Turbo-molecular pump
    1.
    发明授权
    Turbo-molecular pump 有权
    涡轮分子泵

    公开(公告)号:US09388816B2

    公开(公告)日:2016-07-12

    申请号:US13817473

    申请日:2011-07-20

    IPC分类号: F04D19/04 F04D29/64

    摘要: An object of the present invention is to enhance the capacity of a turbomolecular pump.A turbomolecular pump is a composite-type vacuum pump that combines a blade portion and a thread groove portion. Openings are formed at a joint portion between a rotor blade holding portion that holds rotor blades and a stepped portion that holds a rotor cylinder portion, such that the openings span both the rotor blade holding portion and the stepped portion.Part of the gas that is evacuated by the blade portions is evacuated by a thread groove portion that is formed of the rotor cylinder portion and a stator thread groove, and the rest of the gas is led into the rotor cylinder portion via the openings, and is evacuated by a thread groove portion that is formed of the rotor cylinder portion and another stator thread groove. Stress derived from rotation of a rotor can be withstood when the openings are formed at the joint portion between the rotor blade holding portion and the stepped portion. Moreover, a groove in which a balancer weight is disposed is provided at a clearance portion that lies further on the inlet port side of the other stator thread groove, thereby eliminating the necessity of shortening the length of the other stator thread groove.

    摘要翻译: 本发明的目的是提高涡轮分子泵的容量。 涡轮分子泵是组合刀片部分和螺纹槽部分的复合型真空泵。 开口形成在保持转子叶片的转子叶片保持部和保持转子圆筒部的阶梯部之间的接合部,使得开口跨越转子叶片保持部和台阶部。 由叶片部分排出的气体的一部分通过由转子筒部和定子螺纹槽形成的螺纹槽部抽出,其余的气体经由开口被引入转子筒部,并且 通过由转子筒部和另一个定子螺纹槽形成的螺纹槽部排出。 当开口形成在转子叶片保持部分和阶梯部分之间的接合部分时,可以承受来自转子旋转的应力。 此外,在另一个定子线槽的入口侧的间隙部设置有配置有平衡重的槽,从而不需要缩短另一个定子线槽的长度。

    TURBO-MOLECULAR PUMP
    2.
    发明申请
    TURBO-MOLECULAR PUMP 有权
    涡轮分子泵

    公开(公告)号:US20130149105A1

    公开(公告)日:2013-06-13

    申请号:US13817473

    申请日:2011-07-20

    IPC分类号: F04D19/04

    摘要: An object of the present invention is to enhance the capacity of a turbomolecular pump.A turbomolecular pump is a composite-type vacuum pump that combines a blade portion and a thread groove portion. Openings are formed at a joint portion between a rotor blade holding portion that holds rotor blades and a stepped portion that holds a rotor cylinder portion, such that the openings span both the rotor blade holding portion and the stepped portion.Part of the gas that is evacuated by the blade portions is evacuated by a thread groove portion that is formed of the rotor cylinder portion and a stator thread groove, and the rest of the gas is led into the rotor cylinder portion via the openings, and is evacuated by a thread groove portion that is formed of the rotor cylinder portion and another stator thread groove. Stress derived from rotation of a rotor can be withstood when the openings are formed at the joint portion between the rotor blade holding portion and the stepped portion. Moreover, a groove in which a balancer weight is disposed is provided at a clearance portion that lies further on the inlet port side of the other stator thread groove, thereby eliminating the necessity of shortening the length of the other stator thread groove.

    摘要翻译: 本发明的目的是提高涡轮分子泵的容量。 涡轮分子泵是组合刀片部分和螺纹槽部分的复合型真空泵。 开口形成在保持转子叶片的转子叶片保持部和保持转子圆筒部的阶梯部之间的接合部,使得开口跨越转子叶片保持部和台阶部。 由叶片部分排出的气体的一部分通过由转子筒部和定子螺纹槽形成的螺纹槽部抽出,其余的气体经由开口被引入转子筒部,并且 通过由转子筒部和另一个定子螺纹槽形成的螺纹槽部排出。 当开口形成在转子叶片保持部分和阶梯部分之间的接合部分时,可以承受来自转子旋转的应力。 此外,在另一个定子线槽的入口侧的间隙部设置有配置有平衡重的槽,从而不需要缩短另一个定子线槽的长度。

    Turbo-molecular pump
    3.
    发明授权
    Turbo-molecular pump 失效
    涡轮分子泵

    公开(公告)号:US06854956B2

    公开(公告)日:2005-02-15

    申请号:US10387058

    申请日:2003-03-12

    摘要: A turbo-molecular pump has a main body and a pump case for covering the main body. A first flange is integrally formed with the pump case for connection to a second flange integrally with a vacuum chamber. The flange of the pump case and the flange of the vacuum chamber are integrally connected together with fastening bolts. A clamping structure separately clamps the first and second flanges together by surrounding a portion of each of the first and second flanges.

    摘要翻译: 涡轮分子泵具有主体和用于覆盖主体的泵壳体。 第一凸缘与泵壳一体地形成,用于与真空室一体地连接到第二凸缘。 泵壳的法兰和真空室的法兰通过紧固螺栓一体连接在一起。 夹持结构通过围绕第一和第二凸缘中的每一个的一部分而将第一和第二凸缘分别夹紧在一起。

    EXHAUST PUMP
    4.
    发明申请
    EXHAUST PUMP 有权
    排气泵

    公开(公告)号:US20130170955A1

    公开(公告)日:2013-07-04

    申请号:US13822230

    申请日:2011-07-25

    IPC分类号: F04D3/00

    摘要: Provided is an exhaust pump that comprises connecting opening portions that can be deburred easily and that are suitable for enhancing gas evacuation performance. A rotor (a cylindrical rotating member) of an exhaust pump comprises a plate body that has a ring-like projection on a reverse side outer peripheral section of the rotor, and a cylindrical body that is fitted into an outer periphery of the ring-like projection. Connecting opening portions of the exhaust pump comprise holes that are formed by notching an outer peripheral section of the plate body and an outer peripheral section of the ring-like projection, and a portion (specifically, a hole) of the holes that opens in the form of a horizontal hole is covered by an outer-peripheral upper end portion of the cylindrical body.

    摘要翻译: 提供一种排气泵,其包括连接可以容易地去毛刺并且适于增强排气性能的开口部分。 排气泵的转子(圆柱形旋转构件)包括在转子的反向外周部分上具有环状突起的板体,以及嵌合到环状外周部的圆筒体 投影。 排气泵的连接开口部包括通过切割板​​体的外周部和环状突起的外周部而形成的孔,以及在该开口部的孔的部分(具体为孔) 水平孔的形状被筒体的外周上端部覆盖。

    Exhaust pump
    5.
    发明授权
    Exhaust pump 有权
    排气泵

    公开(公告)号:US09416784B2

    公开(公告)日:2016-08-16

    申请号:US13822230

    申请日:2011-07-25

    摘要: Provided is an exhaust pump that comprises connecting opening portions that can be deburred easily and that are suitable for enhancing gas evacuation performance. A rotor (a cylindrical rotating member) of an exhaust pump comprises a plate body that has a ring-like projection on a reverse side outer peripheral section of the rotor, and a cylindrical body that is fitted into an outer periphery of the ring-like projection. Connecting opening portions of the exhaust pump comprise holes that are formed by notching an outer peripheral section of the plate body and an outer peripheral section of the ring-like projection, and a portion (specifically, a hole) of the holes that opens in the form of a horizontal hole is covered by an outer-peripheral upper end portion of the cylindrical body.

    摘要翻译: 提供一种排气泵,其包括连接可以容易地去毛刺并且适于增强排气性能的开口部分。 排气泵的转子(圆柱形旋转构件)包括在转子的反向外周部分上具有环状突起的板体,以及嵌合到环状外周部的圆筒体 投影。 排气泵的连接开口部包括通过切割板​​体的外周部和环状突起的外周部而形成的孔,以及在该开口部的孔的部分(具体为孔) 水平孔的形状被筒体的外周上端部覆盖。

    Turbo-molecular pump and method of assembling turbo-molecular pump
    6.
    发明授权
    Turbo-molecular pump and method of assembling turbo-molecular pump 有权
    涡轮分子泵和组装涡轮分子泵的方法

    公开(公告)号:US08366380B2

    公开(公告)日:2013-02-05

    申请号:US11922655

    申请日:2006-06-16

    IPC分类号: F04D29/32

    CPC分类号: F04D19/042 F04D29/644

    摘要: A turbo-molecular pump has a housing with intake and exhaust ports. A rotary body is enclosed in the housing and has rotor blades of a series of stages formed so that the outside diameter of at least one stage on the exhaust port side is smaller than that on the intake port side. Stator blades are arranged between the rotor blades and spacer rings are arranged between the stator blades to hold the stator blades at predetermined intervals. The spacer rings are formed so that the smallest inside diameter of at least one stage of the spacer rings on the exhaust port side is smaller than the largest outside diameter of the rotor blades. The housing comprises a casing whose inside diameter is constant or whose inside diameter is smaller at the intake port side than at the exhaust port side.

    摘要翻译: 涡轮分子泵具有带进气和排气口的壳体。 旋转体被封装在壳体中,并且具有一系列级的转子叶片,其形成为使得排气口侧的至少一个台的外径小于进气口侧的外径。 定子叶片布置在转子叶片之间,间隔环布置在定子叶片之间,以预定间隔保持定子叶片。 间隔环形成为使得排气口侧的间隔环的至少一级的最小内径小于转子叶片的最大外径。 壳体包括内径恒定的壳体或者在进气口侧的内径比在排气口侧的内径小的壳体。

    Molecular pump and connecting device
    7.
    发明授权
    Molecular pump and connecting device 有权
    分子泵和连接装置

    公开(公告)号:US07341423B2

    公开(公告)日:2008-03-11

    申请号:US10925050

    申请日:2004-08-24

    IPC分类号: F04D19/04

    摘要: A flange of a molecular pump is connected to a vacuum vessel by first bolts that extend through elongate holes in the flange and are bolted to the vacuum vessel. One or more buffering members are attached to the flange by the first bolts that extend through first openings in the buffering members and by second bolts that extend through second openings in the buffering members and are bolted to the flange. In the event of malfunction of the molecular pump that generates an abnormally high torque, the buffering members plastically deform and absorb the shock energy caused by the abnormal torque thereby preventing damage to the vacuum vessel.

    摘要翻译: 分子泵的凸缘通过延伸穿过凸缘中的细长孔的第一螺栓连接到真空容器,并且被螺栓连接到真空容器。 一个或多个缓冲构件通过延伸穿过缓冲构件中的第一开口的第一螺栓和通过缓冲构件中的第二开口延伸并且被螺栓连接到凸缘的第二螺栓附接到凸缘。 在产生异常高转矩的分子泵故障的情况下,缓冲构件塑性变形并吸收由异常扭矩引起的冲击能量,从而防止对真空容器的损坏。

    Virtual Paper Pattern Forming Program, Virtual Paper Pattern Forming Device, and Virtual Paper Pattern Forming Method
    8.
    发明申请
    Virtual Paper Pattern Forming Program, Virtual Paper Pattern Forming Device, and Virtual Paper Pattern Forming Method 审中-公开
    虚拟纸图案形成程序,虚拟纸图案形成装置和虚拟纸图案形成方法

    公开(公告)号:US20070244670A1

    公开(公告)日:2007-10-18

    申请号:US11631988

    申请日:2005-10-03

    IPC分类号: G06F17/50

    摘要: A warp line is set directly on the surface of a virtual three-dimensional object model. A score set portion (22) configured to set scores for a virtual dress model formed within a 3-D space according to a manipulation instruction from the user to divide the virtual dress model into plural paper pattern regions R according to a manipulation instruction from the user, a warp line set portion (23) configured to set a warp line Lg for the paper pattern region R according to a manipulation instruction from the user, and a development portion (24) configured to form a virtual paper pattern by developing the paper pattern regions (R) into a 2-D plane in such a manner that the warp line Lg set by the warp line set portion (23) becomes linear, are included.

    摘要翻译: 在虚拟三维物体模型的表面上直接设置翘曲线。 分数设定部分(22),其被配置为根据来自用户的操作指令来设置在3D空间内形成的虚拟连衣裙模型的分数,以根据来自所述用户的操作指令将虚拟连衣裙模型划分为多个纸样区域R 用户,根据来自用户的操作指令,为纸张图案区域R设定经线Lg的经线组合部分(23),以及通过显影该纸张而形成虚拟纸张图案的显影部分(24) 图案区域(R)以由经线设置部分(23)设置的经线Lg变为线性的方式包括在2D平面中。

    Vacuum pump
    10.
    发明授权
    Vacuum pump 有权
    真空泵

    公开(公告)号:US06866472B2

    公开(公告)日:2005-03-15

    申请号:US10387364

    申请日:2003-03-12

    摘要: A vacuum pump has a rotor mounted to undergo rotation about a rotational axis. A cylindrical base member surrounds a lower outer periphery of the rotor. A cylindrical pump case surrounds an upper outer periphery of the rotor. The base member has an inner periphery, an outer periphery, and a groove formed between the inner and outer peripheries thereof. The pump case is connected to the base member so that a portion of the outer periphery of the base member confronts a portion of the inner periphery of the pump case. A thread groove is formed in the inner periphery of the base member.

    摘要翻译: 真空泵具有安装成绕旋转轴线旋转的转子。 圆筒形底座构件围绕转子的下外周。 圆筒形泵壳围绕转子的上外周。 基部构件具有形成在其内周和外周之间的内周,外周和凹槽。 所述泵壳体与所述基座部件连接,使得所述基座部件的外周的一部分面对所述泵壳体的内周的一部分。 螺纹槽形成在基体的内周。