录介质的方法公开(公告)号：US20130069272A1
公开(公告)日：2013-03-21
申请号：US13423543
申请日：2012-03-19
申请人： Yasuaki OOTERA , Yoshiyuki KAMATA , Naoko KIHARA , Yoshiaki KAWAMONZEN , Takeshi OKINO , Ryosuke YAMAMOTO , Tomoyuki MAEDA , Norikatsu SASAO , Akiko YUZAWA , Takuya SHIMADA , Hiroyuki Hieda
发明人： Yasuaki OOTERA , Yoshiyuki KAMATA , Naoko KIHARA , Yoshiaki KAWAMONZEN , Takeshi OKINO , Ryosuke YAMAMOTO , Tomoyuki MAEDA , Norikatsu SASAO , Akiko YUZAWA , Takuya SHIMADA , Hiroyuki Hieda
CPC分类号： B29C33/3857 , G11B5/855
摘要： In one embodiment, a method of manufacturing a mold includes: forming a first layer having an affinity to a second polymer on a substrate having an affinity to a first polymer; forming first and second openings in the first layer; filling a resist in the second openings and hardening the resist to obtain a hardened resist; and forming a second layer containing a block copolymer and causing it to self-assemble.
摘要翻译： 在一个实施方案中，制造模具的方法包括：在对第一聚合物具有亲和性的基材上形成对第二聚合物具有亲和性的第一层; 在第一层中形成第一和第二开口; 在第二开口中填充抗蚀剂并使抗蚀剂硬化以获得硬化抗蚀剂; 并形成含有嵌段共聚物并使其自组装的第二层。
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公开(公告)号：US20100078143A1
公开(公告)日：2010-04-01
申请号：US12556278
申请日：2009-09-09
IPC分类号： B41C3/02
CPC分类号： B41C3/02
摘要： A method for manufacturing a duplicating stamper is provided. The method includes the steps of forming a metal film on a stamper, the metal film having an apertural area in a central area of the stamper, lifting up an innermost circular edge of the metal film in order to detach the metal film from the innermost circular edge to the outermost circular edge, and detaching the metal film to provide another stamper. Alternatively, for detaching the metal film, a gas is blown into the apertural area with lifting up the innermost circular edge of the metal film.
摘要翻译： 提供了制造复印压模的方法。 该方法包括以下步骤：在压模上形成金属膜，金属膜在压模的中心区域具有开口区域，提升金属膜的最内圆周边缘，以将金属膜从最里面的圆形 边缘到最外面的圆形边缘，并且分离金属膜以提供另一个压模。 或者，为了分离金属膜，通过提起金属膜的最内圆形边缘，气体吹入开口区域。
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10.发明申请MAGNETIC RECORDING MEDIUM, MAGNETIC RECORDING/REPRODUCING APPARATUS, AND METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM 审中-公开磁记录介质，磁记录/再现装置以及制造磁记录介质的方法公开(公告)号：US20130258523A1
公开(公告)日：2013-10-03
申请号：US13723725
申请日：2012-12-21
IPC分类号： G11B5/667
CPC分类号： G11B5/667 , G11B5/7325 , G11B5/855
摘要： A magnetic recording medium of an embodiment includes: a substrate; a nonmagnetic base layer disposed on the substrate; a perpendicular magnetic recording layer disposed on the nonmagnetic base layer, having a hard magnetic recording layer, a nonmagnetic intermediate layer, and a soft magnetic recording layer, and divided into mutually separated plural regions; and a protective layer disposed on the perpendicular magnetic recording layer. The hard magnetic recording layer has an easy magnetization axis directed to a stack direction of the hard magnetic recording layer. The nonmagnetic intermediate layer contains one of C, ZnO, a carbide of Si, Ti, Ta or W, and a nitride of Si, Ti, Ta or W.
摘要翻译： 实施例的磁记录介质包括：基板; 设置在基板上的非磁性基层; 设置在非磁性基底层上的垂直磁记录层，具有硬磁记录层，非磁性中间层和软磁记录层，并分成相互分开的多个区域; 以及设置在垂直磁记录层上的保护层。 硬磁记录层具有指向硬磁记录层的堆叠方向的容易的磁化轴。 非磁性中间层包含C，ZnO，Si，Ti，Ta或W的碳化物和Si，Ti，Ta或W的氮化物中的一种。
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