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    Apparatus and method for sensing electromagnetic radiation using a tunable device
    1.
    发明授权
    Apparatus and method for sensing electromagnetic radiation using a tunable device 失效
    使用可调谐装置感测电磁辐射的装置和方法

    公开(公告)号：US07378655B2

    公开(公告)日：2008-05-27

    申请号：US10821790

    申请日：2004-04-09

    申请人： Yu-Chong Tai ,  Matthieu Liger ,  Ming C. Wu ,  Jui-che Tsai

    发明人： Yu-Chong Tai ,  Matthieu Liger ,  Ming C. Wu ,  Jui-che Tsai

    IPC分类号： G01J5/00

    CPC分类号： G01J5/20 ,  G01J3/26 ,  G02B26/001

    摘要： A method for manufacturing a sensing device, such as a bolometer device or other devices. The method includes providing a substrate, e.g., silicon wafer. The method includes forming a first reflection layer overlying the substrate and forming a first electrode layer overlying the substrate. The method includes forming a sacrificial layer overlying a portion of the first reflection layer and a portion of the first electrode layer. The sacrificial layer is patterned using photolithography techniques. The patterned sacrificial layer corresponds to a cavity region. The method also forms a second electrode layer overlying the sacrificial layer and forms an elastic layer overlying the patterned sacrificial layer. The elastic layer encloses the cavity region corresponding to the patterned sacrificial layer. The method releases the sacrificial layer to form an opening in the cavity region.

    摘要翻译： 一种用于制造诸如测辐射热计装置或其他装置的感测装置的方法。 该方法包括提供衬底，例如硅晶片。 该方法包括形成覆盖在衬底上的第一反射层，并形成覆盖衬底的第一电极层。 该方法包括形成覆盖第一反射层的一部分和第一电极层的一部分的牺牲层。 使用光刻技术对牺牲层进行图案化。 图案化牺牲层对应于空腔区域。 该方法还形成覆盖牺牲层的第二电极层，并形成覆盖图案化牺牲层的弹性层。 弹性层包围对应于图案化牺牲层的空腔区域。 该方法释放牺牲层以在空腔区域中形成开口。

    Pyrolyzed thin film carbon
    2.
    发明申请
    Pyrolyzed thin film carbon 有权
    热解薄膜碳

    公开(公告)号：US20060007983A1

    公开(公告)日：2006-01-12

    申请号：US11040116

    申请日：2005-01-24

    申请人： Yu-Chong Tai ,  Matthieu Liger ,  Theodore Harder ,  Satoshi Konishi ,  Scott Miserendino

    发明人： Yu-Chong Tai ,  Matthieu Liger ,  Theodore Harder ,  Satoshi Konishi ,  Scott Miserendino

    IPC分类号： G01J5/00

    CPC分类号： C23C18/02

    摘要： A method of making carbon thin films comprises depositing a catalyst on a substrate, depositing a hydrocarbon in contact with the catalyst and pyrolyzing the hydrocarbon. A method of controlling a carbon thin film density comprises etching a cavity into a substrate, depositing a hydrocarbon into the cavity, and pyrolyzing the hydrocarbon while in the cavity to form a carbon thin film. Controlling a carbon thin film density is achieved by changing the volume of the cavity. Methods of making carbon containing patterned structures are also provided. Carbon thin films and carbon containing patterned structures can be used in NEMS, MEMS, liquid chromatography, and sensor devices.

    摘要翻译： 制造碳薄膜的方法包括在基材上沉积催化剂，沉积与催化剂接触的烃并热解烃。 控制碳薄膜密度的方法包括将空腔蚀刻到基底中，将烃沉积到空腔中，并在空腔中热解烃以形成碳薄膜。 通过改变空腔的体积来实现碳薄膜密度的控制。 还提供了制备含碳图案结构的方法。 碳薄膜和含碳图案结构可用于NEMS，MEMS，液相色谱和传感器装置。

    Pyrolyzed-parylene based sensors and method of manufacture
    3.
    发明授权
    Pyrolyzed-parylene based sensors and method of manufacture 失效
    基于热解 - 聚对二甲苯的传感器和制造方法

    公开(公告)号：US07238941B2

    公开(公告)日：2007-07-03

    申请号：US10973938

    申请日：2004-10-25

    申请人： Yu-Chong Tai ,  Matthieu Liger ,  Scott Miserendino ,  Satoshi Konishi

    发明人： Yu-Chong Tai ,  Matthieu Liger ,  Scott Miserendino ,  Satoshi Konishi

    IPC分类号： G01J5/00

    CPC分类号： G01J5/20

    摘要： A method (and resulting structure) for fabricating a sensing device. The method includes providing a substrate comprising a surface region and forming an insulating material overlying the surface region. The method also includes forming a film of carbon based material overlying the insulating material and treating to the film of carbon based material to pyrolyzed the carbon based material to cause formation of a film of substantially carbon based material having a resistivity ranging within a predetermined range. The method also provides at least a portion of the pyrolyzed carbon based material in a sensor application and uses the portion of the pyrolyzed carbon based material in the sensing application. In a specific embodiment, the sensing application is selected from chemical, humidity, piezoelectric, radiation, mechanical strain or temperature.

    摘要翻译： 一种用于制造感测装置的方法（和结果）。 该方法包括提供包括表面区域并形成覆盖表面区域的绝缘材料的基板。 该方法还包括形成覆盖绝缘材料的碳基材料薄膜，并处理碳基材料薄膜以热解碳基材料，以形成电阻率范围在预定范围内的基本上碳基材料的薄膜。 该方法还在传感器应用中提供热解碳基材料的至少一部分，并且在感测应用中使用部分热解碳基材料。 在具体实施例中，感测应用选自化学，湿度，压电，辐射，机械应变或温度。

    Apparatus and method for sensing electromagnetic radiation using a tunable device
    4.
    发明申请
    Apparatus and method for sensing electromagnetic radiation using a tunable device 失效
    使用可调谐装置感测电磁辐射的装置和方法

    公开(公告)号：US20050017177A1

    公开(公告)日：2005-01-27

    申请号：US10821790

    申请日：2004-04-09

    申请人： Yu-Chong Tai ,  Matthleu Liger ,  Ming Wu ,  Jui-che Tsai

    发明人： Yu-Chong Tai ,  Matthleu Liger ,  Ming Wu ,  Jui-che Tsai

    IPC分类号： G01J3/26 ,  G01J5/20

    CPC分类号： G01J5/20 ,  G01J3/26 ,  G02B26/001

    摘要： A method for manufacturing a sensing device, such as a bolometer device or other devices. The method includes providing a substrate, e.g., silicon wafer. The method includes forming a first reflection layer overlying the substrate and forming a first electrode layer overlying the substrate. The method includes forming a sacrificial layer overlying a portion of the first reflection layer and a portion of the first electrode layer. The sacrificial layer is patterned using photolithography techniques. The patterned sacrificial layer corresponds to a cavity region. The method also forms a second electrode layer overlying the sacrificial layer and forms an elastic layer overlying the patterned sacrificial layer. The elastic layer encloses the cavity region corresponding to the patterned sacrificial layer. The method releases the sacrificial layer to form an opening in the cavity region.

    摘要翻译： 一种用于制造诸如测辐射热计装置或其他装置的感测装置的方法。 该方法包括提供衬底，例如硅晶片。 该方法包括形成覆盖在衬底上的第一反射层，并形成覆盖衬底的第一电极层。 该方法包括形成覆盖第一反射层的一部分和第一电极层的一部分的牺牲层。 使用光刻技术对牺牲层进行图案化。 图案化牺牲层对应于空腔区域。 该方法还形成覆盖牺牲层的第二电极层，并形成覆盖图案化牺牲层的弹性层。 弹性层包围对应于图案化牺牲层的空腔区域。 该方法释放牺牲层以在空腔区域中形成开口。

    IC-processed polymer nano-liquid chromatoraphy system on-a-chip and method of making it
    5.
    发明授权
    IC-processed polymer nano-liquid chromatoraphy system on-a-chip and method of making it 有权
    IC加工聚合物纳米液体色谱体系及其制备方法

    公开(公告)号：US08323488B2

    公开(公告)日：2012-12-04

    申请号：US13037192

    申请日：2011-02-28

    申请人： Yu-Chong Tai ,  Qing He ,  Jun Xie ,  Changlin Pang ,  Terry D. Lee ,  Damien Rodger ,  Matthieu Liger

    发明人： Yu-Chong Tai ,  Qing He ,  Jun Xie ,  Changlin Pang ,  Terry D. Lee ,  Damien Rodger ,  Matthieu Liger

    IPC分类号： B01D15/08 ,  B01D15/10 ,  B01D15/00

    CPC分类号： H05K3/284 ,  G01N30/6047 ,  G01N30/6095 ,  G01N2030/645 ,  G03F1/80 ,  G01N2030/625

    摘要： Embodiments in accordance with the present invention relate to packed-column nano-liquid chromatography (nano-LC) systems integrated on-chip, and methods for producing and using same. The microfabricated chip includes a column, flits/filters, an injector, and a detector, fabricated in a process compatible with those conventionally utilized to form integrated circuits. The column can be packed with supports for various different stationary phases to allow performance of different forms of nano-LC, including but not limited to reversed-phase, normal-phase, adsorption, size-exclusion, affinity, and ion chromatography. A cross-channel injector injects a nanolitre/picolitre-volume sample plug at the column inlet. An electrochemical/conductivity sensor integrated at the column outlet measures separation signals. A self-aligned channel-strengthening technique increases pressure rating of the microfluidic system, allowing it to withstand the high pressure normally used in high performance liquid chromatography (HPLC). On-chip sample injection, separation, and detection of mixture of anions in water is successfully demonstrated using ion-exchange nano-LC.

    摘要翻译： 根据本发明的实施方案涉及集成在片上的填充柱纳米液相色谱（nano-LC）系统及其制造和使用方法。 微制造的芯片包括以常规用于形成集成电路的方法兼容的工艺制造的柱，过滤器，注射器和检测器。 该柱可以填充有用于各种不同固定相的载体，以允许不同形式的纳米LC的性能，包括但不限于反相，正相，吸附，尺寸排阻，亲和力和离子色谱。 交叉通道注射器在柱入口处注入纳升/皮升体积的样品塞。 集成在色谱柱出口处的电化学/电导率传感器测量分离信号。 自对准的通道加强技术提高了微流体系统的压力等级，使其能够承受通常用于高效液相色谱（HPLC）的高压。 使用离子交换纳米LC成功地证明了在水中阴离子的混合物的片上样品注入，分离和检测。

    Pyrolyzed thin film carbon
    6.
    发明授权
    Pyrolyzed thin film carbon 有权
    热解薄膜碳

    公开(公告)号：US07790226B2

    公开(公告)日：2010-09-07

    申请号：US11040116

    申请日：2005-01-24

    申请人： Yu-Chong Tai ,  Matthieu Liger ,  Theodore Harder ,  Satoshi Konishi ,  Scott Miserendino

    发明人： Yu-Chong Tai ,  Matthieu Liger ,  Theodore Harder ,  Satoshi Konishi ,  Scott Miserendino

    IPC分类号： B05D3/02

    CPC分类号： C23C18/02

    摘要： A method of making carbon thin films comprises depositing a catalyst on a substrate, depositing a hydrocarbon in contact with the catalyst and pyrolyzing the hydrocarbon. A method of controlling a carbon thin film density comprises etching a cavity into a substrate, depositing a hydrocarbon into the cavity, and pyrolyzing the hydrocarbon while in the cavity to form a carbon thin film. Controlling a carbon thin film density is achieved by changing the volume of the cavity. Methods of making carbon containing patterned structures are also provided. Carbon thin films and carbon containing patterned structures can be used in NEMS, MEMS, liquid chromatography, and sensor devices.

    摘要翻译： 制造碳薄膜的方法包括在基材上沉积催化剂，沉积与催化剂接触的烃并热解烃。 控制碳薄膜密度的方法包括将空腔蚀刻到基底中，将烃沉积到空腔中，并在空腔中热解烃以形成碳薄膜。 通过改变空腔的体积来实现碳薄膜密度的控制。 还提供了制备含碳图案结构的方法。 碳薄膜和含碳图案结构可用于NEMS，MEMS，液相色谱和传感器装置。

    Pyrolyzed-parylene based sensors and method of manufacture
    7.
    发明申请
    Pyrolyzed-parylene based sensors and method of manufacture 失效
    基于热解 - 聚对二甲苯的传感器和制造方法

    公开(公告)号：US20060018360A1

    公开(公告)日：2006-01-26

    申请号：US10973938

    申请日：2004-10-25

    申请人： Yu-Chong Tai ,  Matthieu Liger ,  Scott Miserendino ,  Satoshi Konishi

    发明人： Yu-Chong Tai ,  Matthieu Liger ,  Scott Miserendino ,  Satoshi Konishi

    IPC分类号： G01J5/00

    CPC分类号： G01J5/20

    摘要： A method (and resulting structure) for fabricating a sensing device. The method includes providing a substrate comprising a surface region and forming an insulating material overlying the surface region. The method also includes forming a film of carbon based material overlying the insulating material and treating to the film of carbon based material to pyrolyzed the carbon based material to cause formation of a film of substantially carbon based material having a resistivity ranging within a predetermined range. The method also provides at least a portion of the pyrolyzed carbon based material in a sensor application and uses the portion of the pyrolyzed carbon based material in the sensing application. In a specific embodiment, the sensing application is selected from chemical, humidity, piezoelectric, radiation, mechanical strain or temperature.

    摘要翻译： 一种用于制造感测装置的方法（和结果）。 该方法包括提供包括表面区域并形成覆盖表面区域的绝缘材料的基板。 该方法还包括形成覆盖绝缘材料的碳基材料薄膜，并处理碳基材料薄膜以热解碳基材料，以形成电阻率范围在预定范围内的基本上碳基材料的薄膜。 该方法还在传感器应用中提供热解碳基材料的至少一部分，并且在感测应用中使用部分热解碳基材料。 在具体实施例中，感测应用选自化学，湿度，压电，辐射，机械应变或温度。