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1.发明授权Apparatus and method for sensing electromagnetic radiation using a tunable device 失效使用可调谐装置感测电磁辐射的装置和方法公开(公告)号：US07378655B2
公开(公告)日：2008-05-27
申请号：US10821790
申请日：2004-04-09
申请人： Yu-Chong Tai , Matthieu Liger , Ming C. Wu , Jui-che Tsai
发明人： Yu-Chong Tai , Matthieu Liger , Ming C. Wu , Jui-che Tsai
IPC分类号： G01J5/00
CPC分类号： G01J5/20 , G01J3/26 , G02B26/001
摘要： A method for manufacturing a sensing device, such as a bolometer device or other devices. The method includes providing a substrate, e.g., silicon wafer. The method includes forming a first reflection layer overlying the substrate and forming a first electrode layer overlying the substrate. The method includes forming a sacrificial layer overlying a portion of the first reflection layer and a portion of the first electrode layer. The sacrificial layer is patterned using photolithography techniques. The patterned sacrificial layer corresponds to a cavity region. The method also forms a second electrode layer overlying the sacrificial layer and forms an elastic layer overlying the patterned sacrificial layer. The elastic layer encloses the cavity region corresponding to the patterned sacrificial layer. The method releases the sacrificial layer to form an opening in the cavity region.
摘要翻译： 一种用于制造诸如测辐射热计装置或其他装置的感测装置的方法。 该方法包括提供衬底，例如硅晶片。 该方法包括形成覆盖在衬底上的第一反射层，并形成覆盖衬底的第一电极层。 该方法包括形成覆盖第一反射层的一部分和第一电极层的一部分的牺牲层。 使用光刻技术对牺牲层进行图案化。 图案化牺牲层对应于空腔区域。 该方法还形成覆盖牺牲层的第二电极层，并形成覆盖图案化牺牲层的弹性层。 弹性层包围对应于图案化牺牲层的空腔区域。 该方法释放牺牲层以在空腔区域中形成开口。
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公开(公告)号：US07238941B2
公开(公告)日：2007-07-03
申请号：US10973938
申请日：2004-10-25
IPC分类号： G01J5/00
CPC分类号： G01J5/20
摘要： A method (and resulting structure) for fabricating a sensing device. The method includes providing a substrate comprising a surface region and forming an insulating material overlying the surface region. The method also includes forming a film of carbon based material overlying the insulating material and treating to the film of carbon based material to pyrolyzed the carbon based material to cause formation of a film of substantially carbon based material having a resistivity ranging within a predetermined range. The method also provides at least a portion of the pyrolyzed carbon based material in a sensor application and uses the portion of the pyrolyzed carbon based material in the sensing application. In a specific embodiment, the sensing application is selected from chemical, humidity, piezoelectric, radiation, mechanical strain or temperature.
摘要翻译： 一种用于制造感测装置的方法（和结果）。 该方法包括提供包括表面区域并形成覆盖表面区域的绝缘材料的基板。 该方法还包括形成覆盖绝缘材料的碳基材料薄膜，并处理碳基材料薄膜以热解碳基材料，以形成电阻率范围在预定范围内的基本上碳基材料的薄膜。 该方法还在传感器应用中提供热解碳基材料的至少一部分，并且在感测应用中使用部分热解碳基材料。 在具体实施例中，感测应用选自化学，湿度，压电，辐射，机械应变或温度。
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3.发明授权IC-processed polymer nano-liquid chromatoraphy system on-a-chip and method of making it 有权IC加工聚合物纳米液体色谱体系及其制备方法公开(公告)号：US08323488B2
公开(公告)日：2012-12-04
申请号：US13037192
申请日：2011-02-28
申请人： Yu-Chong Tai , Qing He , Jun Xie , Changlin Pang , Terry D. Lee , Damien Rodger , Matthieu Liger
发明人： Yu-Chong Tai , Qing He , Jun Xie , Changlin Pang , Terry D. Lee , Damien Rodger , Matthieu Liger
CPC分类号： H05K3/284 , G01N30/6047 , G01N30/6095 , G01N2030/645 , G03F1/80 , G01N2030/625
摘要： Embodiments in accordance with the present invention relate to packed-column nano-liquid chromatography (nano-LC) systems integrated on-chip, and methods for producing and using same. The microfabricated chip includes a column, flits/filters, an injector, and a detector, fabricated in a process compatible with those conventionally utilized to form integrated circuits. The column can be packed with supports for various different stationary phases to allow performance of different forms of nano-LC, including but not limited to reversed-phase, normal-phase, adsorption, size-exclusion, affinity, and ion chromatography. A cross-channel injector injects a nanolitre/picolitre-volume sample plug at the column inlet. An electrochemical/conductivity sensor integrated at the column outlet measures separation signals. A self-aligned channel-strengthening technique increases pressure rating of the microfluidic system, allowing it to withstand the high pressure normally used in high performance liquid chromatography (HPLC). On-chip sample injection, separation, and detection of mixture of anions in water is successfully demonstrated using ion-exchange nano-LC.
摘要翻译： 根据本发明的实施方案涉及集成在片上的填充柱纳米液相色谱（nano-LC）系统及其制造和使用方法。 微制造的芯片包括以常规用于形成集成电路的方法兼容的工艺制造的柱，过滤器，注射器和检测器。 该柱可以填充有用于各种不同固定相的载体，以允许不同形式的纳米LC的性能，包括但不限于反相，正相，吸附，尺寸排阻，亲和力和离子色谱。 交叉通道注射器在柱入口处注入纳升/皮升体积的样品塞。 集成在色谱柱出口处的电化学/电导率传感器测量分离信号。 自对准的通道加强技术提高了微流体系统的压力等级，使其能够承受通常用于高效液相色谱（HPLC）的高压。 使用离子交换纳米LC成功地证明了在水中阴离子的混合物的片上样品注入，分离和检测。
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公开(公告)号：US20060007983A1
公开(公告)日：2006-01-12
申请号：US11040116
申请日：2005-01-24
IPC分类号： G01J5/00
CPC分类号： C23C18/02
摘要： A method of making carbon thin films comprises depositing a catalyst on a substrate, depositing a hydrocarbon in contact with the catalyst and pyrolyzing the hydrocarbon. A method of controlling a carbon thin film density comprises etching a cavity into a substrate, depositing a hydrocarbon into the cavity, and pyrolyzing the hydrocarbon while in the cavity to form a carbon thin film. Controlling a carbon thin film density is achieved by changing the volume of the cavity. Methods of making carbon containing patterned structures are also provided. Carbon thin films and carbon containing patterned structures can be used in NEMS, MEMS, liquid chromatography, and sensor devices.
摘要翻译： 制造碳薄膜的方法包括在基材上沉积催化剂，沉积与催化剂接触的烃并热解烃。 控制碳薄膜密度的方法包括将空腔蚀刻到基底中，将烃沉积到空腔中，并在空腔中热解烃以形成碳薄膜。 通过改变空腔的体积来实现碳薄膜密度的控制。 还提供了制备含碳图案结构的方法。 碳薄膜和含碳图案结构可用于NEMS，MEMS，液相色谱和传感器装置。
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公开(公告)号：US07790226B2
公开(公告)日：2010-09-07
申请号：US11040116
申请日：2005-01-24
IPC分类号： B05D3/02
CPC分类号： C23C18/02
摘要： A method of making carbon thin films comprises depositing a catalyst on a substrate, depositing a hydrocarbon in contact with the catalyst and pyrolyzing the hydrocarbon. A method of controlling a carbon thin film density comprises etching a cavity into a substrate, depositing a hydrocarbon into the cavity, and pyrolyzing the hydrocarbon while in the cavity to form a carbon thin film. Controlling a carbon thin film density is achieved by changing the volume of the cavity. Methods of making carbon containing patterned structures are also provided. Carbon thin films and carbon containing patterned structures can be used in NEMS, MEMS, liquid chromatography, and sensor devices.
摘要翻译： 制造碳薄膜的方法包括在基材上沉积催化剂，沉积与催化剂接触的烃并热解烃。 控制碳薄膜密度的方法包括将空腔蚀刻到基底中，将烃沉积到空腔中，并在空腔中热解烃以形成碳薄膜。 通过改变空腔的体积来实现碳薄膜密度的控制。 还提供了制备含碳图案结构的方法。 碳薄膜和含碳图案结构可用于NEMS，MEMS，液相色谱和传感器装置。
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公开(公告)号：US20060018360A1
公开(公告)日：2006-01-26
申请号：US10973938
申请日：2004-10-25
IPC分类号： G01J5/00
CPC分类号： G01J5/20
摘要： A method (and resulting structure) for fabricating a sensing device. The method includes providing a substrate comprising a surface region and forming an insulating material overlying the surface region. The method also includes forming a film of carbon based material overlying the insulating material and treating to the film of carbon based material to pyrolyzed the carbon based material to cause formation of a film of substantially carbon based material having a resistivity ranging within a predetermined range. The method also provides at least a portion of the pyrolyzed carbon based material in a sensor application and uses the portion of the pyrolyzed carbon based material in the sensing application. In a specific embodiment, the sensing application is selected from chemical, humidity, piezoelectric, radiation, mechanical strain or temperature.
摘要翻译： 一种用于制造感测装置的方法（和结果）。 该方法包括提供包括表面区域并形成覆盖表面区域的绝缘材料的基板。 该方法还包括形成覆盖绝缘材料的碳基材料薄膜，并处理碳基材料薄膜以热解碳基材料，以形成电阻率范围在预定范围内的基本上碳基材料的薄膜。 该方法还在传感器应用中提供热解碳基材料的至少一部分，并且在感测应用中使用部分热解碳基材料。 在具体实施例中，感测应用选自化学，湿度，压电，辐射，机械应变或温度。
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公开(公告)号：US07842533B2
公开(公告)日：2010-11-30
申请号：US12349860
申请日：2009-01-07
申请人： Matthieu Liger
发明人： Matthieu Liger
IPC分类号： H01L21/00
CPC分类号： H01L27/14669 , G01J5/02 , G01J5/023 , G01J5/20 , H01L27/14683
摘要： A method of forming a semiconductor sensor in one embodiment includes providing a substrate, forming a reflective layer on the substrate, forming a sacrificial layer on the reflective layer, forming an absorber layer with a thickness of less than about 50 nm on the sacrificial layer, forming an absorber in the absorber layer integrally with at least one suspension leg, and removing the sacrificial layer.
摘要翻译： 在一个实施例中形成半导体传感器的方法包括提供衬底，在衬底上形成反射层，在反射层上形成牺牲层，在牺牲层上形成厚度小于约50nm的吸收层， 在吸收层中与至少一个悬挂腿一体地形成吸收体，并且去除牺牲层。
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公开(公告)号：US20140035071A1
公开(公告)日：2014-02-06
申请号：US13563626
申请日：2012-07-31
申请人： Po-Jui Chen , Gary Yama , Matthieu Liger , Andrew Graham
发明人： Po-Jui Chen , Gary Yama , Matthieu Liger , Andrew Graham
CPC分类号： H01L29/84 , B81B2201/0235 , B81B2201/0242 , B81B2207/015 , B81C1/0023 , B81C2201/0197 , B81C2203/0136 , B81C2203/0771 , G01C19/5783 , G01P15/0802 , G01P15/18 , H01L29/66007
摘要： A device with multiple encapsulated functional layers, includes a substrate, a first functional layer positioned above a top surface of the substrate, the functional layer including a first device portion, a first encapsulating layer encapsulating the first functional layer, a second functional layer positioned above the first encapsulating layer, the second functional layer including a second device portion, and a second encapsulating layer encapsulating the second functional layer.
摘要翻译： 具有多个封装的功能层的器件包括衬底，位于衬底顶表面上方的第一功能层，功能层包括第一器件部分，封装第一功能层的第一封装层，位于第一功能层上方的第二功能层 第一封装层，第二功能层包括第二器件部分和封装第二功能层的第二封装层。
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公开(公告)号：US20110019337A1
公开(公告)日：2011-01-27
申请号：US12508894
申请日：2009-07-24
申请人： Po-Jui Chen , Gary Yama , Matthieu Liger , Matthias Illing
发明人： Po-Jui Chen , Gary Yama , Matthieu Liger , Matthias Illing
摘要： A method for fabricating a pair of large surface area planar electrodes. The method includes forming a first template above a first substrate, the first template having a first plurality of pores, coating the first plurality of pores of the first template with a first layer of conducting material to form a first electrode, placing the first plurality of pores of the first electrode in proximity to a second electrode, thereby forming a gap between the first plurality of pores and the second electrode, and filling the gap with an electrolyte material.
摘要翻译： 一种制造一对大面积平面电极的方法。 该方法包括在第一基板上形成第一模板，第一模板具有第一多个孔，用第一导电材料层涂覆第一模板的第一多个孔以形成第一电极，将第一多个 在第二电极附近形成第一电极的孔，从而在第一多个孔和第二电极之间形成间隙，并用电解质材料填充间隙。
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公开(公告)号：US08900906B2
公开(公告)日：2014-12-02
申请号：US13415479
申请日：2012-03-08
申请人： Gary Yama , Fabian Purkl , Matthieu Liger , Matthias Illing
发明人： Gary Yama , Fabian Purkl , Matthieu Liger , Matthias Illing
IPC分类号： H01L21/02
CPC分类号： B81C1/00039 , B81B3/007 , B81B2201/0207 , B81B2203/0307 , B81C2201/0181 , G01J5/023 , H01L27/14649 , H01L27/14683
摘要： In one embodiment, a method of forming a semiconductor device includes providing a substrate, forming a sacrificial layer above the substrate layer, forming a first trench in the sacrificial layer, forming a first sidewall layer with a thickness of less than about 50 nm on a first sidewall of the first trench using atomic layer deposition (ALD), and removing the sacrificial layer.
摘要翻译： 在一个实施例中，形成半导体器件的方法包括提供衬底，在衬底层上形成牺牲层，在牺牲层中形成第一沟槽，形成厚度小于约50nm的第一侧壁层 使用原子层沉积（ALD）的第一沟槽的第一侧壁，以及去除牺牲层。
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