摘要:
An object of the present invention is to enhance the capacity of a turbomolecular pump.A turbomolecular pump is a composite-type vacuum pump that combines a blade portion and a thread groove portion. Openings are formed at a joint portion between a rotor blade holding portion that holds rotor blades and a stepped portion that holds a rotor cylinder portion, such that the openings span both the rotor blade holding portion and the stepped portion.Part of the gas that is evacuated by the blade portions is evacuated by a thread groove portion that is formed of the rotor cylinder portion and a stator thread groove, and the rest of the gas is led into the rotor cylinder portion via the openings, and is evacuated by a thread groove portion that is formed of the rotor cylinder portion and another stator thread groove. Stress derived from rotation of a rotor can be withstood when the openings are formed at the joint portion between the rotor blade holding portion and the stepped portion. Moreover, a groove in which a balancer weight is disposed is provided at a clearance portion that lies further on the inlet port side of the other stator thread groove, thereby eliminating the necessity of shortening the length of the other stator thread groove.
摘要:
An object of the present invention is to enhance the capacity of a turbomolecular pump.A turbomolecular pump is a composite-type vacuum pump that combines a blade portion and a thread groove portion. Openings are formed at a joint portion between a rotor blade holding portion that holds rotor blades and a stepped portion that holds a rotor cylinder portion, such that the openings span both the rotor blade holding portion and the stepped portion.Part of the gas that is evacuated by the blade portions is evacuated by a thread groove portion that is formed of the rotor cylinder portion and a stator thread groove, and the rest of the gas is led into the rotor cylinder portion via the openings, and is evacuated by a thread groove portion that is formed of the rotor cylinder portion and another stator thread groove. Stress derived from rotation of a rotor can be withstood when the openings are formed at the joint portion between the rotor blade holding portion and the stepped portion. Moreover, a groove in which a balancer weight is disposed is provided at a clearance portion that lies further on the inlet port side of the other stator thread groove, thereby eliminating the necessity of shortening the length of the other stator thread groove.
摘要:
A turbo-molecular pump has a main body and a pump case for covering the main body. A first flange is integrally formed with the pump case for connection to a second flange integrally with a vacuum chamber. The flange of the pump case and the flange of the vacuum chamber are integrally connected together with fastening bolts. A clamping structure separately clamps the first and second flanges together by surrounding a portion of each of the first and second flanges.
摘要:
Provided is an exhaust pump that comprises connecting opening portions that can be deburred easily and that are suitable for enhancing gas evacuation performance. A rotor (a cylindrical rotating member) of an exhaust pump comprises a plate body that has a ring-like projection on a reverse side outer peripheral section of the rotor, and a cylindrical body that is fitted into an outer periphery of the ring-like projection. Connecting opening portions of the exhaust pump comprise holes that are formed by notching an outer peripheral section of the plate body and an outer peripheral section of the ring-like projection, and a portion (specifically, a hole) of the holes that opens in the form of a horizontal hole is covered by an outer-peripheral upper end portion of the cylindrical body.
摘要:
Provided is an exhaust pump that comprises connecting opening portions that can be deburred easily and that are suitable for enhancing gas evacuation performance. A rotor (a cylindrical rotating member) of an exhaust pump comprises a plate body that has a ring-like projection on a reverse side outer peripheral section of the rotor, and a cylindrical body that is fitted into an outer periphery of the ring-like projection. Connecting opening portions of the exhaust pump comprise holes that are formed by notching an outer peripheral section of the plate body and an outer peripheral section of the ring-like projection, and a portion (specifically, a hole) of the holes that opens in the form of a horizontal hole is covered by an outer-peripheral upper end portion of the cylindrical body.
摘要:
A turbo-molecular pump has a housing with intake and exhaust ports. A rotary body is enclosed in the housing and has rotor blades of a series of stages formed so that the outside diameter of at least one stage on the exhaust port side is smaller than that on the intake port side. Stator blades are arranged between the rotor blades and spacer rings are arranged between the stator blades to hold the stator blades at predetermined intervals. The spacer rings are formed so that the smallest inside diameter of at least one stage of the spacer rings on the exhaust port side is smaller than the largest outside diameter of the rotor blades. The housing comprises a casing whose inside diameter is constant or whose inside diameter is smaller at the intake port side than at the exhaust port side.
摘要:
A flange of a molecular pump is connected to a vacuum vessel by first bolts that extend through elongate holes in the flange and are bolted to the vacuum vessel. One or more buffering members are attached to the flange by the first bolts that extend through first openings in the buffering members and by second bolts that extend through second openings in the buffering members and are bolted to the flange. In the event of malfunction of the molecular pump that generates an abnormally high torque, the buffering members plastically deform and absorb the shock energy caused by the abnormal torque thereby preventing damage to the vacuum vessel.
摘要:
A warp line is set directly on the surface of a virtual three-dimensional object model. A score set portion (22) configured to set scores for a virtual dress model formed within a 3-D space according to a manipulation instruction from the user to divide the virtual dress model into plural paper pattern regions R according to a manipulation instruction from the user, a warp line set portion (23) configured to set a warp line Lg for the paper pattern region R according to a manipulation instruction from the user, and a development portion (24) configured to form a virtual paper pattern by developing the paper pattern regions (R) into a 2-D plane in such a manner that the warp line Lg set by the warp line set portion (23) becomes linear, are included.
摘要:
A vacuum pump has a pump case having a gas suction port at an upper surface thereof, a rotor shaft mounted in the pump case for undergoing rotation, and a rotor connected to the rotor shaft for rotation therewith. The rotor has inner and outer circumferential surfaces coated with a corrosion-resistant film treated by nonelectrolytic plating. Rotor blades are disposed in the pump case and are integrally connected to the outer circumferential surface of the rotor. Stator blades are integrally connected to the pump case so that the rotor blades and the stator blades are alternately positioned and arranged. A balancing body is disposed on the inner circumferential surface of the rotor for balancing the rotor during rotation thereof.
摘要:
A vacuum pump has a rotor mounted to undergo rotation about a rotational axis. A cylindrical base member surrounds a lower outer periphery of the rotor. A cylindrical pump case surrounds an upper outer periphery of the rotor. The base member has an inner periphery, an outer periphery, and a groove formed between the inner and outer peripheries thereof. The pump case is connected to the base member so that a portion of the outer periphery of the base member confronts a portion of the inner periphery of the pump case. A thread groove is formed in the inner periphery of the base member.